JP7314462B2 - 温調装置 - Google Patents

温調装置 Download PDF

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Publication number
JP7314462B2
JP7314462B2 JP2019070764A JP2019070764A JP7314462B2 JP 7314462 B2 JP7314462 B2 JP 7314462B2 JP 2019070764 A JP2019070764 A JP 2019070764A JP 2019070764 A JP2019070764 A JP 2019070764A JP 7314462 B2 JP7314462 B2 JP 7314462B2
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Japan
Prior art keywords
temperature
circulating fluid
cooling
shell
rotation speed
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Application number
JP2019070764A
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English (en)
Japanese (ja)
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JP2020169760A (ja
JP2020169760A5 (enExample
Inventor
諒 菊地
達也 天野
春彦 徳井
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SMC Corp
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SMC Corp
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Filing date
Publication date
Application filed by SMC Corp filed Critical SMC Corp
Priority to JP2019070764A priority Critical patent/JP7314462B2/ja
Priority to EP20162815.3A priority patent/EP3720244B1/en
Priority to TW109109194A priority patent/TWI840534B/zh
Priority to KR1020200037346A priority patent/KR20200116858A/ko
Priority to CN202010240431.0A priority patent/CN111795502A/zh
Priority to CN202411698225.9A priority patent/CN119289519A/zh
Priority to US16/837,082 priority patent/US12092371B2/en
Publication of JP2020169760A publication Critical patent/JP2020169760A/ja
Publication of JP2020169760A5 publication Critical patent/JP2020169760A5/ja
Application granted granted Critical
Publication of JP7314462B2 publication Critical patent/JP7314462B2/ja
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    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B1/00—Details of electric heating devices
    • H05B1/02—Automatic switching arrangements specially adapted to apparatus ; Control of heating devices
    • H05B1/0227—Applications
    • H05B1/023—Industrial applications
    • H05B1/0244—Heating of fluids
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24H—FLUID HEATERS, e.g. WATER OR AIR HEATERS, HAVING HEAT-GENERATING MEANS, e.g. HEAT PUMPS, IN GENERAL
    • F24H7/00—Storage heaters, i.e. heaters in which the energy is stored as heat in masses for subsequent release
    • F24H7/02—Storage heaters, i.e. heaters in which the energy is stored as heat in masses for subsequent release the released heat being conveyed to a transfer fluid
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25D—REFRIGERATORS; COLD ROOMS; ICE-BOXES; COOLING OR FREEZING APPARATUS NOT OTHERWISE PROVIDED FOR
    • F25D31/00—Other cooling or freezing apparatus
    • F25D31/005—Combined cooling and heating devices
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16L—PIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
    • F16L19/00—Joints in which sealing surfaces are pressed together by means of a member, e.g. a swivel nut, screwed on, or into, one of the joint parts
    • F16L19/08—Joints in which sealing surfaces are pressed together by means of a member, e.g. a swivel nut, screwed on, or into, one of the joint parts with metal rings which bite into the wall of the pipe
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24H—FLUID HEATERS, e.g. WATER OR AIR HEATERS, HAVING HEAT-GENERATING MEANS, e.g. HEAT PUMPS, IN GENERAL
    • F24H15/00—Control of fluid heaters
    • F24H15/10—Control of fluid heaters characterised by the purpose of the control
    • F24H15/174—Supplying heated water with desired temperature or desired range of temperature
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24H—FLUID HEATERS, e.g. WATER OR AIR HEATERS, HAVING HEAT-GENERATING MEANS, e.g. HEAT PUMPS, IN GENERAL
    • F24H15/00—Control of fluid heaters
    • F24H15/20—Control of fluid heaters characterised by control inputs
    • F24H15/212—Temperature of the water
    • F24H15/219—Temperature of the water after heating
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24H—FLUID HEATERS, e.g. WATER OR AIR HEATERS, HAVING HEAT-GENERATING MEANS, e.g. HEAT PUMPS, IN GENERAL
    • F24H15/00—Control of fluid heaters
    • F24H15/30—Control of fluid heaters characterised by control outputs; characterised by the components to be controlled
    • F24H15/335—Control of pumps, e.g. on-off control
    • F24H15/34—Control of the speed of pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24H—FLUID HEATERS, e.g. WATER OR AIR HEATERS, HAVING HEAT-GENERATING MEANS, e.g. HEAT PUMPS, IN GENERAL
    • F24H9/00—Details
    • F24H9/12—Arrangements for connecting heaters to circulation pipes
    • F24H9/13—Arrangements for connecting heaters to circulation pipes for water heaters
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24H—FLUID HEATERS, e.g. WATER OR AIR HEATERS, HAVING HEAT-GENERATING MEANS, e.g. HEAT PUMPS, IN GENERAL
    • F24H9/00—Details
    • F24H9/20—Arrangement or mounting of control or safety devices
    • F24H9/2007—Arrangement or mounting of control or safety devices for water heaters
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25D—REFRIGERATORS; COLD ROOMS; ICE-BOXES; COOLING OR FREEZING APPARATUS NOT OTHERWISE PROVIDED FOR
    • F25D17/00—Arrangements for circulating cooling fluids; Arrangements for circulating gas, e.g. air, within refrigerated spaces
    • F25D17/02—Arrangements for circulating cooling fluids; Arrangements for circulating gas, e.g. air, within refrigerated spaces for circulating liquids, e.g. brine
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25D—REFRIGERATORS; COLD ROOMS; ICE-BOXES; COOLING OR FREEZING APPARATUS NOT OTHERWISE PROVIDED FOR
    • F25D29/00—Arrangement or mounting of control or safety devices
    • F25D29/005—Mounting of control devices
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F28—HEAT EXCHANGE IN GENERAL
    • F28D—HEAT-EXCHANGE APPARATUS, NOT PROVIDED FOR IN ANOTHER SUBCLASS, IN WHICH THE HEAT-EXCHANGE MEDIA DO NOT COME INTO DIRECT CONTACT
    • F28D7/00—Heat-exchange apparatus having stationary tubular conduit assemblies for both heat-exchange media, the media being in contact with different sides of a conduit wall
    • F28D7/02—Heat-exchange apparatus having stationary tubular conduit assemblies for both heat-exchange media, the media being in contact with different sides of a conduit wall the conduits being helically coiled
    • F28D7/024—Heat-exchange apparatus having stationary tubular conduit assemblies for both heat-exchange media, the media being in contact with different sides of a conduit wall the conduits being helically coiled the conduits of only one medium being helically coiled tubes, the coils having a cylindrical configuration
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F28—HEAT EXCHANGE IN GENERAL
    • F28D—HEAT-EXCHANGE APPARATUS, NOT PROVIDED FOR IN ANOTHER SUBCLASS, IN WHICH THE HEAT-EXCHANGE MEDIA DO NOT COME INTO DIRECT CONTACT
    • F28D7/00—Heat-exchange apparatus having stationary tubular conduit assemblies for both heat-exchange media, the media being in contact with different sides of a conduit wall
    • F28D7/10—Heat-exchange apparatus having stationary tubular conduit assemblies for both heat-exchange media, the media being in contact with different sides of a conduit wall the conduits being arranged one within the other, e.g. concentrically
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D23/00—Control of temperature
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D23/00—Control of temperature
    • G05D23/01—Control of temperature without auxiliary power
    • G05D23/12—Control of temperature without auxiliary power with sensing element responsive to pressure or volume changes in a confined fluid
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D23/00—Control of temperature
    • G05D23/01—Control of temperature without auxiliary power
    • G05D23/13—Control of temperature without auxiliary power by varying the mixing ratio of two fluids having different temperatures
    • G05D23/1306—Control of temperature without auxiliary power by varying the mixing ratio of two fluids having different temperatures for liquids
    • G05D23/132—Control of temperature without auxiliary power by varying the mixing ratio of two fluids having different temperatures for liquids with temperature sensing element
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D23/00—Control of temperature
    • G05D23/19—Control of temperature characterised by the use of electric means
    • G05D23/1919—Control of temperature characterised by the use of electric means characterised by the type of controller
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/58—Cooling; Heating; Diminishing heat transfer
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24H—FLUID HEATERS, e.g. WATER OR AIR HEATERS, HAVING HEAT-GENERATING MEANS, e.g. HEAT PUMPS, IN GENERAL
    • F24H1/00—Water heaters, e.g. boilers, continuous-flow heaters or water-storage heaters
    • F24H1/10—Continuous-flow heaters, i.e. heaters in which heat is generated only while the water is flowing, e.g. with direct contact of the water with the heating medium
    • F24H1/12—Continuous-flow heaters, i.e. heaters in which heat is generated only while the water is flowing, e.g. with direct contact of the water with the heating medium in which the water is kept separate from the heating medium
    • F24H1/14—Continuous-flow heaters, i.e. heaters in which heat is generated only while the water is flowing, e.g. with direct contact of the water with the heating medium in which the water is kept separate from the heating medium by tubes, e.g. bent in serpentine form
    • F24H1/16—Continuous-flow heaters, i.e. heaters in which heat is generated only while the water is flowing, e.g. with direct contact of the water with the heating medium in which the water is kept separate from the heating medium by tubes, e.g. bent in serpentine form helically or spirally coiled
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24H—FLUID HEATERS, e.g. WATER OR AIR HEATERS, HAVING HEAT-GENERATING MEANS, e.g. HEAT PUMPS, IN GENERAL
    • F24H15/00—Control of fluid heaters
    • F24H15/10—Control of fluid heaters characterised by the purpose of the control
    • F24H15/12—Preventing or detecting fluid leakage
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24H—FLUID HEATERS, e.g. WATER OR AIR HEATERS, HAVING HEAT-GENERATING MEANS, e.g. HEAT PUMPS, IN GENERAL
    • F24H15/00—Control of fluid heaters
    • F24H15/10—Control of fluid heaters characterised by the purpose of the control
    • F24H15/128—Preventing overheating
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24H—FLUID HEATERS, e.g. WATER OR AIR HEATERS, HAVING HEAT-GENERATING MEANS, e.g. HEAT PUMPS, IN GENERAL
    • F24H15/00—Control of fluid heaters
    • F24H15/20—Control of fluid heaters characterised by control inputs
    • F24H15/212—Temperature of the water
    • F24H15/223—Temperature of the water in the water storage tank
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24H—FLUID HEATERS, e.g. WATER OR AIR HEATERS, HAVING HEAT-GENERATING MEANS, e.g. HEAT PUMPS, IN GENERAL
    • F24H15/00—Control of fluid heaters
    • F24H15/20—Control of fluid heaters characterised by control inputs
    • F24H15/242—Pressure
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24H—FLUID HEATERS, e.g. WATER OR AIR HEATERS, HAVING HEAT-GENERATING MEANS, e.g. HEAT PUMPS, IN GENERAL
    • F24H15/00—Control of fluid heaters
    • F24H15/20—Control of fluid heaters characterised by control inputs
    • F24H15/246—Water level
    • F24H15/248—Water level of water storage tanks
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24H—FLUID HEATERS, e.g. WATER OR AIR HEATERS, HAVING HEAT-GENERATING MEANS, e.g. HEAT PUMPS, IN GENERAL
    • F24H15/00—Control of fluid heaters
    • F24H15/30—Control of fluid heaters characterised by control outputs; characterised by the components to be controlled
    • F24H15/355—Control of heat-generating means in heaters
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F28—HEAT EXCHANGE IN GENERAL
    • F28F—DETAILS OF HEAT-EXCHANGE AND HEAT-TRANSFER APPARATUS, OF GENERAL APPLICATION
    • F28F2240/00—Spacing means
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F28—HEAT EXCHANGE IN GENERAL
    • F28F—DETAILS OF HEAT-EXCHANGE AND HEAT-TRANSFER APPARATUS, OF GENERAL APPLICATION
    • F28F2275/00—Fastening; Joining
    • F28F2275/06—Fastening; Joining by welding
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F28—HEAT EXCHANGE IN GENERAL
    • F28F—DETAILS OF HEAT-EXCHANGE AND HEAT-TRANSFER APPARATUS, OF GENERAL APPLICATION
    • F28F27/00—Control arrangements or safety devices specially adapted for heat-exchange or heat-transfer apparatus
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67098—Apparatus for thermal treatment

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Thermal Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • General Physics & Mathematics (AREA)
  • Automation & Control Theory (AREA)
  • Cooling Or The Like Of Electrical Apparatus (AREA)
  • Heat-Exchange Devices With Radiators And Conduit Assemblies (AREA)
  • Devices That Are Associated With Refrigeration Equipment (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
JP2019070764A 2019-04-02 2019-04-02 温調装置 Active JP7314462B2 (ja)

Priority Applications (7)

Application Number Priority Date Filing Date Title
JP2019070764A JP7314462B2 (ja) 2019-04-02 2019-04-02 温調装置
EP20162815.3A EP3720244B1 (en) 2019-04-02 2020-03-12 Temperature control apparatus
TW109109194A TWI840534B (zh) 2019-04-02 2020-03-19 調溫裝置
KR1020200037346A KR20200116858A (ko) 2019-04-02 2020-03-27 온도 조절 장치
CN202010240431.0A CN111795502A (zh) 2019-04-02 2020-03-31 调温装置
CN202411698225.9A CN119289519A (zh) 2019-04-02 2020-03-31 调温装置
US16/837,082 US12092371B2 (en) 2019-04-02 2020-04-01 Temperature control apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2019070764A JP7314462B2 (ja) 2019-04-02 2019-04-02 温調装置

Publications (3)

Publication Number Publication Date
JP2020169760A JP2020169760A (ja) 2020-10-15
JP2020169760A5 JP2020169760A5 (enExample) 2022-01-20
JP7314462B2 true JP7314462B2 (ja) 2023-07-26

Family

ID=69810709

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2019070764A Active JP7314462B2 (ja) 2019-04-02 2019-04-02 温調装置

Country Status (6)

Country Link
US (1) US12092371B2 (enExample)
EP (1) EP3720244B1 (enExample)
JP (1) JP7314462B2 (enExample)
KR (1) KR20200116858A (enExample)
CN (2) CN111795502A (enExample)
TW (1) TWI840534B (enExample)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI754574B (zh) * 2021-04-07 2022-02-01 芯巧科技股份有限公司 能根據水流資訊以調整液體溫度的方法
JP2022166632A (ja) * 2021-04-21 2022-11-02 Smc株式会社 温調装置
US12359883B2 (en) 2021-06-04 2025-07-15 Jeffrey A. Wilmer Methods and systems for a heat exchanger
US20230247795A1 (en) 2022-01-28 2023-08-03 The Research Foundation For The State University Of New York Regenerative preheater for phase change cooling applications
JP2024004185A (ja) * 2022-06-28 2024-01-16 Smc株式会社 温調装置
JP2024145807A (ja) * 2023-03-31 2024-10-15 Smc株式会社 温調装置
US20240392776A1 (en) * 2023-05-26 2024-11-28 Hamilton Sundstrand Corporation Fluid pump systems
US12188727B1 (en) * 2023-11-15 2025-01-07 Ci Systems (Israel) Ltd. Systems and methods for verification and calibration using known reference chemical solutions
CN117433327B (zh) * 2023-12-20 2024-03-08 宝鸡宏顺达钛业有限公司 一种列管式冷凝器
CN118776351B (zh) * 2024-07-25 2025-01-28 南通曙光机电工程有限公司 一种内嵌多孔射流结构的高压可控温套管式换热器

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JP2002168551A (ja) 2000-11-30 2002-06-14 Tokyo Electron Ltd 処理装置の電極用冷却装置
JP2007100967A (ja) 2005-09-30 2007-04-19 Daikin Ind Ltd 冷凍装置
JP2011501429A (ja) 2007-10-18 2011-01-06 グローバル スタンダード テクノロジー カンパニー リミテッド 半導体製造装置の温度調節システム
JP2011196581A (ja) 2010-03-17 2011-10-06 Nhk Spring Co Ltd 金属プレートと伝熱管との固定構造
CN203177697U (zh) 2013-04-21 2013-09-04 陈晓峰 冷却罐

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002168551A (ja) 2000-11-30 2002-06-14 Tokyo Electron Ltd 処理装置の電極用冷却装置
JP2007100967A (ja) 2005-09-30 2007-04-19 Daikin Ind Ltd 冷凍装置
JP2011501429A (ja) 2007-10-18 2011-01-06 グローバル スタンダード テクノロジー カンパニー リミテッド 半導体製造装置の温度調節システム
JP2011196581A (ja) 2010-03-17 2011-10-06 Nhk Spring Co Ltd 金属プレートと伝熱管との固定構造
CN203177697U (zh) 2013-04-21 2013-09-04 陈晓峰 冷却罐

Also Published As

Publication number Publication date
EP3720244A1 (en) 2020-10-07
JP2020169760A (ja) 2020-10-15
TWI840534B (zh) 2024-05-01
CN119289519A (zh) 2025-01-10
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