CN116904918A - 一种钛合金表面织构化dlc镀层的制备方法 - Google Patents
一种钛合金表面织构化dlc镀层的制备方法 Download PDFInfo
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- 229910001069 Ti alloy Inorganic materials 0.000 title claims abstract description 67
- 239000011248 coating agent Substances 0.000 title claims abstract description 30
- 238000000576 coating method Methods 0.000 title claims abstract description 30
- 238000002360 preparation method Methods 0.000 title claims abstract description 12
- XKRFYHLGVUSROY-UHFFFAOYSA-N argon Substances [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims abstract description 30
- 229910052786 argon Inorganic materials 0.000 claims abstract description 18
- 238000010330 laser marking Methods 0.000 claims abstract description 17
- 238000004140 cleaning Methods 0.000 claims abstract description 12
- 239000011159 matrix material Substances 0.000 claims abstract description 9
- 238000004544 sputter deposition Methods 0.000 claims abstract description 7
- 239000012535 impurity Substances 0.000 claims abstract description 6
- 238000005498 polishing Methods 0.000 claims description 15
- 238000011282 treatment Methods 0.000 claims description 11
- 238000005086 pumping Methods 0.000 claims description 10
- 239000000463 material Substances 0.000 claims description 9
- 238000000034 method Methods 0.000 claims description 7
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 6
- 239000002245 particle Substances 0.000 claims description 6
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 claims description 5
- 244000137852 Petrea volubilis Species 0.000 claims description 5
- 238000005137 deposition process Methods 0.000 claims description 5
- 238000001035 drying Methods 0.000 claims description 5
- 238000005530 etching Methods 0.000 claims description 5
- 229910002804 graphite Inorganic materials 0.000 claims description 5
- 239000010439 graphite Substances 0.000 claims description 5
- 238000001755 magnetron sputter deposition Methods 0.000 claims description 5
- 239000002893 slag Substances 0.000 claims description 5
- 230000003746 surface roughness Effects 0.000 claims description 5
- PEDCQBHIVMGVHV-UHFFFAOYSA-N Glycerine Chemical compound OCC(O)CO PEDCQBHIVMGVHV-UHFFFAOYSA-N 0.000 abstract description 6
- -1 argon ion Chemical class 0.000 abstract description 5
- 238000005461 lubrication Methods 0.000 abstract description 4
- PNEYBMLMFCGWSK-UHFFFAOYSA-N Alumina Chemical compound [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 abstract description 2
- 238000000227 grinding Methods 0.000 abstract description 2
- 239000007788 liquid Substances 0.000 abstract description 2
- 230000001050 lubricating effect Effects 0.000 abstract description 2
- 239000004094 surface-active agent Substances 0.000 abstract description 2
- 239000010408 film Substances 0.000 description 21
- 239000010410 layer Substances 0.000 description 9
- 239000000428 dust Substances 0.000 description 3
- 230000002035 prolonged effect Effects 0.000 description 3
- 239000000758 substrate Substances 0.000 description 3
- 230000007704 transition Effects 0.000 description 3
- 238000005260 corrosion Methods 0.000 description 2
- 230000007797 corrosion Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 239000000314 lubricant Substances 0.000 description 2
- 239000002356 single layer Substances 0.000 description 2
- 238000004381 surface treatment Methods 0.000 description 2
- 230000002195 synergetic effect Effects 0.000 description 2
- 238000000427 thin-film deposition Methods 0.000 description 2
- 208000037099 Prosthesis Failure Diseases 0.000 description 1
- 238000005299 abrasion Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 210000000988 bone and bone Anatomy 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 238000004090 dissolution Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 230000009982 effect on human Effects 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 210000001519 tissue Anatomy 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 231100000331 toxic Toxicity 0.000 description 1
- 230000002588 toxic effect Effects 0.000 description 1
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/02—Pretreatment of the material to be coated
- C23C14/021—Cleaning or etching treatments
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/352—Working by laser beam, e.g. welding, cutting or boring for surface treatment
- B23K26/355—Texturing
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- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/02—Pretreatment of the material to be coated
- C23C14/021—Cleaning or etching treatments
- C23C14/022—Cleaning or etching treatments by means of bombardment with energetic particles or radiation
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- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/02—Pretreatment of the material to be coated
- C23C14/028—Physical treatment to alter the texture of the substrate surface, e.g. grinding, polishing
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- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/0605—Carbon
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- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/3435—Applying energy to the substrate during sputtering
- C23C14/345—Applying energy to the substrate during sputtering using substrate bias
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
Abstract
本发明公开了一种钛合金表面织构化DLC镀层的制备方法,涉及钛合金制备技术领域,试样在沉积DLC薄膜之前须进行氩离子溅射清洗以除去钛合金表面的氧化层和杂质;通入氩气使氩气气压为0.4‑0.9Pa,调节偏压对钛合金表面进行溅射清洗,本发明TC4钛合金和氧化铝陶瓷在添加了表面活性剂的甘油溶液润滑条件下对磨,表现出较高的摩擦系数(0.13‑0.14),DLC自润滑镀层可以显著降低钛合金表面的摩擦系数,降低到0.01‑0.02,但是由于DLC镀层在钛合金表面单独作用时,其结合强度较差,镀层很快失效。使用激光打标机在钛合金表面所加工的点阵,一方面可以储存润滑液,另一方面也可以加强DLC镀层与钛合金的结合强度,可以延长试样表面的低摩擦寿命。
Description
技术领域
本发明涉及钛合金制备技术领域,具体涉及一种钛合金表面织构化DLC镀层的制备方法。
背景技术
钛合金具有良好的耐腐性、力学性能以及生物相容性,被广泛用作于骨科人工关节置换术的主体材料。但是钛合金耐磨性相对较差,钛合金人工关节在摩擦过程中产生的大量磨屑会进入关节周围组织中,促使骨溶解和假体松动,限制假体使用寿命。因此,通过对钛合金表面进行处理,增强钛合金的耐磨性能,降低钛合金的摩擦系数成为医用钛合金的研究焦点。
类金刚石(Diamond-like carbon,DLC)薄膜具有硬度高、表面光滑、摩擦系数小、耐磨损和耐腐蚀的特点,更重要的是,DLC有着其他材料无法比拟的生物相容性,对人体无毒副作用。作为一种自润滑材料,目前主要将其作为镀层来增强其他关节材料的耐磨性和其他性能。但是DLC薄膜的附着性较差,在钛合金表面单独作用时会发生机械失效的现象,这种机械失效与薄膜的残余应力和膜基结合力密切相关。目前,大多数学者通过制造中间过渡层来提高膜基结合力,使DLC和基体之间形成一种非金属过渡层(一层或多层)如碳化物、Si、SiN和单层C或多DLC等,以及金属过渡层如Ti、CrN-W和Cr等来增强结合力。但是这种多层薄膜沉积结构较为复杂而且要实现功能化,还需要考虑薄膜的成分、层数和厚度的选择,以及不同薄膜沉积的次序问题。
激光表面织构化技术(LaserSurfaceTexturing,LST)可以实现金属表面的可控织构化加工,可以在钛合金表面形成尺寸一致,分布规律的微孔阵列,将该技术与DLC自润滑镀层结合起来,能够有效增强DLC薄膜的膜基结合力,降低钛合金表面的磨损和摩擦系数。表面织构可以收集摩擦过程中产生的磨屑颗粒,一定程度上降低磨屑对DLC镀层的破坏,有效延长DLC镀层的使用寿命。并且在润滑条件下,表面织构可以储存润滑剂,在DLC镀层失效后,可以向摩擦副表面提供润滑剂,形成流体润滑,保持摩擦副表面的低摩擦性能。
发明内容
本发明的目的在于提供一种钛合金表面织构化DLC镀层的制备方法,通过表面织构与DLC镀层的协同作用,提高人工关节摩擦副表面的摩擦磨损性能,延长人工关节的使用寿命。
本发明的目的可以通过以下技术方案实现:
一种钛合金表面织构化DLC镀层的制备方法,包括以下步骤:
步骤一、将钛合金试样加工成Φ25×3mm的圆片,分别用200#、400#、800#、1500#的金相砂纸进行打磨,打磨后的试样用金相抛光机打磨抛光至表面粗糙度为0.015-0.025μm,无水乙醇超声清洗,干燥;
步骤二、采用激光打标机对预处理后的试样进行织构化处理,制备点阵,形成激光织构化表面;
步骤三、将织构化处理后的试样再度重复步骤一,去除表面因刻蚀导致周围材料熔融凝固后残留的熔渣;
步骤四、将清洗好的试样放入磁控溅射装置,把炉腔体内的真空度抽至4.0-5.0×10-4Pa,在室温下真空系统进行后续操作;
步骤五、试样在沉积DLC薄膜之前须进行氩离子溅射清洗以除去钛合金表面的氧化层和杂质;通入氩气使氩气气压为0.4-0.9Pa,调节偏压对钛合金表面进行溅射清洗;
步骤六、在放置试样平台两侧相对靶位上放置石墨靶材,设定轰击时间为1-2.5h,使得溅射出的C粒子在织构化钛合金表面沉积一层厚度1-5μm的DLC薄膜,沉积过程中保持偏压为-80V,试样平台的旋转速度保持在10rpm。
作为本发明进一步的方案:步骤二中,激光打标机的参数为:采用355nm紫外激光器,输出波长为355nm,Q脉冲宽度0-200μs,脉冲频率20kHz。
作为本发明进一步的方案:步骤二中,所述的点阵,其圆孔直径D=100-500μm,圆孔深度20-70μm,面积率S=5%-30%,圆孔间距200-1200μm。
作为本发明进一步的方案:步骤二中,所述的点阵,其激光打标机设置的参数为:加工数目5-20次,扫描速度500mm/s,脉冲频率20kHz,泵浦电流5A。
作为本发明进一步的方案:步骤六中还包括:抽真空至真空度为4.0-5.0×10-4Pa。
本发明的有益效果:
本发明TC4钛合金和氧化铝陶瓷在添加了表面活性剂的甘油溶液润滑条件下对磨,表现出较高的摩擦系数(0.13-0.14),DLC自润滑镀层可以显著降低钛合金表面的摩擦系数,降低到0.01-0.02,但是由于DLC镀层在钛合金表面单独作用时,其结合强度较差,镀层很快失效。使用激光打标机在钛合金表面所加工的点阵,一方面可以储存润滑液,另一方面也可以加强DLC镀层与钛合金的结合强度,可以延长试样表面的低摩擦寿命。
附图说明
下面结合附图对本发明作进一步的说明。
图1是本发明带有织构化涂层表面的基体的剖面结构示意图;
图2是本发明不同处理手段的钛合金摩擦曲线。
具体实施方式
下面将结合本发明实施例中的附图,对本发明实施例中的技术方案进行清楚、完整地描述,显然,所描述的实施例仅仅是本发明一部分实施例,而不是全部的实施例。基于本发明中的实施例,本领域普通技术人员在没有作出创造性劳动前提下所获得的所有其它实施例,都属于本发明保护的范围。
实施例1
请参阅图1-2所示,本发明为一种钛合金表面织构化DLC镀层的制备方法,包括以下步骤:
步骤一、将钛合金试样加工成Φ25×3mm的圆片,分别用200#、400#、800#、1500#的金相砂纸进行打磨,打磨后的试样用金相抛光机打磨抛光至表面粗糙度为0.015μm,无水乙醇超声清洗,干燥;
步骤二、采用激光打标机对预处理后的试样进行织构化处理,制备点阵,其圆孔直径D=100μm,圆孔深度20μm,面积率S=5%,圆孔间距200μm,形成激光织构化表面;激光打标机的参数为:采用355nm紫外激光器,输出波长为355nm,Q脉冲宽度0μs,脉冲频率20kHz,激光打标机设置的参数为:加工数目5次,扫描速度500mm/s,泵浦电流5A。
步骤三、将织构化处理后的试样再度重复步骤一,去除表面因刻蚀导致周围材料熔融凝固后残留的熔渣;
步骤四、将清洗好的试样放入磁控溅射装置,把炉腔体内的真空度抽至4.0×10- 4Pa,在室温下真空系统进行后续操作;
步骤五、试样在沉积DLC薄膜之前须进行氩离子溅射清洗以除去钛合金表面的氧化层和杂质;通入氩气使氩气气压为0.49Pa,调节偏压对钛合金表面进行溅射清洗;
步骤六、在放置试样平台两侧相对靶位上放置石墨靶材,设定轰击时间为1h,抽真空至真空度为4.0×10-4Pa,使得溅射出的C粒子在织构化钛合金表面沉积一层厚度1-5μm的DLC薄膜,沉积过程中保持偏压为-80V,试样平台的旋转速度保持在10rpm。
实施例2
请参阅图1-2所示,本发明为一种钛合金表面织构化DLC镀层的制备方法,包括以下步骤:
步骤一、将钛合金试样加工成Φ25×3mm的圆片,分别用200#、400#、800#、1500#的金相砂纸进行打磨,打磨后的试样用金相抛光机打磨抛光至表面粗糙度为0.025μm,无水乙醇超声清洗,干燥;
步骤二、采用激光打标机对预处理后的试样进行织构化处理,制备点阵,其圆孔直径D=500μm,圆孔深度70μm,面积率S=30%,圆孔间距1200μm,形成激光织构化表面;激光打标机的参数为:采用355nm紫外激光器,输出波长为355nm,Q脉冲宽度200μs,脉冲频率20kHz,激光打标机设置的参数为:加工数目20次,扫描速度500mm/s,泵浦电流5A。
步骤三、将织构化处理后的试样再度重复步骤一,去除表面因刻蚀导致周围材料熔融凝固后残留的熔渣;
步骤四、将清洗好的试样放入磁控溅射装置,把炉腔体内的真空度抽至5.0×10- 4Pa,在室温下真空系统进行后续操作;
步骤五、试样在沉积DLC薄膜之前须进行氩离子溅射清洗以除去钛合金表面的氧化层和杂质;通入氩气使氩气气压为0.9Pa,调节偏压对钛合金表面进行溅射清洗;
步骤六、在放置试样平台两侧相对靶位上放置石墨靶材,设定轰击时间为2.5h,抽真空至真空度为5.0×10-4Pa,使得溅射出的C粒子在织构化钛合金表面沉积一层厚度5μm的DLC薄膜,沉积过程中保持偏压为-80V,试样平台的旋转速度保持在10rpm。
实施例3
请参阅图1-2所示,本发明为一种钛合金表面织构化DLC镀层的制备方法,包括以下步骤:
步骤一、将钛合金试样加工成Φ25×3mm的圆片,分别用200#、400#、800#、1500#的金相砂纸进行打磨,打磨后的试样用金相抛光机打磨抛光至表面粗糙度为0.02μm,无水乙醇超声清洗,干燥;
步骤二、采用激光打标机对预处理后的试样进行织构化处理,制备点阵,其圆孔直径D=300μm,圆孔深度50μm,面积率S=20%,圆孔间距800μm,形成激光织构化表面;激光打标机的参数为:采用355nm紫外激光器,输出波长为355nm,Q脉冲宽度100μs,脉冲频率20kHz,激光打标机设置的参数为:加工数目13次,扫描速度500mm/s,泵浦电流5A。
步骤三、将织构化处理后的试样再度重复步骤一,去除表面因刻蚀导致周围材料熔融凝固后残留的熔渣;
步骤四、将清洗好的试样放入磁控溅射装置,把炉腔体内的真空度抽至4.5×10- 4Pa,在室温下真空系统进行后续操作;
步骤五、试样在沉积DLC薄膜之前须进行氩离子溅射清洗以除去钛合金表面的氧化层和杂质;通入氩气使氩气气压为0.6Pa,调节偏压对钛合金表面进行溅射清洗;
步骤六、在放置试样平台两侧相对靶位上放置石墨靶材,设定轰击时间为1.5h,抽真空至真空度为4.5×10-4Pa,使得溅射出的C粒子在织构化钛合金表面沉积一层厚度3μm的DLC薄膜,沉积过程中保持偏压为-80V,试样平台的旋转速度保持在10rpm。
图2中曲线a为未经过表面处理的TC4钛合金,曲线b为表面织构化的TC4钛合金(200μm点阵,深度20μm,20%面积率),曲线c为表面镀DLC膜的钛合金(厚度5μm),曲线d为表两种表面处理同时作用的TC4钛合金。图二中可以看出表面织构可以在一定程度上降低钛合金的摩擦系数,由于DLC薄膜优异的摩擦学性能,在摩擦磨损开始的前期可以大大降低钛合金的摩擦系数,但是由于摩擦的持续,DLC薄膜与钛合金基体的弱膜基结合力会让DLC薄膜在摩擦过程中很快失效。在引入了表面织构与镀层协同作用之后,表面织构增强了镀层与钛合金基体之间的膜基结合力,使得DLC薄膜的失效时间延后,低摩擦寿命延长。
以上对本发明的一个实施例进行了详细说明,但所述内容仅为本发明的较佳实施例,不能被认为用于限定本发明的实施范围。凡依本发明申请范围所作的均等变化与改进等,均应仍归属于本发明的专利涵盖范围之内。
Claims (5)
1.一种钛合金表面织构化DLC镀层的制备方法,其特征在于,包括以下步骤:
步骤一、将钛合金试样加工成Φ25×3mm的圆片,分别用200#、400#、800#、1500#的金相砂纸进行打磨,打磨后的试样用金相抛光机打磨抛光至表面粗糙度为0.015-0.025μm,无水乙醇超声清洗,干燥;
步骤二、采用激光打标机对预处理后的试样进行织构化处理,制备点阵,形成激光织构化表面;
步骤三、将织构化处理后的试样再度重复步骤一,去除表面因刻蚀导致周围材料熔融凝固后残留的熔渣;
步骤四、将清洗好的试样放入磁控溅射装置,把炉腔体内的真空度抽至4.0-5.0×10- 4Pa,在室温下真空系统进行后续操作;
步骤五、试样在沉积DLC薄膜之前须进行氩离子溅射清洗以除去钛合金表面的氧化层和杂质;通入氩气使氩气气压为0.4-0.9Pa,调节偏压对钛合金表面进行溅射清洗;
步骤六、在放置试样平台两侧相对靶位上放置石墨靶材,设定轰击时间为1-2.5h,使得溅射出的C粒子在织构化钛合金表面沉积一层厚度1-5μm的DLC薄膜,沉积过程中保持偏压为-80V,试样平台的旋转速度保持在10rpm。
2.根据权利要求1所述的一种钛合金表面织构化DLC镀层的制备方法,其特征在于,步骤二中,激光打标机的参数为:采用355nm紫外激光器,输出波长为355nm,Q脉冲宽度0-200μs,脉冲频率20kHz。
3.根据权利要求1所述的一种钛合金表面织构化DLC镀层的制备方法,其特征在于,步骤二中,所述的点阵,其圆孔直径D=100-500μm,圆孔深度20-70μm,面积率S=5%-30%,圆孔间距200-1200μm。
4.根据权利要求1所述的一种钛合金表面织构化DLC镀层的制备方法,其特征在于,步骤二中,所述的点阵,其激光打标机设置的参数为:加工数目5-20次,扫描速度500mm/s,脉冲频率20kHz,泵浦电流5A。
5.根据权利要求1所述的一种钛合金表面织构化DLC镀层的制备方法,其特征在于,步骤六中还包括:抽真空至真空度为4.0-5.0×10-4Pa。
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