CN1132254C - Technology for making piezoelectric ceramic sounder medium - Google Patents
Technology for making piezoelectric ceramic sounder medium Download PDFInfo
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- CN1132254C CN1132254C CN 00123845 CN00123845A CN1132254C CN 1132254 C CN1132254 C CN 1132254C CN 00123845 CN00123845 CN 00123845 CN 00123845 A CN00123845 A CN 00123845A CN 1132254 C CN1132254 C CN 1132254C
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- piezoelectric ceramic
- medium
- sounder
- manufacture method
- srco
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Abstract
The present invention relates to a method for manufacturing piezoelectric ceramic sounder media, which comprises the medium formula(weight ratio): 55.0 to 75.0 wt% of Pb3O4, 11.0 to 23.5 wt% of ZrO2, 7.5 to 20.5 wt% of TiO2, 0 to 5.0 wt% of Sb2O5, 0 to 5.0 wt% of Nb2O5, 0 to 15.0 wt% of SrCO3, 0 to 2.5 wt% of MgO, 0 to 2.0 wt% of ZnO, 0 to 1.0 wt% of Bi2O3 and 0 to 2.0 wt% of La2O3. The piezoelectric ceramic sounder media are formed by warming vibration milling, flow casting for filming, laminating for film rolling, and sintering at 1080 to 1280 DEG C. The ceramic media manufactured by the present invention, of which the thickness can be reduced to 15 microns, the insulation resistance is above 10<9> omega, the radial electromechanical coupling coefficient is above 65% and the dielectric constant is from 600 to 5500.
Description
Technical field
The invention relates to the manufacture method of piezoelectric ceramic sounder medium, more particularly, the invention relates to manufacturing is the method for the ultrathin piezoelectric ceramic sounder medium of base with the lead zirconate titanate.
Background technology
Piezoelectric ceramic sounder comprises electric electrophone, piezoelectric buzzer, piezoelectric transducer, piezoelectricity news Chinese percussion instrument etc., and range of application is very extensive.The same an urgent demand miniaturization of piezoelectric ceramic sounder and chip type with electronic devices and components such as electric capacity, resistance, and realize that the key of piezoelectric ceramic sounder miniaturization and chip type is the ceramic dielectric that can make ultra-thin (less than 50 microns).
The employed medium of piezoelectric ceramic sounder normally lead zirconate titanate is the dielectric material of base.
The conventional fabrication processes of piezoelectric ceramic sounder is, with the raw material ball mill grinding, adds adhesive by prescription, rolls film and becomes green sheet, and sintering in air can obtain fine and close porcelain body.Just can test its electrical property after by electrode polarization on the porcelain body.
The shortcoming of above-mentioned manufacture method is, roll ceramic dielectric that embrane method makes can't reach enough thin (usually greater than 100 microns), consistency of thickness relatively poor (cause device electrical performance difference big), production efficiency lower, can't realize piezoelectric ceramic sounder miniaturization and chip type.
Summary of the invention
The objective of the invention is to overcome shortcoming of the prior art, a kind of new method of making the piezo-electric ceramic sounding medium is provided.Not only thickness can enough approach (the thinnest reach 15 microns) to the prepared medium of this method, consistency of thickness is good; Porcelain body density height, electrical property excellence; Production efficiency improves greatly, helps large-scale production; Piezoelectric ceramic sounder miniaturization and chip type have successfully been realized.
The manufacture method of piezoelectric ceramic sounder medium of the present invention comprises:
1, ceramic dielectric consisting of by weight: Pb
3O
4Be 55.0-75.0, ZrO
2Be 11.0-23.5, TiO
2Be 7.5-20.5, Sb
2O
5Be 0-5.0, Nb
2O
5Be 0-5.0, SrCO
3Be 0-15.0, MgO is 0-2.5, and ZnO is 0-2.0, Bi
2O
3Be 0-1.0, La
2O
3Be 0-2.0;
2, the above-mentioned powder with granularity 0.5-2 micron carries out the wet method vibration, adds organic bond, makes the suspension colloidal mixture, and casting film-forming behind ball milling, casting films thickness are the 10-100 micron;
3, the deielectric-coating with above-mentioned flow casting molding builds up the multilayer dielectricity body;
4, above-mentioned multilayer dielectricity is rolled film, be washed into disk then;
5, above-mentioned disk idiosome 20-300 sheet is superimposed neat, lie against on the load bearing board, at 1080-1280 ℃ of following sintering, be incubated 0.5-2.5 hour.
Described wet method vibration is used zirconia ball on the nylon jar vibration 1-2 hour, and described load bearing board is made by zirconia.
The composition of above-mentioned ceramic dielectric adopts following three kinds of schemes:
1.Pb
3O
4Be 60.0-75.0, ZrO
2Be 15.0-23.5, TiO
2Be 7.5-18.0, Sb
2O
5Be 0.2-5.0, Nb
2O
5Be 0.2-5.0, SrCO
3Be 0-8.0, MgO is 0.2-2.5;
2.Pb
3O
4Be 55.0-68.0, ZrO
2Be 11.0-23.5, TiO
2Be 10.0-20.5, Sb
2O
5Be 0.2-5.0, Nb
2O
5Be 0.2-5.0, SrCO
3Be 3.0-12.0;
3.Pb
3O
4Be 60.0-70.0, ZrO
2Be 11.0-22.5, TiO
2Be 10.0-20.5, SrCO
3Be 0.5-8.0, Nb
2O
5Be 0.5-5.0, MgO is 0.5-2.5; ZnO is 0.5-2.0, Bi
2O
3Be 0-1.0, La
2O
3Be 0.2-2.0.
The present invention compared with prior art has following advantage:
1, ceramic dielectric can make enough thin (the thinnest reach 15 microns), helps the miniaturization and the chip type of piezoelectric ceramic sounder.
2, the consistency of ceramic dielectric thickness is fine, and can select arbitrarily by the lamination number that changes casting films.
3, the system membrane efficiency improves greatly, helps large-scale production.
4, ceramic dielectric density height, electrical property excellence and high conformity.
5, cost is lower, and main raw material(s) adopts capacitor stage purity can produce ceramic dielectric of the present invention.
Embodiment
The present invention is carried out the description in a step below in conjunction with embodiment:
Table 1-3 provides three groups of embodiment of the present invention prescription of totally 9 samples.
First group of embodiment (sample 1-3) has low medium electric constant characteristic; Second group of embodiment (sample 4-6) has medium dielectric constant characteristic; The 3rd group of embodiment (sample 7-9) has the high-k characteristic.
Table 1
Specimen coding | Main component (weight) |
Pb 3O 4 ZrO 2 TiO 2 MgO Nb 2O 5 Sb 2O 5 SrCO 3 | |
1 | 68.2 20.7 7.9 0.5 0.3 0.3 2.1 |
2 | 68.2 18.8 9.5 0.3 0.6 0.5 2.1 |
3 | 68.2 19.7 8.3 0.8 0.7 0.2 2.1 |
Table 2
Specimen coding | Main component (weight) |
Pb 3O 4 ZrO 2 TiO 2 Nb 2O 5 Sb 2O 5 SrCO 3 | |
4 | 61.3 22.4 10.5 0.3 0.4 5.1 |
5 | 61.3 22.8 10.1 0.5 0.2 5.1 |
6 | 61.3 21.8 11.3 0.3 0.2 5.1 |
Table 3
Specimen coding | Main component (weight) |
Pb 3O 4 ZrO 2 TiO 2 MgO SrCO 3 ZnO Bi 2O 3 La 2O 3 | |
7 | 63.7 13.5 12.6 1.8 3.4 1.2 0.5 0.5 |
8 | 63.7 12.0 15.1 1.5 3.4 1.6 0.3 0.4 |
9 | 63.7 11.0 15.2 2.0 2.5 2.0 0.5 0.8 |
The primary raw material of above-mentioned prescription adopts capacitor stage purity.Powder granularity is about 1 micron by above-mentioned prescription mixes with distilled water in the nylon jar, with zirconia ball vibration 2 hours, adds adhesive, and ball milling is 8 hours then, makes the suspension colloidal mixture, and casting film-forming, the thickness of casting films are the 10-50 micron; Above-mentioned casting films is built up the multilayer dielectricity body, roll film again, be washed into disk; Above-mentioned disk base substrate 20-300 sheet is superimposed neat, lie against on the load bearing board, sample 1-3 is incubated 1 hour at 1180 ℃ of following sintering; Sample 4-6 is incubated 1 hour at 1220 ℃ of following sintering, and sample 7-9 is incubated 1 hour at 1250 ℃ of following sintering.
The electrical property of above-mentioned each sample is shown in the table 4.
Table 4 sample electromechanical coupling factor insulation resistance K dielectric loss piezoelectric constant numbering (Kp%) (R10
9Ω) (ε
33 T/ ε
0) (tg δ 10
-4) (d
13PC/N)1 66.5 5.8 1480 120 3802 67.4 6.2 1350 140 3803 68.2 5.5 1400 120 4004 70.5 5.6 3000 160 4805 69.8 6.4 3100 150 4506 72.7 6.6 3400 120 5207 65.5 5.8 5100 180 5608 66.0 6.0 4800 200 5209 65.8 6.7 4800 160 550
Claims (6)
1, a kind of manufacture method of piezoelectric ceramic sounder medium is characterized in that, this method comprises:
(1) described ceramic dielectric consisting of by weight: Pb
3O
4Be 55.0-75.0, ZrO
2Be 11.0-23.5, TiO
2Be 7.5-20.5, Sb
2O
5Be 0-5.0, Nb
2O
5Be 0-5.0, SrCO
3Be 0-15.0, MgO is 0-2.5, and ZnO is 0-2.0, Bi
2O
3Be 0-1.0, La
2O
3Be 0-2.0;
(2) the above-mentioned powder with granularity 0.5-2 micron carries out the wet method vibration, adds organic bond, makes the suspension colloidal mixture, and casting film-forming behind ball milling, casting films thickness are the 10-100 micron;
(3) deielectric-coating with above-mentioned flow casting molding builds up the multilayer dielectricity body;
(4) above-mentioned multilayer dielectricity is rolled film, be washed into disk then;
(5) above-mentioned disk idiosome 20-300 sheet is superimposed neat, lie against on the load bearing board, at 1080-1280 ℃ of following sintering, be incubated 0.5-2.5 hour.
As the manufacture method of claims 1 described piezoelectric ceramic sounder medium, it is characterized in that 2, described wet method vibration is used zirconia ball in the nylon jar vibration 1-2 hour.
As the manufacture method of claims 1 described piezoelectric ceramic sounder medium, it is characterized in that 3, described load bearing board is made by zirconia.
4, as the manufacture method of claims 1 described piezoelectric ceramic sounder medium, it is characterized in that Pb
3O
4Be 60.0-75.0, ZrO
2Be 15.0-23.5, TiO
2Be 7.5-18.0, Sb
2O
5Be 0.2-5.0, Nb
2O
5Be 0.2-5.0, SrCO
3Be 0-8.0, MgO is 0.2-2.5.
5, as the manufacture method of claims 1 described piezoelectric ceramic sounder medium, it is characterized in that Pb
3O
4Be 55.0-68.0, ZrO
2Be 11.0-23.5, TiO
2Be 10.0-20.5, Sb
2O
5Be 0.2-5.0, Nb
2O
5Be 0.2-5.0, SrCO
3Be 3.0-12.0.
6, as the manufacture method of claims 1 described piezoelectric ceramic sounder medium, it is characterized in that Pb
3O
4Be 60.0-70.0, ZrO
2Be 11.0-22.5, TiO
2Be 10.0-20.5, SrCO
3Be 0.5-8.0, Nb
2O
5Be 0.5-5.0, MgO is 0.5-2.5; ZnO is 0.5-2.0, Bi
2O
3Be 0-1.0, La
2O
3Be 0.2-2.0.
Priority Applications (1)
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CN 00123845 CN1132254C (en) | 2000-08-22 | 2000-08-22 | Technology for making piezoelectric ceramic sounder medium |
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---|---|---|---|
CN 00123845 CN1132254C (en) | 2000-08-22 | 2000-08-22 | Technology for making piezoelectric ceramic sounder medium |
Publications (2)
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CN1281212A CN1281212A (en) | 2001-01-24 |
CN1132254C true CN1132254C (en) | 2003-12-24 |
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Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN100347123C (en) * | 2005-12-30 | 2007-11-07 | 中国科学院上海硅酸盐研究所 | High dielectric contant flexible piezoelectric ceramic material and preparation process thereof |
CN101445367B (en) * | 2008-12-25 | 2011-10-05 | 西安健信电力电子陶瓷有限责任公司 | Dielectric material of AC high voltage ceramic capacitor and preparation method thereof |
CN102515758A (en) * | 2011-12-12 | 2012-06-27 | 中国振华集团红云器材厂 | Preparation method of piezoelectric ceramic atomizer medium |
CN102941730B (en) * | 2012-08-27 | 2015-12-09 | 宁波凯普电子有限公司 | Ultrathin piezoelectric ceramic green compact diaphragm lamination sintering is every stick and painting method thereof |
CN103011774B (en) * | 2012-12-13 | 2014-06-25 | 成都汇通西电电子有限公司 | High-sensitivity piezoelectric ceramic material, and preparation method and application thereof |
CN105622085A (en) * | 2015-12-22 | 2016-06-01 | 贵州振华红云电子有限公司 | Method for preparing piezoelectric ceramic dielectric slab of piezoelectric pump |
CN111018542A (en) * | 2019-12-22 | 2020-04-17 | 贵州振华红云电子有限公司 | Method for improving density of ultrathin piezoelectric ceramic piece |
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