CN1265943C - 产业用机器人 - Google Patents

产业用机器人 Download PDF

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Publication number
CN1265943C
CN1265943C CNB2003101046625A CN200310104662A CN1265943C CN 1265943 C CN1265943 C CN 1265943C CN B2003101046625 A CNB2003101046625 A CN B2003101046625A CN 200310104662 A CN200310104662 A CN 200310104662A CN 1265943 C CN1265943 C CN 1265943C
Authority
CN
China
Prior art keywords
hand
laser
industrial robot
test portion
corpuscular counter
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
CNB2003101046625A
Other languages
English (en)
Chinese (zh)
Other versions
CN1498732A (zh
Inventor
矢泽隆之
常田晴弘
安川员仁
吉泽丰
近藤秀幸
中岛弘登
永泽芳水
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nidec Sankyo Zhejiang Corp
Nidec Instruments Corp
Original Assignee
Sankyo Seiki Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP2002316738A external-priority patent/JP3970749B2/ja
Priority claimed from JP2002319387A external-priority patent/JP2004148476A/ja
Application filed by Sankyo Seiki Manufacturing Co Ltd filed Critical Sankyo Seiki Manufacturing Co Ltd
Publication of CN1498732A publication Critical patent/CN1498732A/zh
Application granted granted Critical
Publication of CN1265943C publication Critical patent/CN1265943C/zh
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J15/00—Gripping heads and other end effectors
    • B25J15/0014—Gripping heads and other end effectors having fork, comb or plate shaped means for engaging the lower surface on a object to be transported
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/47—Scattering, i.e. diffuse reflection
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Biochemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Chemical & Material Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Health & Medical Sciences (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Analytical Chemistry (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Robotics (AREA)
  • Mechanical Engineering (AREA)
  • Manipulator (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
CNB2003101046625A 2002-10-30 2003-10-30 产业用机器人 Expired - Lifetime CN1265943C (zh)

Applications Claiming Priority (6)

Application Number Priority Date Filing Date Title
JP2002316738A JP3970749B2 (ja) 2002-10-30 2002-10-30 産業用ロボット
JP2002316738 2002-10-30
JP2002319387 2002-11-01
JP2002319387A JP2004148476A (ja) 2002-11-01 2002-11-01 搬送用ロボットのハンド
JP2003287784 2003-08-06
JP2003287784 2003-08-06

Related Child Applications (2)

Application Number Title Priority Date Filing Date
CN 200610004488 Division CN1862246A (zh) 2002-10-30 2003-10-30 粒子计数器
CN 200610004487 Division CN1861334A (zh) 2002-10-30 2003-10-30 产业用机器人

Publications (2)

Publication Number Publication Date
CN1498732A CN1498732A (zh) 2004-05-26
CN1265943C true CN1265943C (zh) 2006-07-26

Family

ID=34279462

Family Applications (1)

Application Number Title Priority Date Filing Date
CNB2003101046625A Expired - Lifetime CN1265943C (zh) 2002-10-30 2003-10-30 产业用机器人

Country Status (3)

Country Link
KR (3) KR20040038783A (ko)
CN (1) CN1265943C (ko)
TW (3) TWI250924B (ko)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4731267B2 (ja) * 2005-09-29 2011-07-20 日本電産サンキョー株式会社 ロボットのハンドおよびこれを用いたワーク搬送ロボット
CN101342994B (zh) * 2008-08-20 2011-01-12 哈尔滨博实自动化股份有限公司 托叉平移式码垛机械手
CN101823263B (zh) * 2009-03-07 2013-02-13 鸿富锦精密工业（深圳）有限公司 机器人的臂部件及其制造方法以及具有该臂部件的机器人
KR101139854B1 (ko) * 2010-04-13 2012-05-02 광주과학기술원 입자계수기
KR101139858B1 (ko) * 2010-04-13 2012-05-02 광주과학기술원 입자계수기
JP6271266B2 (ja) * 2014-01-29 2018-01-31 日本電産サンキョー株式会社 産業用ロボット
JP6456065B2 (ja) * 2014-05-16 2019-01-23 日本電産サンキョー株式会社 産業用ロボットのハンドおよび産業用ロボット
CN106001817A (zh) * 2016-06-29 2016-10-12 北京金迈斯智能设备科技有限公司 一种电火花机床专用机器人
CN109015722A (zh) * 2018-10-15 2018-12-18 重庆电讯职业学院 一种工业机器人复合夹具
CN113340776A (zh) * 2020-03-02 2021-09-03 长鑫存储技术有限公司 物料搬送系统、自动化天车走行区域微粒监控系统及监控方法
CN112102515A (zh) * 2020-09-14 2020-12-18 深圳优地科技有限公司 机器人巡检方法、装置、设备及存储介质

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0612943U (ja) * 1992-07-18 1994-02-18 株式会社堀場製作所 微粒子測定装置
US5479252A (en) * 1993-06-17 1995-12-26 Ultrapointe Corporation Laser imaging system for inspection and analysis of sub-micron particles
JPH07209185A (ja) * 1994-01-13 1995-08-11 Yokogawa Electric Corp 表面散乱形濁度計
JPH09178645A (ja) * 1995-12-26 1997-07-11 Rion Co Ltd 光散乱式粒子計数装置
US5963315A (en) * 1997-08-18 1999-10-05 Motorola, Inc. Method and apparatus for processing a semiconductor wafer on a robotic track having access to in situ wafer backside particle detection
JPH11165281A (ja) * 1997-12-04 1999-06-22 Mitsubishi Heavy Ind Ltd ロボットの移動構造
JP2000085963A (ja) * 1998-09-16 2000-03-28 Shin Meiwa Ind Co Ltd クリーン作業装置
JP3973006B2 (ja) * 2000-03-23 2007-09-05 日本電産サンキョー株式会社 ダブルアーム型ロボット
KR100414157B1 (ko) * 2001-09-28 2004-01-13 삼성전자주식회사 유체 샘플링 장치 및 이를 갖는 분석 장치
KR20030091426A (ko) * 2002-05-28 2003-12-03 삼성전자주식회사 파티클 검출장치가 구비된 제조설비

Also Published As

Publication number Publication date
TW200408513A (en) 2004-06-01
TW200624794A (en) 2006-07-16
TWI289201B (en) 2007-11-01
TW200533483A (en) 2005-10-16
TWI250924B (en) 2006-03-11
CN1498732A (zh) 2004-05-26
KR20040038783A (ko) 2004-05-08
KR20060079763A (ko) 2006-07-06
KR20060039415A (ko) 2006-05-08
TWI274639B (en) 2007-03-01
KR100807433B1 (ko) 2008-02-25

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Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C14 Grant of patent or utility model
GR01 Patent grant
TR01 Transfer of patent right
TR01 Transfer of patent right

Effective date of registration: 20170323

Address after: No. two Xingping Road, Pinghu Economic Development Zone, Zhejiang, China, No. 888

Patentee after: NIDEC SANKYO (ZHEJIANG) Corp.

Patentee after: NIDEC SANKYO Corp.

Address before: Japan, Suwa, Nagano

Patentee before: NIDEC SANKYO Corp.

CX01 Expiry of patent term
CX01 Expiry of patent term

Granted publication date: 20060726