CN116723643A - 一种新型的金属线路制备方法 - Google Patents
一种新型的金属线路制备方法 Download PDFInfo
- Publication number
- CN116723643A CN116723643A CN202310694650.XA CN202310694650A CN116723643A CN 116723643 A CN116723643 A CN 116723643A CN 202310694650 A CN202310694650 A CN 202310694650A CN 116723643 A CN116723643 A CN 116723643A
- Authority
- CN
- China
- Prior art keywords
- conductive metal
- etching
- preparation
- metal
- priming
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 229910052751 metal Inorganic materials 0.000 title claims abstract description 73
- 239000002184 metal Substances 0.000 title claims abstract description 73
- 238000002360 preparation method Methods 0.000 title claims abstract description 24
- 239000000463 material Substances 0.000 claims abstract description 54
- 238000005530 etching Methods 0.000 claims abstract description 38
- 230000037452 priming Effects 0.000 claims abstract description 33
- 239000007788 liquid Substances 0.000 claims abstract description 25
- 229920002120 photoresistant polymer Polymers 0.000 claims abstract description 22
- 238000004519 manufacturing process Methods 0.000 claims abstract description 12
- 239000000758 substrate Substances 0.000 claims description 10
- 239000011248 coating agent Substances 0.000 claims description 9
- 238000000576 coating method Methods 0.000 claims description 9
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims description 6
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 5
- 239000011521 glass Substances 0.000 claims description 5
- 229910052710 silicon Inorganic materials 0.000 claims description 5
- 239000010703 silicon Substances 0.000 claims description 5
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 4
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims description 4
- 229910052802 copper Inorganic materials 0.000 claims description 4
- 239000010949 copper Substances 0.000 claims description 4
- 238000009713 electroplating Methods 0.000 claims description 4
- 238000001704 evaporation Methods 0.000 claims description 4
- 230000008020 evaporation Effects 0.000 claims description 4
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 4
- 229910052737 gold Inorganic materials 0.000 claims description 4
- 239000010931 gold Substances 0.000 claims description 4
- 238000001755 magnetron sputter deposition Methods 0.000 claims description 4
- 230000002378 acidificating effect Effects 0.000 claims description 3
- 229910052759 nickel Inorganic materials 0.000 claims description 3
- 229910052709 silver Inorganic materials 0.000 claims description 3
- 239000004332 silver Substances 0.000 claims description 3
- 238000004544 sputter deposition Methods 0.000 claims description 3
- 238000007740 vapor deposition Methods 0.000 claims description 2
- 239000003292 glue Substances 0.000 claims 2
- 239000011347 resin Substances 0.000 claims 1
- 229920005989 resin Polymers 0.000 claims 1
- 239000000853 adhesive Substances 0.000 abstract description 8
- 230000001070 adhesive effect Effects 0.000 abstract description 8
- 239000003814 drug Substances 0.000 abstract description 7
- 239000007769 metal material Substances 0.000 description 5
- 239000004020 conductor Substances 0.000 description 4
- 239000002253 acid Substances 0.000 description 3
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 239000003960 organic solvent Substances 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 229910052763 palladium Inorganic materials 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/02—Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding
- H05K3/06—Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding the conductive material being removed chemically or electrolytically, e.g. by photo-etch process
- H05K3/067—Etchants
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/02—Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding
- H05K3/06—Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding the conductive material being removed chemically or electrolytically, e.g. by photo-etch process
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/02—Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding
- H05K3/06—Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding the conductive material being removed chemically or electrolytically, e.g. by photo-etch process
- H05K3/068—Apparatus for etching printed circuits
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/22—Secondary treatment of printed circuits
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/38—Improvement of the adhesion between the insulating substrate and the metal
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Manufacturing Of Printed Circuit Boards (AREA)
Abstract
本发明涉及金属线路制备技术领域,具体为一种新型的金属线路制备方法,该制备方法包括有以下步骤:S1:选定基材,随后在基材表面附着一层打底层材料;S2:在所述打底层材料上附着一层导电金属;S3:在导电金属表面覆盖感光胶;S4:经过曝光和显影,制作出感光胶线路;S5:使用蚀刻液对导电金属进行蚀刻,制备出导电金属图案,保持打底层材料不受蚀刻;S6:使用去膜液去除感光胶,并同时对打底层材料进行蚀刻,使打底层材料与导电金属图案一致,完成金属线路的制备。本发明提出的制备方法通过使用特定的药水和液体,实现了打底层材料与导电金属的一致蚀刻,确保线路制备的准确性,提高了线路的稳定性和可靠性。
Description
技术领域
本发明涉及金属线路制备技术领域,具体为一种新型的金属线路制备方法。
背景技术
金属材料实现器件的电气导通,在触摸屏/液晶面板/半导体领域应用广泛。其金属成膜大体有蒸镀、磁控溅射、电镀、涂布等方式,基材为PET、COP、CPI、玻璃、硅基板、FR4(PCB板)等,金属附着在基材上时,对导电金属附着力有一定的要求,如果直接附着在基材上,可能会导致附着力弱,后续制备金属线路会使得金属线脱落,尤其是导电金属厚度较高时。故经常先在基材附着一层打底层,然后再附着上导电金属。制备金属线路时,一般是使用感光胶,先附着在整面金属材料上,经过显影、蚀刻、去除感光胶等工序制备金属线路,蚀刻一般为酸性蚀刻,导电金属和打底层用同一款蚀刻液蚀刻,但蚀刻液对导电金属与打底层材料的蚀刻速率不一样,会导致图案线路的难以控制。
发明内容
本发明的目的在于提供一种新型的金属线路制备方法,以解决上述背景技术中提出的问题。
为实现上述目的,本发明提供如下技术方案:一种新型的金属线路制备方法,该制备方法包括有以下步骤:
S1:选定基材,随后在基材表面附着一层打底层材料;
S2:在所述打底层材料上附着一层导电金属;
S3:在导电金属表面覆盖感光胶;
S4:经过曝光和显影,制作出感光胶线路;
S5:使用蚀刻液对导电金属进行蚀刻,制备出导电金属图案,保持打底层材料不受蚀刻;
S6:使用去膜液去除感光胶,并同时对打底层材料进行蚀刻,使打底层材料与导电金属图案一致,完成金属线路的制备。
优选的,所述基材选自PET、COP、CPI、玻璃、硅基板和FR4中的任意一种。
优选的,所书打底层材料采用涂布、蒸镀和溅射中的任一方式附着在基材上。
优选的,所述导电金属通过蒸镀、磁控溅射、电镀、涂布中的任一方式附着在打底层材料上。
优选的,所述导电金属采用铜、银、金、镍的任意一种。
优选的,所述蚀刻液为酸性蚀刻液。
优选的,所述去膜液为碱性去膜液。
优选的,所述感光胶为光敏感光胶。
与现有技术相比,本发明的有益效果是:
1.本发明提出的制备方法通过使用特定的药水和液体,实现了打底层材料与导电金属的一致蚀刻,确保线路制备的准确性,并且采用导电性良好的打底层材料和优质的附着力,确保导电金属在基材上的牢固附着,提高了线路的稳定性和可靠性。
2.本发明能够简化制备过程,采用了感光胶、曝光、显影、蚀刻和去膜液等一系列步骤,将金属线路的制备过程简化为几个关键步骤,提高了制备效率和生产效率,并且本发明的制备方法适用于多种基材,包括PET、COP、CPI、玻璃、硅基板和FR4等,具有广泛的应用范围和灵活性。
附图说明
图1为本发明制备方法的示意图。
图中:基材1、打底层材料2、导电金属3、感光胶4。
具体实施方式
下面,结合附图以及具体实施方式,对本发明做进一步描述,需要说明的是,在不相冲突的前提下,以下描述的各实施例之间或各技术特征之间可以任意组合形成新的实施例,须知,所描述的实施例仅仅是本发明一部分实施例,而不是全部的实施例。基于本发明中的实施例,本领域普通技术人员在没有做出创造性劳动前提下所获得的所有其他实施例,都属于本发明保护的范围。
请参阅图1,本发明提供一种技术方案:一种新型的金属线路,金属线路包括有基材1、打底层材料2、导电金属3。可依据药水的特性,将打底层材料2选用脱膜液可去除的材料,且蚀刻液无法对其进行蚀刻。当金属材料经过感光胶4附着,曝光,然后显影做出感光胶线路,再经过蚀刻液去除导电金属3,制作出导电金属3的图案,此时打底层整面都未能蚀刻,再经过去膜液,去除感光胶4的同时,可以将打底层进行蚀刻,由于打底层上层有导电金属3,所以此时打底层的图案和导电金属3的图案一致。最终完成整个金属线路的制备。
该金属线路的制备方法为:首先在基材1表面采用涂布、蒸镀或溅射等方式附着一层打底的材料,基材可为PET、CPI、玻璃、硅基板、FR4(PCB板)等,打底层的材料一般也为导电性良好的材料,且打底层材料2与基材1的附着力较好,又与导电金属3的附着力较好,从而实现导电金属3在基材1上的附着力良好。打底层制作好后,再在上面使用蒸镀、磁控溅射、电镀、涂布等方式,将导电金属3附着上去,一般导电金属3为铜、银、金、镍等等。在制备金属线路时,在金属表面压覆或者涂布感光胶4,再经过曝光,然后经过显影,制作出感光胶线路,然后蚀刻液蚀刻,对导电材料进行蚀刻,将导电材料的线路制备出来,底部的打底层不会被蚀刻液蚀刻,最后经过脱膜液,脱模液在去除感光胶4的同时,对打底层材料2进行蚀刻,从而完成了导电材料与打底层材料2的蚀刻,且两者图案一致。
实施例1
一般显影液为碱性,蚀刻液为酸性,脱膜液为碱性。故可依据药水的特性,将打底层材料2选用碱性药水可去除的材料,例如将纳米金属材料中掺杂有机溶剂,如纳米银、纳米铜、纳米金、纳米钯等,此有机溶剂可避免酸性蚀刻或者酸性药水对其蚀刻能力很弱,同时碱性药水对其蚀刻能力较强。当金属材料经过感光胶附着,曝光,然后显影做出感光胶线路,再经过蚀刻液去除导电金属3,制作出导电金属3的图案,此时打底层整面都未能蚀刻,再经过去膜液,去膜液为碱性,去除感光胶4的同时,可以将打底层进行蚀刻,由于打底层上层有导电金属3,所以此时打底层的图案和导电金属3的图案一致。
上述实施方式仅为本发明的优选实施方式,不能以此来限定本发明保护的范围,本领域的普通技术人员从上述构思出发,不经过创造性的劳动,所作出的种种变换,均落在本发明的保护范围之内。
Claims (8)
1.一种新型的金属线路制备方法,其特征在于:该制备方法包括有以下步骤:
S1:选定基材(1),随后在基材(1)表面附着一层打底层材料(2);
S2:在所述打底层材料(2)上附着一层导电金属(3);
S3:在导电金属(3)表面覆盖感光胶(4);
S4:经过曝光和显影,制作出感光胶线路;
S5:使用蚀刻液对导电金属(3)进行蚀刻,制备出导电金属图案,保持打底层材料(2)不受蚀刻;
S6:使用去膜液去除感光胶(4),并同时对打底层材料(2)进行蚀刻,使打底层材料(2)与导电金属(3)图案一致,完成金属线路的制备。
2.根据权利要求1所述的一种新型的金属线路制备方法,其特征在于:所述基材选自PET、COP、CPI、玻璃、硅基板和FR4中的任意一种。
3.根据权利要求1所述的一种新型的金属线路制备方法,其特征在于:所书打底层材料(2)采用涂布、蒸镀和溅射中的任一方式附着在基材(1)上。
4.根据权利要求1所述的一种新型的金属线路制备方法,其特征在于:所述导电金属(3)通过蒸镀、磁控溅射、电镀、涂布中的任一方式附着在打底层材料(2)上。
5.根据权利要求1所述的一种新型的金属线路制备方法,其特征在于:所述导电金属(3)采用铜、银、金、镍的任意一种。
6.根据权利要求1所述的一种新型的金属线路制备方法,其特征在于:所述蚀刻液为酸性蚀刻液。
7.根据权利要求1所述的一种新型的金属线路制备方法,其特征在于:所述去膜液为碱性去膜液。
8.根据权利要求1所述的一种新型的金属线路制备方法,其特征在于:所述感光胶(4)为光敏感光胶。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN202310694650.XA CN116723643A (zh) | 2023-06-13 | 2023-06-13 | 一种新型的金属线路制备方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN202310694650.XA CN116723643A (zh) | 2023-06-13 | 2023-06-13 | 一种新型的金属线路制备方法 |
Publications (1)
Publication Number | Publication Date |
---|---|
CN116723643A true CN116723643A (zh) | 2023-09-08 |
Family
ID=87867431
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN202310694650.XA Pending CN116723643A (zh) | 2023-06-13 | 2023-06-13 | 一种新型的金属线路制备方法 |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN116723643A (zh) |
-
2023
- 2023-06-13 CN CN202310694650.XA patent/CN116723643A/zh active Pending
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP2007103440A (ja) | 配線基板の製造方法および配線基板 | |
KR100777994B1 (ko) | 엄격한 공차로 매입된 소자를 구비하는 인쇄 회로 기판형성 방법 | |
EP2117286A1 (en) | Method of manufacturing printed circuit board | |
KR20070106669A (ko) | 회로기판 및 그 제조방법 | |
CN111534802B (zh) | 柔性复合膜及其制备方法、电子器件 | |
KR20020006462A (ko) | 범프가 부착된 배선회로기판 및 그 제조방법 | |
CN112996265A (zh) | 一种无需补偿的精细线路板制作方法 | |
KR20060009859A (ko) | 복수의 도전층을 갖는 기판과 그 제조 및 이용 방법 | |
US20080314623A1 (en) | Printed Circuit Board and Method for Manufacturing the Same | |
CN112672529A (zh) | 一种适用于精密柔性线路成型的方法 | |
CN116723643A (zh) | 一种新型的金属线路制备方法 | |
JP2003347149A (ja) | 金属転写シート、金属転写シートの製造方法およびセラミックコンデンサの製造方法 | |
CN113825321B (zh) | 电路板及其制作方法和应用 | |
KR20090071494A (ko) | 프린트 배선 기판의 제조 방법 | |
JP3821868B2 (ja) | 絶縁基材上にめっきする方法及びその方法にて得られるめっき付与物 | |
CN108449927B (zh) | 一种金属薄膜及其制作方法 | |
JP3469620B2 (ja) | 多層プリント配線板およびその製造方法 | |
KR100275372B1 (ko) | 회로기판 제조방법 | |
JPH0563340A (ja) | 機能素子を有する配線板の製造法 | |
JPH10335779A (ja) | パターン形成方法 | |
JPH06140473A (ja) | バンプ付きテープの製造方法 | |
KR100408029B1 (ko) | 표시소자의 전극패턴 형성방법 | |
KR101878163B1 (ko) | 디스플레이전극용 회로패턴 형성방법 및 이에 의해 형성된 회로패턴을 구비하는 디스플레이전극 | |
JPS6138638B2 (zh) | ||
JPH11261201A (ja) | 回路基板およびその製造方法 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
PB01 | Publication | ||
PB01 | Publication | ||
SE01 | Entry into force of request for substantive examination | ||
SE01 | Entry into force of request for substantive examination |