CN1215099C - 用于微型平板印刷术的多环含氟聚合物及光刻胶 - Google Patents

用于微型平板印刷术的多环含氟聚合物及光刻胶 Download PDF

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Publication number
CN1215099C
CN1215099C CNB028077636A CN02807763A CN1215099C CN 1215099 C CN1215099 C CN 1215099C CN B028077636 A CNB028077636 A CN B028077636A CN 02807763 A CN02807763 A CN 02807763A CN 1215099 C CN1215099 C CN 1215099C
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China
Prior art keywords
group
tfe
alkyl
polymer
groups
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Expired - Fee Related
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CNB028077636A
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English (en)
Chinese (zh)
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CN1500099A (zh
Inventor
A·E·费林
F·L·沙德特三世
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EIDP Inc
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EI Du Pont de Nemours and Co
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Publication of CN1500099A publication Critical patent/CN1500099A/zh
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    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
    • C08F232/00—Copolymers of cyclic compounds containing no unsaturated aliphatic radicals in a side chain, and having one or more carbon-to-carbon double bonds in a carbocyclic ring system
    • C08F232/08—Copolymers of cyclic compounds containing no unsaturated aliphatic radicals in a side chain, and having one or more carbon-to-carbon double bonds in a carbocyclic ring system having condensed rings

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  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Medicinal Chemistry (AREA)
  • Polymers & Plastics (AREA)
  • Organic Chemistry (AREA)
  • Addition Polymer Or Copolymer, Post-Treatments, Or Chemical Modifications (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
CNB028077636A 2001-03-30 2002-03-27 用于微型平板印刷术的多环含氟聚合物及光刻胶 Expired - Fee Related CN1215099C (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US28026901P 2001-03-30 2001-03-30
US60/280,269 2001-03-30

Publications (2)

Publication Number Publication Date
CN1500099A CN1500099A (zh) 2004-05-26
CN1215099C true CN1215099C (zh) 2005-08-17

Family

ID=23072365

Family Applications (1)

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CNB028077636A Expired - Fee Related CN1215099C (zh) 2001-03-30 2002-03-27 用于微型平板印刷术的多环含氟聚合物及光刻胶

Country Status (7)

Country Link
EP (1) EP1383812B1 (enExample)
JP (1) JP2004526844A (enExample)
KR (1) KR20040018342A (enExample)
CN (1) CN1215099C (enExample)
DE (1) DE60211883T2 (enExample)
IL (1) IL157040A0 (enExample)
WO (1) WO2002079287A1 (enExample)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1675264A (zh) * 2002-08-09 2005-09-28 E.I.内穆尔杜邦公司 用作光致抗蚀剂的具有带稠合4－元碳环的多环基团的氟化聚合物和用于微石印术的方法
JP2005535780A (ja) * 2002-08-09 2005-11-24 イー・アイ・デュポン・ドウ・ヌムール・アンド・カンパニー フォトレジスト、フルオロポリマーおよび１５７ｎｍ微細平版印刷のための方法
JP4386197B2 (ja) 2003-03-06 2009-12-16 日本電気株式会社 脂環式不飽和化合物、重合体、化学増幅レジスト組成物、及び該組成物を用いたパターン形成方法
US7297811B2 (en) 2003-12-04 2007-11-20 International Business Machines Corporation Precursors to fluoroalkanol-containing olefin monomers and associated methods of synthesis and use
US7193023B2 (en) 2003-12-04 2007-03-20 International Business Machines Corporation Low activation energy photoresists
US7495135B2 (en) 2003-12-04 2009-02-24 International Business Machines Corporation Precursors to fluoroalkanol-containing olefin monomers, and associated methods of synthesis and use
US7820369B2 (en) 2003-12-04 2010-10-26 International Business Machines Corporation Method for patterning a low activation energy photoresist
CN1779569B (zh) * 2004-11-22 2010-09-29 北京科华微电子材料有限公司 氟代环烯烃聚合物及在深紫外类光刻胶中的应用
US7732547B2 (en) * 2007-07-12 2010-06-08 Industrial Technology Research Institute Fluorinated cyclic olefinic graft polymer
JP6545168B2 (ja) * 2013-11-13 2019-07-17 オーソゴナル，インコーポレイテッド 分岐型フッ素化感光性ポリマー
DE102014119634B4 (de) 2014-05-05 2023-05-11 Taiwan Semiconductor Manufacturing Company, Ltd. Verfahren zum herstellen von halbleitervorrichtungen und photolitographiematerial
WO2021088198A1 (en) * 2019-11-04 2021-05-14 3M Innovative Properties Company Electronic telecommunications articles comprising crosslinked fluoropolymers and methods
CN118307704A (zh) * 2024-04-26 2024-07-09 安徽恒坤新材料科技有限公司 一种桥型结构光刻胶树脂和KrF光刻胶组合物及其制备方法

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2928865A (en) * 1957-03-25 1960-03-15 Du Pont Fluorinated tricyclononanes and tetracycloundecanes
EP0437619B1 (en) * 1989-07-07 1995-08-30 Daikin Industries, Limited Fluorinated copolymer and method of producing the same

Also Published As

Publication number Publication date
HK1066554A1 (en) 2005-03-24
WO2002079287A1 (en) 2002-10-10
CN1500099A (zh) 2004-05-26
DE60211883D1 (en) 2006-07-06
DE60211883T2 (de) 2007-06-06
JP2004526844A (ja) 2004-09-02
EP1383812A1 (en) 2004-01-28
EP1383812B1 (en) 2006-05-31
IL157040A0 (en) 2004-02-08
KR20040018342A (ko) 2004-03-03

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