CN116139612A - 同时去除易燃气体与一氧化二氮的装置与方法 - Google Patents
同时去除易燃气体与一氧化二氮的装置与方法 Download PDFInfo
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- nitrous oxide
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- GQPLMRYTRLFLPF-UHFFFAOYSA-N Nitrous Oxide Chemical compound [O-][N+]#N GQPLMRYTRLFLPF-UHFFFAOYSA-N 0.000 title claims abstract description 132
- 239000001272 nitrous oxide Substances 0.000 title claims abstract description 64
- 238000000034 method Methods 0.000 title claims abstract description 37
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- 239000003054 catalyst Substances 0.000 claims abstract description 55
- 230000003647 oxidation Effects 0.000 claims abstract description 42
- 238000007254 oxidation reaction Methods 0.000 claims abstract description 42
- 239000000428 dust Substances 0.000 claims abstract description 39
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims abstract description 25
- 229910052757 nitrogen Inorganic materials 0.000 claims abstract description 12
- 238000000354 decomposition reaction Methods 0.000 claims abstract description 10
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- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims abstract description 9
- 239000001301 oxygen Substances 0.000 claims abstract description 9
- 238000007599 discharging Methods 0.000 claims abstract description 3
- UQSXHKLRYXJYBZ-UHFFFAOYSA-N Iron oxide Chemical compound [Fe]=O UQSXHKLRYXJYBZ-UHFFFAOYSA-N 0.000 claims description 14
- 239000002245 particle Substances 0.000 claims description 11
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 claims description 8
- 238000001914 filtration Methods 0.000 claims description 7
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 6
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- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims 1
- 229910001873 dinitrogen Inorganic materials 0.000 claims 1
- BHEPBYXIRTUNPN-UHFFFAOYSA-N hydridophosphorus(.) (triplet) Chemical compound [PH] BHEPBYXIRTUNPN-UHFFFAOYSA-N 0.000 claims 1
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- MKYBYDHXWVHEJW-UHFFFAOYSA-N N-[1-oxo-1-(2,4,6,7-tetrahydrotriazolo[4,5-c]pyridin-5-yl)propan-2-yl]-2-[[3-(trifluoromethoxy)phenyl]methylamino]pyrimidine-5-carboxamide Chemical compound O=C(C(C)NC(=O)C=1C=NC(=NC=1)NCC1=CC(=CC=C1)OC(F)(F)F)N1CC2=C(CC1)NN=N2 MKYBYDHXWVHEJW-UHFFFAOYSA-N 0.000 description 1
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- 229910052746 lanthanum Inorganic materials 0.000 description 1
- FZLIPJUXYLNCLC-UHFFFAOYSA-N lanthanum atom Chemical compound [La] FZLIPJUXYLNCLC-UHFFFAOYSA-N 0.000 description 1
- 229910052748 manganese Inorganic materials 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
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- 229910000510 noble metal Inorganic materials 0.000 description 1
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- 229910052697 platinum Inorganic materials 0.000 description 1
- 229910052703 rhodium Inorganic materials 0.000 description 1
- MHOVAHRLVXNVSD-UHFFFAOYSA-N rhodium atom Chemical compound [Rh] MHOVAHRLVXNVSD-UHFFFAOYSA-N 0.000 description 1
- 229910000077 silane Inorganic materials 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
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- 239000000126 substance Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 238000005979 thermal decomposition reaction Methods 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- LEONUFNNVUYDNQ-UHFFFAOYSA-N vanadium atom Chemical compound [V] LEONUFNNVUYDNQ-UHFFFAOYSA-N 0.000 description 1
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Abstract
本发明提供了一种同时去除易燃气体与一氧化二氮的装置与方法。该装置包括热氧化腔、耐高温滤尘器与催化剂槽。热氧化腔用以接收来自工艺机台的尾气。尾气包含易燃气体与一氧化二氮,其中热氧化腔具有第一排气管,以排放一氧化二氮与尾气经热氧化后产生的粉尘。耐高温滤尘器接收来自第一排气管的粉尘与一氧化二氮,其中耐高温滤尘器具有过滤纤维网与第二排气管,第二排气管用以排放一氧化二氮。催化剂槽接收来自第二排气管的一氧化二氮,其中催化剂槽中具有一氧化二氮分解催化剂,以将一氧化二氮分解成氮气与氧气。
Description
技术领域
本发明涉及一种处理工艺机台的尾气的技术,且特别涉及一种同时去除易燃气体与一氧化二氮的装置与方法。
背景技术
2016年全球温室气体总排放量已高达500亿公吨的碳当量(CO2e),根据2018年美国环境保护暑公告的温室气体排放量统计显示,一氧化二氮(N2O)为排放第三大的温室气体。尤其,近年来半导体产业排放量最多的温室气体就是N2O。
目前大多使用电热水洗抑或燃烧水洗来处理主要含N2O的工艺尾气,但是当N2O经过高温分解后会产生大量的空气污染物NOX排放问题。此外,因为半导体工艺中不只使用N2O,还会伴随着含硅磷砷硼等易燃性气体一起使用,当这些易燃气体经高温氧化后会形成无机粉尘,而导致另类的细悬浮微粒(PM2.5)污染。
发明内容
本发明是针对一种同时去除易燃气体与一氧化二氮的装置,能处理N2O浓度较高的气体并且同时处理易燃气体。
本发明还针对一种同时去除易燃气体与一氧化二氮的方法,能将N2O分解为N2与O2达到零污染排放,并防止易燃气体经高温氧化后产生的粉尘被排放到外界。
根据本发明的一实施例,同时去除易燃气体与一氧化二氮的装置包括热氧化腔、耐高温滤尘器与催化剂槽。热氧化腔用以接收来自工艺机台的尾气。尾气包含易燃气体与一氧化二氮,其中热氧化腔具有第一排气管,以排放一氧化二氮与尾气经热氧化后产生的粉尘。耐高温滤尘器接收来自第一排气管的粉尘与一氧化二氮,其中耐高温滤尘器具有过滤纤维网及第二排气管,第二排气管用以排放一氧化二氮。催化剂槽接收来自第二排气管的一氧化二氮,其中催化剂槽中具有一氧化二氮分解催化剂,以将一氧化二氮分解成氮气(N2)与氧气(O2)。
根据本发明的另一实施例,同时去除易燃气体与一氧化二氮的方法是使用上述装置,先用上述热氧化腔加热来自工艺机台的尾气,其中尾气包含易燃气体与一氧化二氮,且易燃气体经热氧化成为粉尘。然后,使用上述耐高温滤尘器过滤来自热氧化腔的粉尘,再使用上述催化剂槽,将从耐高温滤尘器排放出的一氧化二氮分解成氮气与氧气。
基于上述,根据本发明的装置能够先以热氧化腔处理含硅磷砷硼等易燃性气体,再经由耐高温滤尘器滤除工艺端与上述热氧化腔所产生的无机粉尘,最后,通过含一氧化二氮分解催化剂的催化剂槽,将N2O完全分解成氮气与氧气达到零污染排放,以解决以往使用高温热分解法处理N2O而产生大量NOX有害副产物的缺点,并且过滤其他工艺气体氧化形成的粉尘。
为让本发明的上述特征和优点能更明显易懂,下文特举实施例,并配合附图作详细说明如下。
附图说明
图1是依照本发明的一实施例的一种同时去除易燃气体与一氧化二氮的装置示意图。
图2是依照本发明的另一实施例的一种同时去除易燃气体与一氧化二氮的步骤图。
图3是实验例1的热氧化腔的检测设备示意图。
图4是实验例1的SiH4浓度随时间变化的曲线图。
图5是实验例2的耐高温滤尘器的检测设备示意图。
图6是实验例3的催化剂槽的检测设备示意图。
【附图标记说明】
100:装置
102:热氧化腔
104:耐高温滤尘器
106:催化剂槽
108:第一排气管
110:第二排气管
112:过滤纤维网
114:第三排气管
116:第一泵
118:输入管
120:第二泵
122a、122b、122c、122d:采样孔
200、202、203:步骤
MFC:质量流量控制器
FTIR:傅里叶变换红外分光镜
具体实施方式
以下实施例中所附的附图是为了能更完整地描述本发明的实施例,然而本发明仍可使用许多不同的形式来实施,不限于所记载的实施例。此外,为了清楚起见,各个装置或管路的相对距离、尺寸及位置可能缩小或放大。
图1是依照本发明的一实施例的一种同时去除易燃气体与一氧化二氮的装置示意图。
请参照图1,本实施例的装置100基本包括热氧化腔102、耐高温滤尘器104与催化剂槽106。热氧化腔102用来接收来自工艺机台(图中未绘示)的尾气,其中尾气可包含易燃气体与一氧化二氮(nitrous oxide,N2O)。热氧化腔102具有第一排气管108,以排放N2O与尾气经热氧化后产生的粉尘。
高温滤尘器104则是接收来自第一排气管108的粉尘与N2O,其中设置有可耐高温的过滤纤维网112,耐高温滤尘器104的操作温度从常温至高温,如在20℃~750℃之间。耐高温滤尘器104还具有第二排气管110,以排放N2O。如图1所示,第一排气管108连至耐高温滤尘器104的位置一般低于第二排气管110的出口位置,可使第一排气管108的粉尘与N2O进入高温滤尘器104之后,粉尘受过滤纤维网112拦阻落在高温滤尘器104底部,而N2O通过过滤纤维网112从上方的第二排气管110排出。在一实施例中,过滤纤维网112的材料为耐高温材料,不特别限定,例如可为陶瓷(Al2O3)纤维、聚四氟乙烯(PTFE)纤维、聚酰亚胺(PI)纤维、芳族聚酰胺(Aramid)纤维、聚苯硫醚(PPS)纤维;过滤纤维网112具高孔隙率,举例来说,当过滤纤维网的密度约0.4克/立方公分,陶瓷纤维直径约2-3μm,可滤除粒径100nm-1000nm的粉尘。
催化剂槽106接收来自第二排气管110的N2O,且催化剂槽106中具有一氧化二氮分解催化剂(图中未绘示),能将N2O分解成氮气(N2)与氧气(O2)。在一实施例中,催化剂槽106中填充有一氧化二氮分解催化剂颗粒,催化剂颗粒粒径可介于2mm~5mm,催化剂槽106中的孔隙率例如在60%~70%。前述“孔隙率”的定义是在固定体积下,填充催化剂后的水重/未填充催化剂的水重×100%。催化剂粒径或催化剂槽的孔隙率如果太小,不利于气体通过,影响处理效率。在催化剂的材料方面,在一实施例中,一氧化二氮分解催化剂可为氧化铁与氧化铝复合催化剂,搭配的催化剂载体可为二氧化钛,一般简称铁铝钛催化剂,其中,氧化铁与氧化铝总摩尔数与二氧化钛摩尔数的比为3.5∶1至2.5∶1,氧化铁与氧化铝的摩尔比可例如为2.5∶1至1.5∶1。然而,本发明并不限于此,上述一氧化二氮分解催化剂也可包含铂(Pt)、钯(Pd)、铑(Rh)、铜(Cu)、镍(Ni)、钴(Co)、锰(Mn)、银(Ag)、钼(Mo)、钨(W)、钒(V)、镧(La)等金属元素。不过,相较于贵金属元素,采用铁铝钛催化剂可大幅降低处理成本。催化剂槽106还可包括第三排气管114,用以输出分解后的N2与O2。
请继续参照图1,本实施例的装置100还可设置第一泵116,来增加尾气进入热氧化腔102的压力,例如将第一泵116连到尾气的输入管118。而在第三排气管114处也可设置第二泵120,用以向第三排气管114提供负压,有助于催化剂槽106内气体的流动。而且,为了即时侦测各个设备的效果,可在第一排气管108增设采样孔122a、在第二排气管110增设采样孔122b、在第三排气管114增设采样孔122c、在尾气的输入管118增设采样孔122d。采样孔122a可用来采样并检测气体(易燃气体与N2O)浓度,以确认易燃气体是否被氧化去除。采样孔122b可用来采样并检测粉尘是否被滤掉,如果粉尘含量超过预设值,则须更换过滤纤维网112。采样孔122c可用来采样并检测N2O是否被完全分解成N2与O2,如果N2O处理效率<90%时,需更换催化剂、检修或更换装置100。采样孔122d可用来采样并检测尾气中的气体(易燃气体与N2O)浓度作为初始值。
图2是依照本发明的另一实施例的一种同时去除易燃气体与一氧化二氮的步骤图。
请参照图2,本实施例是使用上一实施例的装置100。首先进行步骤200,先用上述热氧化腔102(如图1所示)加热来自工艺机台的尾气,例如半导体工艺机台,其中尾气包含易燃气体与N2O,且易燃气体会经热氧化成为粉尘,其中热氧化的温度例如在450℃~750℃之间。易燃气体包括含硅、磷、砷与硼中至少一种组成的气体,例如SiH4、Si2H6、PH3、AsH3或B2H6。在使用热氧化腔加热来自工艺机台的尾气之前,还可先使用第一泵116(如图1所示)通入氮气,以对尾气加压,其中氮气的流量可控制在500LPM以下,有利于进入后端催化剂槽106(如图1所述)的N2O的反应。由于进入热氧化腔102(如图1所示)的流量与压力相关,所以热氧化腔102(如图1所示)的压力可控制在650torr~750torr之间。
然后,进行步骤202,使用耐高温滤尘器104(如图1所示)过滤来自热氧化腔102(如图1所示)的粉尘。在此道步骤202中不需要特别控制温度或流量,进入耐高温滤尘器104(如图1所示)的气体自然能经由过滤纤维网112(如图1所示)进入第二排气管110(如图1所示)。
接着,进行步骤203,使用上述催化剂槽106(如图1所示)将从耐高温滤尘器104(如图1所示)排放出的N2O分解成N2与O2。催化剂槽106(如图1所示)的工作温度例如在450℃~600℃之间。由于本发明的装置是将热氧化易燃气体的设备与分解一氧化二氮的设备整合在一起,并在两者之间加设过滤器,所以能够连续地处理工艺的尾气,具有节省处理时间与提高去除效率的功效。
以下列举实验来验证本发明的功效,但本发明并不局限于以下的内容。
<实验例1>
半导体厂所使用含硅磷砷硼等易燃气体中,以硅烷(SiH4)的用量最大,且这些易燃气体在温度500℃时,皆可断键分解,故实验例1中使用SiH4作为测试气体。
首先,设置如图3所示的检测设备以电热或燃烧加热体积约1900L的腔体至500℃,然后利用质量流量控制器(MFC)通入纯SiH4,经不同流量的纯N2稀释再通过热氧化腔处理,利用傅里叶变换红外分光镜(FTIR)分析热氧化腔前后端的SiH4浓度并计算破坏去除效率(Destruction and Removal Efficiency,DRE)。实验结果显示于下表1与图4。
表1
从图4与表1可得到,本发明的装置的热氧化腔能有效去除SiH4,使其氧化成为氧化硅。而且,流量越低,代表进入热氧化腔的SiH4越浓,DRE越高。
<实验例2>
SiH4经由高温氧化后所产生粉末状的SiO2粒径峰值大约在200nm~300nm,且过滤温度越高,其过滤效果越好,故本实验以粒径约200nm的SiO2于常温下进行过滤实验,测试耐高温滤尘器的过滤效果。
首先,设置如图5所示的检测设备,在45L的耐高温滤尘器中架设1支陶瓷过滤器,可以处理的气体流量为350LPM以下,然后在气流中以PALAS(粉尘气溶胶发生器)等速添加200nm的SiO2粉末,采样并测量耐高温滤尘器出入口端的粉尘浓度,计算其粉尘去除效率(Particle Removal Efficiency,PRE)。实验结果显示于下表2。
表2
从表2可得到,本发明的装置的耐高温滤尘器,即使在常温也有高达97%以上的PRE。因此,在接收来自热氧化腔的粉尘时不需特别控制耐高温滤尘器中的温度,即可达到有效过滤的结果。
<实验例3>
为了模拟半导体厂真实工艺N2O尾气浓度,故本实验以铁铝钛催化剂进行分解浓度约20%的N2O实验。
首先,设置如图6所示的检测设备,催化剂槽体积约20ml,其中填充有铁铝钛催化剂颗粒,颗粒粒径介于2mm~5mm,且催化剂槽中的孔隙率约为62%;铁铝钛催化剂中的氧化铁与氧化铝总摩尔数与二氧化钛摩尔数的比约为3∶1,氧化铁与氧化铝的摩尔比约为2∶1。然后以下列条件进行测试。
入口端N2O浓度:~20%
气体流量:648.2sccm(129.9sccm N2O、518.3sccm N2)
反应温度:500℃
GHSV:1944.6h-1(滞留时间~1.9秒)
线速度:10.2cm/s
综上所述,本发明的装置是由连续连接的热氧化腔、耐高温滤尘器以及催化剂槽组成,所以能够先利用热氧化腔处理含硅磷砷硼等易燃性气体,再经由耐高温滤尘器滤除工艺端与上述热氧化腔所产生的粉尘,最后通过催化剂槽将N2O完全分解成氮气与氧气,以达到零污染排放的结果并且可解决传统使用高温热分解法处理N2O而产生大量NOX有害副产物的问题,同时可处理掉其他工艺中的易燃气体。
最后应说明的是:以上各实施例仅用以说明本发明的技术方案,而非对其限制;尽管参照前述各实施例对本发明进行了详细的说明,本领域的普通技术人员应当理解:其依然可以对前述各实施例所记载的技术方案进行修改,或者对其中部分或者全部技术特征进行等同替换;而这些修改或者替换,并不使相应技术方案的本质脱离本发明各实施例技术方案的范围。
Claims (17)
1.一种同时去除易燃气体与一氧化二氮的装置,其特征在于,包括:
热氧化腔,接收来自工艺机台的尾气,所述尾气包含易燃气体与一氧化二氮,其中所述热氧化腔具有第一排气管,以排放所述尾气经热氧化后产生的粉尘与一氧化二氮;
耐高温滤尘器,接收来自所述第一排气管的所述粉尘与一氧化二氮,其中所述耐高温滤尘器具有过滤纤维网及第二排气管,所述第二排气管用以排放一氧化二氮;以及
催化剂槽,接收来自所述第二排气管的一氧化二氮,其中所述催化剂槽中具有一氧化二氮分解催化剂,以将一氧化二氮分解成氮气与氧气。
2.根据权利要求1所述的同时去除易燃气体与一氧化二氮的装置,其特征在于,所述耐高温滤尘器的操作温度在20℃~750℃之间。
3.根据权利要求1所述的同时去除易燃气体与一氧化二氮的装置,其特征在于,所述一氧化二氮分解催化剂包括铁铝钛催化剂,所述铁铝钛催化剂中的氧化铁与氧化铝总摩尔数与二氧化钛摩尔数的比为3.5∶1至2.5∶1,所述铁铝钛催化剂中的氧化铁与氧化铝的摩尔比为2.5∶1至1.5∶1。
4.根据权利要求1所述的同时去除易燃气体与一氧化二氮的装置,其特征在于,所述催化剂槽中的孔隙率为60%~70%。
5.根据权利要求1所述的同时去除易燃气体与一氧化二氮的装置,其特征在于,所述一氧化二氮分解催化剂的颗粒粒径介于2mm~5mm。
6.根据权利要求1所述的同时去除易燃气体与一氧化二氮的装置,其特征在于,还包括第一泵,以增加所述尾气进入所述热氧化腔的压力。
7.根据权利要求1所述的同时去除易燃气体与一氧化二氮的装置,其特征在于,所述第一排气管连至所述耐高温滤尘器的位置低于所述第二排气管的出口位置。
8.根据权利要求1所述的同时去除易燃气体与一氧化二氮的装置,其特征在于,所述催化剂槽包括第三排气管,用以输出氮气与氧气。
9.根据权利要求8所述的同时去除易燃气体与一氧化二氮的装置,其特征在于,还包括第二泵,以向所述第三排气管提供负压。
10.一种使用根据权利要求1~9中任一所述的装置同时去除易燃气体与一氧化二氮的方法,其特征在于,包括:
使用所述热氧化腔加热来自工艺机台的尾气,其中所述尾气包含易燃气体与一氧化二氮,且所述易燃气体经热氧化成为粉尘;
使用所述耐高温滤尘器过滤来自所述热氧化腔的所述粉尘;以及
使用所述催化剂槽,将所述耐高温滤尘器排放出的一氧化二氮分解成氮气与氧气。
11.根据权利要求10所述的同时去除易燃气体与一氧化二氮的方法,其特征在于,所述热氧化的温度在450℃~750℃之间。
12.根据权利要求10所述的同时去除易燃气体与一氧化二氮的方法,其特征在于,所述易燃气体包括含硅、磷、砷与硼中至少一种组成的气体。
13.根据权利要求10所述的同时去除易燃气体与一氧化二氮的方法,其特征在于,所述易燃气体包括SiH4、Si2H6、PH3、AsH3或B2H6。
14.根据权利要求10所述的同时去除易燃气体与一氧化二氮的方法,其特征在于,所述热氧化腔的压力在650torr~750torr之间。
15.根据权利要求10所述的同时去除易燃气体与一氧化二氮的方法,其特征在于,在使用所述热氧化腔加热来自所述尾气之前,还包括使用第一泵通入氮气,以对所述尾气加压。
16.根据权利要求10所述的同时去除易燃气体与一氧化二氮的方法,其特征在于,所述氮气的流量在500LPM以下。
17.根据权利要求10所述的同时去除易燃气体与一氧化二氮的方法,其特征在于,所述催化剂槽的工作温度在450℃~600℃之间。
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TW553761B (en) | 1999-11-05 | 2003-09-21 | Applied Materials Inc | Treatment of process gas effluent |
JP4169236B2 (ja) | 2000-05-10 | 2008-10-22 | メタウォーター株式会社 | 焼却炉からのn2o排出低減方法 |
EP1819422B1 (en) | 2004-11-30 | 2014-07-30 | Showa Denko K.K. | Treatment method and treatment apparatus for gas containing nitrous oxide |
WO2006135911A1 (en) | 2005-06-13 | 2006-12-21 | Applied Materials, Inc. | Methods and apparatus for abatement of waste gas |
WO2008142765A1 (ja) | 2007-05-18 | 2008-11-27 | Nippon Shokubai Co., Ltd. | 亜酸化窒素分解用触媒および亜酸化窒素含有ガスの浄化方法 |
CN101380578B (zh) | 2007-09-06 | 2011-07-20 | 中国科学院生态环境研究中心 | 一种用于氨选择性还原氮氧化物的铁钛复合氧化物催化剂 |
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WO2009125457A1 (ja) | 2008-04-11 | 2009-10-15 | カンケンテクノ株式会社 | シラン系ガス及びフッ素系ガス含有排ガスの処理方法及び該方法を用いた排ガス処理装置 |
TW201002413A (en) * | 2008-06-17 | 2010-01-16 | Taiheiyo Cement Corp | Device and method for treating cement kiln exhaust gas |
GB2497273B (en) * | 2011-11-19 | 2017-09-13 | Edwards Ltd | Apparatus for treating a gas stream |
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US9242238B2 (en) * | 2012-10-19 | 2016-01-26 | Basf Corporation | Mixed metal 8-ring small pore molecular sieve catalyst compositions, catalytic articles, systems, and methods |
US9023303B2 (en) * | 2013-04-15 | 2015-05-05 | Airgard, Inc. | Extended or multiple reaction zones in scrubbing apparatus |
US9517457B2 (en) * | 2013-10-30 | 2016-12-13 | Cummins Inc. | Aftertreatment systems with reduced N2O generation |
CN104437499A (zh) | 2014-10-31 | 2015-03-25 | 兰州天越环保科技有限公司 | 一种用于分解氧化亚氮的催化剂及其制备方法 |
WO2017112615A1 (en) | 2015-12-22 | 2017-06-29 | Shell Internationale Research Maatschappij B.V. | A catalyst bed and method for reducing nitrogen oxides |
KR101825825B1 (ko) | 2016-08-02 | 2018-02-06 | 주식회사 에코프로 | 질소산화물, 염화불화탄소류, 수소염화불화탄소류, 수소불화탄소류 및 과불화화합물을 포함하는 복합 폐가스의 통합 처리 시스템 |
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TWI683697B (zh) * | 2018-09-12 | 2020-02-01 | 富利康科技股份有限公司 | 具有陶纖濾管之粒狀物與一氧化二氮一體去除裝置 |
WO2022005985A1 (en) * | 2020-06-30 | 2022-01-06 | Cummins Inc. | Aqueous fluid system and method for cleaning and remanufacturing of aftertreatment system components |
TWM614915U (zh) * | 2021-05-05 | 2021-07-21 | 傑智環境科技股份有限公司 | 焚化單元尾氣氮氧化物再淨化裝置及廢氣淨化系統 |
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