CN119289519A - 调温装置 - Google Patents

调温装置 Download PDF

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Publication number
CN119289519A
CN119289519A CN202411698225.9A CN202411698225A CN119289519A CN 119289519 A CN119289519 A CN 119289519A CN 202411698225 A CN202411698225 A CN 202411698225A CN 119289519 A CN119289519 A CN 119289519A
Authority
CN
China
Prior art keywords
temperature
flow path
cooling
circulating
liquid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202411698225.9A
Other languages
English (en)
Chinese (zh)
Inventor
菊地谅
天野达也
德井春彦
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SMC Corp
Original Assignee
SMC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by SMC Corp filed Critical SMC Corp
Publication of CN119289519A publication Critical patent/CN119289519A/zh
Pending legal-status Critical Current

Links

Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25DREFRIGERATORS; COLD ROOMS; ICE-BOXES; COOLING OR FREEZING APPARATUS NOT OTHERWISE PROVIDED FOR
    • F25D31/00Other cooling or freezing apparatus
    • F25D31/005Combined cooling and heating devices
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05BELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B1/00Details of electric heating devices
    • H05B1/02Automatic switching arrangements specially adapted to apparatus ; Control of heating devices
    • H05B1/0227Applications
    • H05B1/023Industrial applications
    • H05B1/0244Heating of fluids
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24HEATING; RANGES; VENTILATING
    • F24HFLUID HEATERS, e.g. WATER OR AIR HEATERS, HAVING HEAT-GENERATING MEANS, e.g. HEAT PUMPS, IN GENERAL
    • F24H7/00Storage heaters, i.e. heaters in which the energy is stored as heat in masses for subsequent release
    • F24H7/02Storage heaters, i.e. heaters in which the energy is stored as heat in masses for subsequent release the released heat being conveyed to a transfer fluid
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16LPIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
    • F16L19/00Joints in which sealing surfaces are pressed together by means of a member, e.g. a swivel nut, screwed on, or into, one of the joint parts
    • F16L19/08Joints in which sealing surfaces are pressed together by means of a member, e.g. a swivel nut, screwed on, or into, one of the joint parts with metal rings which bite into the wall of the pipe
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24HEATING; RANGES; VENTILATING
    • F24HFLUID HEATERS, e.g. WATER OR AIR HEATERS, HAVING HEAT-GENERATING MEANS, e.g. HEAT PUMPS, IN GENERAL
    • F24H15/00Control of fluid heaters
    • F24H15/10Control of fluid heaters characterised by the purpose of the control
    • F24H15/174Supplying heated water with desired temperature or desired range of temperature
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24HEATING; RANGES; VENTILATING
    • F24HFLUID HEATERS, e.g. WATER OR AIR HEATERS, HAVING HEAT-GENERATING MEANS, e.g. HEAT PUMPS, IN GENERAL
    • F24H15/00Control of fluid heaters
    • F24H15/20Control of fluid heaters characterised by control inputs
    • F24H15/212Temperature of the water
    • F24H15/219Temperature of the water after heating
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24HEATING; RANGES; VENTILATING
    • F24HFLUID HEATERS, e.g. WATER OR AIR HEATERS, HAVING HEAT-GENERATING MEANS, e.g. HEAT PUMPS, IN GENERAL
    • F24H15/00Control of fluid heaters
    • F24H15/30Control of fluid heaters characterised by control outputs; characterised by the components to be controlled
    • F24H15/335Control of pumps, e.g. on-off control
    • F24H15/34Control of the speed of pumps
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24HEATING; RANGES; VENTILATING
    • F24HFLUID HEATERS, e.g. WATER OR AIR HEATERS, HAVING HEAT-GENERATING MEANS, e.g. HEAT PUMPS, IN GENERAL
    • F24H9/00Details
    • F24H9/12Arrangements for connecting heaters to circulation pipes
    • F24H9/13Arrangements for connecting heaters to circulation pipes for water heaters
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24HEATING; RANGES; VENTILATING
    • F24HFLUID HEATERS, e.g. WATER OR AIR HEATERS, HAVING HEAT-GENERATING MEANS, e.g. HEAT PUMPS, IN GENERAL
    • F24H9/00Details
    • F24H9/20Arrangement or mounting of control or safety devices
    • F24H9/2007Arrangement or mounting of control or safety devices for water heaters
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25DREFRIGERATORS; COLD ROOMS; ICE-BOXES; COOLING OR FREEZING APPARATUS NOT OTHERWISE PROVIDED FOR
    • F25D17/00Arrangements for circulating cooling fluids; Arrangements for circulating gas, e.g. air, within refrigerated spaces
    • F25D17/02Arrangements for circulating cooling fluids; Arrangements for circulating gas, e.g. air, within refrigerated spaces for circulating liquids, e.g. brine
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25DREFRIGERATORS; COLD ROOMS; ICE-BOXES; COOLING OR FREEZING APPARATUS NOT OTHERWISE PROVIDED FOR
    • F25D29/00Arrangement or mounting of control or safety devices
    • F25D29/005Mounting of control devices
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F28HEAT EXCHANGE IN GENERAL
    • F28DHEAT-EXCHANGE APPARATUS, NOT PROVIDED FOR IN ANOTHER SUBCLASS, IN WHICH THE HEAT-EXCHANGE MEDIA DO NOT COME INTO DIRECT CONTACT
    • F28D7/00Heat-exchange apparatus having stationary tubular conduit assemblies for both heat-exchange media, the media being in contact with different sides of a conduit wall
    • F28D7/02Heat-exchange apparatus having stationary tubular conduit assemblies for both heat-exchange media, the media being in contact with different sides of a conduit wall the conduits being helically coiled
    • F28D7/024Heat-exchange apparatus having stationary tubular conduit assemblies for both heat-exchange media, the media being in contact with different sides of a conduit wall the conduits being helically coiled the conduits of only one medium being helically coiled tubes, the coils having a cylindrical configuration
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F28HEAT EXCHANGE IN GENERAL
    • F28DHEAT-EXCHANGE APPARATUS, NOT PROVIDED FOR IN ANOTHER SUBCLASS, IN WHICH THE HEAT-EXCHANGE MEDIA DO NOT COME INTO DIRECT CONTACT
    • F28D7/00Heat-exchange apparatus having stationary tubular conduit assemblies for both heat-exchange media, the media being in contact with different sides of a conduit wall
    • F28D7/10Heat-exchange apparatus having stationary tubular conduit assemblies for both heat-exchange media, the media being in contact with different sides of a conduit wall the conduits being arranged one within the other, e.g. concentrically
    • GPHYSICS
    • G05CONTROLLING; REGULATING
    • G05DSYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D23/00Control of temperature
    • GPHYSICS
    • G05CONTROLLING; REGULATING
    • G05DSYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D23/00Control of temperature
    • G05D23/01Control of temperature without auxiliary power
    • G05D23/12Control of temperature without auxiliary power with sensing element responsive to pressure or volume changes in a confined fluid
    • GPHYSICS
    • G05CONTROLLING; REGULATING
    • G05DSYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D23/00Control of temperature
    • G05D23/01Control of temperature without auxiliary power
    • G05D23/13Control of temperature without auxiliary power by varying the mixing ratio of two fluids having different temperatures
    • G05D23/1306Control of temperature without auxiliary power by varying the mixing ratio of two fluids having different temperatures for liquids
    • G05D23/132Control of temperature without auxiliary power by varying the mixing ratio of two fluids having different temperatures for liquids with temperature sensing element
    • GPHYSICS
    • G05CONTROLLING; REGULATING
    • G05DSYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D23/00Control of temperature
    • G05D23/19Control of temperature characterised by the use of electric means
    • G05D23/1919Control of temperature characterised by the use of electric means characterised by the type of controller
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04DNON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00Details, component parts, or accessories
    • F04D29/58Cooling; Heating; Diminishing heat transfer
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24HEATING; RANGES; VENTILATING
    • F24HFLUID HEATERS, e.g. WATER OR AIR HEATERS, HAVING HEAT-GENERATING MEANS, e.g. HEAT PUMPS, IN GENERAL
    • F24H1/00Water heaters, e.g. boilers, continuous-flow heaters or water-storage heaters
    • F24H1/10Continuous-flow heaters, i.e. heaters in which heat is generated only while the water is flowing, e.g. with direct contact of the water with the heating medium
    • F24H1/12Continuous-flow heaters, i.e. heaters in which heat is generated only while the water is flowing, e.g. with direct contact of the water with the heating medium in which the water is kept separate from the heating medium
    • F24H1/14Continuous-flow heaters, i.e. heaters in which heat is generated only while the water is flowing, e.g. with direct contact of the water with the heating medium in which the water is kept separate from the heating medium by tubes, e.g. bent in serpentine form
    • F24H1/16Continuous-flow heaters, i.e. heaters in which heat is generated only while the water is flowing, e.g. with direct contact of the water with the heating medium in which the water is kept separate from the heating medium by tubes, e.g. bent in serpentine form helically or spirally coiled
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24HEATING; RANGES; VENTILATING
    • F24HFLUID HEATERS, e.g. WATER OR AIR HEATERS, HAVING HEAT-GENERATING MEANS, e.g. HEAT PUMPS, IN GENERAL
    • F24H15/00Control of fluid heaters
    • F24H15/10Control of fluid heaters characterised by the purpose of the control
    • F24H15/12Preventing or detecting fluid leakage
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24HEATING; RANGES; VENTILATING
    • F24HFLUID HEATERS, e.g. WATER OR AIR HEATERS, HAVING HEAT-GENERATING MEANS, e.g. HEAT PUMPS, IN GENERAL
    • F24H15/00Control of fluid heaters
    • F24H15/10Control of fluid heaters characterised by the purpose of the control
    • F24H15/128Preventing overheating
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24HEATING; RANGES; VENTILATING
    • F24HFLUID HEATERS, e.g. WATER OR AIR HEATERS, HAVING HEAT-GENERATING MEANS, e.g. HEAT PUMPS, IN GENERAL
    • F24H15/00Control of fluid heaters
    • F24H15/20Control of fluid heaters characterised by control inputs
    • F24H15/212Temperature of the water
    • F24H15/223Temperature of the water in the water storage tank
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24HEATING; RANGES; VENTILATING
    • F24HFLUID HEATERS, e.g. WATER OR AIR HEATERS, HAVING HEAT-GENERATING MEANS, e.g. HEAT PUMPS, IN GENERAL
    • F24H15/00Control of fluid heaters
    • F24H15/20Control of fluid heaters characterised by control inputs
    • F24H15/242Pressure
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24HEATING; RANGES; VENTILATING
    • F24HFLUID HEATERS, e.g. WATER OR AIR HEATERS, HAVING HEAT-GENERATING MEANS, e.g. HEAT PUMPS, IN GENERAL
    • F24H15/00Control of fluid heaters
    • F24H15/20Control of fluid heaters characterised by control inputs
    • F24H15/246Water level
    • F24H15/248Water level of water storage tanks
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24HEATING; RANGES; VENTILATING
    • F24HFLUID HEATERS, e.g. WATER OR AIR HEATERS, HAVING HEAT-GENERATING MEANS, e.g. HEAT PUMPS, IN GENERAL
    • F24H15/00Control of fluid heaters
    • F24H15/30Control of fluid heaters characterised by control outputs; characterised by the components to be controlled
    • F24H15/355Control of heat-generating means in heaters
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F28HEAT EXCHANGE IN GENERAL
    • F28FDETAILS OF HEAT-EXCHANGE AND HEAT-TRANSFER APPARATUS, OF GENERAL APPLICATION
    • F28F2240/00Spacing means
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F28HEAT EXCHANGE IN GENERAL
    • F28FDETAILS OF HEAT-EXCHANGE AND HEAT-TRANSFER APPARATUS, OF GENERAL APPLICATION
    • F28F2275/00Fastening; Joining
    • F28F2275/06Fastening; Joining by welding
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F28HEAT EXCHANGE IN GENERAL
    • F28FDETAILS OF HEAT-EXCHANGE AND HEAT-TRANSFER APPARATUS, OF GENERAL APPLICATION
    • F28F27/00Control arrangements or safety devices specially adapted for heat-exchange or heat-transfer apparatus
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005Apparatus not specifically provided for elsewhere
    • H01L21/67011Apparatus for manufacture or treatment
    • H01L21/67098Apparatus for thermal treatment

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Thermal Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • General Physics & Mathematics (AREA)
  • Automation & Control Theory (AREA)
  • Cooling Or The Like Of Electrical Apparatus (AREA)
  • Heat-Exchange Devices With Radiators And Conduit Assemblies (AREA)
  • Devices That Are Associated With Refrigeration Equipment (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
CN202411698225.9A 2019-04-02 2020-03-31 调温装置 Pending CN119289519A (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2019-070764 2019-04-02
JP2019070764A JP7314462B2 (ja) 2019-04-02 2019-04-02 温調装置
CN202010240431.0A CN111795502A (zh) 2019-04-02 2020-03-31 调温装置

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
CN202010240431.0A Division CN111795502A (zh) 2019-04-02 2020-03-31 调温装置

Publications (1)

Publication Number Publication Date
CN119289519A true CN119289519A (zh) 2025-01-10

Family

ID=69810709

Family Applications (2)

Application Number Title Priority Date Filing Date
CN202010240431.0A Pending CN111795502A (zh) 2019-04-02 2020-03-31 调温装置
CN202411698225.9A Pending CN119289519A (zh) 2019-04-02 2020-03-31 调温装置

Family Applications Before (1)

Application Number Title Priority Date Filing Date
CN202010240431.0A Pending CN111795502A (zh) 2019-04-02 2020-03-31 调温装置

Country Status (6)

Country Link
US (1) US12092371B2 (enExample)
EP (1) EP3720244B1 (enExample)
JP (1) JP7314462B2 (enExample)
KR (1) KR20200116858A (enExample)
CN (2) CN111795502A (enExample)
TW (1) TWI840534B (enExample)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI754574B (zh) * 2021-04-07 2022-02-01 芯巧科技股份有限公司 能根據水流資訊以調整液體溫度的方法
JP2022166632A (ja) * 2021-04-21 2022-11-02 Smc株式会社 温調装置
US12359883B2 (en) 2021-06-04 2025-07-15 Jeffrey A. Wilmer Methods and systems for a heat exchanger
US20230247795A1 (en) 2022-01-28 2023-08-03 The Research Foundation For The State University Of New York Regenerative preheater for phase change cooling applications
JP2024004185A (ja) * 2022-06-28 2024-01-16 Smc株式会社 温調装置
JP2024145807A (ja) * 2023-03-31 2024-10-15 Smc株式会社 温調装置
US20240392776A1 (en) * 2023-05-26 2024-11-28 Hamilton Sundstrand Corporation Fluid pump systems
US12188727B1 (en) * 2023-11-15 2025-01-07 Ci Systems (Israel) Ltd. Systems and methods for verification and calibration using known reference chemical solutions
CN117433327B (zh) * 2023-12-20 2024-03-08 宝鸡宏顺达钛业有限公司 一种列管式冷凝器
CN118776351B (zh) * 2024-07-25 2025-01-28 南通曙光机电工程有限公司 一种内嵌多孔射流结构的高压可控温套管式换热器

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EP0215927A1 (en) * 1985-03-22 1987-04-01 McLAREN, Keith, Stuart Heat exchanger
JPH0684852B2 (ja) * 1986-01-20 1994-10-26 株式会社東芝 極低温冷凍機
US5309987A (en) * 1992-07-21 1994-05-10 Astec Method and apparatus for heating and cooling food products during processing
CN2144289Y (zh) * 1993-01-14 1993-10-20 成增勋 螺旋换热管热交换器
CN2221199Y (zh) * 1994-09-29 1996-02-28 荣成市自动车厂 管式换热器
US6076597A (en) * 1997-12-31 2000-06-20 Flowserve Management Company Helical coil heat exchanger with removable end plates
CN2404087Y (zh) * 2000-01-26 2000-11-01 淮阴辉煌太阳能有限公司 装配式螺旋套管热交换器
JP2002168551A (ja) 2000-11-30 2002-06-14 Tokyo Electron Ltd 処理装置の電極用冷却装置
JP4157394B2 (ja) 2003-02-18 2008-10-01 イノテック株式会社 チラー装置
CN1288411C (zh) * 2003-08-21 2006-12-06 上海交通大学 海水淡水两用螺旋管式冷凝器
JP2007100967A (ja) 2005-09-30 2007-04-19 Daikin Ind Ltd 冷凍装置
KR100925236B1 (ko) * 2007-10-18 2009-11-05 주식회사 글로벌스탠다드테크놀로지 반도체 제조 장비의 온도 조절 시스템
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JP6129760B2 (ja) 2014-02-07 2017-05-17 伸和コントロールズ株式会社 温調装置
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Also Published As

Publication number Publication date
TW202104811A (zh) 2021-02-01
CN111795502A (zh) 2020-10-20
JP7314462B2 (ja) 2023-07-26
US20200318861A1 (en) 2020-10-08
KR20200116858A (ko) 2020-10-13
EP3720244B1 (en) 2021-11-24
TWI840534B (zh) 2024-05-01
JP2020169760A (ja) 2020-10-15
EP3720244A1 (en) 2020-10-07
US12092371B2 (en) 2024-09-17

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