CN117693824A - 碳化硅半导体器件 - Google Patents
碳化硅半导体器件 Download PDFInfo
- Publication number
- CN117693824A CN117693824A CN202280051598.XA CN202280051598A CN117693824A CN 117693824 A CN117693824 A CN 117693824A CN 202280051598 A CN202280051598 A CN 202280051598A CN 117693824 A CN117693824 A CN 117693824A
- Authority
- CN
- China
- Prior art keywords
- region
- gate
- contact hole
- silicon carbide
- semiconductor region
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D62/00—Semiconductor bodies, or regions thereof, of devices having potential barriers
- H10D62/80—Semiconductor bodies, or regions thereof, of devices having potential barriers characterised by the materials
- H10D62/81—Semiconductor bodies, or regions thereof, of devices having potential barriers characterised by the materials of structures exhibiting quantum-confinement effects, e.g. single quantum wells; of structures having periodic or quasi-periodic potential variation
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W20/00—Interconnections in chips, wafers or substrates
- H10W20/40—Interconnections external to wafers or substrates, e.g. back-end-of-line [BEOL] metallisations or vias connecting to gate electrodes
- H10W20/41—Interconnections external to wafers or substrates, e.g. back-end-of-line [BEOL] metallisations or vias connecting to gate electrodes characterised by their conductive parts
- H10W20/427—Power or ground buses
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D30/00—Field-effect transistors [FET]
- H10D30/60—Insulated-gate field-effect transistors [IGFET]
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D62/00—Semiconductor bodies, or regions thereof, of devices having potential barriers
- H10D62/10—Shapes, relative sizes or dispositions of the regions of the semiconductor bodies; Shapes of the semiconductor bodies
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D62/00—Semiconductor bodies, or regions thereof, of devices having potential barriers
- H10D62/10—Shapes, relative sizes or dispositions of the regions of the semiconductor bodies; Shapes of the semiconductor bodies
- H10D62/102—Constructional design considerations for preventing surface leakage or controlling electric field concentration
- H10D62/103—Constructional design considerations for preventing surface leakage or controlling electric field concentration for increasing or controlling the breakdown voltage of reverse-biased devices
- H10D62/105—Constructional design considerations for preventing surface leakage or controlling electric field concentration for increasing or controlling the breakdown voltage of reverse-biased devices by having particular doping profiles, shapes or arrangements of PN junctions; by having supplementary regions, e.g. junction termination extension [JTE]
- H10D62/106—Constructional design considerations for preventing surface leakage or controlling electric field concentration for increasing or controlling the breakdown voltage of reverse-biased devices by having particular doping profiles, shapes or arrangements of PN junctions; by having supplementary regions, e.g. junction termination extension [JTE] having supplementary regions doped oppositely to or in rectifying contact with regions of the semiconductor bodies, e.g. guard rings with PN or Schottky junctions
- H10D62/107—Buried supplementary regions, e.g. buried guard rings
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D64/00—Electrodes of devices having potential barriers
- H10D64/118—Electrodes comprising insulating layers having particular dielectric or electrostatic properties, e.g. having static charges
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D84/00—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
- H10D84/80—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers characterised by the integration of at least one component covered by groups H10D12/00 or H10D30/00, e.g. integration of IGFETs
- H10D84/82—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers characterised by the integration of at least one component covered by groups H10D12/00 or H10D30/00, e.g. integration of IGFETs of only field-effect components
- H10D84/83—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers characterised by the integration of at least one component covered by groups H10D12/00 or H10D30/00, e.g. integration of IGFETs of only field-effect components of only insulated-gate FETs [IGFET]
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D30/00—Field-effect transistors [FET]
- H10D30/60—Insulated-gate field-effect transistors [IGFET]
- H10D30/64—Double-diffused metal-oxide semiconductor [DMOS] FETs
- H10D30/66—Vertical DMOS [VDMOS] FETs
- H10D30/668—Vertical DMOS [VDMOS] FETs having trench gate electrodes, e.g. UMOS transistors
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D62/00—Semiconductor bodies, or regions thereof, of devices having potential barriers
- H10D62/80—Semiconductor bodies, or regions thereof, of devices having potential barriers characterised by the materials
- H10D62/83—Semiconductor bodies, or regions thereof, of devices having potential barriers characterised by the materials being Group IV materials, e.g. B-doped Si or undoped Ge
- H10D62/832—Semiconductor bodies, or regions thereof, of devices having potential barriers characterised by the materials being Group IV materials, e.g. B-doped Si or undoped Ge being Group IV materials comprising two or more elements, e.g. SiGe
- H10D62/8325—Silicon carbide
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D64/00—Electrodes of devices having potential barriers
- H10D64/20—Electrodes characterised by their shapes, relative sizes or dispositions
- H10D64/27—Electrodes not carrying the current to be rectified, amplified, oscillated or switched, e.g. gates
- H10D64/311—Gate electrodes for field-effect devices
- H10D64/411—Gate electrodes for field-effect devices for FETs
- H10D64/511—Gate electrodes for field-effect devices for FETs for IGFETs
- H10D64/512—Disposition of the gate electrodes, e.g. buried gates
- H10D64/513—Disposition of the gate electrodes, e.g. buried gates within recesses in the substrate, e.g. trench gates, groove gates or buried gates
Landscapes
- Electrodes Of Semiconductors (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2021150122 | 2021-09-15 | ||
| JP2021-150122 | 2021-09-15 | ||
| PCT/JP2022/024785 WO2023042508A1 (ja) | 2021-09-15 | 2022-06-21 | 炭化珪素半導体装置 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN117693824A true CN117693824A (zh) | 2024-03-12 |
Family
ID=85602709
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202280051598.XA Pending CN117693824A (zh) | 2021-09-15 | 2022-06-21 | 碳化硅半导体器件 |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US20240371766A1 (https=) |
| JP (1) | JPWO2023042508A1 (https=) |
| CN (1) | CN117693824A (https=) |
| DE (1) | DE112022004385T5 (https=) |
| WO (1) | WO2023042508A1 (https=) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20260038481A (ko) * | 2024-09-12 | 2026-03-19 | 삼성전자주식회사 | 반도체 장치 |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102947934A (zh) * | 2010-06-24 | 2013-02-27 | 三菱电机株式会社 | 功率半导体器件 |
| JP2015095578A (ja) * | 2013-11-13 | 2015-05-18 | 三菱電機株式会社 | 半導体装置及びその製造方法 |
| US20160300943A1 (en) * | 2013-10-04 | 2016-10-13 | Sumitomo Electric Industries, Ltd. | Silicon carbide semiconductor device |
| JP2018182324A (ja) * | 2017-04-13 | 2018-11-15 | インフィネオン テクノロジーズ アーゲーInfineon Technologies Ag | 静電放電保護構造を含む半導体デバイス |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2950569B2 (ja) * | 1990-03-01 | 1999-09-20 | 株式会社東芝 | Mos型電界効果トランジスタ |
| JP5321377B2 (ja) * | 2009-09-11 | 2013-10-23 | 三菱電機株式会社 | 電力用半導体装置 |
| JP6164636B2 (ja) * | 2013-03-05 | 2017-07-19 | ローム株式会社 | 半導体装置 |
| JP6617292B2 (ja) * | 2014-05-23 | 2019-12-11 | パナソニックIpマネジメント株式会社 | 炭化珪素半導体装置 |
| WO2018055719A1 (ja) | 2016-09-23 | 2018-03-29 | 三菱電機株式会社 | 炭化珪素半導体装置 |
| JP2021150122A (ja) | 2020-03-18 | 2021-09-27 | 株式会社リコー | 蓄電素子、電極、及び電極材料 |
| DE112020007341T5 (de) * | 2020-06-24 | 2023-04-06 | Mitsubishi Electric Corporation | Siliciumcarbid-halbleitereinheit |
-
2022
- 2022-06-21 CN CN202280051598.XA patent/CN117693824A/zh active Pending
- 2022-06-21 WO PCT/JP2022/024785 patent/WO2023042508A1/ja not_active Ceased
- 2022-06-21 US US18/293,460 patent/US20240371766A1/en active Pending
- 2022-06-21 JP JP2023548130A patent/JPWO2023042508A1/ja active Pending
- 2022-06-21 DE DE112022004385.7T patent/DE112022004385T5/de active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102947934A (zh) * | 2010-06-24 | 2013-02-27 | 三菱电机株式会社 | 功率半导体器件 |
| US20160300943A1 (en) * | 2013-10-04 | 2016-10-13 | Sumitomo Electric Industries, Ltd. | Silicon carbide semiconductor device |
| JP2015095578A (ja) * | 2013-11-13 | 2015-05-18 | 三菱電機株式会社 | 半導体装置及びその製造方法 |
| JP2018182324A (ja) * | 2017-04-13 | 2018-11-15 | インフィネオン テクノロジーズ アーゲーInfineon Technologies Ag | 静電放電保護構造を含む半導体デバイス |
Also Published As
| Publication number | Publication date |
|---|---|
| WO2023042508A1 (ja) | 2023-03-23 |
| DE112022004385T5 (de) | 2024-06-20 |
| JPWO2023042508A1 (https=) | 2023-03-23 |
| US20240371766A1 (en) | 2024-11-07 |
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| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination |