CN115210052A

CN115210052A - Release film roll, ceramic member sheet and method for producing same, and ceramic member and method for producing same

Info

Publication number: CN115210052A
Application number: CN202180017964.5A
Authority: CN
Inventors: 饭岛忠良; 江守泰彦; 饭田修治; 丑田智树
Original assignee: TDK Corp
Current assignee: TDK Corp
Priority date: 2020-03-04
Filing date: 2021-02-26
Publication date: 2022-10-18
Also published as: TWI781540B; KR20220141858A; WO2021177179A1; TW202200376A; JPWO2021177179A1

Abstract

The present invention provides a release film roll, which comprises: the peeling film comprises a base film and a peeling layer, and a core around which the peeling film is wound, wherein the surface roughness (Rp) of the outer peripheral surface of the core is 1.5 [ mu ] m or less. The present invention provides a method for manufacturing a ceramic member sheet, which comprises a step of forming a ceramic green sheet on the surface of a release layer of a release film drawn out from a release film roll by using a slurry containing ceramic powder.

Description

Release film roll, ceramic member sheet and method for producing same, and ceramic member and method for producing same

Technical Field

The present disclosure relates to a release film roll, a ceramic member sheet and a method for manufacturing the same, and a ceramic member and a method for manufacturing the same.

Background

In recent years, electronic components have become more and more miniaturized as electronic devices are required to be miniaturized. Ceramic components, which are a kind of electronic components, are also increasingly miniaturized year by year. For example, a multilayer ceramic capacitor, which is one of ceramic components, is intended to increase the capacitance by reducing the thicknesses of dielectric layers and internal electrodes. A general multilayer ceramic capacitor is manufactured by forming a green sheet by using a release film as a carrier film and forming a dielectric layer and internal electrodes on the carrier film, and then peeling the green sheet to laminate them.

When the dielectric layers of the multilayer ceramic capacitor are made thin, the withstand voltage performance of the withstand voltage at the voltage strength, which indicates a failure such as a short circuit, tends to be lowered. In particular, when the thickness of the dielectric layer is not uniform, the thin portion becomes a factor of lowering the withstand voltage performance. The multilayer ceramic capacitor including the dielectric layer having such a thin portion has a withstand voltage failure, and the yield of the multilayer ceramic capacitor is reduced. On the other hand, if the dielectric layer has a uniform thickness, the withstand voltage performance is good, and the yield of the laminated ceramic capacitor is improved.

If wrinkles, creases, and the like are present in a release film used as a carrier film for a dielectric layer, the thickness will vary. In addition, the smoothness of the surface of the release film affects the uniformity of the thickness of the dielectric layer. Under such circumstances, for example, patent document 1 has studied a roll of release film capable of smoothing the release film to reduce the variation in the thickness of the dielectric layer.

Documents of the prior art

Patent literature

Patent document 1: japanese patent laid-open publication No. 2011-206995

Disclosure of Invention

Technical problem to be solved by the invention

In the step of manufacturing a ceramic member, a ceramic green sheet is formed on a release film drawn from a release film roll. Here, as a measure for improving the productivity of the ceramic member, it is considered effective to reduce the frequency of replacement of the release film roll by increasing the winding length of the release film wound into the release film roll. However, if the winding length of the release film is increased, the release film roll becomes large, and the pressure applied to the release film in the inner portion of the release film roll, that is, in the vicinity of the winding core becomes large.

Therefore, if a protrusion (convex portion) is present on the core, the protrusion shape of the core is transferred to the release film near the core. In the case of a ceramic green sheet having a small thickness, such a transferred projection shape becomes a factor of variation in the thickness of the ceramic green sheet. This thickness variation is improved as the distance from the winding core increases, but the thickness variation of the ceramic green sheet increases because the deformation of the release film is large in the vicinity of the winding core, and measures such as discarding without use are taken to suppress the thickness variation of the ceramic green sheet. If such a release film that is not effectively used can be effectively used, the release film can be effectively used, and the frequency of replacing the release film roll can be reduced, so that the productivity of various products such as ceramic green sheets and ceramic parts can be expected to be improved.

Therefore, the present invention provides a release film roll which can effectively utilize the release film up to the vicinity of the winding core. In addition, the present disclosure provides a method for manufacturing a ceramic member sheet and a ceramic member by using such a release film roll, which can manufacture the ceramic member sheet with high production efficiency. The present invention also provides a ceramic member sheet and a ceramic member having excellent reliability.

[ means for solving the problems ]

A release film roll according to an aspect of the present invention includes: a release film having a base film and a release layer, and a core around which the release film is wound, wherein the surface roughness (Rp) of the outer peripheral surface of the core is 1.5 [ mu ] m or less.

The protrusion on the outer peripheral surface of the winding core greatly affects the deformation of the release film in the inner portion of the release film roll, that is, in the portion near the winding core. In the above-described roll of release film, the surface roughness (Rp) of the outer peripheral surface of the winding core is 1.5 μm or less, and therefore even if the winding length is increased and the pressure applied to the release film on the inside is increased, deformation of the release film near the winding core is suppressed, and variation in thickness of the release film is reduced. Therefore, even if the winding length of the release film is increased, the release film can be effectively used up to the vicinity of the core.

The surface roughness (Rp) represents the height of the highest projection (protrusion) in a roughness curve obtained by measuring the outer peripheral surface of the core. If there is even one large protrusion on the outer peripheral surface of the winding core, the shape is transferred to the release film by the protrusion, and the release film near the winding core is significantly deformed, resulting in a large variation in the thickness of the ceramic green sheet. On the other hand, the depressions in the outer peripheral surface of the winding core are more difficult to transfer the shape to the release film than the protrusions. Therefore, as the surface roughness of the core, the deformation of the release film in the vicinity of the core can be reduced by specifying Rp (maximum protrusion height) rather than Ra (arithmetic average roughness) and Rv (maximum depression depth) to be a predetermined value or less.

The width of the thickness variation of the release film wound around the core in the width direction may be 0.5 μm or less. If the width of the thickness variation of the release film in the width direction is 0.5 μm or less, the pressure difference due to the difference in thickness becomes small, and the deformation of the release film can be further suppressed. In particular, in the case of a release film roll having a large roll diameter, the effect of suppressing deformation is further increased.

The winding core may be constructed of fiber reinforced plastic. This improves the smoothness of the surface of the core and improves the mechanical strength of the core. Therefore, the occurrence of wrinkles, creases, and the like in the release film due to the deformation of the core can be sufficiently suppressed. Fiber Reinforced Plastics are also sometimes referred to as FRP (Fiber Reinforced Plastics) or FWD (Fiber Winding Plastics).

The outer diameter of the winding core can be below 170 mm. Since the release film roll is wound, the transfer of the shape from the core periodically occurs at intervals of the circumference corresponding to the diameter of the wound release film. When the outer diameter of the winding core is reduced, the gap is narrowed. The transfer of the protrusion shape of the winding core tends to be smaller as the peeling film is wound away from the winding core. The smaller the core size, the narrower the transfer interval of the projection shape. Therefore, the length of the release film on which the transfer of the protrusion shape occurs becomes shorter as the winding core becomes smaller. Therefore, the length of the release film that has to be discarded following the transfer can be reduced. In addition, the size of the peeling film roll can be reduced, thereby reducing the installation space and the transportation cost.

The length of the release film wound around the core may be 4000m or more. When the length of the release film is long, the pressure applied to the release film near the core increases, and the release film is easily affected by the protrusion on the outer peripheral surface of the core. Since the height of the projection on the outer peripheral surface of the roll of release film is sufficiently small, even if the length of the release film is increased, deformation of the release film can be suppressed. Therefore, the frequency of replacing the release film roll can be reduced, and the production efficiency of various products such as ceramic green sheets and ceramic parts can be sufficiently improved.

A method for manufacturing a ceramic member sheet according to an aspect of the present disclosure includes a step of forming a ceramic green sheet on a surface of a release layer of a release film drawn from the arbitrary release film roll using a slurry containing ceramic powder.

The above-described manufacturing method uses a release film drawn from the above-described arbitrary release film roll. The release film can form a ceramic green sheet with reduced thickness variation in the vicinity of the core. Therefore, the release film in the vicinity of the winding core can be effectively utilized to produce a ceramic component sheet having a ceramic green sheet with reduced thickness variation. In this way, the release film near the winding core can be effectively used to produce the ceramic component sheet, and therefore, the production efficiency of the ceramic component sheet can be improved.

In the step of forming the ceramic green sheet, the ceramic green sheet may be formed in a portion of the release film drawn from the release film roll within 300m from the rear end. Even if the release film in the vicinity of the winding core is used in this manner, a ceramic green sheet with suppressed thickness variation can be produced. Thus, the manufacturing cost of the ceramic green sheet can be sufficiently reduced. In the present disclosure, the "rear end" of the release film refers to the end attached to the winding core, and the "front end" of the release film refers to the end appearing on the outer peripheral surface of the release film roll.

A method for manufacturing a ceramic component according to an aspect of the present invention includes: a step of obtaining a laminate including ceramic green sheets by using the ceramic member sheet obtained by the above-described production method; and a step of obtaining a sintered body by firing the laminate. The manufacturing method can also manufacture a ceramic component by effectively using the release film near the winding core. Therefore, the production efficiency of the ceramic member can be improved.

The ceramic member sheet according to one aspect of the present invention can be obtained by forming a green sheet including a ceramic green sheet on the surface of the release layer of the release film drawn from the above-described arbitrary release film roll.

The ceramic member sheet can be obtained by using a release film drawn from the above-described arbitrary release film roll. Since the thickness variation of the release film is suppressed, the thickness variation of the green sheet of the ceramic member sheet is suppressed, and the reliability is excellent. In addition, since the production can be performed using the release film near the core, the yield can be improved.

A ceramic component according to one aspect of the present invention includes a sintered body obtained by forming a laminate of ceramic green sheets including the ceramic component sheet and firing the laminate. Since the variation in the thickness of the ceramic green sheet is suppressed, the ceramic member is excellent in reliability. In addition, a ceramic green sheet produced using a release film near the winding core can be used, and therefore the yield can be improved.

ADVANTAGEOUS EFFECTS OF INVENTION

According to the present disclosure, a release film roll in which the release film can be effectively used up to the vicinity of the core can be provided even if the winding length of the release film is increased. Further, the present invention can provide a method for manufacturing a ceramic member sheet and a ceramic member with high production efficiency by using such a release film roll. The present invention can provide a ceramic member sheet and a ceramic member having excellent reliability.

Drawings

Fig. 1 is a perspective view of a release film roll according to an embodiment.

Fig. 2 is a cross-sectional view showing an example of a cross section of the release film.

FIG. 3 is a cross-sectional view of one embodiment of a ceramic component sheet.

FIG. 4 is a sectional view showing a ceramic member according to an embodiment.

Description of the symbols

10, 8230, 8230and a core; 20, 8230, 8230and stripping film; 22\8230, 8230and base material film; 24\8230, 8230and stripping layer; 30, 823060, 8230and blank sheet; 32, 8230, ceramic blank sheet; 34, 823060, 8230and electrode blank sheet; 40, 8230, ceramic parts sheet; 90 8230, laminated ceramic capacitor; 92- (8230); 8230; inner layer part; 93 \ 8230, 8230and an outer layer part; 94\8230, 8230, internal electrode layer; 95\8230, 8230and terminal electrode; 96\8230, 8230and ceramic layer; 100, 8230, 8230and peeling film roll.

Detailed Description

Hereinafter, embodiments of the present disclosure will be described with reference to the drawings as appropriate. In the drawings, the same or equivalent elements are denoted by the same reference numerals, and overlapping description will be omitted as appropriate. However, the following embodiments are examples for explaining the present disclosure, and the present invention is not intended to be limited to the following.

Fig. 1 is a perspective view of a release film roll according to an embodiment. The release film roll 100 of fig. 1 includes: a release film 20 having a base film and a release layer; and a core 10 around which a release film 20 is wound. The release film 20 is used as a carrier film in a process of manufacturing a ceramic member represented by a laminated ceramic capacitor, for example. In this manufacturing step, for example, a ceramic green sheet to be a dielectric sheet and an electrode green sheet to be an internal electrode are formed on a release film by coating or printing, and then these are peeled off and laminated, and the laminated body is fired to manufacture a ceramic member. The release film 20 is drawn from the release film roll 100 and used.

The material of the winding core 10 may be paper, plastic, metal, or the like. Since the particles cause generation of pinholes in the production of the ceramic parts, a lightweight plastic containing no paper dust is preferred. As such a material, ABS resin, bakelite (bakelite), fiber reinforced plastic, and the like can be cited. Among them, the ABS resin may deform the winding core 10 after one use, and may decrease the roundness (roundness).

On the other hand, the fiber reinforced plastic and the phenolic plastic have high mechanical strength, and thus the winding core 10 can be recycled. In this way, the winding core 10 can be used repeatedly, and therefore, industrial waste can be reduced and effective use of resources can be achieved. In addition, the deformation of the core 10 can be sufficiently suppressed when the winding length of the release film 20 is increased. Among the fiber-reinforced plastics and the phenolic plastics, the fiber-reinforced plastics are particularly preferable because they have high mechanical strength and flexibility. Examples of the fiber-reinforced plastic include those obtained by reinforcing fibers with a thermosetting resin.

The winding core 10 is cylindrical, and has a surface roughness (Rp) of 1.5 μm or less on the outer peripheral surface. The surface roughness (Rp) of the core 10 is preferably 1.0 μm or less, and more preferably 0.6 μm or less. If the surface roughness (Rp) is greater than 1.5 μm, the protrusion (convex portion) on the outer peripheral surface of the core 10 presses the release film 20, the shape of the protrusion is transferred, and the release film 20 deforms. As a result, the release surface (surface of the release layer) of the release film 20 is deformed into a convex shape in the release film roll wound outward. On the other hand, in a release film roll in which the release surface is wound inward, the release surface is deformed into a concave shape. In the laminated ceramic capacitor manufactured using the release film 20, the dielectric layer has a non-uniform thickness, and a withstand voltage is reduced in a portion where the dielectric layer has a small thickness, and a capacitance is reduced in a portion where the dielectric layer has a large thickness. On the other hand, when the surface roughness (Rp) of the outer peripheral surface of the core 10 is small, the protrusions are small, and the deformation of the release film 20 can be suppressed. As a result, the reliability of the multilayer ceramic capacitor manufactured using the release film 20 can be improved.

The surface roughness (Rp) and the surface roughness (Rv) of the core 10 are the "maximum protrusion height" and the "maximum depression height" specified in JIS (Japanese Industrial Standards) B0601-2001. The surface roughness of these can be measured using a contact surface roughness meter.

The surface roughness (Rp) in the outer peripheral surface of the winding core 10 can be reduced by densely cutting the outer peripheral surface. For example, when manufacturing a winding core 10 made of fiber-reinforced plastic, first, a fiber impregnated with resin is wound around a mandrel, and if necessary, a resin sheet is further wound around the mandrel. The resin may be applied instead of winding the resin sheet. Next, after the resin is cured by heat or the like by heating, the mandrel is removed to obtain a bare tube serving as a core.

Examples of the resin include epoxy resins and unsaturated polyester resins. Examples of the fibers include glass fibers and aromatic polyamide fibers. In view of cost, the resin is preferably an unsaturated polyester resin. From the same viewpoint, glass fibers are preferable as the fibers.

Next, the outer peripheral surface of the bare pipe is smoothed by cutting with a lathe or the like. For example, the surface roughness (Rp) of the outer peripheral surface can be reduced by slowing down the feed speed of the turning tool. Further, the surface roughness (Rp) of the outer peripheral surface can be sufficiently reduced by performing polishing (e.g., buffing) using polishing paper, a polishing liquid containing an abrasive, or the like. The polishing may be performed using coarse polishing paper or a coarse polishing material, or may be performed by gradually changing from coarse polishing paper or a polishing material to fine polishing paper or a polishing material. By performing such polishing, the surface roughness (Rp) of the outer peripheral surface can be reduced.

The bare tube with the surface treated was cut into a predetermined length. If necessary, a treatment such as removing burrs from the cut surface may be performed. Further, by removing chips (foreign matters) generated during cutting, polishing, and cutting, generation of pinholes in the ceramic green sheet can be suppressed.

Fig. 2 is a sectional view showing an example of a section of a release film. The release film 20 has a base film 22 and a release layer 24 on one surface thereof. The substrate film 22 may be a film of a synthetic resin. Examples of the synthetic resin include polyolefin resins such as polyester resins, polypropylene resins, and polyethylene resins, acrylic resins such as polylactic acid resins, polycarbonate resins, and polymethyl methacrylate resins, polystyrene resins, polyamide resins such as nylon, polyvinyl chloride resins, polyurethane resins, fluorine resins (fluorine resins), and polyphenylene sulfide resins. Among these, polyester resins are preferable. Among the polyester resins, polyethylene terephthalate (PET) is more preferable from the viewpoint of mechanical properties, transparency, cost, and the like.

The thickness of the base film 22 is preferably 10 to 100. Mu.m, more preferably 20 to 50 μm. When the thickness is less than 10 μm, physical properties such as dimensional stability of the release film 20 tend to be impaired. When the thickness exceeds 100 μm, the production cost per unit area of the release film 20 tends to increase.

The base film 22 may contain a filler (filler) to such an extent that transparency is not impaired, from the viewpoint of sufficiently improving the mechanical strength of the release film 20. The filler is not particularly limited, and examples thereof include calcium carbonate, calcium phosphate, silica, kaolin, talc, titanium oxide, fumed silica, alumina, and organic particles.

When a polyester film is used as the base film 22, the production can be performed in the following order. First, molten polyester was cast to a rotating cooling drum using an extruder. The molten polyester is extruded from a metal port formed with a slit. Then cooled and peeled off from the rotating cooling drum to obtain an unstretched polyester film. The thickness of the polyester film and the range of variation thereof can be adjusted by adjusting the gap between the slits of the extruder.

Next, the non-stretched polyester film was stretched and adjusted to a desired thickness, and mechanical strength was given. The polyester film is preferably drawn by biaxial drawing. In this case, after the longitudinal extension, the lateral extension is performed. The stretching temperature during stretching is preferably not lower than the glass transition temperature and not higher than the melting temperature of the polyester film. The longitudinal extension and the transverse extension can be extended by about several times respectively. The variation in thickness of the unstretched film is also inherited after stretching. Therefore, the thickness fluctuation range of the base film 22 and the release film 20 can be adjusted by controlling the thickness fluctuation of the unstretched film.

The release layer 24 is formed by applying a solution containing a release agent to one surface of the base film 22, drying, and curing. The coating method is not particularly limited, and a reverse coating method, a gravure coating method, a bar coating method, a rod coating method, a meyer rod coating method (12510124521251699, 125409612540125401254080, a die coating method, a spray coating method, and the like. The drying may be hot air drying, infrared drying, natural drying, etc. Heating is preferable for suppressing moisture condensation during drying, and may be about 60 to 120 ℃.

Examples of the release agent for forming the release layer 24 include silicone-based release agents, long-chain alkyl-based release agents, fluorine-containing release agents, and aminoalkyd-based release agents. The silicone-based release agent includes an addition reaction type silicone release agent, a condensation reaction type silicone release agent, an ultraviolet curing type release agent, and the like, depending on the curing reaction.

The curing conditions may be appropriately selected depending on the curing system of the release agent. For example, when the release agent is an addition-reaction-type silicone, it can be cured by heat treatment at 80 to 130 ℃ for several tens of seconds. In the case of ultraviolet curing, ultraviolet rays may be irradiated from a mercury lamp, a metal halide lamp, or the like as a light source to cure the resin. When radical polymerization is performed by irradiation with ultraviolet rays, curing is preferably performed in a nitrogen atmosphere in order to prevent oxygen inhibition. The range of thickness variation of the release layer 24 is preferably small.

The addition reaction type silicone release agent is cured by reacting a substance obtained by introducing a vinyl group into a terminal and/or a side chain of polydimethylsiloxane with hydrogen siloxane. A platinum catalyst may be used in the curing. For example, the curing may be carried out at a curing temperature of about 100 ℃ for several tens of seconds to several minutes. The thickness of the release layer 24 may be about 50 to 300 nm. Examples of the strippers for addition reaction include KS-847, KS-847T, KS-776L, KS-776A, KS-841, KS-774, KS-3703T, KS-3601 and the like (trade names in all cases) manufactured by shin-Etsu chemical Co.

The release layer 24 may be formed of, for example, a cured product of a (meth) acrylate component and a (meth) acrylate-modified silicone. Since such a cured product can be cured by ultraviolet rays, the thickness of the release layer 24 can be increased. Therefore, for example, in the case where the base material film 22 contains a filler, the surface of the release layer 24 can be smoothed by covering the protrusion caused by the filler. In this case, the thickness of the release layer 24 may be 300 to 3000nm.

It is also possible to use a (meth) acrylate monomer and a (meth) acrylate-modified silicone oil which are not miscible with each other. These components are mixed together with the reaction initiator in a solvent, and after the mixture is applied to the base film 22, the solvent is dried. In this way, the release layer 24 may be formed by curing with ultraviolet rays in a state where the silicone-modified silicone oil is locally present in the vicinity of the surface. Known (meth) acrylate-modified silicone oils can be used. Examples thereof include X-22-164A, X-22-164B, X-22-174DX and X-22-2445 (trade names) manufactured by shin-Etsu chemical Co., ltd.

The surface (release surface) of the release layer 24 in the release film 20 is preferably smooth. Specifically, the surface roughness (Rp) of the release layer 24 is preferably 100nm or less, and more preferably 50nm or less. The surface roughness (Rp) of the release layer 24 of the present embodiment is the maximum protrusion height specified in JIS B0601-2001, and can be measured using a known surface roughness meter such as a scanning white interference microscope or a contact type.

The width of the thickness variation of the release film 20 in the width direction is preferably 0.5 μm or less, more preferably 0.4 μm or less, and still more preferably 0.3 μm or less. Particularly preferably 0.2 μm or less. By reducing the fluctuation width, when the release film 20 is wound around the core 10 to form the release film roll 100, the pressure difference caused by the difference in thickness of the release film 20 is reduced, and the deformation of the release film 20 in the vicinity of the core 10 can be sufficiently suppressed.

In the present disclosure, a direction in which the release film is conveyed when the release film is wound up and unwound is referred to as a longitudinal direction, and a direction orthogonal to the longitudinal direction of the release film is referred to as a width direction of the release film. The width of the thickness variation of the release film of the present disclosure in the width direction is the difference between the maximum value and the minimum value of the thickness of the release film between both ends of the release film 20 in the width direction. This was determined as follows.

The peeling film 20 is provided with a reference point, and a plurality of positions for measuring the thickness of the peeling film are set in the width direction. The interval between the measurement positions may be set as appropriate, and the thickness of the release film is substantially hard to change rapidly, so that the interval may be set to about 1mm to 10 mm. The reference point may be, for example, a side edge of the release film. The thickness of the release film was measured at each measurement position and the film was appropriately moved in the longitudinal direction, so that the thickness of the release film was measured in time in the same manner. An average value is calculated using a plurality of longitudinal thickness measurement values measured at the same position in the width direction, and the difference between the maximum value and the minimum value among the average values of the thickness of the peeled film calculated for each measurement position in the width direction is the thickness variation width.

Examples of the method for measuring the thickness include a method using a contact type thickness measuring instrument, an optical type thickness measuring instrument, a capacitance type thickness measuring instrument, a radiation type thickness measuring instrument using β rays, fluorescent X rays, or the like, and a method of measuring the cross section of the release film 20 by microscopic observation. When a contact thickness measuring device is used, the thickness variation of the release film 20 can be directly measured. The thickness variation widths of the base film 22 and the release layer 24 may be measured by the same method or different methods, and the total thickness of the respective thicknesses may be used as the thickness of the release film 20. For example, the thickness of the base film 22 may be measured by a radiation type film thickness meter, the thickness of the peeling layer 24 may be measured by an optical measurement obtained by spectrophotometry, and the respective thickness fluctuation ranges may be summed up to be the thickness fluctuation range of the peeling film 20. The optical thickness measuring instrument may be set to a diameter of about 0.2 to 2mm as long as the diameter of the measuring point is appropriately set.

Further, a thickness measuring device may be provided in the line of the coating device, the cutting device, or the like, and the thicknesses may be sequentially measured. The thickness measurement with the measuring instrument set in the line is performed by an optical method or a radiation method, whereby the measuring instrument and the release film 20 can be prevented from coming into contact with each other. This can suppress damage and the like, and can sufficiently maintain the quality of the release film roll. By providing a thickness measuring device in the coating line or the cutting line and measuring the thickness by moving the thickness measuring device back and forth in the width direction during the conveyance of the release film 20, the thickness can be measured over the entire length of the release film 20.

The width of the release film before cutting may be, for example, 1 to 2m. The release film roll before cutting is manufactured by winding the release film around a winding core. In this case, the release surface side of the release film may be wound around the core at either the inner side or the outer side. The release film before cutting may be wound around one or more winding cores 10 while being cut in the longitudinal direction. This makes it possible to adjust the width of the release film 20 to an appropriate width. The method of cutting the release film may be selected as appropriate. For example, cutting can be performed using a cutting device having an upper knife roll and a lower knife roll. The upper blade roll may be mounted with a plurality of upper blades at specific intervals in the direction of its rotation axis. The upper knife of the upper knife roller can be meshed with the lower knife roller.

The release film pulled out from the release film roll before cutting is conveyed to between an upper knife roll and a lower knife roll in the cutting device. In the cutting device, the upper knife roll and the lower knife roll rotate in opposite directions to cut the release film. After cutting, the release film is wound around the core again to form the release film roll 100 of one embodiment (after cutting). The tension can be appropriately adjusted in winding the core 10, and the release surface side can be wound around the core 10 as either the inside or the outside. The tension at the start of winding may be increased and gradually decreased in order to suppress the winding displacement during transportation. The discharge of air between the release films 20 wound by the contact roller can also be promoted.

The outer diameter of the core 10 may be 170mm or less, or may be 100mm or less. This reduces the size of the release film roll 100, thereby reducing installation space and transportation costs.

The length of the release film 20 wound around the core 10 may be 4000m or more, 5000m or more, or 6000m or more. This can reduce the frequency of replacing the release film roll 100, and sufficiently improve the productivity of various products such as ceramic green sheets and ceramic parts.

In the release film roll 100, the surface roughness (Rp) of the core 10 is sufficiently small, and therefore, even in the vicinity of the core 10, deformation of the release film 20 can be suppressed. Therefore, the take-up force of the release film 20 can be increased when the release film roll 100 is manufactured. This can sufficiently suppress the release film roll 100 from collapsing or winding displacement during transportation.

Fig. 3 is a cross-sectional view of a ceramic component sheet according to one embodiment of the present disclosure. The method for manufacturing the ceramic member sheet 40 shown in fig. 3 includes a step of forming a green sheet 30 including a ceramic green sheet 32 and an electrode green sheet 34 on the surface 24a of the release layer 24 of the release film 20 drawn from the release film roll, using a slurry including ceramic powder and an electrode slurry.

The ceramic green sheet 32 may be formed by coating a ceramic slurry containing ceramic powder and drying it. The electrode green sheet 34 may be formed by coating an electrode paste on the ceramic green sheet 32 and drying it.

For example, in the case of a laminated ceramic capacitor, a ceramic slurry can be prepared by kneading a dielectric raw material (ceramic powder) with an organic vehicle. As the dielectric material, various compounds which become a composite oxide or an oxide by firing can be cited. For example, the metal salt may be appropriately selected from carbonates, nitrates, hydroxides, organic metal compounds, and the like. The dielectric material is a powder having an average particle diameter of 4 μm or less, preferably 0.1 to 3.0. Mu.m.

The electrode paste can be prepared by kneading at least one selected from a conductive material such as various conductive metals and alloys, and a material which becomes a conductive material after firing such as various oxides, organic metal compounds, and resinates, with an organic vehicle. As the conductive material used in the production of the electrode paste, ni metal, ni alloy, or a mixture thereof is preferably used. The electrode paste may also include a plasticizer in order to improve adhesiveness. Examples of the plasticizer include phthalic acid esters such as Butyl Benzyl Phthalate (BBP), adipic acid, phosphoric acid esters, and glycols.

The organic vehicle included in the ceramic slurry and the electrode slurry may be prepared by dissolving a binder resin in an organic solvent. Examples of the binder resin used for the organic medium include ethyl cellulose, acrylic resins, butyral resins, polyvinyl acetal, polyvinyl alcohol, polyolefins, polyurethanes, polystyrene, and copolymers thereof. Among these, butyral resins are preferable, and specifically polyvinyl butyral resins are used. The use of the butyral resin can improve the mechanical strength of the ceramic green sheet. One or both of the ceramic slurry and the electrode slurry may contain at least one additive selected from various dispersants, plasticizers, antistatic agents, dielectrics, glass frits, insulators, and the like, as necessary.

The ceramic slurry is applied to the surface 24a of the release layer 24 of the release film 20 using, for example, a doctor blade apparatus. Then, the coated ceramic slurry is dried in a drying apparatus at a temperature of, for example, 50 to 100 ℃ for 1 to 20 minutes to form a ceramic green sheet 32. The ceramic green sheet 32 shrinks to 5 to 25% compared to before drying.

Then, the electrode paste is printed on the surface 32a of the ceramic green sheet 32 in a specific pattern by using, for example, a screen printing apparatus. The printed electrode paste is dried in a drying apparatus at a temperature of, for example, 50 to 100 ℃ for 1 to 20 minutes to form an electrode green sheet 34. In this way, the ceramic member sheet 40 in which the ceramic green sheet 32 and the electrode green sheet 34 are sequentially laminated on the peeling layer 24 of the peeling film 20 can be obtained.

When the width of the thickness variation of the release film 20 of the release film roll 100 is large, the thickness variation of the ceramic green sheet 32 is large. Since the peeling film 20 pulled out from the peeling film roll 100 is less deformed near the core 10 and the variation width of the thickness of the peeling film 20 is small, the ceramic green sheet 32 having the variation width of the thickness sufficiently reduced can be formed even in the peeling film 20 near the core 10.

Since the variation in thickness of the release film 20 is suppressed even in the vicinity of the winding core 10, the green sheet 30 including the ceramic green sheet 32 and the electrode green sheet 34 can be formed, for example, up to a portion within 300m from the rear end of the release film 20 on the winding core 10 side. The blank 30 may be formed up to a portion within 250m, or up to a portion within 200m from the rear end. In this way, the release sheet 12 up to the vicinity of the core 10 can be effectively used, so that the manufacturing cost can be reduced, and the frequency of replacement of the release film roll 100 can be reduced to improve the production efficiency of the web 30.

In the ceramic member sheet 40, the range of variation in the thickness of the green sheet 30 including the ceramic green sheet 32 and the electrode green sheet 34 is sufficiently reduced. The ceramic member manufactured using the ceramic member sheet 40 is excellent in reliability. In addition, the ceramic member sheet 40 and the ceramic member can be manufactured at a low manufacturing cost.

The thicknesses of the ceramic green sheet 32 and the electrode green sheet 34 may be 1.0 μm or less, respectively. Thus, even if the thickness is small, the variation in thickness can be suppressed, and thus a ceramic component having high reliability can be obtained. The ceramic member sheet of the present disclosure is not limited to the sheet of fig. 3, and may be constituted of only the ceramic green sheet 32 without the electrode green sheet, for example.

A method for manufacturing a ceramic component according to an embodiment of the present invention includes: a laminating step of preparing a plurality of ceramic member sheets, and laminating green sheets of the plurality of ceramic member sheets to obtain a laminate; a firing step of firing the laminate to obtain a sintered body; and an electrode forming step of forming a terminal electrode on the sintered body to obtain a multilayer ceramic capacitor.

Fig. 4 is a cross-sectional view showing an example of the multilayer ceramic capacitor manufactured by the above-described manufacturing method. The multilayer ceramic capacitor 90 includes an inner layer 92 and a pair of outer layers 93 sandwiching the inner layer 92 in the stacking direction. The multilayer ceramic capacitor 90 has terminal electrodes 95 on the side surfaces.

The inner portion 92 includes a plurality of (13 in this example) ceramic layers 96 and a plurality of (12 in this example) internal electrode layers 94. The ceramic layers 96 are alternately laminated with the internal electrode layers 94. The internal electrode layer 94 is electrically connected to the terminal electrode 95. The outer layer portion 93 is formed of a ceramic layer. The ceramic layer may be formed in the same manner as the ceramic green sheet 32, for example.

As an example of the laminating step, the release film 20 of the ceramic member sheet 40 shown in fig. 3 is peeled to obtain a green sheet 30. One surface 30b of the green sheet 30 is laminated on the outer layer green sheet. Another release film 20 is peeled from another ceramic member sheet 40 to obtain another green sheet 30, and the electrode green sheet 34 of the green sheet after the initial peeling and the electrode green sheet 30b of the other green sheet 30 are laminated in an opposed manner. Thereafter, this sequence is repeatedly performed to laminate the green sheets 30, whereby a laminated body can be obtained. That is, in this lamination step, the green sheets 30 are obtained by peeling the release film 20, and the green sheets 30 are sequentially laminated. The laminate is formed by repeating this sequence a plurality of times. Finally, lamination of the outer layer green sheets may be performed.

The number of stacked sheets of the green sheets in the stacked body is not particularly limited, and may be, for example, several tens to several hundreds of layers. A thick outer layer green sheet on which no electrode layer is formed may be provided on both end surfaces of the laminate orthogonal to the lamination direction. After the laminate is formed, the laminate may be cut to produce green sheets (greenchip).

In the firing step, the laminate (green sheet) obtained in the laminating step is fired to obtain a sintered body. The firing may be performed at 1100 to 1300 ℃ in an atmosphere of a humidified mixed gas of nitrogen and hydrogen, or the like. However, the oxygen partial pressure in the atmosphere during firing is preferably 10 ^-2 Pa or less, more preferably 10 ^-2 ～10 ^-8 Pa. Before firing, the laminate is preferably subjected to binder removal treatment. The debinding treatment may be performed under ordinary conditions. For example, when a base metal such as Ni or a Ni alloy is used as a conductor material of the internal electrode layer, it is preferably performed at 200 to 600 ℃.

After firing, heat treatment may be performed to reoxidize the dielectric layer constituting the sintered body. The holding temperature or the maximum temperature in the heat treatment is preferably 1000 to 1100 ℃. The oxygen partial pressure at the time of heat treatment is preferably higher than that of the reducing atmosphere at the time of firing, and more preferably 10 ^-2 Pa to 1Pa. The sintered body thus obtained is preferably subjected to barrel polishing, end face polishing by sandblasting or the like, for example.

In the electrode forming step, the terminal electrode paste is fired on the side surface of the sintered body to form the terminal electrode 95, whereby the multilayer ceramic capacitor 90 shown in fig. 4 can be obtained. In the method of manufacturing the multilayer ceramic capacitor 90, the multilayer ceramic capacitor 90 can be manufactured using the green sheet 30 formed on the release film 20 in the vicinity of the core 10 of the release film roll 100. In the release film roll 100, since the range of variation in the thickness of the release film 20 near the core 10 is sufficiently reduced, the range of variation in the thickness of the green sheet 30 can be sufficiently reduced. Therefore, the green sheet 30 of the release film 20 formed in the vicinity of the core 10 can also be used for manufacturing the multilayer ceramic capacitor 90.

The multilayer ceramic capacitor 90 can suppress a decrease in withstand voltage and is excellent in reliability. Therefore, according to the above-described manufacturing method, the multilayer ceramic capacitor 90 having excellent reliability can be manufactured at a high yield. In addition, since the release film 20 which has not been used before can be used, the manufacturing cost can be reduced.

While the embodiments have been described above, the present invention is not limited to the embodiments. For example, although a multilayer ceramic capacitor is described as an example of the ceramic member, the ceramic member of the present invention is not limited to the multilayer ceramic capacitor, and may be another ceramic member, for example. The ceramic member may be a varistor or a laminated inductor, for example.

Examples

The present disclosure will be described in more detail with reference to examples and comparative examples, but the present disclosure is not limited to the following examples.

(example 1)

To produce a release film, a release agent solution was prepared in the following order. 0.415 parts by mass of an acrylate-modified silicone oil (trade name: X-22-2445, manufactured by shin-Etsu chemical Co., ltd.), 100 parts by mass of methyl ethyl ketone, and 100 parts by mass of toluene were prepared with respect to 100 parts by mass of nonanediol diacrylate. These were put into a metal container and mixed with stirring to obtain a colorless transparent solution.

To the above solution, 2.5 parts by mass of a reaction initiator (trade name: omnirad127, manufactured by IGM ratios B.V.) was added to prepare a coating solution. The coating solution was extruded from a slit of a coating apparatus, coated on one surface of a biaxially stretched polyethylene terephthalate film (PET film, thickness: 31 μm, width-direction thickness variation: 0.46 μm) having a width of 1100mm, and heated air was blown thereto for 30 seconds at a temperature of 80 ℃ to evaporate methyl ethyl ketone and toluene. Thereby forming a coating layer on the PET film.

Next, the coating layer was cured by irradiation with ultraviolet light in a nitrogen atmosphere having an oxygen concentration of 100ppm, thereby forming a release layer having a release function. Thus, a release film having a release layer on one surface of the PET film was obtained.

The thickness of the release film was measured in the following order. An optical thickness measuring instrument is arranged between an ultraviolet curing part of the coating device and a coiling machine of the release film to measure the thickness of the release film. The thickness measuring device is provided with a thickness measuring detection part for measuring the stripping layer with different wavelength ranges and a thickness measuring detection part for the PET film. The diameter of the measurement point was 1mm, and the measurement positions were set at 4mm intervals with respect to one end of the release film. The thickness of the release layer and the thickness of the PET film were measured at 4mm intervals in the width direction while moving the detection units in the width direction. The thickness of the release film was determined by adding the respective measured values of the release layer and the PET film, which were obtained by an optical thickness measuring instrument. Further, the thickness measurement was continued while the release film was conveyed and the thickness measuring device was moved back and forth. Thus, the thickness of the release film was measured over the entire length of the release film. The average thickness of the release layer was 0.5 μm.

The surface roughness (Rp) of the release layer of the release film was measured using a scanning type white interference microscope (device name: VS1540, manufactured by Hitachi High-Tech Science Corporation). As a result, the surface roughness (Rp) of the release layer was 30nm. The total length of the release film was 8500m.

The release film was cut into a size of 200mm in width by cutting the film lengthwise with a cutter. The release film is wound around a winding core so that the release surface is on the outer side. The winding is performed by an inclined tension (tape tension) which gradually weakens the tension applied to the wound release film from the start of winding to the end of winding. Thus, 5 rolls of the release film having a winding length of 4000m were obtained. Further, a 50mm portion of the release film before cutting was cut from both ends toward the inside and discarded.

The thickness data of the release films measured in the above-described order for each roll of the cut release film is calculated in accordance with the position of each release film, and the width variation width in the width direction is obtained for each roll of the release film.

A winding core made of fiber-reinforced plastic for winding is a winding core obtained by impregnating glass fibers with an epoxy resin, and laminating the glass fibers under pressure. The inner diameter of the winding core is 76.2mm, and the outer diameter is 88.2mm. The outer peripheral surface of the winding core is polished using a polishing paper. The grinding is performed by changing the ground paper from coarse ground paper to fine ground paper in stages. In this way, the surface treatment is performed, and the surface roughness of the outer peripheral surface of the winding core is adjusted.

After the surface treatment, the surface roughnesses Rp and Rv of the outer peripheral surface of the core were 1.5 μm and 3.0. Mu.m, respectively. The surface roughness (Rp and Rv) was measured using a surface roughness measuring machine (trade name: SJ-210) manufactured by Mitutoyo Corporation in the following order. The outer peripheral surface of a winding core having a width of 202mm was divided into 14 pieces along a direction corresponding to the width direction of the release film, and the surface roughness of each piece was measured. This measurement was repeated every 1/4 turn of the core, and the surface roughness was measured at 56 pieces in total. Of the 56 individual pieces of Rp and Rv, the maximum values thereof were defined as the surface roughnesses Rp and Rv of the core outer peripheral surface. The results are shown in Table 1.

From the release film rolls obtained by cutting the release film, 1 release film roll having a width variation of 0.5 μm in the width direction was selected. The release film was pulled out from the release film roll, and a dielectric sheet was produced as a ceramic member sheet in the following order. BaTiO powders were prepared as ceramic powders, respectively ₃ A powder of the series, polyvinyl butyral (PVB) as an organic binder, and methanol as a solvent. Then, 10 parts by mass of an organic binder and 165 parts by mass of a solvent were mixed with 100 parts by mass of the ceramic powder, and kneaded by a ball mill to obtain a dielectric slurry.

The release film roll was set in a coater, and the dielectric slurry was applied to the release layer side of the release film drawn out from the release film roll, to form a dielectric green sheet on the release film. The thickness of the dielectric green sheet was set to 0.9. Mu.m. The thickness was continuously measured using a transmission X-ray film thickness meter (trade name: accureX, manufactured by FUTEC INC.) disposed on one line. The application of the dielectric paste was terminated in a state where the release film wound around the core remained 100 m. Thereafter, the release film was pulled out from the core in an uncoated state and moved in the coater, and the movement was stopped in a state where the release film remained 70m on the core. The average thickness of the dielectric green sheet and the variation range of the thickness (thickness variation range) were examined based on the data measured by the transmission X-ray film thickness meter. The thickness variation width is obtained from the average value, the maximum value, and the minimum value of the thickness. That is, the larger of the absolute value of the maximum value-average value and the absolute value of the minimum value-average value is taken as the thickness variation width.

The range of thickness variation of the dielectric green sheet from the tip side of the release film on which the dielectric slurry was applied to the portion of the remaining 500m was 0.03. Mu.m. On the other hand, the range of variation in the thickness of the dielectric green sheet in the portion from 500m to 100m (the portion on the rear end side of the release film) was 0.04 μm. The conditions and results are summarized in Table 1.

(examples 2 to 3)

A release film roll was produced in the same manner as in example 1 except that the surface roughness of the outer peripheral surface of the winding core was changed by adjusting the polishing conditions of the outer peripheral surface of the winding core. Then, a dielectric green sheet was formed on the release film drawn out from the release film roll in the same manner as in example 1, and the thickness variation width was investigated. The results are shown in Table 1.

(examples 4 and 5)

Molten polyethylene terephthalate was cast from a metal port provided with a slit onto a rotating cooling drum to produce a PET film. In this case, by adjusting the gap of the slit more precisely, a PET film having a width variation width in the width direction different from that of example 1 was obtained. A release film was produced in the same manner as in example 1 except that this PET film was used, and a release film roll having a smaller width variation width in the width direction than in example 1 was obtained. Then, a dielectric green sheet was formed on the release film drawn from the release film roll in the same manner as in example 1, and the thickness variation width of the dielectric green sheet was investigated. The results are shown in Table 1.

(example 6)

A PET film was produced in the same manner as in examples 1, 4, and 5. At this time, a PET film was produced without performing the adjustment of the slit gap more precisely than in examples 1, 4, and 5. Thus, PET films having a width variation width in the width direction different from those of examples 1, 4, and 5 were obtained. A release film was produced in the same manner as in example 1 except that this PET film was used, and a release film roll having a larger width variation in the width direction than in example 1 was obtained. In the same manner as in example 1, a dielectric green sheet was formed on the release film drawn from the release film roll, and the thickness variation width of the dielectric green sheet was investigated. The results are shown in Table 1.

(example 7)

A release film roll was obtained in the same manner as in example 1, except that a winding core made of ABS (acrylonitrile-butadiene-styrene copolymer resin) was used instead of the winding core made of fiber-reinforced plastic. The winding core made of ABS is manufactured by extrusion molding. Since the outer peripheral surface is not polished, the surface roughness of the outer peripheral surface of the winding core depends on the surface shape of the mold. A dielectric green sheet was formed on the release film drawn from the release film roll in the same manner as in example 1, and the thickness variation range was investigated. The results are shown in Table 1.

(example 8)

A release film was produced in the same manner as in example 1, except that the same core as in example 2 was used, the same release film as in example 4 was used, and the winding length was 8000 m. The thickness variation range was examined in the same manner as in example 1 except that the dielectric green sheet was formed longer than in example 1 depending on the length of the rolled release film. The results are shown in Table 1.

(example 9)

A release film was produced in the same manner as in example 1, except that the same core as in example 3 was used, the same release film as in example 4 was used, and the winding length was 6000 m. The thickness fluctuation range was examined in the same manner as in example 1 except that the dielectric green sheet was formed longer than in example 1 depending on the length of the rolled release film. The results are shown in Table 1.

(example 10)

A release film was produced in the same manner as in example 1, except that the same core as in example 3 was used, the same release film as in example 5 was used, and the winding length was 8000 m. The thickness fluctuation range was examined in the same manner as in example 1 except that the dielectric green sheet was formed longer than in example 1 depending on the length of the rolled release film. The results are shown in Table 1.

(example 11)

After the dielectric green sheet was formed on the release film drawn out from the release film roll in example 1, the roll core was repeatedly used to produce the release film roll of example 1 again. A dielectric green sheet is formed again on the release film drawn out from the release film roll. The production of the release film roll and the production of the dielectric green sheet on the release film drawn from the release film roll were repeated 30 times in total. The range of thickness variation of the dielectric green sheet produced in the 30 th run was examined. The results are shown in Table 1.

(example 12)

A release film roll was produced in the same manner as in example 1, except that the release film was wound with the release surface facing inward during winding into the core. Then, a dielectric green sheet was formed on the release film drawn from the release film roll in the same manner as in example 1, and the thickness variation range was investigated. The results are shown in Table 1.

Comparative example 1

A release film roll was produced in the same manner as in example 1, except that the outer peripheral surface of the winding core was polished with only coarse polishing paper to change the surface roughness of the outer peripheral surface of the winding core. Then, a dielectric green sheet was formed on the release film drawn out from the release film roll in the same manner as in example 1, and the thickness variation width was investigated. The results are shown in Table 1.

Comparative example 2

A release film roll was obtained in the same manner as in comparative example 1, except that PET films having different thickness variation widths were used and the length of the release film wound around the core was varied as shown in table 1. On the release film drawn out from the release film roll, a dielectric green sheet was formed longer than that of comparative example 1 in accordance with the winding length in the same manner as in comparative example 1, and the thickness variation width was investigated. The results are shown in Table 1. The variation in film thickness of the dielectric green sheet from about 500m is large, and the variation in film thickness from 300m is particularly large.

Comparative example 3

Instead of the FRP winding core, a winding core made of a phenolic plastic having a surface roughness of the outer peripheral surface shown in table 1 was used. A release film roll was obtained in the same manner as in example 1, except that this core was used. A dielectric green sheet was formed on the release film drawn from the release film roll in the same manner as in example 1, and the thickness variation range was investigated. The results are shown in Table 1. The variation in film thickness of the dielectric green sheet from about 500m is large, and the variation in film thickness from 300m is particularly large.

[ Table 1]

In comparative examples 1 to 3, the range of variation in thickness of the dielectric green sheet was increased on the core side, that is, on the rear end side (500 m to 100 m) of the release film. In a laminated ceramic capacitor obtained by laminating and firing such dielectric green sheets, a withstand voltage failure may occur. On the other hand, in examples 1 to 12, the range of thickness variation of the dielectric green sheet can be reduced on the core side, that is, on the rear end side (500 m to 100 m) of the release film. The capacitor obtained by stacking and firing such dielectric green sheets has high withstand voltage and excellent reliability. Further, according to the results of example 11, it was confirmed that the winding core made of fiber reinforced plastic can be repeatedly used and is also excellent in durability. On the other hand, in the ABS core of example 7, although the range of thickness variation of the dielectric green sheet was small, the core was deformed after use and was difficult to reuse.

[ industrial applicability ]

According to the present invention, a release film roll in which the release film can be effectively used up to the vicinity of the winding core can be provided. Further, the present invention can provide a method for manufacturing a ceramic member sheet and a ceramic member with high production efficiency by using such a release film roll. The present invention can provide a ceramic member sheet and a ceramic member having excellent reliability.

Claims

1. A roll of release film, wherein,

the release film roll is provided with: a release film having a base film and a release layer, and a core around which the release film is wound,

the surface roughness Rp of the outer peripheral surface of the winding core is 1.5 [ mu ] m or less.

2. The release film roll according to claim 1,

the width of the release film in the width direction has a thickness variation width of 0.5 [ mu ] m or less.

3. The release film roll according to claim 1 or 2,

the winding core is made of fiber reinforced plastic.

4. The release film roll according to any one of claims 1 to 3,

the outer diameter of the winding core is 170mm or less, and the length of the release film wound around the winding core is 4000m or more.

5. A method for producing a sheet for a ceramic member,

comprises the following components: a step of forming a ceramic green sheet on the surface of the release layer of the release film pulled out from the release film roll according to any one of claims 1 to 4, using a slurry containing ceramic powder.

6. The method for producing a ceramic member sheet according to claim 5,

the ceramic green sheet is formed in a portion of the release film drawn out from the release film roll within 300m from the rear end.

7. A method for manufacturing a ceramic part, wherein,

comprising:

a step of obtaining a laminate including the ceramic green sheet by using the ceramic member sheet obtained by the production method according to claim 5 or 6; and

a step of firing the laminate to obtain a sintered body,

and the ceramic member is provided with the sintered body.

8. A sheet for a ceramic part, wherein,

the ceramic member sheet is obtained by forming a green sheet including a ceramic green sheet on the surface of the release layer of the release film drawn from the release film roll of any one of claims 1 to 4.

9. A ceramic part, wherein,

comprises a sintered body and a sintered body formed by sintering,

the sintered body is obtained by forming a laminate of ceramic green sheets comprising the ceramic member sheet according to claim 8 and firing the laminate.