CN116133743A8 - 输送等离子体处理原料的方法和装置 - Google Patents

输送等离子体处理原料的方法和装置 Download PDF

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Publication number
CN116133743A8
CN116133743A8 CN202180062764.1A CN202180062764A CN116133743A8 CN 116133743 A8 CN116133743 A8 CN 116133743A8 CN 202180062764 A CN202180062764 A CN 202180062764A CN 116133743 A8 CN116133743 A8 CN 116133743A8
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Prior art keywords
reagent
plasma
delivering
treatment vessel
feedstock
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CN202180062764.1A
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CN116133743A (zh
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J-M·瑟伊莫尔
T·豪伊
L·艾德沃斯
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Haydale Graphene Industries PLC
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Haydale Graphene Industries PLC
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Priority claimed from GB2014776.5A external-priority patent/GB2598934B/en
Priority claimed from GB2014779.9A external-priority patent/GB2598936B/en
Application filed by Haydale Graphene Industries PLC filed Critical Haydale Graphene Industries PLC
Publication of CN116133743A publication Critical patent/CN116133743A/zh
Publication of CN116133743A8 publication Critical patent/CN116133743A8/zh
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Abstract

本申请涉及用于将液体或固体原料输送到等离子体处理容器中的方法和装置。更具体地，本发明提供了一种在包括处理容器的装置中使用辉光放电等离子体处理样品的方法，该方法包括(i)在气体流量控制器的控制下通过气体输送管线将气态等离子体形成原料输送到处理容器中，并且在处理容器中由气态等离子体形成原料形成辉光放电等离子体；以及同时(ii)在试剂剂量控制器的控制下将试剂输送到处理容器中，其中试剂是液体或固体；(iii)使样品与辉光放电等离子体和试剂接触；其中气体流量控制器和试剂剂量控制器可以独立控制气态等离子体形成原料和试剂的输送速率。
CN202180062764.1A 2020-09-18 2021-09-08 输送等离子体处理原料的方法和装置 Pending CN116133743A (zh)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
GB2014776.5 2020-09-18
GB2014776.5A GB2598934B (en) 2020-09-18 2020-09-18 Method and apparatus for plasma processing
GB2014779.9A GB2598936B (en) 2020-09-18 2020-09-18 Method and apparatus for plasma processing
GB2014779.9 2020-09-18
PCT/EP2021/074727 WO2022058218A1 (en) 2020-09-18 2021-09-08 Methods and apparatus for delivering feedstocks for plasma treatment

Publications (2)

Publication Number Publication Date
CN116133743A CN116133743A (zh) 2023-05-16
CN116133743A8 true CN116133743A8 (zh) 2024-05-28

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CN202180062764.1A Pending CN116133743A (zh) 2020-09-18 2021-09-08 输送等离子体处理原料的方法和装置
CN202180062404.1A Pending CN116113491A (zh) 2020-09-18 2021-09-17 等离子体处理的方法和装置
CN202180062428.7A Pending CN116133742A (zh) 2020-09-18 2021-09-17 等离子体处理的方法和装置

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CN202180062404.1A Pending CN116113491A (zh) 2020-09-18 2021-09-17 等离子体处理的方法和装置
CN202180062428.7A Pending CN116133742A (zh) 2020-09-18 2021-09-17 等离子体处理的方法和装置

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US (3) US20240024840A1 (zh)
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