CN111018542A - Method for improving density of ultrathin piezoelectric ceramic piece - Google Patents

Method for improving density of ultrathin piezoelectric ceramic piece Download PDF

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Publication number
CN111018542A
CN111018542A CN201911332435.5A CN201911332435A CN111018542A CN 111018542 A CN111018542 A CN 111018542A CN 201911332435 A CN201911332435 A CN 201911332435A CN 111018542 A CN111018542 A CN 111018542A
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piezoelectric ceramic
density
thickness
casting
film
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褚涛
张田才
张静
陈鱼
刘长流
张珍宣
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Guizhou Zhenhua Electronic Information Industry Technology Research Co ltd
Guizhou Zhenhua Hongyun Electronics Co ltd
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Guizhou Zhenhua Electronic Information Industry Technology Research Co ltd
Guizhou Zhenhua Hongyun Electronics Co ltd
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Abstract

The invention discloses a method for improving the density of an ultrathin piezoelectric ceramic piece, belonging to a preparation method of a piezoelectric ceramic piece; the method for preparing the piezoelectric ceramic chip can meet the requirement of large-scale batch production and improve the product quality. The technical scheme of the method is as follows: mixing piezoelectric ceramic powder, an adhesive, a defoaming agent, a dispersing agent, a plasticizer, ethanol and deionized water, and performing ball milling to obtain slurry; removing air bubbles in the slurry, and then casting into a film strip with the thickness of 0.02-0.1 mm; finely rolling the casting film strip to the required thickness, and ensuring that the thickness reduction amount of each fine rolling is 0.005-0.02 mm; and stamping the finely rolled membrane strip into a membrane, and then removing the glue and sintering. The density of the piezoelectric ceramic piece finished product prepared by the method can reach more than 98% of the theoretical density.

Description

Method for improving density of ultrathin piezoelectric ceramic piece
Technical Field
The invention relates to a preparation method of a piezoelectric ceramic piece, in particular to a method for improving the density of an ultrathin piezoelectric ceramic piece; belongs to a preparation method of electronic components.
Background
The piezoelectric ceramics are widely applied to various fields of material engineering, sound, light, electricity and the like. With the rapid development of miniaturization of smart devices, the ceramic chip as the core element used therein is also required to be miniaturized and thinned.
At present, the main methods for preparing the piezoelectric ceramic membrane band comprise three methods, namely tape casting, membrane extrusion and membrane rolling; wherein, the casting is mainly suitable for preparing the film belt with the thickness of 0.02-0.1 mm, the film extrusion is suitable for preparing the film belt with the thickness of 0.1-0.4 mm, and the film rolling is suitable for preparing the film belt with the thickness of 0.15-0.5 mm. Although the production efficiency of casting and film extrusion is high, the prepared film belt has poor compactness and is easy to form air holes, so that the insulation resistance is poor and the reliability is poor; and the film rolling process is not favorable for batch production.
Disclosure of Invention
In order to overcome the defects in the prior art, the invention aims to provide a method for improving the density of an ultrathin piezoelectric ceramic piece, which can meet the requirement of large-scale batch production and improve the product quality.
In order to achieve the purpose, the method adopts the following technical scheme:
1) mixing piezoelectric ceramic powder, an adhesive, a defoaming agent, a dispersing agent, a plasticizer, ethanol and deionized water, and performing ball milling to obtain slurry;
2) removing air bubbles in the slurry, and then casting into a film strip with the thickness of 0.02-0.1 mm;
3) finely rolling the casting film strip to the required thickness, and ensuring that the thickness reduction amount of each fine rolling is 0.005-0.02 mm;
4) and stamping the finely rolled membrane strip into a membrane, and then removing the glue and sintering.
Compared with the prior art, the invention adopts the technical scheme and adopts the composite process of combining the casting process and the film rolling process to prepare the film, thereby not only eliminating or reducing air holes generated in the casting process and improving the reliability of the piezoelectric ceramic piece, but also improving the density of a green body of the ceramic film strip. In addition, the defect of low production efficiency of a single film rolling process can be overcome by adopting the composite process. Tests show that the density of the ultrathin piezoelectric ceramic film belt green body prepared by the method can be improved by over 17 percent; the density of the piezoelectric ceramic piece finished product prepared by the method can reach more than 98% of the theoretical density.
Detailed Description
The invention is further illustrated by the following specific examples:
example 1, an ultra-thin piezoelectric ceramic sheet having a thickness of 0.035mm was prepared.
1) Preparing piezoelectric ceramic powder according to a conventional method:
1.1) primary ball milling: adding Pb3O4、ZrO2、TiO2、Sb2O3、Nb2O5、NiO、MgO、Li2CO3Mixing the raw material powder by a conventional method, then mixing the raw material powder with absolute ethyl alcohol and zirconium balls by a conventional method, carrying out ball milling, drying by a conventional method, and sieving to obtain raw ceramic powder;
1.2) pre-burning: sintering the raw porcelain powder according to a conventional method, cooling and sieving to obtain porcelain powder;
1.3) secondary ball milling: mixing the ceramic powder with absolute ethyl alcohol and zirconium balls according to a conventional method, ball-milling, drying and sieving to obtain piezoelectric ceramic powder;
2) preparing a casting film according to a conventional method:
2.1) mixing the piezoelectric ceramic powder with an adhesive, a defoaming agent, a dispersing agent, a plasticizer, ethanol and deionized water according to a conventional method, and performing ball milling to obtain slurry;
2.2) removing air bubbles in the slurry according to a conventional method, and then preparing a film tape with the thickness of 0.04mm by tape casting according to the conventional method;
3) coating castor oil on a roller, and finely rolling the casting film belt to a film belt with the thickness of 0.035mm by adopting a conventional method according to the thickness reduction of 0.005 mm;
4) and stamping the finish-rolled membrane strip into a membrane with a required size according to a conventional method, and then carrying out binder removal and sintering according to the conventional method.
In this example, the cast film band density, the cast film band sintered density, the cast and finish rolled film band density, and the cast and finish rolled film band sintered density are shown in tables 1 to 2, respectively.
Example 2, an ultra-thin piezoelectric ceramic sheet having a thickness of 0.07mm was prepared.
The procedure is as in example 1, wherein: the thickness of the casting film belt in the step 2.2) is 0.08 mm; the thickness of the membrane strip after finish rolling in the step 3) is 0.07mm, and the number of finish rolling is two.
In this example, the cast film band density, the cast film band sintered density, the cast and finish rolled film band density, and the cast and finish rolled film band sintered density are shown in tables 1 to 2, respectively.
Example 3, an ultra-thin piezoelectric ceramic sheet having a thickness of 0.08mm was prepared.
The procedure is as in example 1, wherein: the thickness of the casting film belt in the step 2.2) is 0.1 mm; the thickness of the membrane strip after finish rolling in the step 3) is 0.08mm, and the number of finish rolling times is four.
In this example, the cast film band density, the cast film band sintered density, the cast and finish rolled film band density, and the cast and finish rolled film band sintered density are shown in tables 1 to 2, respectively.
Table 1: film green Density comparison
Examples of the invention Thickness of casting film (mm) Post-casting rolled film thickness (mm) Cast film Density (g/cm)3） Cast and rolled film Density (g/cm)3） Casting and Rolling film Density improvement amount (%)
1 0.04 0.035 3.70 4.33 17.0
2 0.08 0.07 3.68 4.34 17.9
3 0.10 0.08 3.67 4.35 18.5
Table 2: ceramic chip finished product density and density contrast
Examples of the invention Thickness of casting film (mm) Casting film sintered density (g- cm3） Cast and rolled film sintered density (g- cm3） Relative theoretical density of sintered cast film （%） Relative theoretical density of casting and film rolling sintering （%） Relative density improvement amount （%）
1 0.04 7.53 7.65 96.5 98.1 1.6
2 0.08 7.52 7.66 96.4 98.2 1.8
3 0.10 7.52 7.68 96.4 98.5 2.1
As can be seen from tables 1-2, the density of the film belt green body can be improved by more than 17% by adopting the method, and the density of the finished piezoelectric ceramic piece product can reach more than 98% of the theoretical density; compared with the tape casting process, the density of the ceramic chip finished product prepared by the method can be improved by 1.6 percent.

Claims (1)

1. A method for improving the density of an ultrathin piezoelectric ceramic piece is characterized by comprising the following steps:
1) mixing piezoelectric ceramic powder, an adhesive, a defoaming agent, a dispersing agent, a plasticizer, ethanol and deionized water, and performing ball milling to obtain slurry;
2) removing air bubbles in the slurry, and then casting into a film strip with the thickness of 0.02-0.1 mm;
3) finely rolling the casting film strip to the required thickness, and ensuring that the thickness reduction amount of each fine rolling is 0.005-0.02 mm;
4) and stamping the finely rolled membrane strip into a membrane, and then removing the glue and sintering.
CN201911332435.5A 2019-12-22 2019-12-22 Method for improving density of ultrathin piezoelectric ceramic piece Pending CN111018542A (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113526962A (en) * 2021-07-28 2021-10-22 福建臻璟新材料科技有限公司 Method for producing nitride ceramic substrate by film rolling forming process

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1281212A (en) * 2000-08-22 2001-01-24 姜知水 Technology for making piezoelectric ceramic sounder medium
CN108238788A (en) * 2017-12-26 2018-07-03 贵州振华红云电子有限公司 The manufacturing method of high-compactness thin type piezoelectric ceramics atomizing medium piece

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1281212A (en) * 2000-08-22 2001-01-24 姜知水 Technology for making piezoelectric ceramic sounder medium
CN108238788A (en) * 2017-12-26 2018-07-03 贵州振华红云电子有限公司 The manufacturing method of high-compactness thin type piezoelectric ceramics atomizing medium piece

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113526962A (en) * 2021-07-28 2021-10-22 福建臻璟新材料科技有限公司 Method for producing nitride ceramic substrate by film rolling forming process

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