CN214470643U - Displacement measuring device integrating confocal method and trigonometry - Google Patents
Displacement measuring device integrating confocal method and trigonometry Download PDFInfo
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- CN214470643U CN214470643U CN202120799278.5U CN202120799278U CN214470643U CN 214470643 U CN214470643 U CN 214470643U CN 202120799278 U CN202120799278 U CN 202120799278U CN 214470643 U CN214470643 U CN 214470643U
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Abstract
The utility model discloses a displacement measurement device of integrated confocal method and trigonometry. The accuracy and the measuring range of the existing displacement measuring mode are contradictory. The laser confocal displacement sensor probe, the position sensitive element and the focusing lens of the utility model are all fixed with the probe panel; the laser confocal displacement sensor probe is connected with the optical unit and the controller of the laser confocal displacement sensor body to form a laser confocal displacement sensor; the measuring light of the laser confocal displacement sensor probe is generated by an optical unit of the laser confocal displacement sensor body and is transmitted to the laser confocal displacement sensor probe through an optical fiber; the central axis of the measuring light of the probe of the laser confocal displacement sensor and the central axis of the focusing lens are positioned in the same plane; the signal output end of the position sensitive element is connected with the controller; the laser confocal displacement sensor, the focusing lens and the position sensitive element form a triangulation displacement measuring system. The utility model discloses measurement accuracy is high, and the range is big.
Description
Technical Field
The utility model belongs to non-contact displacement measurement field based on optical measurement, in particular to displacement measurement device of integrated confocal method and trigonometry.
Background
The confocal displacement measurement is a non-contact displacement measurement method based on spectral dispersion analysis, and the principle is as follows: a beam of white light (or multi-wavelength mixed light) passes through the dispersive objective lens to form continuous monochromatic light focuses on an optical axis, and the distances from each monochromatic light focus to a measured object are different. When the measured surface is at a certain position in the measuring range, only light with a certain wavelength is focused on the measured surface, the reflected light of the light with the wavelength can enter the spectrometer because the light meets the confocal condition, and most of light cannot enter the spectrometer because the light with other wavelengths is in a defocusing state on the measured surface. The wavelength value at the maximum light intensity position is obtained through the decoding of the spectrometer, and the distance value corresponding to the target can be measured.
On the basis, a product of a color coaxial confocal displacement meter developed by KEYENCE company adopts a color light source to replace a white light source for displacement measurement by a traditional confocal method, so that the luminous waveband width is improved, and high-precision measurement can be realized in a wider waveband. The main principle is as follows: firstly, irradiating a beam of blue laser on a fluorescent body capable of simultaneously emitting red light and green light to generate multicolor light, and then transmitting the multicolor light to a probe through an optical fiber; when in light projection, only monochromatic light with a certain specific wavelength in the polychromatic light can be focused at a measured point; when receiving light, only the light focused on the surface of the measured object can be received and transmitted to the optical splitter to be decomposed according to the wavelength to obtain corresponding measured data. The method adopts a straight-up and straight-down measurement method, and can realize high-precision measurement on the surfaces of various objects to be measured, such as curved surfaces, pits and small surface height fluctuation.
However, in the displacement monitoring field, the measurement accuracy and the measurement range are often contradictory. The confocal displacement measurement has a high accuracy but a small range, as developed by KEYENCE: the ultra-high precision displacement meter CL-L015/CL-P015 has a measuring range of 2.6 mm; the shape measurement type displacement meter CL-PT010 has a measuring range of 0.6 mm. Therefore, when the surface of the measured object has a complex shape and large height fluctuation, the confocal displacement measurement will easily cause the over-range phenomenon to terminate the measurement.
Aiming at the problem, the displacement monitoring field has a trigonometry displacement measurement to make up the defect of small measuring range of the confocal displacement sensor. The main principle of trigonometry displacement measurement is as follows: after laser emitted by the laser is converged on the surface of a measured object through the focusing lens, generated diffuse reflection light is received by the receiving lens and converged on a position sensitive element (such as PSD, CMOS, CCD and the like) to form light spots, and a displacement value of the measured point can be obtained according to a triangular relation formed among the measured point, the optical center of the receiving lens and the light spots on the sensitive element. However, the triangulation laser displacement sensor has a larger measurement range but lower measurement accuracy than the confocal displacement sensor, and may not meet the measurement requirements in some cases where high-accuracy detection is required.
In order to solve the contradiction between the measurement accuracy and the measurement range, the current common method is to use a large-range and high-accuracy sensor to perform repeated measurement respectively, such as: firstly, a large-range sensor is used for carrying out primary measurement, and then the data of the primary measurement is used for guiding a high-precision sensor to carry out secondary measurement. The measuring method can solve the contradiction between measuring range and precision to a certain extent, but when the method is applied to a production field, firstly, the production beat is reduced by measuring for many times, the requirement of the production field on the measuring efficiency cannot be met, and the time cost is increased; secondly, sensors with large measuring range and high precision are respectively adopted, two sensors are required to be respectively used, and the measurement cost is increased.
Disclosure of Invention
The weak point to prior art, the utility model aims at providing an integrated confocal method and displacement measurement device of trigonometry through at confocal displacement sensor probe one side installation focusing lens of laser and position sensing element for confocal displacement sensor's incident laser and focusing lens, position sensing element constitute a trigonometry displacement measurement system, can be under the condition of guaranteeing high accuracy measurement, realize the extension to the confocal displacement sensor range of laser simultaneously.
In order to achieve the above object, the utility model adopts the following technical solutions:
the utility model comprises a laser confocal displacement sensor probe, a probe fixing clamp II, a probe fixing clamp I, a probe panel, a fixing seat, a position sensitive element, a lens holder and a focusing lens; the first probe fixing clamp and the second probe fixing clamp are fixed and clamp the probe of the laser confocal displacement sensor; the first probe fixing clamp is fixed with the measuring head panel; the position sensitive element is fixed on the fixed seat, and the fixed seat is fixed with the measuring head panel; the focusing lens is fixed on the lens holder, and the lens holder is fixed with the measuring head panel; the laser confocal displacement sensor probe is connected with the optical unit and the controller of the laser confocal displacement sensor body to form a laser confocal displacement sensor; the measuring light of the laser confocal displacement sensor probe is generated by an optical unit of the laser confocal displacement sensor body and is transmitted to the laser confocal displacement sensor probe through an optical fiber; the central axis of the measuring light of the probe of the laser confocal displacement sensor and the central axis of the focusing lens are positioned in the same plane; the signal output end of the position sensitive element is connected with the controller; the laser confocal displacement sensor, the focusing lens and the position sensitive element form a triangulation displacement measuring system.
Preferably, the position sensitive element adopts a linear array CMOS image sensor or a linear array CCD element.
Preferably, the measuring head panel is provided with an integrally formed connecting rod.
The utility model has the advantages that:
1. the utility model discloses integrated confocal method displacement measurement and trigonometry displacement measurement are in an organic whole, in the actual measurement process, judge through trigonometry displacement measurement system whether the out-of-range phenomenon appears in the confocal displacement sensor of laser, measure the Z axle coordinate that obtains data adjustment measuring device according to the trigonometry, make the confocal displacement sensor of laser get back to in the confocal measuring area, thereby enlarged the measuring range of the confocal displacement sensor of laser, can realize carrying out the non-contact measurement fast, the high accuracy to the complicated surface that has the hole, sudden change structure.
2. The utility model discloses the measurement principle is simple, and measurement cost is lower, and convenient operation is applicable to the measurement scene of high accuracy, wide range.
Drawings
FIG. 1 is a perspective view of the overall structure of the present invention;
FIG. 2 is an assembly diagram of a first probe fixing clamp and a second probe fixing clamp of the present invention;
fig. 3 is a schematic diagram of the optical path of the present invention;
fig. 4 is a schematic diagram of the triangulation displacement measurement employed by the present invention.
In the figure: 1. the confocal displacement sensor comprises a laser confocal displacement sensor probe 2, probe fixing clamps II and 3, screws 4, probe fixing clamps I and 5, a first bolt group 6, a measuring head panel 6-1, a connecting rod 7, a fixing seat 8, a second bolt group 9, a position sensitive element 10, a third bolt group 11, a lens holder 12 and a focusing lens.
Detailed Description
The present invention will be further explained with reference to the accompanying drawings.
As shown in fig. 1,2 and 3, the displacement measuring device integrating the confocal method and the triangulation method comprises a laser confocal displacement sensor probe 1, a probe fixing clamp 2, a probe fixing clamp 4, a probe panel 6, a fixed seat 7, a position sensitive element 9, a lens holder 11 and a focusing lens 12; the first probe fixing clamp 4 and the second probe fixing clamp 2 are connected through a screw 3 to form a probe fixing clamp and clamp the laser confocal displacement sensor probe 1; the first probe fixing clamp 4 is connected with the measuring head panel 6 through a first bolt group 5. The position sensitive element 9 is fixed on the fixed seat 7, and the fixed seat 7 is connected with the measuring head panel 6 through the second bolt group 8. The focus lens 12 is fixed to the lens holder 11, and the lens holder 11 and the probe panel 6 are connected by a third bolt group 10. The laser confocal displacement sensor probe 1 is connected with an optical unit and a controller of the laser confocal displacement sensor body to form a laser confocal displacement sensor; the measuring light of the laser confocal displacement sensor probe 1 is generated by an optical unit of the laser confocal displacement sensor body and is transmitted to the laser confocal displacement sensor probe 1 through an optical fiber; the central axis of the measuring light of the laser confocal displacement sensor probe 1 and the central axis of the focusing lens 12 are positioned in the same plane. The focusing lens 12 can form light spots on the position sensitive element 9 after focusing the diffuse reflection light on the surface of the measured object; the signal output end of the position sensitive element 9 is connected with the controller. The laser confocal displacement sensor, the focusing lens 12 and the position sensitive element 9 form a triangulation displacement measuring system.
As a preferred embodiment, the position sensitive device 9 employs a linear CMOS image sensor or a linear CCD device.
As a preferred embodiment, the probe panel 6 is provided with an integrally formed connecting rod 6-1.
As shown in fig. 3 and 4, the displacement measuring device integrating the confocal method and the triangulation method works according to the following principle:
1. the measuring head panel 6 is fixed on the Z axis of the three-coordinate measuring machine, and the central axis of the measuring light emitted by the laser confocal displacement sensor probe 1 is parallel to the Z axis of the three-coordinate measuring machine. Then, the working range s of the position sensitive element 9 is calibrated in the measuring range of the laser confocal displacement sensor1s2And calibrating the working range of the trigonometry displacement measurement system. The object to be measured is then placed in the measuring area of the three coordinate measuring machine platform and a measuring coordinate system is established with X, Y, Z coordinate axes of the three coordinate measuring machine. Finally, the Z axis of the three-coordinate measuring machine translates along the Z coordinate axis, the position of the measuring head panel 6 on the Z coordinate axis is adjusted, so that after the focusing lens 12 focuses the diffuse reflection light on the surface of the measured object, the light spot position point formed on the position sensitive element 9 is at s0And recording the Z coordinate value Z of the Z axis of the three-coordinate measuring machine at the moment0，s0Is the working range s1s2The center position of (a).
2. Z-axis of three-coordinate measuring machine along X or Y coordinate axis directionTranslating to drive the laser confocal displacement sensor probe 1 to scan and measure the surface of the measured object; when measuring a point i to be measured, firstly, the output value of the triangulation displacement measurement system is obtained, and whether the light spot focused by the focusing lens 12 at the point i to be measured is positioned in the range s is judged1s2If it is within range s1s2And storing the coordinate value (X) of the laser confocal displacement sensori,Yi,Zi) Wherein X isiIs the X coordinate value, Y coordinate value of the point i to be measured in the measuring coordinate systemiIs the Y coordinate value, Z of the point i to be measured in the measuring coordinate systemiThe Z coordinate value of the point i to be measured in the measuring coordinate system is shown, i is 1,2,3 … …, n is the total number of the points to be measured in the surface scanning measuring process of the measured object; if the light spot focused by the focusing lens 12 at the point i to be measured is located in the range s2s′2If the distance between the probe 1 of the laser confocal displacement sensor and the surface of the measured object is too far (far end defocusing) and the measuring range is exceeded, then the Z axis of the three-coordinate measuring machine drives the measuring head panel 6 to move downwards along the Z coordinate axis direction until the light spot position focused by the focusing lens 12 returns to the range s1s2And recording the moving distance delta Z of the three-coordinate measuring machine along the Z coordinate axis direction, and storing the measuring coordinate value (X) of the laser confocal displacement sensor at the momenti,Yi,Zi- Δ Z), after the storage is finished, moving the Z axis of the three-coordinate measuring machine upwards along the Z coordinate axis direction by Δ Z for resetting, and preparing to carry out next point measurement; if the light spot focused by the focusing lens 12 at the point i to be measured is located in the range s1s′1If the probe 1 of the laser confocal displacement sensor is too close to the surface of the measured object (near-end defocusing) and exceeds the measuring range, then the Z axis of the three-coordinate measuring machine drives the measuring head panel 6 to move upwards along the Z coordinate axis direction until the position of the focused light spot of the focusing lens 12 returns to the range s1s2And recording the moving distance delta Z of the three-coordinate measuring machine along the Z coordinate axis direction, and storing the measuring coordinate value (X) of the laser confocal displacement sensor at the momenti,Yi,ZiAnd + delta Z), after the storage is finished, the Z axis of the three-coordinate measuring machine moves downwards along the Z coordinate axis direction by delta Z for resetting, and the next point measurement is prepared.
3. And (3) repeating the point-by-point scanning measurement process in the step (2) until the scanning measurement of the whole measured object surface is completed.
The process of marking the working range of the position sensitive element 9 in the measuring range of the laser confocal displacement sensor is as follows:
firstly, the Z axis of the three-coordinate measuring machine translates along the Z coordinate axis, so that the output measurement value of the laser confocal displacement sensor is the measurement range midpoint value h0The spot position on the position sensor 9 at this time is recorded as s0. Then the Z axis of the three-coordinate measuring machine is moved downwards, so that the output measurement value of the laser confocal displacement sensor is the minimum value h of the measuring range1(near-end defocus critical point), recording the spot position on the position sensitive element 9 at this time as s1。
Moving the three-coordinate measuring machine in the Z-axis direction to make the output measurement value of the laser confocal displacement sensor be the maximum value of the measuring range h2(far-end defocus critical point), recording the spot position on the position sensitive element 9 at this time as s2Determining the working range of the position sensitive element 9 within the measuring range of the laser confocal displacement sensor as s1s2。
The working range calibration process of the triangulation displacement measurement system is as follows:
firstly, the Z axis of the three-coordinate measuring machine translates along the Z coordinate axis, so that after the diffuse reflection light on the surface of the measured object is focused by the focusing lens 12, a light spot position point is formed on the position sensitive element 9 at s0To (3). Then, the Z axis of the three-coordinate measuring machine is moved downwards, when the diffuse reflection light of the measured object surface is focused by the focusing lens 12, and the light spot formed on the position sensitive element 9 is positioned at the lower limit position point s 'of the working range of the position sensitive element 9'1Then, the distance h 'of downward movement of the three-coordinate measuring machine is recorded'1。
② the Z axis of the three-coordinate measuring machine moves upwards, when the focusing lens 12 focuses the diffuse reflection light of the measured object surface, the light spot formed on the position sensitive element 9 is positioned at the extreme position point s 'on the working range of the position sensitive element 9'2Then, the upward movement distance h 'of the three-coordinate measuring machine is recorded'2Then bit ofMaximum working range of the position-sensitive element 9 is s'1s′2The working range of the trigonometric displacement measurement system is h ═ h'1-h′2。
The output value of the triangulation displacement measurement system is obtained by calculation according to the triangulation displacement measurement principle, and the calculation formula is as follows:
in the formula, α is an included angle between a central axis of the measuring light emitted by the laser confocal displacement sensor probe 1 and a central axis of the focusing lens 12; beta is an included angle between the surface of the position sensitive element 9 and the central axis of the focusing lens 12; l1The output measurement value of the laser confocal displacement sensor is a measuring range midpoint value h0The distance from the center of the time focusing lens 12 to the central axis of the measuring light emitted by the laser confocal displacement sensor probe 1; l2When the spot position point is at s0The distance from the center of the focusing lens 12 to the spot position point; Δ s is the spot position point of the measured point on the position sensor 9 relative to the spot position point s0The distance of (d); delta h is a middle point value h of a real-time measuring point of the trigonometric displacement measuring system relative to the measuring range of the laser confocal displacement sensor0The distance of (d); setting the measured point as h0When the point is above, plus or minus takes the plus sign, otherwise, plus or minus takes the minus sign.
When the laser confocal displacement sensor is out of focus at the near end of a real-time measuring point, the upward moving distance delta Z of the Z axis of the three-coordinate measuring machine along the Z coordinate axis meets the following conditions:
Δh-(h1-h0)≤Δz≤Δh+(h0-h2)
when the laser confocal displacement sensor is out of focus at the far end of a real-time measuring point, the distance delta Z of the downward shift of the Z axis of the three-coordinate measuring machine along the Z coordinate axis meets the following conditions:
Δh-(h0-h2)≤Δz≤Δh+(h1-h0)。
Claims (3)
1. displacement measurement device of integrated confocal method and trigonometry, including the confocal displacement sensor probe of laser, probe mounting fixture two, probe mounting fixture one and gauge head panel, its characterized in that: the device also comprises a fixed seat, a position sensitive element, a lens holding frame and a focusing lens; the first probe fixing clamp and the second probe fixing clamp are fixed and clamp the probe of the laser confocal displacement sensor; the first probe fixing clamp is fixed with the measuring head panel; the position sensitive element is fixed on the fixed seat, and the fixed seat is fixed with the measuring head panel; the focusing lens is fixed on the lens holder, and the lens holder is fixed with the measuring head panel; the laser confocal displacement sensor probe is connected with the optical unit and the controller of the laser confocal displacement sensor body to form a laser confocal displacement sensor; the measuring light of the laser confocal displacement sensor probe is generated by an optical unit of the laser confocal displacement sensor body and is transmitted to the laser confocal displacement sensor probe through an optical fiber; the central axis of the measuring light of the probe of the laser confocal displacement sensor and the central axis of the focusing lens are positioned in the same plane; the signal output end of the position sensitive element is connected with the controller; the laser confocal displacement sensor, the focusing lens and the position sensitive element form a triangulation displacement measuring system.
2. The integrated confocal and trigonometric displacement measurement device according to claim 1, characterized in that: the position sensitive element adopts a linear array CMOS image sensor or a linear array CCD element.
3. The confocal and trigonometric displacement measurement device according to claim 1 or 2, characterized in that: the measuring head panel is provided with an integrally formed connecting rod.
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