CN119522369A - 图像处理方法、图像处理装置、扫描型探针显微镜以及程序 - Google Patents

图像处理方法、图像处理装置、扫描型探针显微镜以及程序 Download PDF

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Publication number
CN119522369A
CN119522369A CN202380052807.7A CN202380052807A CN119522369A CN 119522369 A CN119522369 A CN 119522369A CN 202380052807 A CN202380052807 A CN 202380052807A CN 119522369 A CN119522369 A CN 119522369A
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CN
China
Prior art keywords
image
correction
processing method
image processing
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202380052807.7A
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English (en)
Chinese (zh)
Inventor
平出雅人
山崎贤治
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Shimadzu Corp
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Shimadzu Corp
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Application filed by Shimadzu Corp filed Critical Shimadzu Corp
Publication of CN119522369A publication Critical patent/CN119522369A/zh
Pending legal-status Critical Current

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q30/00—Auxiliary means serving to assist or improve the scanning probe techniques or apparatus, e.g. display or data processing devices
    • G01Q30/04—Display or data processing devices
    • G01Q30/06—Display or data processing devices for error compensation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/10—STM [Scanning Tunnelling Microscopy] or apparatus therefor, e.g. STM probes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/24—AFM [Atomic Force Microscopy] or apparatus therefor, e.g. AFM probes

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  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Radiology & Medical Imaging (AREA)
  • Image Processing (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
CN202380052807.7A 2022-07-11 2023-06-07 图像处理方法、图像处理装置、扫描型探针显微镜以及程序 Pending CN119522369A (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2022-111187 2022-07-11
JP2022111187 2022-07-11
PCT/JP2023/021094 WO2024014185A1 (ja) 2022-07-11 2023-06-07 画像処理方法、画像処理装置、走査型プローブ顕微鏡、およびプログラム

Publications (1)

Publication Number Publication Date
CN119522369A true CN119522369A (zh) 2025-02-25

Family

ID=89536625

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202380052807.7A Pending CN119522369A (zh) 2022-07-11 2023-06-07 图像处理方法、图像处理装置、扫描型探针显微镜以及程序

Country Status (3)

Country Link
JP (1) JPWO2024014185A1 (enExample)
CN (1) CN119522369A (enExample)
WO (1) WO2024014185A1 (enExample)

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH1138019A (ja) * 1997-07-17 1999-02-12 Seiko Instr Inc 走査型プローブ顕微鏡
JPH11142416A (ja) * 1997-11-12 1999-05-28 Olympus Optical Co Ltd 走査型プローブ顕微鏡における測定データの補正方法
JP4136157B2 (ja) * 1999-02-09 2008-08-20 オリンパス株式会社 分子測長方法
JP5481883B2 (ja) * 2009-03-05 2014-04-23 株式会社島津製作所 特定部位検出方法を用いた試料分析装置
JP6631647B2 (ja) * 2018-03-08 2020-01-15 株式会社島津製作所 走査型プローブ顕微鏡及び表面画像補正方法
JP7218262B2 (ja) * 2019-09-12 2023-02-06 株式会社日立ハイテク パターン高さ情報補正システム及びパターン高さ情報の補正方法

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WO2024014185A1 (ja) 2024-01-18
JPWO2024014185A1 (enExample) 2024-01-18

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