CN116332625B - 一种凝胶注模制备igzo旋转靶材的制备方法 - Google Patents
一种凝胶注模制备igzo旋转靶材的制备方法 Download PDFInfo
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- 238000002360 preparation method Methods 0.000 title claims abstract description 27
- 238000005266 casting Methods 0.000 title claims abstract description 13
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 claims abstract description 68
- 239000002002 slurry Substances 0.000 claims abstract description 45
- AJNVQOSZGJRYEI-UHFFFAOYSA-N digallium;oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[Ga+3].[Ga+3] AJNVQOSZGJRYEI-UHFFFAOYSA-N 0.000 claims abstract description 33
- 229910001195 gallium oxide Inorganic materials 0.000 claims abstract description 33
- 229910003437 indium oxide Inorganic materials 0.000 claims abstract description 33
- PJXISJQVUVHSOJ-UHFFFAOYSA-N indium(iii) oxide Chemical compound [O-2].[O-2].[O-2].[In+3].[In+3] PJXISJQVUVHSOJ-UHFFFAOYSA-N 0.000 claims abstract description 33
- 239000011787 zinc oxide Substances 0.000 claims abstract description 33
- 239000000178 monomer Substances 0.000 claims abstract description 20
- 238000010438 heat treatment Methods 0.000 claims abstract description 19
- 238000000034 method Methods 0.000 claims abstract description 19
- 239000002270 dispersing agent Substances 0.000 claims abstract description 15
- 125000000524 functional group Chemical group 0.000 claims abstract description 15
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 15
- 238000005245 sintering Methods 0.000 claims abstract description 13
- 238000005238 degreasing Methods 0.000 claims abstract description 12
- 238000002156 mixing Methods 0.000 claims abstract description 12
- 239000008367 deionised water Substances 0.000 claims abstract description 11
- 229910021641 deionized water Inorganic materials 0.000 claims abstract description 11
- 239000003054 catalyst Substances 0.000 claims abstract description 10
- 239000003999 initiator Substances 0.000 claims abstract description 10
- 239000013077 target material Substances 0.000 claims abstract description 9
- 238000000498 ball milling Methods 0.000 claims abstract description 8
- 229910001220 stainless steel Inorganic materials 0.000 claims abstract description 6
- 239000010935 stainless steel Substances 0.000 claims abstract description 6
- 239000002202 Polyethylene glycol Substances 0.000 claims description 43
- 229920001223 polyethylene glycol Polymers 0.000 claims description 43
- FPYJFEHAWHCUMM-UHFFFAOYSA-N maleic anhydride Chemical group O=C1OC(=O)C=C1 FPYJFEHAWHCUMM-UHFFFAOYSA-N 0.000 claims description 41
- CHPZKNULDCNCBW-UHFFFAOYSA-N gallium nitrate Chemical compound [Ga+3].[O-][N+]([O-])=O.[O-][N+]([O-])=O.[O-][N+]([O-])=O CHPZKNULDCNCBW-UHFFFAOYSA-N 0.000 claims description 36
- 150000005690 diesters Chemical class 0.000 claims description 33
- LYCAIKOWRPUZTN-UHFFFAOYSA-N Ethylene glycol Chemical compound OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 claims description 24
- XURCIPRUUASYLR-UHFFFAOYSA-N Omeprazole sulfide Chemical compound N=1C2=CC(OC)=CC=C2NC=1SCC1=NC=C(C)C(OC)=C1C XURCIPRUUASYLR-UHFFFAOYSA-N 0.000 claims description 18
- 229940044658 gallium nitrate Drugs 0.000 claims description 18
- NIXOWILDQLNWCW-UHFFFAOYSA-N 2-Propenoic acid Natural products OC(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 claims description 16
- ONDPHDOFVYQSGI-UHFFFAOYSA-N zinc nitrate Chemical compound [Zn+2].[O-][N+]([O-])=O.[O-][N+]([O-])=O ONDPHDOFVYQSGI-UHFFFAOYSA-N 0.000 claims description 16
- SMZOUWXMTYCWNB-UHFFFAOYSA-N 2-(2-methoxy-5-methylphenyl)ethanamine Chemical compound COC1=CC=C(C)C=C1CCN SMZOUWXMTYCWNB-UHFFFAOYSA-N 0.000 claims description 14
- ZOIORXHNWRGPMV-UHFFFAOYSA-N acetic acid;zinc Chemical compound [Zn].CC(O)=O.CC(O)=O ZOIORXHNWRGPMV-UHFFFAOYSA-N 0.000 claims description 11
- 239000003381 stabilizer Substances 0.000 claims description 11
- 238000003756 stirring Methods 0.000 claims description 11
- 239000004246 zinc acetate Substances 0.000 claims description 11
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 8
- QUSNBJAOOMFDIB-UHFFFAOYSA-N Ethylamine Chemical group CCN QUSNBJAOOMFDIB-UHFFFAOYSA-N 0.000 claims description 8
- XNWFRZJHXBZDAG-UHFFFAOYSA-N 2-METHOXYETHANOL Chemical compound COCCO XNWFRZJHXBZDAG-UHFFFAOYSA-N 0.000 claims description 7
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 claims description 7
- 229910052733 gallium Inorganic materials 0.000 claims description 7
- 229910052738 indium Inorganic materials 0.000 claims description 7
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 claims description 7
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 claims description 6
- 239000000203 mixture Substances 0.000 claims description 6
- 229910052725 zinc Inorganic materials 0.000 claims description 6
- 239000011701 zinc Substances 0.000 claims description 6
- 238000003754 machining Methods 0.000 claims description 5
- 239000004721 Polyphenylene oxide Substances 0.000 claims description 4
- 229910052757 nitrogen Inorganic materials 0.000 claims description 4
- 229920000570 polyether Polymers 0.000 claims description 4
- 150000002148 esters Chemical class 0.000 claims description 3
- 230000002776 aggregation Effects 0.000 abstract description 15
- 238000005054 agglomeration Methods 0.000 abstract description 14
- 230000000052 comparative effect Effects 0.000 description 21
- 239000000843 powder Substances 0.000 description 12
- XLYOFNOQVPJJNP-UHFFFAOYSA-M hydroxide Chemical compound [OH-] XLYOFNOQVPJJNP-UHFFFAOYSA-M 0.000 description 11
- 229920000642 polymer Polymers 0.000 description 7
- 239000000243 solution Substances 0.000 description 6
- 230000009286 beneficial effect Effects 0.000 description 5
- 230000007062 hydrolysis Effects 0.000 description 5
- 238000006460 hydrolysis reaction Methods 0.000 description 5
- ROOXNKNUYICQNP-UHFFFAOYSA-N ammonium persulfate Chemical group [NH4+].[NH4+].[O-]S(=O)(=O)OOS([O-])(=O)=O ROOXNKNUYICQNP-UHFFFAOYSA-N 0.000 description 4
- 238000009826 distribution Methods 0.000 description 4
- 239000011812 mixed powder Substances 0.000 description 4
- QTBSBXVTEAMEQO-UHFFFAOYSA-N Acetic acid Chemical compound CC(O)=O QTBSBXVTEAMEQO-UHFFFAOYSA-N 0.000 description 3
- 230000002349 favourable effect Effects 0.000 description 3
- 239000001257 hydrogen Substances 0.000 description 3
- 229910052739 hydrogen Inorganic materials 0.000 description 3
- 150000004679 hydroxides Chemical class 0.000 description 3
- 238000006116 polymerization reaction Methods 0.000 description 3
- 238000004544 sputter deposition Methods 0.000 description 3
- 238000005979 thermal decomposition reaction Methods 0.000 description 3
- KWYHDKDOAIKMQN-UHFFFAOYSA-N N,N,N',N'-tetramethylethylenediamine Chemical group CN(C)CCN(C)C KWYHDKDOAIKMQN-UHFFFAOYSA-N 0.000 description 2
- 229920002125 Sokalan® Polymers 0.000 description 2
- 229910001870 ammonium persulfate Inorganic materials 0.000 description 2
- 230000000903 blocking effect Effects 0.000 description 2
- -1 diester maleic anhydride Chemical class 0.000 description 2
- 238000001035 drying Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 125000002887 hydroxy group Chemical group [H]O* 0.000 description 2
- 238000001746 injection moulding Methods 0.000 description 2
- 239000004584 polyacrylic acid Substances 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- 238000005303 weighing Methods 0.000 description 2
- HRPVXLWXLXDGHG-UHFFFAOYSA-N Acrylamide Chemical group NC(=O)C=C HRPVXLWXLXDGHG-UHFFFAOYSA-N 0.000 description 1
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 description 1
- 229920002565 Polyethylene Glycol 400 Polymers 0.000 description 1
- 238000004220 aggregation Methods 0.000 description 1
- QGZKDVFQNNGYKY-UHFFFAOYSA-O ammonium group Chemical group [NH4+] QGZKDVFQNNGYKY-UHFFFAOYSA-O 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 230000001627 detrimental effect Effects 0.000 description 1
- 125000003827 glycol group Chemical group 0.000 description 1
- 238000011065 in-situ storage Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000004377 microelectronic Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910017604 nitric acid Inorganic materials 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- JLFNLZLINWHATN-UHFFFAOYSA-N pentaethylene glycol Chemical compound OCCOCCOCCOCCOCCO JLFNLZLINWHATN-UHFFFAOYSA-N 0.000 description 1
- 229920000058 polyacrylate Polymers 0.000 description 1
- 230000037048 polymerization activity Effects 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 238000004513 sizing Methods 0.000 description 1
- 230000006641 stabilisation Effects 0.000 description 1
- 238000011105 stabilization Methods 0.000 description 1
- 239000006188 syrup Substances 0.000 description 1
- 235000020357 syrup Nutrition 0.000 description 1
- 238000010998 test method Methods 0.000 description 1
- 238000009283 thermal hydrolysis Methods 0.000 description 1
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- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
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Abstract
本申请涉及IGZO旋转靶制备技术领域,具体公开了一种凝胶注模制备IGZO旋转靶材的制备方法。该制备方法包括以下步骤:(1)将纳米氧化铟、纳米氧化镓、纳米氧化锌、去离子水、官能团单体、分散剂、引发剂、催化剂湿法球磨,得到浆料;(2)将浆料和IGZO溶胶混合,依次在100‑120℃和190‑210℃的条件下加热,脱模后得到毛坯;(3)对毛坯依次进行加热脱脂、烧结,将烧结产物粘合在不锈钢管材表面,得到IGZO旋转靶材。本申请限制了纳米氧化铟、纳米氧化镓、纳米氧化锌在加热脱脂和烧结过程中的进一步团聚,得到了致密度更高的IGZO靶材。
Description
技术领域
本申请涉及IGZO旋转靶制备技术领域,更具体地说,它涉及一种凝胶注模制备IGZO旋转靶材的制备方法。
背景技术
铟镓锌氧化物简称IGZO,由IGZO靶材制成的薄膜晶体管在微电子技术中有着广泛应用,因此,为了制备高性能的 IGZO薄膜,有必要研究作为溅射材料的高性能 IGZO靶材。目前,IGZO靶材的发展呈现出高致密度的趋势,高致密度的IGZO靶材往往同时具有高电阻率和高溅射稳定性,有助于提高溅射效率。
相关技术中有一种IGZO靶材,通过如下方法制备:(1)称取氧化铟、氧化镓、氧化锌粉末配备成混合粉体,将混合粉体、去离子水、官能团单体、分散剂、引发剂以及催化剂加入到湿法球磨设备中进行球磨混合搅拌,得到浆料;(2)将浆料通过注塑机注入模具中,进行固化,取出模具内模;待浆料完全固化,除去外模后再进行干燥,得到毛坯;(3)将毛坯放置于脱脂炉内脱脂;(4)将脱脂后的IGZO靶材毛坯放置于高温烧结炉内烧结;(5)对烧结后的IGZO靶材毛坯进行机械加工,然后粘合在不锈钢管上,得到IGZO旋转靶材。
针对上述中的相关技术,发明人认为,相关技术中虽然提供了制备IGZO旋转靶材的方法,但是当该方法中选取的氧化铟、氧化镓、氧化锌粉末均为纳米级粉末时,粉末的团聚现象会造成氧化铟、氧化镓、氧化锌粉末分布不均,不利于得到高致密度的IGZO靶材。
发明内容
相关技术中,粉末的团聚现象会造成氧化铟、氧化镓、氧化锌粉末分布不均,不利于得到高致密度的IGZO靶材。为了改善这一缺陷,本申请提供一种凝胶注模制备IGZO旋转靶材的制备方法。
本申请提供一种凝胶注模制备IGZO旋转靶材的制备方法,采用如下的技术方案:
一种凝胶注模制备IGZO旋转靶材的制备方法,所述IGZO旋转靶材的制备方法包括以下步骤:
(1)将纳米氧化铟、纳米氧化镓、纳米氧化锌、去离子水、官能团单体、分散剂、引发剂、催化剂混合后进行湿法球磨,得到浆料;本步骤中,所述纳米氧化铟、纳米氧化镓、纳米氧化锌三者合计占浆料总重量的80%,纳米氧化铟、纳米氧化镓、纳米氧化锌的摩尔比为1:1:1,所述官能团单体中含有聚醚链段;
(2)将浆料和IGZO溶胶按照1:1的重量比混合后注入模具中,然后在100-120℃的条件下将模具静置2-3h,然后在190-210℃的条件下将模具加热30-50min,等待模具冷却至20-25℃后进行脱模,得到毛坯;本步骤中,所述IGZO溶胶的组分包括醋酸锌、硝酸铟、硝酸镓、稳定剂和乙二醇单甲醚;
(3)在200-300℃对毛坯进行4-6h的加热脱脂,然后在1500-1600℃对脱脂后的毛坯进行烧结,对烧结产物进行机械加工,再将烧结产物粘合在不锈钢管材表面,得到IGZO旋转靶材。
通过采用上述技术方案,在100-120℃加热浆料与IGZO溶胶的混合物时,醋酸锌、硝酸铟、硝酸镓发生水解,并生成对应的氢氧化物,醋酸和硝酸则在加热过程中挥发。在此阶段,官能团单体发生聚合,产生的含聚醚链段的聚合物通过聚醚链段的空间位阻限制了氢氧化物的团聚。
在190-210℃加热时,氢氧化物分解为对应的氧化物,并原位组合为IGZO粉体。新生成的IGZO粉体附着在纳米氧化铟、纳米氧化镓、纳米氧化锌的团聚体表面,并在模具冷却后成为了毛坯的一部分。由于稳定剂的作用,醋酸锌、硝酸铟、硝酸镓原本在IGZO溶胶中能够实现均匀分布,而聚合物的产生又限制了氢氧化物的团聚,因此这一阶段生成的IGZO粉体具有良好的均匀度,且阻碍了纳米氧化铟、纳米氧化镓、纳米氧化锌在加热脱脂和烧结过程中的进一步团聚,最终得到了致密度更高的IGZO靶材。
作为优选,所述稳定剂选用单乙胺。
通过采用上述技术方案,单乙胺能够对醋酸锌、硝酸铟、硝酸镓在乙二醇单甲醚中形成的溶胶起稳定作用,增加了醋酸锌、硝酸铟、硝酸镓水解得到的氢氧化物分布的均匀度,有助于得到致密度更高的IGZO靶材。
作为优选,所述分散剂包括乙二醇。
通过采用上述技术方案,乙二醇的两个羟基均容易与纳米氧化铟、纳米氧化镓、纳米氧化锌形成氢键,有利于破坏纳米氧化铟、纳米氧化镓、纳米氧化锌形成的团聚体,提高了IGZO靶材的致密度。
作为优选,所述官能团单体包括马来酸酐聚乙二醇双酯。
通过采用上述技术方案,马来酸酐聚乙二醇单酯含有能够参与聚合的不饱和键,而且其中的聚乙二醇链段具有显著的空间位阻作用,有利于减少醋酸锌、硝酸铟、硝酸镓水解得到的氢氧化物的团聚,提高了IGZO靶材的致密度。
作为优选,所述马来酸酐聚乙二醇双酯按照以下方法制备:
将马来酸酐和平均分子量360-440的聚乙二醇按照2:1的摩尔比混合,在60℃且有氮气保护的条件下反应50-65min,得到马来酸酐聚乙二醇双酯。
作为优选,所述马来酸酐聚乙二醇双酯占浆料总重量的8-10%。
通过采用上述技术方案,在氮气保护下令聚乙二醇和马来酸酐反应,得到了马来酸酐聚乙二醇双酯。
作为优选,所述马来酸酐聚乙二醇双酯占浆料总重量的8-10%。
通过采用上述技术方案,优选了马来酸酐聚乙二醇双酯的用量,有利于聚合物充分发挥空间位阻作用。
作为优选,所述官能团单体还包括丙烯酸,所述丙烯酸的用量为马来酸酐聚乙二醇酯的5%。
通过采用上述技术方案,丙烯酸的聚合活性良好,能够促进马来酸酐聚乙二醇双酯的聚合,使聚合物能够更快产生足够的空间位阻,有利于减少醋酸锌、硝酸铟、硝酸镓水解得到的氢氧化物的团聚,提高了IGZO靶材的致密度。
作为优选,所述马来酸酐聚乙二醇双酯占浆料总重量的5-6%。
通过采用上述技术方案,在添加丙烯酸的情况下,马来酸酐聚乙二醇双酯能够更快产生足够的空间位阻,因此在相对较低的用量下即可达到与未添加丙烯酸时相近的效果。
作为优选,所述IGZO溶胶按照以下方法制备:
将硝酸镓加入乙二醇单甲醚中,在20-30℃的条件下搅拌至硝酸镓溶解,然后向得到的溶液中添加硝酸铟,继续搅拌至硝酸铟溶解,然后向得到的溶液中加入硝酸锌,搅拌至硝酸锌溶解后再将稳定剂加入所得溶液中,在70-75℃水浴加热1-2h,然后再在20-30℃静置20-24h,得到IGZO溶胶。
通过采用上述技术方案,通过依次添加的方式混合了醋酸锌、硝酸铟、硝酸镓和乙二醇单甲醚,然后通过添加稳定剂和水浴加热得到了具有良好均匀度的IGZO溶胶。
作为优选,在所述IGZO溶胶中,铟、镓、锌的摩尔比为2:2:1。
通过采用上述技术方案,优选了IGZO溶胶中铟、镓、锌的摩尔比,使得IGZO溶胶的摩尔比与按照1:1:1的比例添加纳米氧化铟、纳米氧化镓、纳米氧化锌时浆料中的铟、镓、锌摩尔比接近,有利于减少团聚现象对IGZO靶材性能造成的干扰。
综上所述,本申请具有以下有益效果:
1、本申请的方法将IGZO溶胶与浆料混合,IGZO溶胶在加热过程中经过水解和热分解产生的IGZO粉体附着在纳米氧化铟、纳米氧化镓、纳米氧化锌的团聚体表面,限制了纳米氧化铟、纳米氧化镓、纳米氧化锌在加热脱脂和烧结过程中的进一步团聚,得到了致密度更高的IGZO靶材。
2、本申请中优选分散剂包括乙二醇,乙二醇的两个羟基均可能够与纳米氧化铟、纳米氧化镓、纳米氧化锌形成氢键,有利于破坏纳米氧化铟、纳米氧化镓、纳米氧化锌形成的团聚体,提高了IGZO靶材的致密度。
具体实施方式
以下结合实施例、制备例和对比例对本申请作进一步详细说明,本申请涉及的原料均可通过市售获得。
马来酸酐聚乙二醇双酯的制备例,以下以制备例1为例说明。
制备例1:本制备例中,马来酸酐聚乙二醇双酯按照以下方法制备:将马来酸酐和PEG400按照2:1的摩尔比混合,在60℃且有氮气保护的条件下反应60min,得到马来酸酐聚乙二醇双酯。
IGZO溶胶的制备例,以下以制备例2为例说明。
制备例2:本制备例中,IGZO溶胶按照以下方法制备:
将硝酸镓加入乙二醇单甲醚中,在25℃的条件下搅拌至硝酸镓溶解,然后向得到的溶液中添加硝酸铟,继续搅拌至硝酸铟溶解,然后向得到的溶液中加入硝酸锌,搅拌至硝酸锌溶解后再将稳定剂单乙胺加入所得溶液中,在75℃水浴加热1.5h,然后再在25℃静置22h,得到IGZO溶胶。按照本方法得到的IGZO溶胶中,硝酸锌、硝酸铟、硝酸镓的浓度均为0.01mol/L。
制备例3:本制备例与制备例2的不同之处在于,在得到的IGZO溶胶中,硝酸锌的浓度为0.005mol/L。
实施例:以下实施例、对比例中,当浆料中除了去离子水之外的组分含量发生变化或添加新组分时,仍然由去离子水将浆料重量补足至100%;以下选用的纳米氧化铟、纳米氧化镓、纳米氧化锌的平均粒径均为40nm。
实施例1-5,以下以实施例1为例进行说明。
实施例1:本实施例中,凝胶注模制备IGZO旋转靶材的制备方法包括以下步骤:
(1)将纳米氧化铟、纳米氧化镓、纳米氧化锌、去离子水、官能团单体、分散剂、引发剂、催化剂混合后进行湿法球磨,得到浆料;本步骤中,纳米氧化铟、纳米氧化镓、纳米氧化锌三者合计占浆料总重量的80%,纳米氧化铟、纳米氧化镓、纳米氧化锌的摩尔比为1:1:1;本步骤中,官能团单体为制备例1的马来酸酐聚乙二醇双酯,占浆料总重量的7%;分散剂为聚丙烯酸,用量占浆料总重量的1%;引发剂为过硫酸铵,用量占浆料总重量的2%;催化剂为四甲基乙二胺,用量占浆料总重量的0.15%;余下的重量由去离子水补充至100%;
(2)将浆料和制备例2的IGZO溶胶按照1:1的重量比混合后注入模具中,然后在105℃的条件下将模具静置2.5h,然后在200℃的条件下将模具加热40min,等待模具冷却至20℃后进行脱模,得到毛坯;
(3)在250℃对毛坯进行5h的加热脱脂,然后在1550℃对脱脂后的毛坯进行4h的烧结;烧结完成后对烧结产物进行机械加工,再将烧结产物粘合在不锈钢管材表面,得到IGZO旋转靶材。
如表1,实施例1-5的不同之处在于,马来酸酐聚乙二醇双酯的用量占浆料总重量的百分比(以下简称M1)不同。
表1马来酸酐聚乙二醇双酯的用量占浆料总重量的百分比M1
实施例6:本实施例与实施例1 的不同之处在于,官能团单体还包括丙烯酸,丙烯酸的用量为马来酸酐聚乙二醇酯的5%。
如表2,实施例6-10的不同之处在于,马来酸酐聚乙二醇双酯的用量占浆料总重量的百分比(以下简称M2)不同。
表2马来酸酐聚乙二醇双酯的用量占浆料总重量的百分比M2
实施例11:本实施例与实施例7 的不同之处在于,分散剂由聚丙烯酸和乙二醇按照1:1的重量比混合而成。
实施例12:本实施例与实施例11的不同之处在于,IGZO溶胶按照制备例3的方法制备。
对比例:对比例1:本对比例提供一种凝胶注模制备IGZO旋转靶材,按照以下方法制备:
(1)称取纳米氧化铟、纳米氧化镓、纳米氧化锌,按照1:1:1的摩尔比配备成混合粉体,将混合粉体、去离子水、官能团单体、分散剂、引发剂以及催化剂加入到湿法球磨设备中进行球磨混合搅拌,得到浆料;本步骤中,纳米氧化铟、纳米氧化镓、纳米氧化锌三者合计占浆料总重量的80%,纳米氧化铟、纳米氧化镓、纳米氧化锌的摩尔比为1:1:1;本步骤中,官能团单体为丙烯酰胺,占浆料总重量的7%;分散剂为聚丙烯酸铵,用量占浆料总重量的1%;引发剂为过硫酸铵,用量占浆料总重量的2%;催化剂为四甲基乙二胺,用量占浆料总重量的0.15%;余下的重量由去离子水补充至100%;
(2)将浆料通过注塑机注入模具中固化1小时,然后取出模具内模,在25℃干燥80h,得到毛坯;
(3)将毛坯放置于脱脂炉内在260℃保温6h,完成脱脂;
(4)将脱脂后的毛坯放置于高温烧结炉内以1550℃烧结4h;
(5)对烧结后的毛坯进行机械加工,然后粘合在不锈钢管上,得到IGZO旋转靶材。
对比例2:本对比例与实施例1的不同之处在于,IGZO溶胶中不含稳定剂。
对比例3:本对比例与实施例1的不同之处在于,将浆料中的官能团单体等质量替换为去离子水。
对比例4:本对比例与实施例1的不同之处在于,将浆料中的官能团单体等质量替换为丙烯酸。
性能检测试验方法:将烧结后的毛坯作为样品,样品真实密度的测试逐个采用阿基米德排水法进行检测,样品理论密度统一按照In2Ga2ZnO7计算。计算样品理论密度与样品真实密度的差值(以下简称密度差),密度差的数值越小说明样品的致密度越接近理论值。计算对比例1求得的密度差与各实施例、对比例求得的密度差的比值,将该比值记为相对致密度,计算结果见表3。
表3 相对致密度
结合实施例1和对比例1并结合表3可以看出,实施例1的相对致密度大于对比例1,说明实施例1的样品真实密度更接近理论密度。在浆料与IGZO溶胶混合之后,IGZO溶胶在加热过程中经过水解和热分解产生的IGZO粉体附着在纳米氧化铟、纳米氧化镓、纳米氧化锌的团聚体表面,限制了纳米氧化铟、纳米氧化镓、纳米氧化锌在加热脱脂和烧结过程中的进一步团聚,得到了致密度更高的IGZO靶材。
结合实施例1和对比例2并结合表3可以看出,实施例1的相对致密度大于对比例2,说明当IGZO溶胶中不含稳定剂时,醋酸锌、硝酸铟、硝酸镓在加热水解过程中产生的三种氢氧化物分布的均匀度下降,影响了样品的致密度。
结合实施例1和对比例3并结合表3可以看出,实施例1的相对致密度大于对比例3,说明当IGZO溶胶中不含官能团单体时,聚合物的空间位阻对氢氧化物的团聚产生的限制减小,不利于阻碍氢氧化物的团聚,因此氢氧化物热分解后转化而成的IGZO粉体分布不均匀,限制了样品的致密度。
结合实施例1和对比例4并结合表3可以看出,实施例1的相对致密度大于对比例4,说明当官能团单体为丙烯酸时,丙烯酸的聚合物产生的空间位阻有限,不利于阻碍氢氧化物的团聚。在此情况下,氢氧化物热分解后转化而成的IGZO粉体分布不均匀,限制了样品的致密度
结合实施例1-5并结合表3可以看出,随着马来酸酐聚乙二醇双酯用量的增加,相对致密度也在上升,但是相对致密度相对于马来酸酐聚乙二醇双酯用量的变化率也在减小。当马来酸酐聚乙二醇双酯占浆料总重量的百分比超过10%之后,继续增加马来酸酐聚乙二醇双酯的用量难以充分提高相对致密度。而当马来酸酐聚乙二醇双酯占浆料总重量的百分比低于8%时,相对致密度较低,因此为了充分提高样品的致密度并节约马来酸酐聚乙二醇双酯,优选马来酸酐聚乙二醇双酯的用量占浆料总重量的8-10%。
结合实施例1、实施例6-10并结合表3可以看出,当丙烯酸与马来酸酐聚乙二醇双酯混用之后,丙烯酸促进了马来酸酐聚乙二醇双酯的聚合,使聚合物能够更快产生足够的空间位阻,有利于减少醋酸锌、硝酸铟、硝酸镓水解得到的氢氧化物的团聚,提高了IGZO靶材的致密度。在添加丙烯酸的前提下,为了充分提高样品的致密度并节约马来酸酐聚乙二醇双酯,优选马来酸酐聚乙二醇双酯占浆料总重量的5-6%。
结合实施例7、实施例11并结合表3可以看出,当分散剂包括乙二醇时,样品的相对致密度更高,说明乙二醇容易与纳米氧化铟、纳米氧化镓、纳米氧化锌形成氢键,有利于破坏纳米氧化铟、纳米氧化镓、纳米氧化锌形成的团聚体,提高了IGZO靶材的致密度。
结合实施例11、实施例12并结合表3可以看出,实施例12测得的相对致密度大于实施例11,说明当IGZO溶胶中,铟、镓、锌的摩尔比为2:2:1时,IGZO溶胶的摩尔比与按照1:1:1的比例添加纳米氧化铟、纳米氧化镓、纳米氧化锌时浆料中的铟、镓、锌摩尔比接近,有利于减少团聚现象对IGZO靶材性能造成的干扰,使得样品具有更高的致密度。
本具体实施例仅仅是对本申请的解释,其并不是对本申请的限制,本领域技术人员在阅读完本说明书后可以根据需要对本实施例做出没有创造性贡献的修改,但只要在本申请的权利要求范围内都受到专利法的保护。
Claims (4)
1.一种凝胶注模制备IGZO旋转靶材的制备方法,其特征在于,所述IGZO旋转靶材的制备方法包括以下步骤:
(1)将纳米氧化铟、纳米氧化镓、纳米氧化锌、去离子水、官能团单体、分散剂、引发剂、催化剂混合后进行湿法球磨,得到浆料;本步骤中,所述纳米氧化铟、纳米氧化镓、纳米氧化锌三者合计占浆料总重量的80%,纳米氧化铟、纳米氧化镓、纳米氧化锌的摩尔比为1:1:1,所述官能团单体中含有聚醚链段; 其中,所述分散剂包括乙二醇;所述官能团单体为马来酸酐聚乙二醇双酯,所述马来酸酐聚乙二醇双酯占浆料总重量的8-10%;
(2)将浆料和IGZO溶胶按照1:1的重量比混合后注入模具中,然后在100-120℃的条件下将模具静置2-3h,然后在190-210℃的条件下将模具加热30-50min,等待模具冷却至20-25℃后进行脱模,得到毛坯;本步骤中,所述IGZO溶胶的组分包括醋酸锌、硝酸铟、硝酸镓、稳定剂和乙二醇单甲醚;在所述IGZO溶胶中,铟、镓、锌的摩尔比为2:2:1;所述稳定剂选用单乙胺;
(3)在200-300℃对毛坯进行4-6h的加热脱脂,然后在1500-1600℃对脱脂后的毛坯进行烧结,对烧结产物进行机械加工,再将烧结产物粘合在不锈钢管材表面,得到IGZO旋转靶材。
2.根据权利要求1所述的凝胶注模制备IGZO旋转靶材的制备方法,其特征在于,所述马来酸酐聚乙二醇双酯按照以下方法制备:
将马来酸酐和平均分子量360-440的聚乙二醇按照2:1的摩尔比混合,在60℃且有氮气保护的条件下反应50-65min,得到马来酸酐聚乙二醇双酯。
3.根据权利要求1所述的凝胶注模制备IGZO旋转靶材的制备方法,其特征在于,所述官能团单体为马来酸酐聚乙二醇双酯和丙烯酸,所述马来酸酐聚乙二醇双酯占浆料总重量的5-6%;所述丙烯酸的用量为马来酸酐聚乙二醇酯的5%。
4.根据权利要求1所述的凝胶注模制备IGZO旋转靶材的制备方法,其特征在于,所述IGZO溶胶按照以下方法制备: 将硝酸镓加入乙二醇单甲醚中,在20-30℃的条件下搅拌至硝酸镓溶解,然后向得到的溶液中添加硝酸铟,继续搅拌至硝酸铟溶解,然后向得到的溶液中加入硝酸锌,搅拌至硝酸锌溶解后再将稳定剂加入所得溶液中,在70-75℃水浴加热1-2h,然后再在20-30℃静置20-24h,得到IGZO溶胶。
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Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101274242A (zh) * | 2008-01-08 | 2008-10-01 | 陕西科技大学 | 高分子陶瓷分散剂的制备方法 |
CN103302724A (zh) * | 2012-12-28 | 2013-09-18 | 中国船舶重工集团公司第七二五研究所 | 一种凝胶注模成型高密度ito靶材坯体的方法 |
CN107987220A (zh) * | 2017-11-02 | 2018-05-04 | 张家港市德宝化工有限公司 | 一种可复配表面活性剂的高效螯合分散剂及其制备方法 |
CN108101534A (zh) * | 2018-01-03 | 2018-06-01 | 王春梅 | 凝胶注模成型氧化钇部分稳定氧化锆陶瓷坩埚的方法 |
CN113354393A (zh) * | 2021-07-13 | 2021-09-07 | 江苏迪丞光电材料有限公司 | 一种凝胶注模制备igzo旋转靶材的制备方法 |
CN114133467A (zh) * | 2021-12-16 | 2022-03-04 | 科之杰新材料集团浙江有限公司 | 一种不饱和酯化单体、酯类低泌水型聚羧酸减水剂及其制备方法 |
CN115504768A (zh) * | 2022-09-22 | 2022-12-23 | 九天智能科技(宁夏)有限公司 | 一种氧化铟镓锌靶材的制备方法 |
-
2023
- 2023-05-30 CN CN202310618514.2A patent/CN116332625B/zh active Active
Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101274242A (zh) * | 2008-01-08 | 2008-10-01 | 陕西科技大学 | 高分子陶瓷分散剂的制备方法 |
CN103302724A (zh) * | 2012-12-28 | 2013-09-18 | 中国船舶重工集团公司第七二五研究所 | 一种凝胶注模成型高密度ito靶材坯体的方法 |
CN107987220A (zh) * | 2017-11-02 | 2018-05-04 | 张家港市德宝化工有限公司 | 一种可复配表面活性剂的高效螯合分散剂及其制备方法 |
CN108101534A (zh) * | 2018-01-03 | 2018-06-01 | 王春梅 | 凝胶注模成型氧化钇部分稳定氧化锆陶瓷坩埚的方法 |
CN113354393A (zh) * | 2021-07-13 | 2021-09-07 | 江苏迪丞光电材料有限公司 | 一种凝胶注模制备igzo旋转靶材的制备方法 |
CN114133467A (zh) * | 2021-12-16 | 2022-03-04 | 科之杰新材料集团浙江有限公司 | 一种不饱和酯化单体、酯类低泌水型聚羧酸减水剂及其制备方法 |
CN115504768A (zh) * | 2022-09-22 | 2022-12-23 | 九天智能科技(宁夏)有限公司 | 一种氧化铟镓锌靶材的制备方法 |
Non-Patent Citations (1)
Title |
---|
刘德荣 ; 周杨 ; .马来酸酐聚乙二醇双酯-丙烯酸共聚物分散剂对碳酸钙在尼龙-6树脂中的分散效果研究.化学建材.2008,(第06期),全文. * |
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