CN1175533C - 半导体元件及其制造方法 - Google Patents
半导体元件及其制造方法 Download PDFInfo
- Publication number
- CN1175533C CN1175533C CNB001331345A CN00133134A CN1175533C CN 1175533 C CN1175533 C CN 1175533C CN B001331345 A CNB001331345 A CN B001331345A CN 00133134 A CN00133134 A CN 00133134A CN 1175533 C CN1175533 C CN 1175533C
- Authority
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- China
- Prior art keywords
- layer
- algan
- resilient coating
- semiconductor
- current barrier
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
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- 239000004065 semiconductor Substances 0.000 title claims description 238
- 238000004519 manufacturing process Methods 0.000 title claims description 36
- 239000000758 substrate Substances 0.000 claims abstract description 26
- 230000004888 barrier function Effects 0.000 claims description 126
- 239000011248 coating agent Substances 0.000 claims description 104
- 238000000576 coating method Methods 0.000 claims description 104
- 230000012010 growth Effects 0.000 claims description 69
- 238000000034 method Methods 0.000 claims description 45
- 150000004767 nitrides Chemical class 0.000 claims description 31
- 230000015572 biosynthetic process Effects 0.000 claims description 21
- 239000000203 mixture Substances 0.000 claims description 18
- 229910052782 aluminium Inorganic materials 0.000 claims description 11
- 239000004411 aluminium Substances 0.000 claims description 7
- 229910052716 thallium Inorganic materials 0.000 claims description 7
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 6
- 229910052796 boron Inorganic materials 0.000 claims description 6
- 229910052733 gallium Inorganic materials 0.000 claims description 6
- 229910052738 indium Inorganic materials 0.000 claims description 6
- BKVIYDNLLOSFOA-UHFFFAOYSA-N thallium Chemical compound [Tl] BKVIYDNLLOSFOA-UHFFFAOYSA-N 0.000 claims description 3
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 claims description 2
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 claims description 2
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 claims description 2
- 229910002704 AlGaN Inorganic materials 0.000 abstract description 191
- 229910052594 sapphire Inorganic materials 0.000 abstract description 13
- 239000010980 sapphire Substances 0.000 abstract description 13
- 230000000903 blocking effect Effects 0.000 abstract description 3
- 238000005253 cladding Methods 0.000 abstract 4
- 229910002601 GaN Inorganic materials 0.000 description 64
- 208000037656 Respiratory Sounds Diseases 0.000 description 39
- 230000007547 defect Effects 0.000 description 20
- 230000006866 deterioration Effects 0.000 description 17
- 238000002488 metal-organic chemical vapour deposition Methods 0.000 description 12
- 230000007797 corrosion Effects 0.000 description 11
- 238000005260 corrosion Methods 0.000 description 11
- 230000014509 gene expression Effects 0.000 description 10
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 description 7
- 239000008199 coating composition Substances 0.000 description 5
- 238000002425 crystallisation Methods 0.000 description 5
- 230000008025 crystallization Effects 0.000 description 5
- 230000003647 oxidation Effects 0.000 description 5
- 238000007254 oxidation reaction Methods 0.000 description 5
- 239000000956 alloy Substances 0.000 description 4
- 229910045601 alloy Inorganic materials 0.000 description 4
- 238000002347 injection Methods 0.000 description 4
- 239000007924 injection Substances 0.000 description 4
- 238000003776 cleavage reaction Methods 0.000 description 3
- 230000007017 scission Effects 0.000 description 3
- 229910017083 AlN Inorganic materials 0.000 description 2
- PIGFYZPCRLYGLF-UHFFFAOYSA-N Aluminum nitride Chemical compound [Al]#N PIGFYZPCRLYGLF-UHFFFAOYSA-N 0.000 description 2
- 229910052582 BN Inorganic materials 0.000 description 2
- PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 description 2
- NWAIGJYBQQYSPW-UHFFFAOYSA-N azanylidyneindigane Chemical compound [In]#N NWAIGJYBQQYSPW-UHFFFAOYSA-N 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 125000002524 organometallic group Chemical group 0.000 description 2
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 150000001398 aluminium Chemical class 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 238000011084 recovery Methods 0.000 description 1
Images
Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y20/00—Nanooptics, e.g. quantum optics or photonic crystals
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/20—Structure or shape of the semiconductor body to guide the optical wave ; Confining structures perpendicular to the optical axis, e.g. index or gain guiding, stripe geometry, broad area lasers, gain tailoring, transverse or lateral reflectors, special cladding structures, MQW barrier reflection layers
- H01S5/22—Structure or shape of the semiconductor body to guide the optical wave ; Confining structures perpendicular to the optical axis, e.g. index or gain guiding, stripe geometry, broad area lasers, gain tailoring, transverse or lateral reflectors, special cladding structures, MQW barrier reflection layers having a ridge or stripe structure
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/02—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S2301/00—Functional characteristics
- H01S2301/17—Semiconductor lasers comprising special layers
- H01S2301/173—The laser chip comprising special buffer layers, e.g. dislocation prevention or reduction
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/20—Structure or shape of the semiconductor body to guide the optical wave ; Confining structures perpendicular to the optical axis, e.g. index or gain guiding, stripe geometry, broad area lasers, gain tailoring, transverse or lateral reflectors, special cladding structures, MQW barrier reflection layers
- H01S5/22—Structure or shape of the semiconductor body to guide the optical wave ; Confining structures perpendicular to the optical axis, e.g. index or gain guiding, stripe geometry, broad area lasers, gain tailoring, transverse or lateral reflectors, special cladding structures, MQW barrier reflection layers having a ridge or stripe structure
- H01S5/2205—Structure or shape of the semiconductor body to guide the optical wave ; Confining structures perpendicular to the optical axis, e.g. index or gain guiding, stripe geometry, broad area lasers, gain tailoring, transverse or lateral reflectors, special cladding structures, MQW barrier reflection layers having a ridge or stripe structure comprising special burying or current confinement layers
- H01S5/2214—Structure or shape of the semiconductor body to guide the optical wave ; Confining structures perpendicular to the optical axis, e.g. index or gain guiding, stripe geometry, broad area lasers, gain tailoring, transverse or lateral reflectors, special cladding structures, MQW barrier reflection layers having a ridge or stripe structure comprising special burying or current confinement layers based on oxides or nitrides
- H01S5/2216—Structure or shape of the semiconductor body to guide the optical wave ; Confining structures perpendicular to the optical axis, e.g. index or gain guiding, stripe geometry, broad area lasers, gain tailoring, transverse or lateral reflectors, special cladding structures, MQW barrier reflection layers having a ridge or stripe structure comprising special burying or current confinement layers based on oxides or nitrides nitrides
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/30—Structure or shape of the active region; Materials used for the active region
- H01S5/32—Structure or shape of the active region; Materials used for the active region comprising PN junctions, e.g. hetero- or double- heterostructures
- H01S5/3201—Structure or shape of the active region; Materials used for the active region comprising PN junctions, e.g. hetero- or double- heterostructures incorporating bulkstrain effects, e.g. strain compensation, strain related to polarisation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/30—Structure or shape of the active region; Materials used for the active region
- H01S5/34—Structure or shape of the active region; Materials used for the active region comprising quantum well or superlattice structures, e.g. single quantum well [SQW] lasers, multiple quantum well [MQW] lasers or graded index separate confinement heterostructure [GRINSCH] lasers
- H01S5/343—Structure or shape of the active region; Materials used for the active region comprising quantum well or superlattice structures, e.g. single quantum well [SQW] lasers, multiple quantum well [MQW] lasers or graded index separate confinement heterostructure [GRINSCH] lasers in AIIIBV compounds, e.g. AlGaAs-laser, InP-based laser
- H01S5/34333—Structure or shape of the active region; Materials used for the active region comprising quantum well or superlattice structures, e.g. single quantum well [SQW] lasers, multiple quantum well [MQW] lasers or graded index separate confinement heterostructure [GRINSCH] lasers in AIIIBV compounds, e.g. AlGaAs-laser, InP-based laser with a well layer based on Ga(In)N or Ga(In)P, e.g. blue laser
Abstract
Description
Claims (10)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP27112699A JP2001094212A (ja) | 1999-09-24 | 1999-09-24 | 半導体素子およびその製造方法 |
JP271126/1999 | 1999-09-24 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN1290056A CN1290056A (zh) | 2001-04-04 |
CN1175533C true CN1175533C (zh) | 2004-11-10 |
Family
ID=17495701
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CNB001331345A Expired - Lifetime CN1175533C (zh) | 1999-09-24 | 2000-09-22 | 半导体元件及其制造方法 |
Country Status (3)
Country | Link |
---|---|
US (2) | US6534800B1 (zh) |
JP (1) | JP2001094212A (zh) |
CN (1) | CN1175533C (zh) |
Families Citing this family (24)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3459588B2 (ja) * | 1999-03-24 | 2003-10-20 | 三洋電機株式会社 | 半導体レーザ素子の製造方法 |
CN1252883C (zh) * | 2001-04-12 | 2006-04-19 | 日亚化学工业株式会社 | 氮化镓系列化合物半导体元件 |
JP2002335050A (ja) * | 2001-05-09 | 2002-11-22 | Sony Corp | 窒化物半導体装置の製造方法 |
US6977953B2 (en) * | 2001-07-27 | 2005-12-20 | Sanyo Electric Co., Ltd. | Nitride-based semiconductor light-emitting device and method of fabricating the same |
JP3785970B2 (ja) * | 2001-09-03 | 2006-06-14 | 日本電気株式会社 | Iii族窒化物半導体素子の製造方法 |
US6746948B2 (en) * | 2001-09-17 | 2004-06-08 | Matsushita Electric Industrial Co., Ltd. | Method for fabricating semiconductor light-emitting device |
US6963086B2 (en) * | 2001-10-10 | 2005-11-08 | Sony Corporation | Semiconductor light-emitting device image display illuminator and its manufacturing method |
WO2003038956A1 (fr) * | 2001-10-29 | 2003-05-08 | Matsushita Electric Industrial Co., Ltd. | Procede de production d'un element emetteur de lumiere |
JP4457564B2 (ja) * | 2002-04-26 | 2010-04-28 | 沖電気工業株式会社 | 半導体装置の製造方法 |
SG115549A1 (en) * | 2002-07-08 | 2005-10-28 | Sumitomo Chemical Co | Epitaxial substrate for compound semiconductor light emitting device, method for producing the same and light emitting device |
JP4534444B2 (ja) * | 2003-07-10 | 2010-09-01 | 日亜化学工業株式会社 | 窒化物半導体レーザ及びその製造方法 |
KR101034055B1 (ko) * | 2003-07-18 | 2011-05-12 | 엘지이노텍 주식회사 | 발광 다이오드 및 그 제조방법 |
JP3833674B2 (ja) * | 2004-06-08 | 2006-10-18 | 松下電器産業株式会社 | 窒化物半導体レーザ素子 |
US7741654B2 (en) * | 2004-09-16 | 2010-06-22 | Nec Corporation | Group III nitride semiconductor optical device |
US20070195843A1 (en) * | 2006-02-22 | 2007-08-23 | Satoshi Tamura | Nitride semiconductor laser device and method for fabricating the same |
KR100756841B1 (ko) * | 2006-03-13 | 2007-09-07 | 서울옵토디바이스주식회사 | AlxGa1-xN 버퍼층을 갖는 발광 다이오드 및 이의제조 방법 |
JP2008041688A (ja) | 2006-08-01 | 2008-02-21 | Mitsubishi Electric Corp | 半導体レーザ素子の製造方法 |
SE532467C2 (sv) * | 2007-12-27 | 2010-01-26 | Numat As | Implantatrengöringsverktyg för rengöring av ett metalliskt implantat |
JP5167081B2 (ja) * | 2008-11-13 | 2013-03-21 | パナソニック株式会社 | 窒化物半導体デバイス |
KR20120032329A (ko) | 2010-09-28 | 2012-04-05 | 삼성전자주식회사 | 반도체 소자 |
JP5668647B2 (ja) * | 2011-09-06 | 2015-02-12 | 豊田合成株式会社 | Iii族窒化物半導体発光素子およびその製造方法 |
WO2013110769A2 (en) * | 2012-01-25 | 2013-08-01 | Novo Nordisk A/S | Drug delivery device with cartridge fixation feature |
CN103236476B (zh) * | 2013-04-09 | 2016-04-20 | 湘能华磊光电股份有限公司 | 一种生长外延片及其制备方法 |
KR102343099B1 (ko) * | 2017-06-07 | 2021-12-24 | 쑤저우 레킨 세미컨덕터 컴퍼니 리미티드 | 반도체 소자 |
Family Cites Families (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2708992B2 (ja) * | 1991-12-20 | 1998-02-04 | シャープ株式会社 | AlGaInP系半導体発光装置の製造方法 |
US6083812A (en) * | 1993-02-02 | 2000-07-04 | Texas Instruments Incorporated | Heteroepitaxy by large surface steps |
JP3353527B2 (ja) | 1995-03-24 | 2002-12-03 | 松下電器産業株式会社 | 窒化ガリウム系半導体の製造方法 |
US5903017A (en) * | 1996-02-26 | 1999-05-11 | Kabushiki Kaisha Toshiba | Compound semiconductor device formed of nitrogen-containing gallium compound such as GaN, AlGaN or InGaN |
JPH11506273A (ja) * | 1996-03-28 | 1999-06-02 | フィリップス エレクトロニクス ネムローゼ フェンノートシャップ | 最高30%のアルミニウムを含む半導体材料又はアルミニウムを含まない半導体材料から成る個別の閉じ込め層を有する放射放出半導体ダイオード |
JP3467153B2 (ja) * | 1996-08-30 | 2003-11-17 | 株式会社リコー | 半導体素子 |
JP3787195B2 (ja) | 1996-09-06 | 2006-06-21 | シャープ株式会社 | 窒化ガリウム系化合物半導体発光素子の製造方法 |
JP3957359B2 (ja) | 1997-05-21 | 2007-08-15 | シャープ株式会社 | 窒化ガリウム系化合物半導体発光素子及びその製造方法 |
JP3488597B2 (ja) * | 1997-07-14 | 2004-01-19 | 株式会社東芝 | 窒化ガリウム系化合物半導体装置 |
JPH1168158A (ja) | 1997-08-20 | 1999-03-09 | Sanyo Electric Co Ltd | 窒化ガリウム系化合物半導体装置 |
JP3822976B2 (ja) * | 1998-03-06 | 2006-09-20 | ソニー株式会社 | 半導体装置およびその製造方法 |
JP3833848B2 (ja) * | 1999-05-10 | 2006-10-18 | パイオニア株式会社 | 3族窒化物半導体素子製造方法 |
-
1999
- 1999-09-24 JP JP27112699A patent/JP2001094212A/ja active Pending
-
2000
- 2000-09-21 US US09/666,557 patent/US6534800B1/en not_active Expired - Lifetime
- 2000-09-22 CN CNB001331345A patent/CN1175533C/zh not_active Expired - Lifetime
-
2002
- 2002-09-17 US US10/244,513 patent/US6756245B2/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
JP2001094212A (ja) | 2001-04-06 |
CN1290056A (zh) | 2001-04-04 |
US6756245B2 (en) | 2004-06-29 |
US20030010983A1 (en) | 2003-01-16 |
US6534800B1 (en) | 2003-03-18 |
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Owner name: FUTURE LIGHT LLC Free format text: FORMER OWNER: SANYO ELECTRIC CO., LTD. Effective date: 20130311 |
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Effective date of registration: 20170414 Address after: Taiwan, China Hsinchu Science Park Road No. five, No. 5 Patentee after: Jingyuan Optoelectronics Co., Ltd. Address before: Osaka Japan Patentee before: Sanyo Electric Co., Ltd. |
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