CN1160586C - 用于微加工镜的改进光反射器 - Google Patents

用于微加工镜的改进光反射器 Download PDF

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Publication number
CN1160586C
CN1160586C CNB008069212A CN00806921A CN1160586C CN 1160586 C CN1160586 C CN 1160586C CN B008069212 A CNB008069212 A CN B008069212A CN 00806921 A CN00806921 A CN 00806921A CN 1160586 C CN1160586 C CN 1160586C
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CN
China
Prior art keywords
reflection horizon
reverberator
little processing
layer
dielectric layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CNB008069212A
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English (en)
Chinese (zh)
Other versions
CN1349617A (zh
Inventor
J・D・德雷克
J·D·德雷克
杰曼
J·H·杰曼
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seagate Technology LLC
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Seagate Technology LLC
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Publication date
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Publication of CN1349617A publication Critical patent/CN1349617A/zh
Application granted granted Critical
Publication of CN1160586C publication Critical patent/CN1160586C/zh
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/08—Mirrors
    • G02B5/0816—Multilayer mirrors, i.e. having two or more reflecting layers
    • G02B5/085—Multilayer mirrors, i.e. having two or more reflecting layers at least one of the reflecting layers comprising metal
    • G02B5/0858—Multilayer mirrors, i.e. having two or more reflecting layers at least one of the reflecting layers comprising metal the reflecting layers comprising a single metallic layer with one or more dielectric layers
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G02B6/4201—Packages, e.g. shape, construction, internal or external details
    • G02B6/4216—Packages, e.g. shape, construction, internal or external details incorporating polarisation-maintaining fibres
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B11/00—Recording on or reproducing from the same record carrier wherein for these two operations the methods are covered by different main groups of groups G11B3/00 - G11B7/00 or by different subgroups of group G11B9/00; Record carriers therefor
    • G11B11/10—Recording on or reproducing from the same record carrier wherein for these two operations the methods are covered by different main groups of groups G11B3/00 - G11B7/00 or by different subgroups of group G11B9/00; Record carriers therefor using recording by magnetic means or other means for magnetisation or demagnetisation of a record carrier, e.g. light induced spin magnetisation; Demagnetisation by thermal or stress means in the presence or not of an orienting magnetic field
    • G11B11/105—Recording on or reproducing from the same record carrier wherein for these two operations the methods are covered by different main groups of groups G11B3/00 - G11B7/00 or by different subgroups of group G11B9/00; Record carriers therefor using recording by magnetic means or other means for magnetisation or demagnetisation of a record carrier, e.g. light induced spin magnetisation; Demagnetisation by thermal or stress means in the presence or not of an orienting magnetic field using a beam of light or a magnetic field for recording by change of magnetisation and a beam of light for reproducing, i.e. magneto-optical, e.g. light-induced thermomagnetic recording, spin magnetisation recording, Kerr or Faraday effect reproducing
    • G11B11/10532—Heads
    • G11B11/10541—Heads for reproducing
    • G11B11/10543—Heads for reproducing using optical beam of radiation
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/08—Disposition or mounting of heads or light sources relatively to record carriers
    • G11B7/085—Disposition or mounting of heads or light sources relatively to record carriers with provision for moving the light beam into, or out of, its operative position or across tracks, otherwise than during the transducing operation, e.g. for adjustment or preliminary positioning or track change or selection
    • G11B7/08547—Arrangements for positioning the light beam only without moving the head, e.g. using static electro-optical elements
    • G11B7/08564—Arrangements for positioning the light beam only without moving the head, e.g. using static electro-optical elements using galvanomirrors
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/12—Heads, e.g. forming of the optical beam spot or modulation of the optical beam
    • G11B7/122—Flying-type heads, e.g. analogous to Winchester type in magnetic recording
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/12—Heads, e.g. forming of the optical beam spot or modulation of the optical beam
    • G11B7/135—Means for guiding the beam from the source to the record carrier or from the record carrier to the detector
    • G11B7/1362—Mirrors
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/12—Heads, e.g. forming of the optical beam spot or modulation of the optical beam
    • G11B7/135—Means for guiding the beam from the source to the record carrier or from the record carrier to the detector
    • G11B7/1365—Separate or integrated refractive elements, e.g. wave plates
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/12—Heads, e.g. forming of the optical beam spot or modulation of the optical beam
    • G11B7/135—Means for guiding the beam from the source to the record carrier or from the record carrier to the detector
    • G11B7/1384—Fibre optics
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N1/00—Electrostatic generators or motors using a solid moving electrostatic charge carrier
    • H02N1/002—Electrostatic motors
    • H02N1/006—Electrostatic motors of the gap-closing type
    • H02N1/008—Laterally driven motors, e.g. of the comb-drive type
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/351—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements
    • G02B6/3512—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being reflective, e.g. mirror
    • G02B6/3518—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being reflective, e.g. mirror the reflective optical element being an intrinsic part of a MEMS device, i.e. fabricated together with the MEMS device

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • General Physics & Mathematics (AREA)
  • Optical Elements Other Than Lenses (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Optical Filters (AREA)
CNB008069212A 1999-03-08 2000-03-08 用于微加工镜的改进光反射器 Expired - Fee Related CN1160586C (zh)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US12351499P 1999-03-08 1999-03-08
US60/123,514 1999-03-08
US09/491,427 2000-01-26
US09/491,427 US6392775B1 (en) 1998-01-13 2000-01-26 Optical reflector for micro-machined mirrors

Publications (2)

Publication Number Publication Date
CN1349617A CN1349617A (zh) 2002-05-15
CN1160586C true CN1160586C (zh) 2004-08-04

Family

ID=26821640

Family Applications (1)

Application Number Title Priority Date Filing Date
CNB008069212A Expired - Fee Related CN1160586C (zh) 1999-03-08 2000-03-08 用于微加工镜的改进光反射器

Country Status (8)

Country Link
US (1) US6392775B1 (enExample)
JP (1) JP4640743B2 (enExample)
KR (1) KR100673675B1 (enExample)
CN (1) CN1160586C (enExample)
AU (1) AU3730100A (enExample)
DE (1) DE10084337T1 (enExample)
GB (1) GB2368070B (enExample)
WO (1) WO2000054090A1 (enExample)

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US7593029B2 (en) 2001-08-20 2009-09-22 Ricoh Company, Ltd. Optical scanning device and image forming apparatus using the same
JP4575628B2 (ja) * 2001-08-23 2010-11-04 株式会社リコー 光偏向器及びその製造方法、光走査モジュール、光走査装置、画像形成装置、画像表示装置
US7145143B2 (en) * 2002-03-18 2006-12-05 Honeywell International Inc. Tunable sensor
CN100394214C (zh) * 2002-11-21 2008-06-11 台达电子工业股份有限公司 膜应力平衡镀膜方法以及应用该方法制造的光学组件
CN100410891C (zh) * 2002-12-09 2008-08-13 联想(北京)有限公司 计算机应用软件自纠错自重起方法
JP4251054B2 (ja) 2003-10-01 2009-04-08 株式会社デンソー 半導体装置の製造方法
KR100542559B1 (ko) * 2003-10-29 2006-01-11 삼성전자주식회사 반사기 및 이를 구비하는 화상형성장치의 광주사장치
WO2005112014A1 (ja) * 2004-05-14 2005-11-24 Fujitsu Limited 光照射ヘッド、情報記憶装置、光照射ヘッド設計装置、および光照射ヘッド設計プログラム
JP4860268B2 (ja) * 2006-01-13 2012-01-25 富士フイルム株式会社 プリズムの製造方法、プリズム、光ピックアップ及び液晶プロジェクタ
US20100246036A1 (en) * 2007-07-27 2010-09-30 Lagana Paolo Preliminary Controlled Pre-Deformation Treatment for the Production of Mirrors
JP5655365B2 (ja) * 2009-08-04 2015-01-21 セイコーエプソン株式会社 光偏向器、光偏向器の製造方法および画像表示装置
JP2012042584A (ja) * 2010-08-17 2012-03-01 Seiko Epson Corp 光フィルター、光フィルターモジュール、分光測定器および光機器
WO2012165579A1 (ja) * 2011-06-03 2012-12-06 Hoya株式会社 プラスチックレンズ
CN103777266A (zh) * 2014-01-24 2014-05-07 大连波能激光光学有限公司 一种反射相位延迟镜及其制备方法
EP3009875B1 (en) * 2014-10-13 2020-04-01 Delta Electronics, Inc. Optical wavelength-converting device and illumination system using same
US10928679B2 (en) * 2016-09-12 2021-02-23 Sony Corporation Optical compensation element, liquid crystal light valve assembly, and liquid crystal projector apparatus
CN108149197B (zh) * 2017-12-22 2020-06-09 武汉大学 一种激光发生器反射板制作方法
DE102018211325A1 (de) * 2018-07-10 2020-01-16 Robert Bosch Gmbh Fabry-Perot-Interferometer-Einheit und Verfahren zur Herstellung einer Fabry-Perot-Interferometer-Einheit
JP7563261B2 (ja) * 2021-03-19 2024-10-08 株式会社リコー 光偏向素子、画像投影装置、ヘッドアップディスプレイ、レーザヘッドランプ、ヘッドマウントディスプレイ、物体認識装置および移動体
WO2025197615A1 (ja) * 2024-03-18 2025-09-25 パナソニックＩｐマネジメント株式会社 光学反射素子

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Also Published As

Publication number Publication date
WO2000054090A1 (en) 2000-09-14
DE10084337T1 (de) 2002-12-05
GB2368070A (en) 2002-04-24
KR100673675B1 (ko) 2007-01-23
AU3730100A (en) 2000-09-28
KR20010112311A (ko) 2001-12-20
CN1349617A (zh) 2002-05-15
US6392775B1 (en) 2002-05-21
GB0123889D0 (en) 2001-11-28
JP4640743B2 (ja) 2011-03-02
JP2002539472A (ja) 2002-11-19
GB2368070B (en) 2003-10-22

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