CN116113491A8 - 等离子体处理的方法和装置 - Google Patents

等离子体处理的方法和装置 Download PDF

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Publication number
CN116113491A8
CN116113491A8 CN202180062404.1A CN202180062404A CN116113491A8 CN 116113491 A8 CN116113491 A8 CN 116113491A8 CN 202180062404 A CN202180062404 A CN 202180062404A CN 116113491 A8 CN116113491 A8 CN 116113491A8
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Prior art keywords
treatment
sample
plasma processing
control system
temperature control
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Pending
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CN202180062404.1A
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CN116113491A (zh
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J-M·瑟伊莫尔
T·豪伊
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Haydale Graphene Industries PLC
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Haydale Graphene Industries PLC
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Priority claimed from GB2014776.5A external-priority patent/GB2598934B/en
Priority claimed from GB2014779.9A external-priority patent/GB2598936B/en
Application filed by Haydale Graphene Industries PLC filed Critical Haydale Graphene Industries PLC
Publication of CN116113491A publication Critical patent/CN116113491A/zh
Publication of CN116113491A8 publication Critical patent/CN116113491A8/zh
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Abstract

本发明涉及一种使用辉光放电等离子体处理样品的方法，所述方法包括一个或多个处理步骤，其中所述用于处理的样品在设有温度控制系统的处理容器中进行等离子体处理，其中，在所述一个或多个处理步骤期间，所述处理容器围绕轴线旋转以搅动所述样品，所述温度控制系统用于冷却或加热所述样品。本发明还涉及一种在这种方法中使用的装置。
CN202180062404.1A 2020-09-18 2021-09-17 等离子体处理的方法和装置 Pending CN116113491A (zh)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
GB2014776.5A GB2598934B (en) 2020-09-18 2020-09-18 Method and apparatus for plasma processing
GB2014776.5 2020-09-18
GB2014779.9 2020-09-18
GB2014779.9A GB2598936B (en) 2020-09-18 2020-09-18 Method and apparatus for plasma processing
PCT/EP2021/075697 WO2022058546A1 (en) 2020-09-18 2021-09-17 Method and apparatus for plasma processing

Publications (2)

Publication Number Publication Date
CN116113491A CN116113491A (zh) 2023-05-12
CN116113491A8 true CN116113491A8 (zh) 2024-05-28

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Application Number Title Priority Date Filing Date
CN202180062764.1A Pending CN116133743A (zh) 2020-09-18 2021-09-08 输送等离子体处理原料的方法和装置
CN202180062428.7A Pending CN116133742A (zh) 2020-09-18 2021-09-17 等离子体处理的方法和装置
CN202180062404.1A Pending CN116113491A (zh) 2020-09-18 2021-09-17 等离子体处理的方法和装置

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CN202180062764.1A Pending CN116133743A (zh) 2020-09-18 2021-09-08 输送等离子体处理原料的方法和装置
CN202180062428.7A Pending CN116133742A (zh) 2020-09-18 2021-09-17 等离子体处理的方法和装置

Country Status (6)

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US (3) US20240024840A1 (zh)
EP (3) EP4213982A1 (zh)
JP (1) JP2023542903A (zh)
KR (1) KR20230069960A (zh)
CN (3) CN116133743A (zh)
WO (3) WO2022058218A1 (zh)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2610394A (en) 2021-09-01 2023-03-08 Haydale Graphene Ind Plc Shoe sole
GB2612057A (en) 2021-10-20 2023-04-26 Haydale Graphene Ind Plc Heatable garment, fabrics for such garments, and methods of manufacture
GB2625980A (en) 2022-09-23 2024-07-10 Haydale Graphene Ind Plc Composition

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