TWI840534B - 調溫裝置 - Google Patents
調溫裝置 Download PDFInfo
- Publication number
- TWI840534B TWI840534B TW109109194A TW109109194A TWI840534B TW I840534 B TWI840534 B TW I840534B TW 109109194 A TW109109194 A TW 109109194A TW 109109194 A TW109109194 A TW 109109194A TW I840534 B TWI840534 B TW I840534B
- Authority
- TW
- Taiwan
- Prior art keywords
- flow path
- aforementioned
- temperature
- heat exchange
- circulating fluid
- Prior art date
Links
- 239000012530 fluid Substances 0.000 claims abstract description 179
- 238000001816 cooling Methods 0.000 claims abstract description 87
- 238000003466 welding Methods 0.000 claims abstract description 19
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 108
- 239000007788 liquid Substances 0.000 claims description 69
- 239000000110 cooling liquid Substances 0.000 claims description 66
- 238000007789 sealing Methods 0.000 claims description 49
- 239000002826 coolant Substances 0.000 claims description 38
- 239000002184 metal Substances 0.000 claims description 22
- 229910052751 metal Inorganic materials 0.000 claims description 22
- 230000001105 regulatory effect Effects 0.000 claims description 11
- 238000009835 boiling Methods 0.000 claims description 9
- 230000001276 controlling effect Effects 0.000 claims description 8
- 230000003247 decreasing effect Effects 0.000 claims description 7
- 230000007423 decrease Effects 0.000 claims description 3
- 238000010438 heat treatment Methods 0.000 claims description 3
- 238000005259 measurement Methods 0.000 claims description 3
- 239000000498 cooling water Substances 0.000 abstract 1
- 238000005192 partition Methods 0.000 description 11
- 239000012809 cooling fluid Substances 0.000 description 10
- 238000009434 installation Methods 0.000 description 4
- 101001121408 Homo sapiens L-amino-acid oxidase Proteins 0.000 description 3
- 102100026388 L-amino-acid oxidase Human genes 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 238000007654 immersion Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 230000020169 heat generation Effects 0.000 description 2
- 238000002347 injection Methods 0.000 description 2
- 239000007924 injection Substances 0.000 description 2
- 239000007769 metal material Substances 0.000 description 2
- 230000001737 promoting effect Effects 0.000 description 2
- 229910001220 stainless steel Inorganic materials 0.000 description 2
- 239000010935 stainless steel Substances 0.000 description 2
- 238000011144 upstream manufacturing Methods 0.000 description 2
- 101000827703 Homo sapiens Polyphosphoinositide phosphatase Proteins 0.000 description 1
- 102100023591 Polyphosphoinositide phosphatase Human genes 0.000 description 1
- 230000005856 abnormality Effects 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- -1 for example Substances 0.000 description 1
- 239000008235 industrial water Substances 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 230000000284 resting effect Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Images
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25D—REFRIGERATORS; COLD ROOMS; ICE-BOXES; COOLING OR FREEZING APPARATUS NOT OTHERWISE PROVIDED FOR
- F25D31/00—Other cooling or freezing apparatus
- F25D31/005—Combined cooling and heating devices
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B1/00—Details of electric heating devices
- H05B1/02—Automatic switching arrangements specially adapted to apparatus ; Control of heating devices
- H05B1/0227—Applications
- H05B1/023—Industrial applications
- H05B1/0244—Heating of fluids
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24H—FLUID HEATERS, e.g. WATER OR AIR HEATERS, HAVING HEAT-GENERATING MEANS, e.g. HEAT PUMPS, IN GENERAL
- F24H7/00—Storage heaters, i.e. heaters in which the energy is stored as heat in masses for subsequent release
- F24H7/02—Storage heaters, i.e. heaters in which the energy is stored as heat in masses for subsequent release the released heat being conveyed to a transfer fluid
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16L—PIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
- F16L19/00—Joints in which sealing surfaces are pressed together by means of a member, e.g. a swivel nut, screwed on, or into, one of the joint parts
- F16L19/08—Joints in which sealing surfaces are pressed together by means of a member, e.g. a swivel nut, screwed on, or into, one of the joint parts with metal rings which bite into the wall of the pipe
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24H—FLUID HEATERS, e.g. WATER OR AIR HEATERS, HAVING HEAT-GENERATING MEANS, e.g. HEAT PUMPS, IN GENERAL
- F24H15/00—Control of fluid heaters
- F24H15/10—Control of fluid heaters characterised by the purpose of the control
- F24H15/174—Supplying heated water with desired temperature or desired range of temperature
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24H—FLUID HEATERS, e.g. WATER OR AIR HEATERS, HAVING HEAT-GENERATING MEANS, e.g. HEAT PUMPS, IN GENERAL
- F24H15/00—Control of fluid heaters
- F24H15/20—Control of fluid heaters characterised by control inputs
- F24H15/212—Temperature of the water
- F24H15/219—Temperature of the water after heating
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24H—FLUID HEATERS, e.g. WATER OR AIR HEATERS, HAVING HEAT-GENERATING MEANS, e.g. HEAT PUMPS, IN GENERAL
- F24H15/00—Control of fluid heaters
- F24H15/30—Control of fluid heaters characterised by control outputs; characterised by the components to be controlled
- F24H15/335—Control of pumps, e.g. on-off control
- F24H15/34—Control of the speed of pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24H—FLUID HEATERS, e.g. WATER OR AIR HEATERS, HAVING HEAT-GENERATING MEANS, e.g. HEAT PUMPS, IN GENERAL
- F24H9/00—Details
- F24H9/12—Arrangements for connecting heaters to circulation pipes
- F24H9/13—Arrangements for connecting heaters to circulation pipes for water heaters
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24H—FLUID HEATERS, e.g. WATER OR AIR HEATERS, HAVING HEAT-GENERATING MEANS, e.g. HEAT PUMPS, IN GENERAL
- F24H9/00—Details
- F24H9/20—Arrangement or mounting of control or safety devices
- F24H9/2007—Arrangement or mounting of control or safety devices for water heaters
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25D—REFRIGERATORS; COLD ROOMS; ICE-BOXES; COOLING OR FREEZING APPARATUS NOT OTHERWISE PROVIDED FOR
- F25D17/00—Arrangements for circulating cooling fluids; Arrangements for circulating gas, e.g. air, within refrigerated spaces
- F25D17/02—Arrangements for circulating cooling fluids; Arrangements for circulating gas, e.g. air, within refrigerated spaces for circulating liquids, e.g. brine
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25D—REFRIGERATORS; COLD ROOMS; ICE-BOXES; COOLING OR FREEZING APPARATUS NOT OTHERWISE PROVIDED FOR
- F25D29/00—Arrangement or mounting of control or safety devices
- F25D29/005—Mounting of control devices
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F28—HEAT EXCHANGE IN GENERAL
- F28D—HEAT-EXCHANGE APPARATUS, NOT PROVIDED FOR IN ANOTHER SUBCLASS, IN WHICH THE HEAT-EXCHANGE MEDIA DO NOT COME INTO DIRECT CONTACT
- F28D7/00—Heat-exchange apparatus having stationary tubular conduit assemblies for both heat-exchange media, the media being in contact with different sides of a conduit wall
- F28D7/02—Heat-exchange apparatus having stationary tubular conduit assemblies for both heat-exchange media, the media being in contact with different sides of a conduit wall the conduits being helically coiled
- F28D7/024—Heat-exchange apparatus having stationary tubular conduit assemblies for both heat-exchange media, the media being in contact with different sides of a conduit wall the conduits being helically coiled the conduits of only one medium being helically coiled tubes, the coils having a cylindrical configuration
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F28—HEAT EXCHANGE IN GENERAL
- F28D—HEAT-EXCHANGE APPARATUS, NOT PROVIDED FOR IN ANOTHER SUBCLASS, IN WHICH THE HEAT-EXCHANGE MEDIA DO NOT COME INTO DIRECT CONTACT
- F28D7/00—Heat-exchange apparatus having stationary tubular conduit assemblies for both heat-exchange media, the media being in contact with different sides of a conduit wall
- F28D7/10—Heat-exchange apparatus having stationary tubular conduit assemblies for both heat-exchange media, the media being in contact with different sides of a conduit wall the conduits being arranged one within the other, e.g. concentrically
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D23/00—Control of temperature
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D23/00—Control of temperature
- G05D23/01—Control of temperature without auxiliary power
- G05D23/12—Control of temperature without auxiliary power with sensing element responsive to pressure or volume changes in a confined fluid
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D23/00—Control of temperature
- G05D23/01—Control of temperature without auxiliary power
- G05D23/13—Control of temperature without auxiliary power by varying the mixing ratio of two fluids having different temperatures
- G05D23/1306—Control of temperature without auxiliary power by varying the mixing ratio of two fluids having different temperatures for liquids
- G05D23/132—Control of temperature without auxiliary power by varying the mixing ratio of two fluids having different temperatures for liquids with temperature sensing element
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D23/00—Control of temperature
- G05D23/19—Control of temperature characterised by the use of electric means
- G05D23/1919—Control of temperature characterised by the use of electric means characterised by the type of controller
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/58—Cooling; Heating; Diminishing heat transfer
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24H—FLUID HEATERS, e.g. WATER OR AIR HEATERS, HAVING HEAT-GENERATING MEANS, e.g. HEAT PUMPS, IN GENERAL
- F24H1/00—Water heaters, e.g. boilers, continuous-flow heaters or water-storage heaters
- F24H1/10—Continuous-flow heaters, i.e. heaters in which heat is generated only while the water is flowing, e.g. with direct contact of the water with the heating medium
- F24H1/12—Continuous-flow heaters, i.e. heaters in which heat is generated only while the water is flowing, e.g. with direct contact of the water with the heating medium in which the water is kept separate from the heating medium
- F24H1/14—Continuous-flow heaters, i.e. heaters in which heat is generated only while the water is flowing, e.g. with direct contact of the water with the heating medium in which the water is kept separate from the heating medium by tubes, e.g. bent in serpentine form
- F24H1/16—Continuous-flow heaters, i.e. heaters in which heat is generated only while the water is flowing, e.g. with direct contact of the water with the heating medium in which the water is kept separate from the heating medium by tubes, e.g. bent in serpentine form helically or spirally coiled
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24H—FLUID HEATERS, e.g. WATER OR AIR HEATERS, HAVING HEAT-GENERATING MEANS, e.g. HEAT PUMPS, IN GENERAL
- F24H15/00—Control of fluid heaters
- F24H15/10—Control of fluid heaters characterised by the purpose of the control
- F24H15/12—Preventing or detecting fluid leakage
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24H—FLUID HEATERS, e.g. WATER OR AIR HEATERS, HAVING HEAT-GENERATING MEANS, e.g. HEAT PUMPS, IN GENERAL
- F24H15/00—Control of fluid heaters
- F24H15/10—Control of fluid heaters characterised by the purpose of the control
- F24H15/128—Preventing overheating
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24H—FLUID HEATERS, e.g. WATER OR AIR HEATERS, HAVING HEAT-GENERATING MEANS, e.g. HEAT PUMPS, IN GENERAL
- F24H15/00—Control of fluid heaters
- F24H15/20—Control of fluid heaters characterised by control inputs
- F24H15/212—Temperature of the water
- F24H15/223—Temperature of the water in the water storage tank
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24H—FLUID HEATERS, e.g. WATER OR AIR HEATERS, HAVING HEAT-GENERATING MEANS, e.g. HEAT PUMPS, IN GENERAL
- F24H15/00—Control of fluid heaters
- F24H15/20—Control of fluid heaters characterised by control inputs
- F24H15/242—Pressure
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24H—FLUID HEATERS, e.g. WATER OR AIR HEATERS, HAVING HEAT-GENERATING MEANS, e.g. HEAT PUMPS, IN GENERAL
- F24H15/00—Control of fluid heaters
- F24H15/20—Control of fluid heaters characterised by control inputs
- F24H15/246—Water level
- F24H15/248—Water level of water storage tanks
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24H—FLUID HEATERS, e.g. WATER OR AIR HEATERS, HAVING HEAT-GENERATING MEANS, e.g. HEAT PUMPS, IN GENERAL
- F24H15/00—Control of fluid heaters
- F24H15/30—Control of fluid heaters characterised by control outputs; characterised by the components to be controlled
- F24H15/355—Control of heat-generating means in heaters
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F28—HEAT EXCHANGE IN GENERAL
- F28F—DETAILS OF HEAT-EXCHANGE AND HEAT-TRANSFER APPARATUS, OF GENERAL APPLICATION
- F28F2240/00—Spacing means
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F28—HEAT EXCHANGE IN GENERAL
- F28F—DETAILS OF HEAT-EXCHANGE AND HEAT-TRANSFER APPARATUS, OF GENERAL APPLICATION
- F28F2275/00—Fastening; Joining
- F28F2275/06—Fastening; Joining by welding
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F28—HEAT EXCHANGE IN GENERAL
- F28F—DETAILS OF HEAT-EXCHANGE AND HEAT-TRANSFER APPARATUS, OF GENERAL APPLICATION
- F28F27/00—Control arrangements or safety devices specially adapted for heat-exchange or heat-transfer apparatus
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67098—Apparatus for thermal treatment
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Thermal Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Combustion & Propulsion (AREA)
- General Physics & Mathematics (AREA)
- Automation & Control Theory (AREA)
- Cooling Or The Like Of Electrical Apparatus (AREA)
- Heat-Exchange Devices With Radiators And Conduit Assemblies (AREA)
- Devices That Are Associated With Refrigeration Equipment (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2019070764A JP7314462B2 (ja) | 2019-04-02 | 2019-04-02 | 温調装置 |
| JP2019-070764 | 2019-04-02 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW202104811A TW202104811A (zh) | 2021-02-01 |
| TWI840534B true TWI840534B (zh) | 2024-05-01 |
Family
ID=69810709
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW109109194A TWI840534B (zh) | 2019-04-02 | 2020-03-19 | 調溫裝置 |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US12092371B2 (enExample) |
| EP (1) | EP3720244B1 (enExample) |
| JP (1) | JP7314462B2 (enExample) |
| KR (1) | KR20200116858A (enExample) |
| CN (2) | CN111795502A (enExample) |
| TW (1) | TWI840534B (enExample) |
Families Citing this family (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI754574B (zh) * | 2021-04-07 | 2022-02-01 | 芯巧科技股份有限公司 | 能根據水流資訊以調整液體溫度的方法 |
| JP2022166632A (ja) * | 2021-04-21 | 2022-11-02 | Smc株式会社 | 温調装置 |
| US12359883B2 (en) | 2021-06-04 | 2025-07-15 | Jeffrey A. Wilmer | Methods and systems for a heat exchanger |
| US20230247795A1 (en) | 2022-01-28 | 2023-08-03 | The Research Foundation For The State University Of New York | Regenerative preheater for phase change cooling applications |
| JP2024004185A (ja) * | 2022-06-28 | 2024-01-16 | Smc株式会社 | 温調装置 |
| JP2024145807A (ja) * | 2023-03-31 | 2024-10-15 | Smc株式会社 | 温調装置 |
| US20240392776A1 (en) * | 2023-05-26 | 2024-11-28 | Hamilton Sundstrand Corporation | Fluid pump systems |
| US12188727B1 (en) * | 2023-11-15 | 2025-01-07 | Ci Systems (Israel) Ltd. | Systems and methods for verification and calibration using known reference chemical solutions |
| CN117433327B (zh) * | 2023-12-20 | 2024-03-08 | 宝鸡宏顺达钛业有限公司 | 一种列管式冷凝器 |
| CN118776351B (zh) * | 2024-07-25 | 2025-01-28 | 南通曙光机电工程有限公司 | 一种内嵌多孔射流结构的高压可控温套管式换热器 |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6076597A (en) * | 1997-12-31 | 2000-06-20 | Flowserve Management Company | Helical coil heat exchanger with removable end plates |
| JP2002168551A (ja) * | 2000-11-30 | 2002-06-14 | Tokyo Electron Ltd | 処理装置の電極用冷却装置 |
| JP2011501429A (ja) * | 2007-10-18 | 2011-01-06 | グローバル スタンダード テクノロジー カンパニー リミテッド | 半導体製造装置の温度調節システム |
| CN203177697U (zh) * | 2013-04-21 | 2013-09-04 | 陈晓峰 | 冷却罐 |
| CN206073496U (zh) * | 2016-09-23 | 2017-04-05 | 张怀 | 一种水冷却半导体散热器 |
Family Cites Families (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1986005578A1 (en) * | 1985-03-22 | 1986-09-25 | Keith Stuart Mclaren | Heat exchanger |
| JPH0684852B2 (ja) * | 1986-01-20 | 1994-10-26 | 株式会社東芝 | 極低温冷凍機 |
| US5309987A (en) * | 1992-07-21 | 1994-05-10 | Astec | Method and apparatus for heating and cooling food products during processing |
| CN2144289Y (zh) * | 1993-01-14 | 1993-10-20 | 成增勋 | 螺旋换热管热交换器 |
| CN2221199Y (zh) * | 1994-09-29 | 1996-02-28 | 荣成市自动车厂 | 管式换热器 |
| CN2404087Y (zh) * | 2000-01-26 | 2000-11-01 | 淮阴辉煌太阳能有限公司 | 装配式螺旋套管热交换器 |
| JP4157394B2 (ja) | 2003-02-18 | 2008-10-01 | イノテック株式会社 | チラー装置 |
| CN1288411C (zh) * | 2003-08-21 | 2006-12-06 | 上海交通大学 | 海水淡水两用螺旋管式冷凝器 |
| JP2007100967A (ja) * | 2005-09-30 | 2007-04-19 | Daikin Ind Ltd | 冷凍装置 |
| EP2505951B1 (en) * | 2009-11-24 | 2020-12-23 | M Technique Co., Ltd. | Heat exchanger |
| JP5676894B2 (ja) * | 2010-03-17 | 2015-02-25 | 日本発條株式会社 | 金属プレートと伝熱管との固定構造 |
| CN203203433U (zh) * | 2013-02-20 | 2013-09-18 | 上海光建传动控制设备有限公司 | 切向双进液换热器 |
| JP6129760B2 (ja) | 2014-02-07 | 2017-05-17 | 伸和コントロールズ株式会社 | 温調装置 |
| CN206683426U (zh) * | 2017-04-25 | 2017-11-28 | 南京医科大学第一附属医院 | 多内管蛇形换热管 |
| CA3081814A1 (en) * | 2017-11-06 | 2019-05-09 | Zuta-Core Ltd. | Systems and methods for heat exchange |
-
2019
- 2019-04-02 JP JP2019070764A patent/JP7314462B2/ja active Active
-
2020
- 2020-03-12 EP EP20162815.3A patent/EP3720244B1/en active Active
- 2020-03-19 TW TW109109194A patent/TWI840534B/zh active
- 2020-03-27 KR KR1020200037346A patent/KR20200116858A/ko active Pending
- 2020-03-31 CN CN202010240431.0A patent/CN111795502A/zh active Pending
- 2020-03-31 CN CN202411698225.9A patent/CN119289519A/zh active Pending
- 2020-04-01 US US16/837,082 patent/US12092371B2/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6076597A (en) * | 1997-12-31 | 2000-06-20 | Flowserve Management Company | Helical coil heat exchanger with removable end plates |
| JP2002168551A (ja) * | 2000-11-30 | 2002-06-14 | Tokyo Electron Ltd | 処理装置の電極用冷却装置 |
| JP2011501429A (ja) * | 2007-10-18 | 2011-01-06 | グローバル スタンダード テクノロジー カンパニー リミテッド | 半導体製造装置の温度調節システム |
| CN203177697U (zh) * | 2013-04-21 | 2013-09-04 | 陈晓峰 | 冷却罐 |
| CN206073496U (zh) * | 2016-09-23 | 2017-04-05 | 张怀 | 一种水冷却半导体散热器 |
Also Published As
| Publication number | Publication date |
|---|---|
| EP3720244A1 (en) | 2020-10-07 |
| JP2020169760A (ja) | 2020-10-15 |
| JP7314462B2 (ja) | 2023-07-26 |
| CN119289519A (zh) | 2025-01-10 |
| TW202104811A (zh) | 2021-02-01 |
| US20200318861A1 (en) | 2020-10-08 |
| US12092371B2 (en) | 2024-09-17 |
| CN111795502A (zh) | 2020-10-20 |
| EP3720244B1 (en) | 2021-11-24 |
| KR20200116858A (ko) | 2020-10-13 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| TWI840534B (zh) | 調溫裝置 | |
| KR101363954B1 (ko) | 액체 순환 공급 장치 | |
| EP3779320B1 (en) | Leakage detection in condensing water heater | |
| JP5997967B2 (ja) | 熱源装置及びその熱源装置を備えた温水暖房設備 | |
| JP5034367B2 (ja) | ヒートポンプ式給湯機 | |
| JP4628995B2 (ja) | エンジン試験用オイル温度調整装置 | |
| JP2010133573A (ja) | 熱媒注入方法 | |
| JP5103040B2 (ja) | 加熱システム | |
| JP2016057019A (ja) | ボイラ装置 | |
| JP3920843B2 (ja) | 給湯器 | |
| CN117308426A (zh) | 温度调节装置 | |
| KR20160117340A (ko) | 급탕시스템 | |
| CN114061309A (zh) | 一种坩埚冷却供水闭式循环系统及其运行方法 | |
| KR102815150B1 (ko) | 유체 가열 장치 | |
| JP2010159963A (ja) | 加熱システム | |
| US20250180248A1 (en) | Heater module and boiler | |
| US20240192711A1 (en) | Temperature adjustment device | |
| CN117476259A (zh) | 一种能力可调节的正压余热排出系统 | |
| JP4602062B2 (ja) | 給湯装置 | |
| KR20250166217A (ko) | 온도 조절 장치 | |
| JP2006010153A (ja) | 給湯装置 | |
| JP2023011477A (ja) | 貯湯式給湯装置 | |
| JP2013242048A (ja) | 省エネ貯留方法及び貯湯式給湯機 | |
| JP2009074796A (ja) | ヒートポンプ給湯器 | |
| JP2008151406A (ja) | 貯湯式給湯装置 |