CN116134720A - 静电致动器 - Google Patents

静电致动器 Download PDF

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Publication number
CN116134720A
CN116134720A CN202180062986.3A CN202180062986A CN116134720A CN 116134720 A CN116134720 A CN 116134720A CN 202180062986 A CN202180062986 A CN 202180062986A CN 116134720 A CN116134720 A CN 116134720A
Authority
CN
China
Prior art keywords
stator
mover
electrostatic actuator
opposing
electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
CN202180062986.3A
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English (en)
Chinese (zh)
Inventor
千叶正毅
和气美纪夫
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Zeon Corp
Original Assignee
Zeon Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Zeon Corp filed Critical Zeon Corp
Publication of CN116134720A publication Critical patent/CN116134720A/zh
Withdrawn legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N1/00—Electrostatic generators or motors using a solid moving electrostatic charge carrier
    • H02N1/002—Electrostatic motors
    • H02N1/004—Electrostatic motors in which a body is moved along a path due to interaction with an electric field travelling along the path

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  • Micromachines (AREA)
CN202180062986.3A 2020-09-28 2021-08-26 静电致动器 Withdrawn CN116134720A (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2020-161620 2020-09-28
JP2020161620 2020-09-28
PCT/JP2021/031413 WO2022064952A1 (ja) 2020-09-28 2021-08-26 静電アクチュエータ

Publications (1)

Publication Number Publication Date
CN116134720A true CN116134720A (zh) 2023-05-16

Family

ID=80845158

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202180062986.3A Withdrawn CN116134720A (zh) 2020-09-28 2021-08-26 静电致动器

Country Status (4)

Country Link
US (1) US20230369992A1 (https=)
JP (1) JPWO2022064952A1 (https=)
CN (1) CN116134720A (https=)
WO (1) WO2022064952A1 (https=)

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2719365B2 (ja) * 1988-10-21 1998-02-25 オリンパス光学工業株式会社 焦電アクチュエータ
JP3452739B2 (ja) * 1996-11-25 2003-09-29 アスモ株式会社 静電アクチュエータ
JP3805713B2 (ja) * 2002-04-24 2006-08-09 独立行政法人科学技術振興機構 静電浮上モータ

Also Published As

Publication number Publication date
WO2022064952A1 (ja) 2022-03-31
JPWO2022064952A1 (https=) 2022-03-31
US20230369992A1 (en) 2023-11-16

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Application publication date: 20230516

WW01 Invention patent application withdrawn after publication