JP5379405B2 - 超音波接合装置 - Google Patents
超音波接合装置 Download PDFInfo
- Publication number
- JP5379405B2 JP5379405B2 JP2008137487A JP2008137487A JP5379405B2 JP 5379405 B2 JP5379405 B2 JP 5379405B2 JP 2008137487 A JP2008137487 A JP 2008137487A JP 2008137487 A JP2008137487 A JP 2008137487A JP 5379405 B2 JP5379405 B2 JP 5379405B2
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- JP
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- Prior art keywords
- chip
- back surface
- chip component
- ultrasonic
- ultrasonic bonding
- Prior art date
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies
- H01L24/75—Apparatus for connecting with bump connectors or layer connectors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2221/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof covered by H01L21/00
- H01L2221/67—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere
- H01L2221/683—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L2221/68304—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
- H01L2221/68313—Auxiliary support including a cavity for storing a finished device, e.g. IC package, or a partly finished device, e.g. die, during manufacturing or mounting
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/15—Structure, shape, material or disposition of the bump connectors after the connecting process
- H01L2224/16—Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto
- H01L2224/75—Apparatus for connecting with bump connectors or layer connectors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto
- H01L2224/75—Apparatus for connecting with bump connectors or layer connectors
- H01L2224/757—Means for aligning
- H01L2224/75743—Suction holding means
- H01L2224/75745—Suction holding means in the upper part of the bonding apparatus, e.g. in the bonding head
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01004—Beryllium [Be]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01005—Boron [B]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01006—Carbon [C]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01033—Arsenic [As]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/11—Device type
- H01L2924/14—Integrated circuits
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
- H01L2924/151—Die mounting substrate
- H01L2924/156—Material
- H01L2924/15786—Material with a principal constituent of the material being a non metallic, non metalloid inorganic material
- H01L2924/15788—Glasses, e.g. amorphous oxides, nitrides or fluorides
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/30—Technical effects
- H01L2924/301—Electrical effects
- H01L2924/3025—Electromagnetic shielding
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Wire Bonding (AREA)
- Pressure Welding/Diffusion-Bonding (AREA)
- Die Bonding (AREA)
Description
片面に電極が形成された電極面を有し、電極面に対する裏面が超音波ホーンに吸着保持されるチップ部品に、超音波振動を付与して基板の電極にチップ部品の電極を超音波接合する超音波接合装置であって、
チップ部品の裏面を超音波ホーンに吸着保持する前に、チップ部品の裏面を検査するチップ裏面検査手段を備え、
前記チップ裏面検査手段が、
チップ部品の裏面に付着した異物の有無を観察する観察手段と、
前記観察手段の観察結果と予め設定した異物付着率とを比較する付着率比較手段とから構成されることを特徴とする超音波接合装置である。
チップ部品の裏面を超音波ホーンに吸着保持する前に、
チップ部品の裏面をプラズマによって洗浄するプラズマ洗浄手段を備えた超音波接合装置である。
チップ部品の裏面を超音波ホーンに吸着保持する前に、
チップ部品の裏面を紫外線によって洗浄する紫外線洗浄手段を備えた超音波接合装置である。
チップ部品の裏面を超音波ホーンに吸着保持する前に、
チップ部品の裏面を有機溶剤を用いて洗浄する有機溶剤洗浄手段を備えた超音波接合装置である。
チップ部品の裏面の観察手段が、
チップ部品の裏面の法線方向に配置されチップ部品の裏面からの散乱光を観察するカメラと、
カメラとチップ部品の裏面を結ぶ法線に対して所定の傾きを有した方向に光源を配置し、該光源からチップ部品の裏面に所定の角度で光を照射させる斜光照射手段と、
から構成されることを特徴とする超音波接合装置である。
2 チップ供給部
21 チップトレイ
22 コレット
23 ガイドレール
3 チップ搬送部
31 チップスライダ
32 駆動機構
33 吸引孔
34 ボールねじ
35 サーボモータ
4 チップ裏面検査部
41 カメラ
42 斜光照射手段
43 遮蔽板
5 超音波接合部
51 加圧機構
511 加圧シリンダ
512 ロッド
513 ヘッド支持部材
514 上面
52 超音波接合ヘッド
521 超音波発生器
522 超音波ホーン
523 チップ保持面
524 吸引孔
53 基板ステージ
531 吸引孔
6 制御部
61 記憶部
62 条件入力部
63 表示部
64 演算部
7 チップ部品
7a 電極面
7b 裏面
71 電極
8 基板
81 電極
9 チップ洗浄部
Claims (5)
- 片面に電極が形成された電極面を有し、電極面に対する裏面が超音波ホーンに吸着保持されるチップ部品に、超音波振動を付与して基板の電極にチップ部品の電極を超音波接合する超音波接合装置であって、
チップ部品の裏面を超音波ホーンに吸着保持する前に、チップ部品の裏面を検査するチップ裏面検査手段を備え、
前記チップ裏面検査手段が、
チップ部品の裏面に付着した異物の有無を観察する観察手段と、
前記観察手段の観察結果と予め設定した異物付着率とを比較する付着率比較手段とから構成されることを特徴とする超音波接合装置。 - 請求項1に記載の発明において、
チップ部品の裏面を超音波ホーンに吸着保持する前に、
チップ部品の裏面をプラズマによって洗浄するプラズマ洗浄手段を備えた超音波接合装置。 - 請求項1に記載の発明において、
チップ部品の裏面を超音波ホーンに吸着保持する前に、
チップ部品の裏面を紫外線によって洗浄する紫外線洗浄手段を備えた超音波接合装置。 - 請求項1に記載の発明において、
チップ部品の裏面を超音波ホーンに吸着保持する前に、
チップ部品の裏面を有機溶剤を用いて洗浄する有機溶剤洗浄手段を備えた超音波接合装置。 - 請求項1から4のいずれか1項に記載の超音波接合装置において、
チップ部品の裏面の観察手段が、
チップ部品の裏面の法線方向に配置されチップ部品の裏面からの散乱光を観察するカメラと、
カメラとチップ部品の裏面を結ぶ法線に対して所定の傾きを有した方向に光源を配置し、該光源からチップ部品の裏面に所定の角度で光を照射させる斜光照射手段と、
から構成されることを特徴とする超音波接合装置。
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2008137487A JP5379405B2 (ja) | 2008-05-27 | 2008-05-27 | 超音波接合装置 |
PCT/JP2009/058903 WO2009145055A1 (ja) | 2008-05-27 | 2009-05-13 | 超音波接合装置 |
KR1020107029114A KR101541947B1 (ko) | 2008-05-27 | 2009-05-13 | 초음파 접합 장치 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2008137487A JP5379405B2 (ja) | 2008-05-27 | 2008-05-27 | 超音波接合装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2009289776A JP2009289776A (ja) | 2009-12-10 |
JP5379405B2 true JP5379405B2 (ja) | 2013-12-25 |
Family
ID=41376939
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2008137487A Expired - Fee Related JP5379405B2 (ja) | 2008-05-27 | 2008-05-27 | 超音波接合装置 |
Country Status (3)
Country | Link |
---|---|
JP (1) | JP5379405B2 (ja) |
KR (1) | KR101541947B1 (ja) |
WO (1) | WO2009145055A1 (ja) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2014203971A (ja) * | 2013-04-04 | 2014-10-27 | 日東電工株式会社 | アンダーフィルフィルム、封止シート、半導体装置の製造方法及び半導体装置 |
JP6705727B2 (ja) * | 2016-09-26 | 2020-06-03 | ファスフォードテクノロジ株式会社 | フリップチップボンダおよび半導体装置の製造方法 |
JP7365827B2 (ja) * | 2019-03-13 | 2023-10-20 | 東京エレクトロン株式会社 | 接合システム、および接合方法 |
CN111696858A (zh) * | 2019-03-13 | 2020-09-22 | 东京毅力科创株式会社 | 接合系统和接合方法 |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4363756B2 (ja) * | 2000-07-31 | 2009-11-11 | 東レエンジニアリング株式会社 | チップ実装方法及びこれに用いられる基板洗浄装置 |
JP4761672B2 (ja) * | 2001-09-05 | 2011-08-31 | 株式会社東芝 | ボンディング方法及びボンディング装置 |
JP4239881B2 (ja) * | 2003-06-03 | 2009-03-18 | パナソニック株式会社 | 電子部品装着装置および電子部品装着方法 |
JP2005005382A (ja) * | 2003-06-10 | 2005-01-06 | Renesas Technology Corp | 半導体装置の製造方法およびそれに使用されるボンディング装置 |
JP4653550B2 (ja) * | 2005-04-27 | 2011-03-16 | 株式会社東芝 | 半導体装置の製造装置および製造方法 |
JP2007201108A (ja) * | 2006-01-25 | 2007-08-09 | Sharp Corp | 電子部品接合装置および電子部品接合方法 |
-
2008
- 2008-05-27 JP JP2008137487A patent/JP5379405B2/ja not_active Expired - Fee Related
-
2009
- 2009-05-13 KR KR1020107029114A patent/KR101541947B1/ko not_active IP Right Cessation
- 2009-05-13 WO PCT/JP2009/058903 patent/WO2009145055A1/ja active Application Filing
Also Published As
Publication number | Publication date |
---|---|
JP2009289776A (ja) | 2009-12-10 |
WO2009145055A1 (ja) | 2009-12-03 |
KR20110021948A (ko) | 2011-03-04 |
KR101541947B1 (ko) | 2015-08-04 |
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