CN116283281A - 一种有双向应变的压电驱动器材料及其制备方法 - Google Patents
一种有双向应变的压电驱动器材料及其制备方法 Download PDFInfo
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Abstract
本发明提供了一种有双向应变的压电驱动器材料及其制备方法,组成通式为:PbxSryBa(1‑x‑y)(TizZr1‑z)O3+α%A,其中:x、y、z均为摩尔比,0.8≤x≤0.95,0≤y≤0.2,0.45≤z≤0.5,A为Al、Bi、La、Mn、Fe元素的氧化物中的一种或多种,每种氧化物的重量比α满足0.05≤α≤0.35,利用固相法合成粉体,然后在高温炉中烧结致密,陶瓷被覆电极后经高温淬火,后在高温油浴里施加高压极化。本发明制备工艺适合大料生产,制备的陶瓷材料具有可加双向电场、低滞后、低损耗及高机械品质因数,适合制作压电陶瓷微位移驱动器,用在精密控制及高精度定位等领域。
Description
技术领域
本发明涉及功能陶瓷材料制备技术领域,具体地说,涉及一种压电陶瓷驱动器材料及其制备方法。
背景技术
压电体受到外机械力作用而发生电极化,并导致压电体两端表面内出现符号相反的束缚电荷,其电荷密度与外机械力成正比,这种现象称为正压电效应。压电体受到外电场作用而发生形变,其形变量与外电场强度成正比,这种现象称为逆压电效应。压电驱动器正是利用逆压电效应产生形变反应为微小位移。
压电驱动器也可定义为,利用压电材料(聚合物双晶片)逆压电效应(横向效应和纵向效应),将电能转变为机械能或机械运动的器件。随着技术的进步,压电微位移驱动器的应用范围逐步增大。采用聚合物双晶片的驱动器,已用于显示器件控制、微位移产生系统等。
目前,比较主流的压电驱动器是由德国PI公司生产,体积小且有较大位移,但只能加单向电压,且滞后较大(15~20%)。位移较大反应为压电陶瓷内部畴的运动,因此也伴随着较大损耗、低的机械品质因数,以及低的线性度,国内常见的芯明天生产的驱动器,在微小电场作用下也能产生较大位移。但以上目前常用驱动器的共同问题在于,滞后较大,不能施加反向电场,否则陶瓷将会在双向电场作用下退极化,失去逆压电效应。
综上所述,目前商用的压电陶瓷材料中,寻找同时具备较大位移、低滞后、可加双向电压、低损耗、高机械品质因数及高线性度的压电驱动器材料,并完善制备工艺仍是科研人员寻找的方向。
发明内容
针对现有技术中的问题,本发明的目的在于提供了一种具有较大的电位移、低滞后、可加双向电压、低损耗、高机械品质因数特性的压电驱动器材料及其制备方法。
根据本发明的一方面,提供了一种有双向应变的压电驱动器材料,所述压电驱动器材料的组成通式为:PbxSryBa(1-x-y)(TizZr1-z)O3+α%A,其中:x、y、z均为摩尔比,0.8≤x≤0.95,0≤y≤0.2,0.45≤z≤0.5,A为Al、Bi、La、Mn、Fe元素的氧化物中的一种或多种,每种氧化物的重量比α满足0.05≤α≤0.35。
优选的:所述压电驱动器材料的压电常数d33为460~550pC/N,位移滞后为5%~8%,损耗为0.1~0.3%。
根据本发明的另一方面,提供了上述有双向应变的压电驱动器材料的制备方法,包括以下步骤:
步骤1,按组成通式的化学计量比称量原料,并混合均匀;
步骤2,将混合均匀的原料通过固相法合成粉体;
步骤3,将粉体过筛、球磨后烘干;
步骤4,将烘干后粉体压制成型得到素坯;
步骤5,将素坯烧结成陶瓷材料,并表面被覆电极;
步骤6,将被覆电极后的陶瓷材料极化,获得压电驱动器材料。
优选的:所述步骤1中通过将原料放入球磨罐中,加入去离子水,混合5~6小时后倒出烘干混合均匀。
优选的:所述步骤2中将混合均匀的原料过筛、压块后,放置在高温炉中,在850℃~1050℃下合成2~4小时,以得到所需要的粉体。
优选的:所述步骤3中将合成后的粉体打碎后过40目筛网,所得粉体放入球磨罐中,加入去离子水,球磨7~8小时后倒出、烘干。
优选的:所述步骤4中将烘干后的粉体加入粘结剂,造粒后压制成型,得到素坯,将压制成型的素坯在550℃~650℃下保温4~6小时。
优选的:所述步骤5中将素坯在1220℃~1280℃下烧结2~4小时,双面平磨,表面被覆电极。
优选的:所述步骤6中的极化过程包括:将被覆电极后的陶瓷加热至550℃后,冷却,然后在150~180℃的油浴里施加2~4kV/mm的电压极化。
优选的:还包括步骤7,将压电驱动器材料粘结成叠堆驱动器。
与现有技术相比,本发明技术方案制备工艺适合大料生产,制备的锆钛酸铅基压电陶瓷材料具有较大的电位移、低滞后、可加双向电压、低损耗、高机械品质因数的特性,可以制作高精度压电驱动器,在精密控制及加工等领域有着广泛的应用前景。
附图说明
通过阅读参照以下附图对非限制性实施例所作的详细描述,本发明的其它特征、目的和优点将会变得更明显。
图1为本发明实施例1制得的陶瓷材料的XRD谱图;
图2为本发明实施例1制得的陶瓷的SEM图;
图3为本发明实施例1制得的陶瓷的极化前电滞回线;
图4为本发明实施例1制得的陶瓷叠堆微位移器件在±300V电压下的应变曲线。
具体实施方式
现在将参考附图更全面地描述示例实施方式。然而,示例实施方式能够以多种形式实施,且不应被理解为限于在此阐述的实施方式。相反,提供这些实施方式使得本发明将全面和完整,并将示例实施方式的构思全面地传达给本领域的技术人员。在图中相同的附图标记表示相同或类似的结构,因而将省略对它们的重复描述。
本发明实施例的有双向应变的压电驱动器材料的组成通式为:PbxSryBa(1-x-y)(TizZr1-z)O3+α%A,(简写为PSBZT)。
其中:x、y、z均为摩尔比,且满足0.8≤x≤0.95,0≤y≤0.2,0.45≤z≤0.5,A为Al、Bi、La、Mn、Fe元素的氧化物中的一种或多种,优选为Al2O3、Bi2O3、La2O3、MnO2、Fe2O3、BiAlO3中的一种或多种。且每种氧化物的重量比α,以PSBZT陶瓷粉体总重量计,满足0.05≤α≤0.35。
优选压电驱动器材料的压电常数d33为460~550pC/N,位移滞后为5%~8%,损耗为0.1~0.3%。因此该陶瓷材料同时具备低滞后、低损耗、双向位移等特性,是一种理想的压电驱动器材料。
同时,本发明的实施例的有双向应变的压电驱动器材料的制备方法,包括以下步骤:
步骤1,按组成通式的化学计量比称量原料,并混合均匀;
优选按照PbxSryBa(1-x-y)(TizZr1-z)O3+α%A通式精确称量化学计量比的Pb3O4、SrCO3、ZrO2、TiO2、BaO及A。将所有原料粉体放入球磨罐中,加入去离子水,混合5~6小时后,倒出烘干;
步骤2,将混合均匀的原料通过固相法合成粉体;
优选将混合均匀的粉体过筛、压块后,放置在高温炉中,在850℃~1050℃下合成2小时,以得到所需要的物相;
步骤3,将粉体过筛、球磨后烘干;
优选将合成后的粉体打碎后过40目筛网,所得粉体放入球磨罐中,加入去离子水,球磨7~8小时后倒出、烘干;
步骤4,将烘干后粉体压制成型得到素坯;
优选将球磨后的粉体加入粘结剂,造粒,在150~200MPa压力下压制成型,压制成型的素坯按排胶曲线升至550~650℃下保温4小时以排出素坯中的有机成分;
并优选粘结剂为PVA或PVB。
步骤5,将素坯烧结成陶瓷材料,并表面被覆电极;
优选将素坯放入高温烧结炉中,在1220~1280℃下烧结2~4小时,经双面平磨至所需尺寸后,表面被覆电极;并优选电极为铜电极、银电极或铂电极。
步骤6,将被覆电极后的陶瓷材料极化,获得压电驱动器材料。
优选将被覆电极后的陶瓷加热至550℃后,冷却,然后在150~180℃油浴里施加2~4kV/mm的电压极化,即可获得可加双向电场、低滞后、低损耗及较高机械品质因数的陶瓷材料。
并优选还包括步骤7,将压电驱动器材料用树脂粘结成叠堆驱动器,即可获得可加双向电场、低滞后、低损耗及高机械品质因数器件。并优选树脂为环氧树脂或酚醛树脂。
与现有技术相比,本发明提供的压电陶瓷材料压电常数d33大于460pC/N;电压位移滞后低至5%,电损耗低于0.3%,可加双向电场、低滞后、低损耗及较高机械品质因数,满足高精度控制及定位等需要,具有广阔的应用前景。并且制备工艺简单,适合大料生产。
下面以具体的实施例描述本发明:
实施例1
压电驱动器材料的组成通式为:
Pb0.9Sr0.05Ba0.05Ti0.47Zr0.53O3+0.25%MnO2+0.20% BiAlO3。
材料制备方法包括如下步骤:
a)按照通式精确称量化学计量比的Pb3O4、SrCO3、ZrO2、TiO2、BaO、MnO2、Bi2O3、Al2O3。将所有原料粉体放入球磨罐中,加入去离子水,混合6小时后倒出烘干;
b)将混合均匀的粉体过筛压块后,放置在高温炉中,在850℃下合成2小时,以获得所需要的物相;
c)将合成后的粉体打碎后,放入球磨罐中,加入去离子水,球磨7小时后倒出烘干;
d)将球磨后的粉体加入PVA为粘结剂,造粒,在200MPa压力下压制成型,将压制成型的素坯按排胶曲线升到650℃温度下保温4小时以排出素坯中的有机成分;
e)将素坯放入高温烧结炉中,在1260℃烧结2.5小时,经双面磨平,表面被覆电极。
f)被覆电极后的陶瓷加热至550℃后,冷却,然后在150℃油浴中施加3kV/mm的电压极化,即可获得可加双向电场、低滞后、低损耗及较高机械品质因数的陶瓷材料。
将制得的陶瓷材料进行物相分析,得到的XRD谱图见图1所示。由图1可见:陶瓷为四方相的钙钛矿结构。
图2为本发明实施例1制得的陶瓷经单面抛光、热腐蚀(1160℃)后,冷却,放大5000倍的SEM图谱,可见陶瓷烧结致密,晶粒大小不一。
图3为本发明实施例1制得的陶瓷材料的电滞回线,由图3可知,陶瓷正负向对称良好,矫顽场适中。
图4为将本发明实施例1制得的陶瓷用树脂粘结剂制作成叠堆微位移器件(陶瓷片厚0.85mm,20层),对器件进行正弦交流电老化,老化电场为±600V/mm,频率1KHz,30分钟后,器件测试不退极化。由图4可知,经电场老化后的器件在±300V电压下有双向应变,正负向位移分别为2.7 0um和2.69um,电位移滞后较小,为5.39%。也可以看出此器件有良好的线性度。
上述制备好的压电陶瓷的其电学性能为:
tanδ | d33(pC/N) | kp | Qm | △H(位移滞后) |
0.15% | 460 | 0.59 | 585 | 5.8% |
实施例2
压电驱动器材料的组成通式为:
Pb0.9Sr0.08Ba0.02Ti0.47Zr0.53O3+0.25%MnO2+0.30%Fe2O3。
材料制备方法包括如下步骤:
a)按照通式精确称量化学计量比的Pb3O4、SrCO3、ZrO2、TiO2、BaO、MnO2、Fe2O3。将所有原料粉体放入球磨罐中,加入去离子水,混合6小时后倒出烘干;
b)将混合均匀的粉体过筛压块后,放置在高温炉中,在850℃下合成2小时,以获得所需要的物相;
c)将合成后的粉体打碎后,放入球磨罐中,加入去离子水,球磨7小时后倒出烘干;
d)将球磨后的粉体加入PVA为粘结剂,造粒,在200MPa压力下压制成型,将压制成型的素坯按排胶曲线升到650℃温度下保温4小时以排出素坯中的有机成分;
e)将素坯放入高温烧结炉中,在1280℃烧结2.5小时,经双面磨平至所需尺寸后,表面被覆电极。
f)被覆电极后的陶瓷在150℃油浴中施加3kV/mm的电压极化,即可获得可加双向电场、低滞后、低损耗及较高机械品质因数的陶瓷。
上述制备好的压电陶瓷其电学性能为:
实施例3
压电驱动器材料的组成通式为:
Pb0.9Sr0.03Ba0.07Ti0.47Zr0.53O3+0.25%MnO2+0.20%Bi2O3+0.20%Fe2O3。
材料制备方法包括如下步骤:
a)按照通式精确称量化学计量比的Pb3O4、SrCO3、ZrO2、TiO2、BaO、MnO2、Bi2O3、Fe2O3。将所有原料粉体放入球磨罐中,加入去离子水,混合6小时后倒出烘干;
b)将混合均匀的粉体过筛压块后,放置在高温炉中,在850℃下合成2小时,以获得所需要的物相;
c)将合成后的粉体打碎后,放入球磨罐中,加入去离子水,球磨7小时后倒出烘干;
d)将球磨后的粉体加入PVA为粘结剂,造粒,在200MPa压力下压制成型,将压制成型的素坯按排胶曲线升到650℃温度下保温4小时以排出素坯中的有机成分;
e)将素坯放入高温烧结炉中,在1280℃烧结2.5小时,经双面磨平至所需尺寸后,表面被覆电极。
f)被覆电极后的陶瓷在150℃油浴中施加3kV/mm的电压极化,即可获得可加双向电场、低滞后、低损耗及较高机械品质因数的陶瓷。
上述制备好的压电陶瓷其电学性能为:
tanδ | d33(pC/N) | kp | Qm | △H(位移滞后) |
0.26% | 553 | 0.68 | 486 | 8.3% |
综上所述,本发明实施例制备的用于驱动器材料的压电陶瓷片压电常数d33在460~553pC/N之间;位移滞后在5.8%~8.3%之间;损耗在0.15%~0.26%之间。因此该类陶瓷具备较大位移、低损耗、较低滞后的特性,同时陶瓷可加双向电场不退极化、有较高机械品质因数,可满足高精度压电驱动器应用需求,极具应用前景。
以上内容是结合具体的优选实施方式对本发明所作的进一步详细说明,不能认定本发明的具体实施只局限于这些说明。对于本发明所属技术领域的普通技术人员来说,在不脱离本发明构思的前提下,还可以做出若干简单推演或替换,都应当视为属于本发明的保护范围。
Claims (10)
1.一种有双向应变的压电驱动器材料,其特征在于,所述压电驱动器材料的组成通式为:PbxSryBa(1-x-y)(TizZr1-z)O3+α%A,其中:x、y、z均为摩尔比,0.8≤x≤0.95,0≤y≤0.2,0.45≤z≤0.5,A为Al、Bi、La、Mn、Fe元素的氧化物中的一种或多种,每种氧化物的重量比α满足0.05≤α≤0.35。
2.根据权利要求1所述的有双向应变的压电驱动器材料,其特征在于:所述压电驱动器材料的压电常数d33为460~550pC/N,位移滞后为5%~8%,损耗为0.1~0.3%。
3.根据权利要求1所述的有双向应变的压电驱动器材料的制备方法,其特征在于:包括以下步骤:
步骤1,按组成通式的化学计量比称量原料,并混合均匀;
步骤2,将混合均匀的原料通过固相法合成粉体;
步骤3,将粉体过筛、球磨后烘干;
步骤4,将烘干后粉体压制成型得到素坯;
步骤5,将素坯烧结成陶瓷材料,并表面被覆电极;
步骤6,将被覆电极后的陶瓷材料极化,获得压电驱动器材料。
4.根据权利要求3所述的有双向应变的压电驱动器材料的制备方法,其特征在于:所述步骤1中通过将原料放入球磨罐中,加入去离子水,混合5~6小时后倒出烘干混合均匀。
5.根据权利要求3所述的有双向应变的压电驱动器材料的制备方法,其特征在于:所述步骤2中将混合均匀的原料过筛、压块后,放置在高温炉中,在850℃~1050℃下合成2~4小时,以得到所需要的粉体。
6.根据权利要求3所述的有双向应变的压电驱动器材料的制备方法,其特征在于:所述步骤3中将合成后的粉体打碎后过40目筛网,所得粉体放入球磨罐中,加入去离子水,球磨7~8小时后倒出、烘干。
7.根据权利要求3所述的有双向应变的压电驱动器材料的制备方法,其特征在于:所述步骤4中将烘干后的粉体加入粘结剂,造粒后压制成型,得到素坯,将压制成型的素坯在550℃~650℃下保温4~6小时。
8.根据权利要求3所述的有双向应变的压电驱动器材料的制备方法,其特征在于:所述步骤5中将素坯在1220℃~1280℃下烧结2~4小时,双面平磨,表面被覆电极。
9.根据权利要求3所述的有双向应变的压电驱动器材料的制备方法,其特征在于:所述步骤6中的极化过程包括:将被覆电极后的陶瓷加热至550℃后,冷却,然后在150~180℃的油浴里施加2~4kV/mm的电压极化。
10.根据权利要求3所述的有双向应变的压电驱动器材料的制备方法,其特征在于:还包括步骤7,将压电驱动器材料粘结成叠堆驱动器。
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