JPWO2024014185A1 - - Google Patents

Info

Publication number
JPWO2024014185A1
JPWO2024014185A1 JP2024533572A JP2024533572A JPWO2024014185A1 JP WO2024014185 A1 JPWO2024014185 A1 JP WO2024014185A1 JP 2024533572 A JP2024533572 A JP 2024533572A JP 2024533572 A JP2024533572 A JP 2024533572A JP WO2024014185 A1 JPWO2024014185 A1 JP WO2024014185A1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2024533572A
Other languages
Japanese (ja)
Other versions
JPWO2024014185A5 (enExample
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPWO2024014185A1 publication Critical patent/JPWO2024014185A1/ja
Publication of JPWO2024014185A5 publication Critical patent/JPWO2024014185A5/ja
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q30/00—Auxiliary means serving to assist or improve the scanning probe techniques or apparatus, e.g. display or data processing devices
    • G01Q30/04—Display or data processing devices
    • G01Q30/06—Display or data processing devices for error compensation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/10—STM [Scanning Tunnelling Microscopy] or apparatus therefor, e.g. STM probes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/24—AFM [Atomic Force Microscopy] or apparatus therefor, e.g. AFM probes

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Radiology & Medical Imaging (AREA)
  • Image Processing (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
JP2024533572A 2022-07-11 2023-06-07 Pending JPWO2024014185A1 (enExample)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2022111187 2022-07-11
PCT/JP2023/021094 WO2024014185A1 (ja) 2022-07-11 2023-06-07 画像処理方法、画像処理装置、走査型プローブ顕微鏡、およびプログラム

Publications (2)

Publication Number Publication Date
JPWO2024014185A1 true JPWO2024014185A1 (enExample) 2024-01-18
JPWO2024014185A5 JPWO2024014185A5 (enExample) 2025-02-19

Family

ID=89536625

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2024533572A Pending JPWO2024014185A1 (enExample) 2022-07-11 2023-06-07

Country Status (3)

Country Link
JP (1) JPWO2024014185A1 (enExample)
CN (1) CN119522369A (enExample)
WO (1) WO2024014185A1 (enExample)

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH1138019A (ja) * 1997-07-17 1999-02-12 Seiko Instr Inc 走査型プローブ顕微鏡
JPH11142416A (ja) * 1997-11-12 1999-05-28 Olympus Optical Co Ltd 走査型プローブ顕微鏡における測定データの補正方法
JP2000230823A (ja) * 1999-02-09 2000-08-22 Olympus Optical Co Ltd 分子測長方法
JP2010203999A (ja) * 2009-03-05 2010-09-16 Shimadzu Corp 特定部位検出方法、及び該方法を用いた試料分析装置
JP2019158387A (ja) * 2018-03-08 2019-09-19 株式会社島津製作所 走査型プローブ顕微鏡及び表面画像補正方法
JP2021043096A (ja) * 2019-09-12 2021-03-18 株式会社日立ハイテク パターン高さ情報補正システム及びパターン高さ情報の補正方法

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH1138019A (ja) * 1997-07-17 1999-02-12 Seiko Instr Inc 走査型プローブ顕微鏡
JPH11142416A (ja) * 1997-11-12 1999-05-28 Olympus Optical Co Ltd 走査型プローブ顕微鏡における測定データの補正方法
JP2000230823A (ja) * 1999-02-09 2000-08-22 Olympus Optical Co Ltd 分子測長方法
JP2010203999A (ja) * 2009-03-05 2010-09-16 Shimadzu Corp 特定部位検出方法、及び該方法を用いた試料分析装置
JP2019158387A (ja) * 2018-03-08 2019-09-19 株式会社島津製作所 走査型プローブ顕微鏡及び表面画像補正方法
JP2021043096A (ja) * 2019-09-12 2021-03-18 株式会社日立ハイテク パターン高さ情報補正システム及びパターン高さ情報の補正方法

Also Published As

Publication number Publication date
CN119522369A (zh) 2025-02-25
WO2024014185A1 (ja) 2024-01-18

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