CN115597496A - Automatic multifunctional calibration device and method for spectrum confocal displacement sensor - Google Patents
Automatic multifunctional calibration device and method for spectrum confocal displacement sensor Download PDFInfo
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Abstract
The invention relates to an automatic multifunctional calibration device and method of a spectrum confocal displacement sensor, which comprises a laser interferometer, wherein a laser feedback module is arranged on a light emitting path of the laser interferometer; the laser feedback module is arranged on the first electric motion platform, a linear calibration reflector is arranged on the first electric motion platform, and the first electric motion platform controls the linear calibration reflector and the laser feedback module to move synchronously; one side of the first electric motion platform is provided with a second electric motion platform which is vertical to the first electric motion platform, and a probe horizontal angle adjusting platform is movably controlled on the second electric motion platform; the spectrum confocal probe is arranged on the probe horizontal angle adjusting table or the probe fixing table. The invention realizes the calibration of the linear error, the limit measurement angle and the light spot size parameter of the spectrum confocal probe in the same calibration system, and the change of the position and the attitude of the probe is realized by electric control, thereby improving the automation degree and the calibration work efficiency of the calibration of the probe.
Description
Technical Field
The invention relates to the technical field of precision measurement and sensing, in particular to an automatic multifunctional calibration device and method for a spectrum confocal displacement sensor.
Background
The spectrum confocal displacement sensor is widely applied to application scenes such as distance measurement, thickness measurement and appearance measurement in the field of industrial detection, and is typically applied to wafer surface type detection, glass thickness measurement, roughness measurement, lens profile detection and the like. The spectrum confocal displacement sensor has the advantages of high precision, non-contact, adaptability to materials with different reflectivity and the like. However, in the actual measurement process, the size of the light spot of the spectral confocal displacement sensor and the maximum measurable angle during the curve measurement have great influence on the use effect. In addition, in the process of probe assembly and dispensing, due to the non-repeatability of operation of technicians, the positions of lenses of different probes are deviated, so that the measurement light paths are different, and the measurement result is inaccurate.
In order to ensure the measurement precision and the service performance of the spectrum confocal displacement sensor, a high-precision instrument is needed, indexes such as linear errors, light spot sizes, limit measurement angles and the like of the sensor are calibrated by an efficient calibration method. In addition, the probe has different measuring ranges and measuring angles, and the size of the probe also has different sizes, so that the probe clamping device and the probe pose adjusting device are required to have universality and replaceability in order to adapt to spectrum confocality with different sizes.
Disclosure of Invention
The invention aims to overcome the problems in the prior art and provides an automatic multifunctional calibration device and method for a spectrum confocal displacement sensor.
In order to achieve the technical purpose and achieve the technical effect, the invention is realized by the following technical scheme:
an automatic multifunctional calibration device for a spectral confocal displacement sensor comprises:
the laser feedback module is arranged on a light emitting path of the laser interferometer, so that laser emitted by the laser interferometer is returned by the laser feedback module and is used for measuring the position of the laser feedback module;
the laser feedback module is arranged on the first electric motion platform and is controlled by the first electric motion platform to move, the first electric motion platform is provided with a linear calibration reflector, and the first electric motion platform controls the linear calibration reflector and the laser feedback module to move synchronously, so that the positions of the laser feedback module and the linear calibration reflector are relatively fixed;
the linear calibration reflector reflects white light emitted by the spectral confocal probe and is used for representing a displacement measurement value of the spectral confocal probe and realizing the contrast with the displacement measurement value of the laser interferometer;
a second electric motion table vertical to the first electric motion table is arranged on one side of the first electric motion table, and a probe horizontal angle adjusting table is movably arranged on the second electric motion table in a moving mode;
the spectrum confocal probe comprises:
the probe horizontal angle adjusting platform is arranged on the probe horizontal angle adjusting platform, is controlled by the probe horizontal angle adjusting platform to rotate, and is used for measuring a limit angle and measuring a light spot size;
or on the probe mount for linear calibration.
Furthermore, a limit angle calibration table is arranged on the outer side of the probe horizontal angle adjustment table, when the limit angle measurement is performed, the probe horizontal angle adjustment table adjusts a light outlet of the spectrum confocal probe to be aligned with the limit angle calibration table, a calibration checkerboard is arranged on the inner side of the probe horizontal angle adjustment table, the calibration checkerboard is controlled by the first electric motion table to move along the direction perpendicular to the second electric motion table, and after the limit angle measurement is completed, the probe horizontal angle adjustment table controls the rotation degree of the spectrum confocal probe to enable the light outlet of the spectrum confocal probe to be aligned with the calibration checkerboard, so that the calibration checkerboard can return to the spectrum confocal probe to measure light beams to perform light spot size measurement.
Furthermore, the probe fixing table is arranged at the outer end of the first electric moving table, so that the laser interferometer, the laser feedback module, the linear calibration reflector and the spectrum confocal probe are positioned on the same straight line, and the measuring light beam of the laser interferometer and the measuring light beam of the spectrum confocal probe are collinear for linear calibration.
Further, the limit angle calibration platform is rotatably arranged on the corresponding machine frame, so that the angle of the limit angle calibration platform relative to the spectrum confocal probe can be adjusted.
Furthermore, the probe fixing table clamps the spectrum confocal probe through the V-shaped groove arranged on the probe fixing table, so that the probe fixing table is suitable for spectrum confocal probes with different lengths and different diameters.
Furthermore, the spectrum confocal probe is in communication connection with the spectrum confocal controller through an optical fiber, the spectrum confocal controller is in network communication connection with an upper computer and used for data acquisition, and the upper computer is respectively connected with the first electric motion table, the second electric motion table, the probe horizontal angle adjusting table, the limit angle calibrating table and the laser interferometer and used for controlling corresponding actions to adjust the position and the attitude.
A detection method of an automatic multifunctional calibration device by using a spectral confocal displacement sensor comprises limit angle measurement and light spot size measurement, wherein the method comprises the following steps:
the limit angle measurement method comprises the following steps: when the optical axis of the spectrum confocal probe is not perpendicular to the limit angle calibration table, the maximum angle, which can be rotated by the limit angle calibration table relative to the vertical position, is set as the limit angle, the upper computer controls the limit angle calibration table to rotate, and simultaneously sends an instruction to the spectrum confocal controller to read displacement measurement data, and when the measurement data of the spectrum confocal controller jumps to an invalid value, the upper computer reads the angle of the limit angle calibration table
Angle of rotation
The limit measurement angle of the spectrum confocal probe is obtained;
the spot size measuring method comprises the following steps: the calibration checkerboard is controlled by a first electric motion platform to move in the vertical direction of the optical axis of the spectrum confocal probe, an instruction is sent to the spectrum confocal controller through the upper computer to read the light intensity, the calibration checkerboard is composed of black and white grids, the light intensities reflected by grids with different colors on the calibration checkerboard by measuring light beams of the spectrum confocal probe are different, and the measurement calibration of the size of the light spot is realized according to the jumping of the light intensities at the junction of the black and white grids.
Further, the method also comprises linear calibration, and the linear calibration method comprises the following steps:
firstly, fixing a spectrum confocal probe on a probe fixing table to enable a measuring beam of the spectrum confocal probe to be collinear with a measuring beam of a laser interferometer, controlling a linear calibration reflector to move along the direction of the measuring beam of the spectrum confocal probe by a first electric motion table, and respectively positioning to the near end and the far end of the measuring range of the spectrum confocal probe by taking whether an effective measuring peak value is detected by a peak positioning algorithm as a positioning criterion;
after the near end and the far end of the spectrum confocal probe range are positioned, the midpoint of the far end and the near end is taken as a zero point, the measurement values of the laser interferometer and the spectrum confocal probe are reset to zero, then the linear calibration reflecting mirror is controlled by the first electric motion platform to move to the near end of the spectrum confocal probe range, the stepping distance of the first electric motion platform is set to be D, the motion speed is set to be v, the actual range of the spectrum confocal probe is taken to be D, and then n = D/D measurement positions are taken in the whole range of the probe in the scanning process for sampling;
controlling the first electric motion platform to move towards the far end of the range in a stepping mode by the upper computer with the near end of the range as a starting point, and sampling the spectrum confocal controller and the laser interferometer by the upper computer and storing the spectrum confocal controller and the laser interferometer into the upper computer when the first electric motion platform moves to a measuring point;
after the full-range scanning is finished, the displacement measurement deviation of the spectral confocal probe and the laser interferometer of the n sampling points is obtained.
Further, after displacement measurement values of the spectral confocal probe and the laser interferometer at all sampling points are obtained, a nonlinear relation between the displacement measurement value of the spectral confocal probe and the displacement measurement value of the laser interferometer is obtained through spline curve fitting, then equal-interval sampling is carried out between the near end and the far end of the measuring range of the spectral confocal probe, a mapping calibration table between the displacement measurement value of the spectral confocal probe and the displacement measurement value of the laser interferometer is generated through the nonlinear relation, and the mapping calibration table is uploaded to a spectral confocal controller, so that the measurement accuracy of the spectral confocal displacement sensor is greatly improved.
The beneficial effects of the invention are:
the invention realizes the calibration of the linear error, the limit measurement angle and the light spot size parameter of the spectrum confocal probe in the same calibration system, the change of the position and the attitude of the probe is realized by electric control, and the position or the angle of the electric control calibration mechanism can be fed back to an upper computer, thereby greatly improving the automation degree of the calibration of the probe and the working efficiency of calibration technicians.
The linear error calibration result can generate a mapping calibration table to be used as compensation of the displacement measurement value of the spectrum confocal sensor, so that the measurement precision of the spectrum confocal displacement sensor is greatly improved.
The limit measurement angle calibration result can be used for the reference of the normal direction adjustment range when the spectrum confocal sensor measures the surface morphology.
The light spot size calibration result can be used for the transverse resolution reference of scenes such as the measurement roughness of the spectrum confocal sensor, the depth of the micro-groove and the like.
A plurality of parameters of the spectrum confocal probe are calibrated in the same system, whether the assembly of the spectrum confocal probe has problems or not can be timely fed back through a parameter calibration result, and the yield of the spectrum confocal probe is effectively improved.
Drawings
FIG. 1 is a schematic diagram of an automated multifunctional calibration device for a spectral confocal sensor;
FIG. 2 is a schematic structural diagram of an automated multifunctional calibration device for a spectral confocal sensor;
FIG. 3 is a schematic diagram of the limiting angle calibration principle of the spectral confocal displacement sensor;
fig. 4 is a schematic diagram of the principle of calibrating the spot size of the spectral confocal displacement sensor.
The reference numbers in the figures illustrate: 1. the device comprises a laser interferometer, 2, a laser feedback module, 3, a first electric motion table, 4, a second electric motion table, 5, a probe horizontal angle adjusting table, 6, a limit angle calibrating table, 7, a calibrating checkerboard, 8, a linear calibrating reflector, 9, a probe fixing table, 10, a spectrum confocal probe, 11, a spectrum confocal controller, 12, an upper computer, 13, a measuring light beam, 14 and a reflected light beam.
Detailed Description
The present invention will be described in detail below with reference to the accompanying drawings in combination with embodiments.
As shown in fig. 1 and fig. 2, an automatic multifunctional calibration device for a spectral confocal displacement sensor comprises:
the device comprises a laser interferometer 1, wherein a laser feedback module 2 is arranged on a light emitting path of the laser interferometer 1, so that laser emitted by the laser interferometer 1 is returned by the laser feedback module 2 and is used for measuring the position of the laser feedback module 2;
the laser feedback module 2 is arranged on the first electric motion table 3 and is controlled by the first electric motion table 3 to move, the first electric motion table 3 is provided with a linear calibration reflector 8, and the first electric motion table 3 controls the linear calibration reflector 8 to move synchronously with the laser feedback module 2, so that the positions of the laser feedback module 2 and the linear calibration reflector 8 are relatively fixed, and therefore, the displacement of the laser feedback module 2 measured by the laser interferometer 1 can also be regarded as the displacement of the linear calibration reflector 8;
the linear calibration reflector 8 reflects white light emitted by the spectrum confocal probe 10, is used for representing the displacement measurement value of the spectrum confocal probe 10 and realizes the comparison with the displacement measurement value of the laser interferometer 1;
a second electric motion table 4 vertical to the first electric motion table 3 is arranged on one side of the first electric motion table, and a probe horizontal angle adjusting table 5 is movably controlled on the second electric motion table 4;
the spectral confocal probe 10:
the probe horizontal angle adjusting platform 5 is arranged on the probe horizontal angle adjusting platform 5 and is controlled by the probe horizontal angle adjusting platform 5 to rotate, and the probe horizontal angle adjusting platform is used for measuring a limit angle and measuring a light spot size;
or on the probe mount 9 for linear calibration.
The limit angle calibration table 6 is arranged on the outer side of the probe horizontal angle adjusting table 5, and is used for adjusting a light outlet of the spectrum confocal probe 10 to align to the limit angle calibration table 6 by the probe horizontal angle adjusting table 5 when a limit angle is measured, in this embodiment, as shown in fig. 3, when the limit angle calibration table 6 is located at an initial position, the limit angle calibration table is perpendicular to a measuring beam 14 emitted by the spectrum confocal probe 10, and a measuring beam 13 emitted by the spectrum confocal probe 10 returns after being reflected by the limit angle calibration table 6; when the limit angle calibration platform 6 is located at an inclined position, the measuring light beam 13 emitted by the spectrum confocal probe 10 is reflected by the limit angle calibration platform and then does not return back, the reflected light beam 14 returns back at a certain angle with the original light beam, and when the reflected light beam is located within the receiving range of the spectrum confocal probe 10, the measurement can still be carried out at this time; when the angle of inclination continues to increase, there will be an angle
Above this angle, the reflected beam 14 will be out of the receiving range of the spectroscopic confocal probe 10, the angle
Namely the limit angle measured by the probe.
The inner side of the probe horizontal angle adjusting table 5 is provided with a calibration checkerboard 7, the calibration checkerboard 7 is controlled by the first electric moving table 3 to move along the direction perpendicular to the second electric moving table 4, and after the limit angle measurement is completed, the probe horizontal angle adjusting table 5 controls the spectrum confocal probe 10 to rotate 180 degrees, so that the light outlet of the spectrum confocal probe is aligned with the calibration checkerboard 7, the calibration checkerboard 7 can return to a measuring light beam 13 of the spectrum confocal probe 10 to measure the size of a light spot, the measurement of the size of the light spot is realized through the stepping movement of the calibration checkerboard 7, the measurement of the size of the light spot can be respectively measured in two perpendicular directions, in the embodiment, as shown in fig. 4, the calibration checkerboard 7 is controlled by the first electric moving table 3 to move in the direction perpendicular to the optical axis of the spectrum confocal probe 10, an instruction is sent to the spectrum confocal controller 11 through the upper computer 12 to read the light intensity, the calibration checkerboard 7 is composed of alternate squares with different colors reflected by the measuring light beams of the calibration checkerboard 7 of the spectrum confocal probe 10, and the light intensity of different colors reflected by the checkerboard is realized according to the jump of the light intensity at the boundary of the light spot, and the light intensity of the calibration checkerboard size of the calibration checkerboard.
The probe fixing table 9 is arranged at the outer end of the first electric motion table 3, so that the laser interferometer 1, the laser feedback module 2, the linear calibration reflecting mirror 8 and the spectrum confocal probe 10 are located on the same straight line, the measuring light beam of the laser interferometer 1 is collinear with the measuring light beam 13 of the spectrum confocal probe 10 and is used for linear calibration, when linear error calibration is performed, the first electric motion table 3 controls the linear calibration reflecting mirror 8 to move in a large range along the collinear direction of the laser interferometer 1 and the spectrum confocal probe 10, when spot size calibration is performed, the first electric motion table 3 controls the calibration checkerboard 7 to move in a small range along the direction perpendicular to the second electric motion table 4, so that the calibration checkerboard 7 can return to the measuring light beam 13 of the spectrum confocal probe 10, and the second electric motion table 4 can control the spectrum confocal probe 10 to move, so that the calibration checkerboard 7 is located in the measuring range of the spectrum confocal probe 10.
The extreme angle calibration stages 6 are rotatably arranged on the respective frames, so that the angle of the extreme angle calibration stages 6 relative to the spectral confocal probe 10 is adjustable.
The probe fixing table 9 clamps the spectrum confocal probe 10 through a V-shaped groove arranged on the probe fixing table, and the opening width, the opening angle and the fixing position of the V-shaped groove can be freely adjusted so as to be suitable for the spectrum confocal probes 10 with different lengths and different diameters.
The spectrum confocal probe 10 is in communication connection with a spectrum confocal controller 11 through an optical fiber, the spectrum confocal controller 11 is in network communication connection with an upper computer 12 and used for data acquisition, the upper computer 12 is respectively connected with a first electric motion table 3, a second electric motion table 4, a probe horizontal angle adjusting table 5, a limit angle calibrating table 6 and a laser interferometer 1 and used for controlling corresponding actions to adjust the pose, wherein the first electric motion table 3 and the second electric motion table 4 can be controlled by the upper computer 12 to move linearly, and the probe horizontal angle adjusting table 5 and the limit angle calibrating table 6 can be controlled by the upper computer 12 to rotate.
A detection method of an automatic multifunctional calibration device by using a spectral confocal displacement sensor comprises limit angle measurement and light spot size measurement, wherein the method comprises the following steps:
the limit angle measurement method comprises the following steps: when the optical axis of the spectral confocal probe 10 is not perpendicular to the limit angle calibration table 6, the maximum angle, which can be rotated by the limit angle calibration table 6 relative to the vertical position, is set as the limit angle, the upper computer 12 controls the limit angle calibration table 6 to rotate, and simultaneously sends an instruction to the spectral confocal controller 11 to read displacement measurement data, and when the measurement data of the spectral confocal controller 11 jumps to an invalid value, the upper computer 12 reads the angle of the limit angle calibration table 6
Angle of rotation
Namely the limit measurement angle of the spectrum confocal probe 10;
the method for measuring the size of the light spot comprises the following steps: the calibration checkerboard 7 is controlled by the first electric motion table 3 to move in the vertical direction of the optical axis of the spectrum confocal probe 10, an instruction is sent to the spectrum confocal controller 11 through the upper computer 12 to read the light intensity, the calibration checkerboard 7 is composed of black squares and white squares, the light intensities reflected by the squares with different colors on the calibration checkerboard 7 by the measuring light beams 13 of the spectrum confocal probe 10 are different, and the measurement calibration of the light spot size is realized according to the jump of the light intensities at the junction of the black squares and the white squares.
The method also comprises linear calibration, and the linear calibration method comprises the following steps:
firstly, fixing a spectrum confocal probe 10 on a probe fixing table 9, so that a measuring beam 13 of the spectrum confocal probe 10 is collinear with a measuring beam of a laser interferometer 1, a first electric motion table 3 controls a linear calibration reflector 8 to move along the direction of the measuring beam 13 of the spectrum confocal probe 10, and whether an effective measuring peak value is detected by a peak positioning algorithm is taken as a positioning criterion to be respectively positioned to the near end and the far end of the measuring range of the spectrum confocal probe 10;
after the near end and the far end of the spectrum confocal probe 10 are positioned, the midpoint of the far end and the near end is taken as a zero point, the measurement values of the laser interferometer 1 and the spectrum confocal probe 10 are reset to zero, then the linear calibration reflector 8 is controlled by the first electric motion table 3 to move to the near end of the spectrum confocal probe 10, the stepping distance of the first electric motion table 3 is set to be D, the motion speed is set to be v, the actual range of the spectrum confocal probe 10 is taken to be D, and n = D/D measurement positions are taken in the full range of the probe in the scanning process for sampling;
the upper computer 12 controls the first electric motion platform 3 to move in a stepping way towards the far end of the measuring range by taking the near end of the measuring range as a starting point, and the upper computer 12 samples the spectral confocal controller 11 and the laser interferometer 1 and stores the samples in the upper computer 12 when the samples are stepped to a measuring point;
after the full-range scanning is finished, the displacement measurement deviation of the spectral confocal probe 10 and the laser interferometer 1 of the n sampling points is obtained.
After displacement measurement values of the spectral confocal probe 10 and the laser interferometer 1 of all sampling points are obtained, a nonlinear relation between the displacement measurement values of the spectral confocal probe 10 and the displacement measurement values of the laser interferometer 1 is obtained through spline curve fitting, then equal-interval sampling is carried out between the near end and the far end of the measuring range of the spectral confocal probe 10, a mapping calibration table between the displacement measurement values of the spectral confocal probe 10 and the displacement measurement values of the laser interferometer 1 is generated through the nonlinear relation, and the mapping calibration table is uploaded to a spectral confocal controller 11, so that the measurement accuracy of the spectral confocal displacement sensor is greatly improved.
The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention, and various modifications and changes may be made by those skilled in the art. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (9)
1. The utility model provides a confocal displacement sensor of spectrum automatic multi-functional calibration device which characterized in that includes:
the device comprises a laser interferometer (1), wherein a laser feedback module (2) is arranged on a light emitting path of the laser interferometer (1), so that laser emitted by the laser interferometer (1) is returned by the laser feedback module (2) and is used for measuring the position of the laser feedback module (2);
the laser feedback module (2) is arranged on the first electric motion table (3) and is controlled by the first electric motion table (3) to move, a linear calibration reflector (8) is arranged on the first electric motion table (3), and the linear calibration reflector (8) and the laser feedback module (2) are controlled by the first electric motion table (3) to move synchronously, so that the positions of the laser feedback module (2) and the linear calibration reflector (8) are relatively fixed;
the linear calibration reflector (8) reflects white light emitted by the spectrum confocal probe (10) and is used for representing the displacement measurement value of the spectrum confocal probe (10) and realizing the comparison with the displacement measurement value of the laser interferometer (1);
a second electric motion table (4) vertical to the first electric motion table is arranged on one side of the first electric motion table (3), and a probe horizontal angle adjusting table (5) is movably controlled on the second electric motion table (4);
the spectroscopic confocal probe (10):
the probe horizontal angle adjusting platform (5) is arranged on the probe horizontal angle adjusting platform (5), is controlled by the probe horizontal angle adjusting platform (5) to rotate, and is used for measuring a limit angle and measuring a light spot size;
or is arranged on the probe fixing table (9) for linear calibration.
2. The automatic multifunctional calibration device for the spectral confocal displacement sensor according to claim 1, wherein a limit angle calibration table (6) is arranged on the outer side of the probe horizontal angle adjustment table (5), and when the limit angle is measured, the light outlet of the spectral confocal probe (10) is adjusted by the probe horizontal angle adjustment table (5) to be aligned with the limit angle calibration table (6), a calibration checkerboard (7) is arranged on the inner side of the probe horizontal angle adjustment table (5), and the calibration checkerboard (7) is controlled by the first electric motion table (3) to move in the direction perpendicular to the second electric motion table (4), so that after the limit angle measurement is completed, the probe horizontal angle adjustment table (5) controls the spectral probe (10) to rotate 180 degrees, and the light outlet of the spectral confocal displacement sensor is aligned with the calibration checkerboard (7), so that the calibration checkerboard (7) can return to the measurement beam (13) of the spectral confocal probe (10) to perform spot size measurement.
3. The automatic multifunctional calibration device for the spectral confocal displacement sensor according to claim 1, wherein the probe fixing station (9) is arranged at the outer end of the first electric motion table (3), so that the laser interferometer (1), the laser feedback module (2), the linear calibration reflecting mirror (8) and the spectral confocal probe (10) are positioned on the same straight line, and the measuring beam of the laser interferometer (1) and the measuring beam (13) of the spectral confocal probe (10) are collinear for linear calibration.
4. The automated multifunctional calibration device for spectral confocal displacement sensors according to claim 2, characterized in that the extreme angle calibration stage (6) is rotationally arranged on the corresponding frame, so that the angle of the extreme angle calibration stage (6) relative to the spectral confocal probe (10) is adjustable.
5. The automatic multifunctional calibration device for the spectral confocal displacement sensor according to claim 3, wherein the probe fixing station (9) clamps the spectral confocal probe (10) through a V-shaped groove arranged on the probe fixing station, so as to adapt to the spectral confocal probes (10) with different lengths and different diameters.
6. The automatic multifunctional calibration device for the spectral confocal displacement sensor according to claim 2 or 3, wherein the spectral confocal probe (10) is in communication connection with the spectral confocal controller (11) through an optical fiber, the spectral confocal controller (11) is in network communication connection with an upper computer (12) for data acquisition, and the upper computer (12) is respectively connected with the first electric motion table (3), the second electric motion table (4), the probe horizontal angle adjusting table (5), the limit angle calibration table (6) and the laser interferometer (1) for controlling corresponding actions to perform pose adjustment.
7. A detection method using the spectral confocal displacement sensor automatic multifunctional calibration device of any one of claims 1 to 6, wherein the method comprises extreme angle measurement and spot size measurement, wherein:
the limit angle measuring method comprises the following steps: when the optical axis of the spectrum confocal probe (10) is set to be not perpendicular to the limit angle calibration table (6), the maximum angle, which can be rotated by the limit angle calibration table (6) relative to the vertical position, is set as the limit angle, the upper computer (12) controls the limit angle calibration table (6) to rotate, and simultaneously sends an instruction to the spectrum confocal controller (11) to read displacement measurement data, and when the measurement data of the spectrum confocal controller (11) jumps to an invalid value, the upper computer (12) reads the angle of the limit angle calibration table (6)
Angle of rotation
Namely the limit measurement angle of the spectrum confocal probe (10);
the spot size measuring method comprises the following steps: the calibration checkerboard (7) is controlled by the first electric moving table (3) to move in the vertical direction of the optical axis of the spectrum confocal probe (10), an instruction is sent to the spectrum confocal controller (11) through the upper computer (12) to read the light intensity, the calibration checkerboard (7) is composed of black and white grids, the light intensity reflected by grids with different colors on the calibration checkerboard (7) of a measuring light beam (13) of the spectrum confocal probe (10) is different, and the measurement calibration of the light spot size is realized according to the jump of the light intensity at the junction of the black and white grids.
8. The detection method according to claim 7, further comprising a linear calibration, wherein the linear calibration method comprises:
firstly, a spectrum confocal probe (10) is fixed on a probe fixing table (9), so that a measuring beam (13) of the spectrum confocal probe (10) is collinear with a measuring beam of a laser interferometer (1), a linear calibration reflector (8) is controlled by a first electric motion table (3) to move along the direction of the measuring beam (13) of the spectrum confocal probe (10), and whether an effective measuring peak value is detected by a peak positioning algorithm is taken as a positioning criterion to be respectively positioned at the near end and the far end of the measuring range of the spectrum confocal probe (10);
after the near end and the far end of the spectrum confocal probe (10) range are positioned, the midpoint of the far end and the near end is taken as a zero point, the measurement values of the laser interferometer (1) and the spectrum confocal probe (10) are reset to zero, then the linear calibration reflector (8) is controlled by the first electric motion table (3) to move to the near end of the spectrum confocal probe (10) range, the stepping distance of the first electric motion table (3) is set to be D, the motion speed is v, the actual range of the spectrum confocal probe (10) is taken to be D, and n = D/D measurement positions are taken for sampling in the whole range of the probe in the scanning process;
the upper computer (12) controls the first electric motion platform (3) to move towards the far end of the range in a stepping mode by taking the near end of the range as a starting point, and when the first electric motion platform steps to a measuring point, the upper computer (12) samples the spectrum confocal controller (11) and the laser interferometer (1) and stores the spectrum confocal controller and the laser interferometer into the upper computer (12);
after the full-range scanning is finished, the displacement measurement deviation of the spectral confocal probe (10) and the laser interferometer (1) of the n sampling points is obtained.
9. The detection method according to claim 8, wherein after obtaining the displacement measurement values of the spectral confocal probe (10) and the laser interferometer (1) at all the sampling points, a nonlinear relation between the displacement measurement values of the spectral confocal probe (10) and the displacement measurement values of the laser interferometer (1) is obtained through spline curve fitting, then equal-interval sampling is carried out between the near end and the far end of the measuring range of the spectral confocal probe (10), a mapping calibration table between the displacement measurement values of the spectral confocal probe (10) and the displacement measurement values of the laser interferometer (1) is generated through the nonlinear relation, and the mapping calibration table is uploaded to the spectral confocal controller (11), so that the measurement accuracy of the spectral displacement sensor is greatly improved.
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