CN118829843A - 测定探头的保管装置及保管方法 - Google Patents

测定探头的保管装置及保管方法 Download PDF

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Publication number
CN118829843A
CN118829843A CN202280093857.5A CN202280093857A CN118829843A CN 118829843 A CN118829843 A CN 118829843A CN 202280093857 A CN202280093857 A CN 202280093857A CN 118829843 A CN118829843 A CN 118829843A
Authority
CN
China
Prior art keywords
air
probe
measurement
storage
measuring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202280093857.5A
Other languages
English (en)
Chinese (zh)
Inventor
涩谷俊夫
小林一三
舟桥隆宪
久保圭司
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Intellectual Property Management Co Ltd
Original Assignee
Panasonic Intellectual Property Management Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Panasonic Intellectual Property Management Co Ltd filed Critical Panasonic Intellectual Property Management Co Ltd
Publication of CN118829843A publication Critical patent/CN118829843A/zh
Pending legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
    • G01B5/004—Measuring arrangements characterised by the use of mechanical techniques for measuring coordinates of points
    • G01B5/008—Measuring arrangements characterised by the use of mechanical techniques for measuring coordinates of points using coordinate measuring machines
    • G01B5/012—Contact-making feeler heads therefor
    • G01B5/016—Constructional details of contacts
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
    • F16C32/0603—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion
    • F16C32/0614—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion the gas being supplied under pressure, e.g. aerostatic bearings
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
    • G01B5/004—Measuring arrangements characterised by the use of mechanical techniques for measuring coordinates of points
    • G01B5/008—Measuring arrangements characterised by the use of mechanical techniques for measuring coordinates of points using coordinate measuring machines
    • G01B5/012—Contact-making feeler heads therefor

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Mechanical Engineering (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • A Measuring Device Byusing Mechanical Method (AREA)
CN202280093857.5A 2022-03-23 2022-10-27 测定探头的保管装置及保管方法 Pending CN118829843A (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2022-047392 2022-03-23
JP2022047392 2022-03-23
PCT/JP2022/040121 WO2023181474A1 (ja) 2022-03-23 2022-10-27 測定プローブの保管装置および保管方法

Publications (1)

Publication Number Publication Date
CN118829843A true CN118829843A (zh) 2024-10-22

Family

ID=88100435

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202280093857.5A Pending CN118829843A (zh) 2022-03-23 2022-10-27 测定探头的保管装置及保管方法

Country Status (4)

Country Link
US (1) US20240426589A1 (https=)
JP (1) JPWO2023181474A1 (https=)
CN (1) CN118829843A (https=)
WO (1) WO2023181474A1 (https=)

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH043214Y2 (https=) * 1987-07-07 1992-02-03
JP4388304B2 (ja) * 2003-05-16 2009-12-24 オリンパス株式会社 測定装置のパージ機構およびそれを備えた測定装置
JP4485857B2 (ja) * 2004-06-18 2010-06-23 パナソニック株式会社 測定用プローブ
JP2010044043A (ja) * 2008-07-14 2010-02-25 Nikon Corp 保管装置及び同保管装置を備えた計測装置

Also Published As

Publication number Publication date
WO2023181474A1 (ja) 2023-09-28
JPWO2023181474A1 (https=) 2023-09-28
US20240426589A1 (en) 2024-12-26

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