TWI840534B - 調溫裝置 - Google Patents

調溫裝置 Download PDF

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Publication number
TWI840534B
TWI840534B TW109109194A TW109109194A TWI840534B TW I840534 B TWI840534 B TW I840534B TW 109109194 A TW109109194 A TW 109109194A TW 109109194 A TW109109194 A TW 109109194A TW I840534 B TWI840534 B TW I840534B
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TW
Taiwan
Prior art keywords
flow path
aforementioned
temperature
heat exchange
circulating fluid
Prior art date
Application number
TW109109194A
Other languages
English (en)
Chinese (zh)
Other versions
TW202104811A (zh
Inventor
菊地諒
天野達也
徳井春彦
Original Assignee
日商Smc股份有限公司
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Application filed by 日商Smc股份有限公司 filed Critical 日商Smc股份有限公司
Publication of TW202104811A publication Critical patent/TW202104811A/zh
Application granted granted Critical
Publication of TWI840534B publication Critical patent/TWI840534B/zh

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    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25DREFRIGERATORS; COLD ROOMS; ICE-BOXES; COOLING OR FREEZING APPARATUS NOT OTHERWISE PROVIDED FOR
    • F25D31/00Other cooling or freezing apparatus
    • F25D31/005Combined cooling and heating devices
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05BELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B1/00Details of electric heating devices
    • H05B1/02Automatic switching arrangements specially adapted to apparatus ; Control of heating devices
    • H05B1/0227Applications
    • H05B1/023Industrial applications
    • H05B1/0244Heating of fluids
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24HEATING; RANGES; VENTILATING
    • F24HFLUID HEATERS, e.g. WATER OR AIR HEATERS, HAVING HEAT-GENERATING MEANS, e.g. HEAT PUMPS, IN GENERAL
    • F24H7/00Storage heaters, i.e. heaters in which the energy is stored as heat in masses for subsequent release
    • F24H7/02Storage heaters, i.e. heaters in which the energy is stored as heat in masses for subsequent release the released heat being conveyed to a transfer fluid
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16LPIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
    • F16L19/00Joints in which sealing surfaces are pressed together by means of a member, e.g. a swivel nut, screwed on, or into, one of the joint parts
    • F16L19/08Joints in which sealing surfaces are pressed together by means of a member, e.g. a swivel nut, screwed on, or into, one of the joint parts with metal rings which bite into the wall of the pipe
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24HEATING; RANGES; VENTILATING
    • F24HFLUID HEATERS, e.g. WATER OR AIR HEATERS, HAVING HEAT-GENERATING MEANS, e.g. HEAT PUMPS, IN GENERAL
    • F24H15/00Control of fluid heaters
    • F24H15/10Control of fluid heaters characterised by the purpose of the control
    • F24H15/174Supplying heated water with desired temperature or desired range of temperature
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24HEATING; RANGES; VENTILATING
    • F24HFLUID HEATERS, e.g. WATER OR AIR HEATERS, HAVING HEAT-GENERATING MEANS, e.g. HEAT PUMPS, IN GENERAL
    • F24H15/00Control of fluid heaters
    • F24H15/20Control of fluid heaters characterised by control inputs
    • F24H15/212Temperature of the water
    • F24H15/219Temperature of the water after heating
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24HEATING; RANGES; VENTILATING
    • F24HFLUID HEATERS, e.g. WATER OR AIR HEATERS, HAVING HEAT-GENERATING MEANS, e.g. HEAT PUMPS, IN GENERAL
    • F24H15/00Control of fluid heaters
    • F24H15/30Control of fluid heaters characterised by control outputs; characterised by the components to be controlled
    • F24H15/335Control of pumps, e.g. on-off control
    • F24H15/34Control of the speed of pumps
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24HEATING; RANGES; VENTILATING
    • F24HFLUID HEATERS, e.g. WATER OR AIR HEATERS, HAVING HEAT-GENERATING MEANS, e.g. HEAT PUMPS, IN GENERAL
    • F24H9/00Details
    • F24H9/12Arrangements for connecting heaters to circulation pipes
    • F24H9/13Arrangements for connecting heaters to circulation pipes for water heaters
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24HEATING; RANGES; VENTILATING
    • F24HFLUID HEATERS, e.g. WATER OR AIR HEATERS, HAVING HEAT-GENERATING MEANS, e.g. HEAT PUMPS, IN GENERAL
    • F24H9/00Details
    • F24H9/20Arrangement or mounting of control or safety devices
    • F24H9/2007Arrangement or mounting of control or safety devices for water heaters
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25DREFRIGERATORS; COLD ROOMS; ICE-BOXES; COOLING OR FREEZING APPARATUS NOT OTHERWISE PROVIDED FOR
    • F25D17/00Arrangements for circulating cooling fluids; Arrangements for circulating gas, e.g. air, within refrigerated spaces
    • F25D17/02Arrangements for circulating cooling fluids; Arrangements for circulating gas, e.g. air, within refrigerated spaces for circulating liquids, e.g. brine
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25DREFRIGERATORS; COLD ROOMS; ICE-BOXES; COOLING OR FREEZING APPARATUS NOT OTHERWISE PROVIDED FOR
    • F25D29/00Arrangement or mounting of control or safety devices
    • F25D29/005Mounting of control devices
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F28HEAT EXCHANGE IN GENERAL
    • F28DHEAT-EXCHANGE APPARATUS, NOT PROVIDED FOR IN ANOTHER SUBCLASS, IN WHICH THE HEAT-EXCHANGE MEDIA DO NOT COME INTO DIRECT CONTACT
    • F28D7/00Heat-exchange apparatus having stationary tubular conduit assemblies for both heat-exchange media, the media being in contact with different sides of a conduit wall
    • F28D7/02Heat-exchange apparatus having stationary tubular conduit assemblies for both heat-exchange media, the media being in contact with different sides of a conduit wall the conduits being helically coiled
    • F28D7/024Heat-exchange apparatus having stationary tubular conduit assemblies for both heat-exchange media, the media being in contact with different sides of a conduit wall the conduits being helically coiled the conduits of only one medium being helically coiled tubes, the coils having a cylindrical configuration
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F28HEAT EXCHANGE IN GENERAL
    • F28DHEAT-EXCHANGE APPARATUS, NOT PROVIDED FOR IN ANOTHER SUBCLASS, IN WHICH THE HEAT-EXCHANGE MEDIA DO NOT COME INTO DIRECT CONTACT
    • F28D7/00Heat-exchange apparatus having stationary tubular conduit assemblies for both heat-exchange media, the media being in contact with different sides of a conduit wall
    • F28D7/10Heat-exchange apparatus having stationary tubular conduit assemblies for both heat-exchange media, the media being in contact with different sides of a conduit wall the conduits being arranged one within the other, e.g. concentrically
    • GPHYSICS
    • G05CONTROLLING; REGULATING
    • G05DSYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D23/00Control of temperature
    • GPHYSICS
    • G05CONTROLLING; REGULATING
    • G05DSYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D23/00Control of temperature
    • G05D23/01Control of temperature without auxiliary power
    • G05D23/12Control of temperature without auxiliary power with sensing element responsive to pressure or volume changes in a confined fluid
    • GPHYSICS
    • G05CONTROLLING; REGULATING
    • G05DSYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D23/00Control of temperature
    • G05D23/01Control of temperature without auxiliary power
    • G05D23/13Control of temperature without auxiliary power by varying the mixing ratio of two fluids having different temperatures
    • G05D23/1306Control of temperature without auxiliary power by varying the mixing ratio of two fluids having different temperatures for liquids
    • G05D23/132Control of temperature without auxiliary power by varying the mixing ratio of two fluids having different temperatures for liquids with temperature sensing element
    • GPHYSICS
    • G05CONTROLLING; REGULATING
    • G05DSYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D23/00Control of temperature
    • G05D23/19Control of temperature characterised by the use of electric means
    • G05D23/1919Control of temperature characterised by the use of electric means characterised by the type of controller
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04DNON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00Details, component parts, or accessories
    • F04D29/58Cooling; Heating; Diminishing heat transfer
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24HEATING; RANGES; VENTILATING
    • F24HFLUID HEATERS, e.g. WATER OR AIR HEATERS, HAVING HEAT-GENERATING MEANS, e.g. HEAT PUMPS, IN GENERAL
    • F24H1/00Water heaters, e.g. boilers, continuous-flow heaters or water-storage heaters
    • F24H1/10Continuous-flow heaters, i.e. heaters in which heat is generated only while the water is flowing, e.g. with direct contact of the water with the heating medium
    • F24H1/12Continuous-flow heaters, i.e. heaters in which heat is generated only while the water is flowing, e.g. with direct contact of the water with the heating medium in which the water is kept separate from the heating medium
    • F24H1/14Continuous-flow heaters, i.e. heaters in which heat is generated only while the water is flowing, e.g. with direct contact of the water with the heating medium in which the water is kept separate from the heating medium by tubes, e.g. bent in serpentine form
    • F24H1/16Continuous-flow heaters, i.e. heaters in which heat is generated only while the water is flowing, e.g. with direct contact of the water with the heating medium in which the water is kept separate from the heating medium by tubes, e.g. bent in serpentine form helically or spirally coiled
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24HEATING; RANGES; VENTILATING
    • F24HFLUID HEATERS, e.g. WATER OR AIR HEATERS, HAVING HEAT-GENERATING MEANS, e.g. HEAT PUMPS, IN GENERAL
    • F24H15/00Control of fluid heaters
    • F24H15/10Control of fluid heaters characterised by the purpose of the control
    • F24H15/12Preventing or detecting fluid leakage
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24HEATING; RANGES; VENTILATING
    • F24HFLUID HEATERS, e.g. WATER OR AIR HEATERS, HAVING HEAT-GENERATING MEANS, e.g. HEAT PUMPS, IN GENERAL
    • F24H15/00Control of fluid heaters
    • F24H15/10Control of fluid heaters characterised by the purpose of the control
    • F24H15/128Preventing overheating
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24HEATING; RANGES; VENTILATING
    • F24HFLUID HEATERS, e.g. WATER OR AIR HEATERS, HAVING HEAT-GENERATING MEANS, e.g. HEAT PUMPS, IN GENERAL
    • F24H15/00Control of fluid heaters
    • F24H15/20Control of fluid heaters characterised by control inputs
    • F24H15/212Temperature of the water
    • F24H15/223Temperature of the water in the water storage tank
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24HEATING; RANGES; VENTILATING
    • F24HFLUID HEATERS, e.g. WATER OR AIR HEATERS, HAVING HEAT-GENERATING MEANS, e.g. HEAT PUMPS, IN GENERAL
    • F24H15/00Control of fluid heaters
    • F24H15/20Control of fluid heaters characterised by control inputs
    • F24H15/242Pressure
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24HEATING; RANGES; VENTILATING
    • F24HFLUID HEATERS, e.g. WATER OR AIR HEATERS, HAVING HEAT-GENERATING MEANS, e.g. HEAT PUMPS, IN GENERAL
    • F24H15/00Control of fluid heaters
    • F24H15/20Control of fluid heaters characterised by control inputs
    • F24H15/246Water level
    • F24H15/248Water level of water storage tanks
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24HEATING; RANGES; VENTILATING
    • F24HFLUID HEATERS, e.g. WATER OR AIR HEATERS, HAVING HEAT-GENERATING MEANS, e.g. HEAT PUMPS, IN GENERAL
    • F24H15/00Control of fluid heaters
    • F24H15/30Control of fluid heaters characterised by control outputs; characterised by the components to be controlled
    • F24H15/355Control of heat-generating means in heaters
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F28HEAT EXCHANGE IN GENERAL
    • F28FDETAILS OF HEAT-EXCHANGE AND HEAT-TRANSFER APPARATUS, OF GENERAL APPLICATION
    • F28F2240/00Spacing means
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F28HEAT EXCHANGE IN GENERAL
    • F28FDETAILS OF HEAT-EXCHANGE AND HEAT-TRANSFER APPARATUS, OF GENERAL APPLICATION
    • F28F2275/00Fastening; Joining
    • F28F2275/06Fastening; Joining by welding
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F28HEAT EXCHANGE IN GENERAL
    • F28FDETAILS OF HEAT-EXCHANGE AND HEAT-TRANSFER APPARATUS, OF GENERAL APPLICATION
    • F28F27/00Control arrangements or safety devices specially adapted for heat-exchange or heat-transfer apparatus
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005Apparatus not specifically provided for elsewhere
    • H01L21/67011Apparatus for manufacture or treatment
    • H01L21/67098Apparatus for thermal treatment

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Thermal Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • General Physics & Mathematics (AREA)
  • Automation & Control Theory (AREA)
  • Cooling Or The Like Of Electrical Apparatus (AREA)
  • Heat-Exchange Devices With Radiators And Conduit Assemblies (AREA)
  • Devices That Are Associated With Refrigeration Equipment (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
TW109109194A 2019-04-02 2020-03-19 調溫裝置 TWI840534B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2019070764A JP7314462B2 (ja) 2019-04-02 2019-04-02 温調装置
JP2019-070764 2019-04-02

Publications (2)

Publication Number Publication Date
TW202104811A TW202104811A (zh) 2021-02-01
TWI840534B true TWI840534B (zh) 2024-05-01

Family

ID=69810709

Family Applications (1)

Application Number Title Priority Date Filing Date
TW109109194A TWI840534B (zh) 2019-04-02 2020-03-19 調溫裝置

Country Status (6)

Country Link
US (1) US12092371B2 (enExample)
EP (1) EP3720244B1 (enExample)
JP (1) JP7314462B2 (enExample)
KR (1) KR20200116858A (enExample)
CN (2) CN111795502A (enExample)
TW (1) TWI840534B (enExample)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI754574B (zh) * 2021-04-07 2022-02-01 芯巧科技股份有限公司 能根據水流資訊以調整液體溫度的方法
JP2022166632A (ja) * 2021-04-21 2022-11-02 Smc株式会社 温調装置
US12359883B2 (en) 2021-06-04 2025-07-15 Jeffrey A. Wilmer Methods and systems for a heat exchanger
US20230247795A1 (en) 2022-01-28 2023-08-03 The Research Foundation For The State University Of New York Regenerative preheater for phase change cooling applications
JP2024004185A (ja) * 2022-06-28 2024-01-16 Smc株式会社 温調装置
JP2024145807A (ja) * 2023-03-31 2024-10-15 Smc株式会社 温調装置
US20240392776A1 (en) * 2023-05-26 2024-11-28 Hamilton Sundstrand Corporation Fluid pump systems
US12188727B1 (en) * 2023-11-15 2025-01-07 Ci Systems (Israel) Ltd. Systems and methods for verification and calibration using known reference chemical solutions
CN117433327B (zh) * 2023-12-20 2024-03-08 宝鸡宏顺达钛业有限公司 一种列管式冷凝器
CN118776351B (zh) * 2024-07-25 2025-01-28 南通曙光机电工程有限公司 一种内嵌多孔射流结构的高压可控温套管式换热器

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6076597A (en) * 1997-12-31 2000-06-20 Flowserve Management Company Helical coil heat exchanger with removable end plates
JP2002168551A (ja) * 2000-11-30 2002-06-14 Tokyo Electron Ltd 処理装置の電極用冷却装置
JP2011501429A (ja) * 2007-10-18 2011-01-06 グローバル スタンダード テクノロジー カンパニー リミテッド 半導体製造装置の温度調節システム
CN203177697U (zh) * 2013-04-21 2013-09-04 陈晓峰 冷却罐
CN206073496U (zh) * 2016-09-23 2017-04-05 张怀 一种水冷却半导体散热器

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WO1986005578A1 (en) * 1985-03-22 1986-09-25 Keith Stuart Mclaren Heat exchanger
JPH0684852B2 (ja) * 1986-01-20 1994-10-26 株式会社東芝 極低温冷凍機
US5309987A (en) * 1992-07-21 1994-05-10 Astec Method and apparatus for heating and cooling food products during processing
CN2144289Y (zh) * 1993-01-14 1993-10-20 成增勋 螺旋换热管热交换器
CN2221199Y (zh) * 1994-09-29 1996-02-28 荣成市自动车厂 管式换热器
CN2404087Y (zh) * 2000-01-26 2000-11-01 淮阴辉煌太阳能有限公司 装配式螺旋套管热交换器
JP4157394B2 (ja) 2003-02-18 2008-10-01 イノテック株式会社 チラー装置
CN1288411C (zh) * 2003-08-21 2006-12-06 上海交通大学 海水淡水两用螺旋管式冷凝器
JP2007100967A (ja) * 2005-09-30 2007-04-19 Daikin Ind Ltd 冷凍装置
EP2505951B1 (en) * 2009-11-24 2020-12-23 M Technique Co., Ltd. Heat exchanger
JP5676894B2 (ja) * 2010-03-17 2015-02-25 日本発條株式会社 金属プレートと伝熱管との固定構造
CN203203433U (zh) * 2013-02-20 2013-09-18 上海光建传动控制设备有限公司 切向双进液换热器
JP6129760B2 (ja) 2014-02-07 2017-05-17 伸和コントロールズ株式会社 温調装置
CN206683426U (zh) * 2017-04-25 2017-11-28 南京医科大学第一附属医院 多内管蛇形换热管
CA3081814A1 (en) * 2017-11-06 2019-05-09 Zuta-Core Ltd. Systems and methods for heat exchange

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6076597A (en) * 1997-12-31 2000-06-20 Flowserve Management Company Helical coil heat exchanger with removable end plates
JP2002168551A (ja) * 2000-11-30 2002-06-14 Tokyo Electron Ltd 処理装置の電極用冷却装置
JP2011501429A (ja) * 2007-10-18 2011-01-06 グローバル スタンダード テクノロジー カンパニー リミテッド 半導体製造装置の温度調節システム
CN203177697U (zh) * 2013-04-21 2013-09-04 陈晓峰 冷却罐
CN206073496U (zh) * 2016-09-23 2017-04-05 张怀 一种水冷却半导体散热器

Also Published As

Publication number Publication date
EP3720244A1 (en) 2020-10-07
JP2020169760A (ja) 2020-10-15
JP7314462B2 (ja) 2023-07-26
CN119289519A (zh) 2025-01-10
TW202104811A (zh) 2021-02-01
US20200318861A1 (en) 2020-10-08
US12092371B2 (en) 2024-09-17
CN111795502A (zh) 2020-10-20
EP3720244B1 (en) 2021-11-24
KR20200116858A (ko) 2020-10-13

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