JP7447988B2 - Release film roll, ceramic component sheet and manufacturing method thereof, and ceramic component and manufacturing method thereof - Google Patents

Description

The present disclosure relates to release film rolls, ceramic component sheets and methods of manufacturing the same, and ceramic components and methods of manufacturing the same.

In recent years, with the demand for smaller electronic devices, electronic components are also becoming smaller. Ceramic components, which are a type of electronic component, are also becoming smaller year by year. For example, in a multilayer ceramic capacitor, which is a type of ceramic component, the capacitance is increased by reducing the thickness of the dielectric layer and internal electrodes. A typical multilayer ceramic capacitor is manufactured by using a release film as a carrier film, forming a dielectric layer and an internal electrode on the carrier film to form a green sheet, and then peeling the green sheet and laminating the layers.

As the thickness of the dielectric layer of a multilayer ceramic capacitor becomes thinner, the withstand voltage performance, which indicates resistance to voltage intensities that can cause defects such as short circuits, tends to decrease. In particular, when the thickness of the dielectric layer is non-uniform, the thin portion becomes a factor in deteriorating the withstand voltage performance. A multilayer ceramic capacitor including a dielectric layer having such a thin portion has a poor withstand voltage, and the yield of the multilayer ceramic capacitor decreases. On the other hand, if the thickness of the dielectric layer is uniform, the withstand voltage performance will be good and the yield of the multilayer ceramic capacitor will be improved.

Scratches and the like present in the release film used as a carrier film for the dielectric layer cause thickness fluctuations in the dielectric layer. Furthermore, the smoothness of the surface of the release film affects the uniformity of the thickness of the dielectric layer. Under these circumstances, for example, Patent Document 1 examines a release film roll that can smooth the release film and reduce variations in the thickness of the dielectric layer.

Japanese Patent Application Publication No. 2011-206995

In the manufacturing process of ceramic parts, a ceramic green sheet is formed on a release film pulled out from a release film roll. Here, as a measure to improve the productivity of ceramic parts, it is considered effective to increase the length of the release film wound around the release film roll to reduce the frequency of replacing the release film roll. .

Such release film rolls are fixed or supported by a core during storage and transportation. If the winding length becomes long, there is a concern that the release film wound into a roll may slide like a bamboo shoot due to vibrations during transportation. There is also a concern that vibration may cause winding misalignment, which may cause damage to the release layer. Scratches in the release layer can cause pinholes to occur in the dielectric layer. Increasing the winding strength of the release film is considered to be effective as a measure to avoid the occurrence of such winding misalignment and sliding phenomenon.

However, when the winding strength of the release film is increased, the uneven shape of the base film is more likely to be transferred to the release layer. As the winding length becomes longer, the pressure applied to the inner release film increases, so that uneven shapes are particularly likely to be transferred. As a measure to avoid such a phenomenon, it is considered to be effective to reduce the winding strength of the release film.

In this way, there are circumstances in which it is desirable to reduce the winding strength in order to suppress the transfer of uneven shapes near the winding core, and on the other hand, there is a desire to increase the winding strength in order to suppress the winding shift and sliding phenomenon during transportation etc. There is also a situation. In order to increase the length of the release film, it is necessary to satisfy these contradictory demands.

Therefore, the present disclosure provides a release film roll that can sufficiently reduce damage to the release layer of the release film even if the length of the release film is increased. The present disclosure also provides a method of manufacturing a ceramic component sheet and a method of manufacturing a ceramic component with excellent reliability by using such a release film roll. The present disclosure also provides a ceramic component sheet and a ceramic component with excellent reliability.

A release film roll according to one aspect of the present disclosure is a release film roll having a release film having a base film and a release layer, and a core around which the release film is wound. When the distance r [mm] along the radial direction from the outer peripheral surface is 10 to 130 mm, the distance r of the release film roll measured toward the center of the core on the surface of the release film exposed on the outer peripheral surface of the roll. Repulsion hardness K(r) [HL] satisfies the following formula (1).
-2r+670≦K(r)≦-1.25r+862.5...(1)

The rebound hardness K(r) changes depending on the amount of air present in the gap between the wound release films. As the amount of air present between the release films increases, the rebound hardness K(r) decreases, and as the amount of air decreases, the rebound hardness increases. Here, if the repulsion hardness K(r) becomes too high, adjacent release films will come into close contact with each other, and the uneven shape of the base film will be easily transferred to the release layer. Since the rebound hardness tends to be higher on the inner side of the release film roll, the uneven shape is likely to be transferred to the inner release film. Therefore, in the release film roll, the repulsion hardness K(r) is set to be equal to or less than a predetermined upper limit value (-1.25r+862.5) in the inner part where the distance r is 10 to 130 mm. This suppresses the uneven shape from being transferred to the release film.

On the other hand, if the repulsion hardness K(r) becomes too low, the amount of air existing between adjacent release films increases, and the inner part of the release film roll tends to slide like a bamboo shoot, and winding due to vibrations. Misalignment tends to occur more easily. In addition, in the release film roll, the force when the outer release film is wound acts on the release film wound on the inside, causing the release film to shift in the winding direction, resulting in the formation of wrinkles. Therefore, in the above-mentioned release film roll, the repulsion hardness K(r) is set to a predetermined lower limit value (-2r+670) or more in the portion where the distance r is 10 to 130 mm. This suppresses the peeling film from sliding in a bamboo shoot shape, from causing winding misalignment due to vibration, and from occurring from winding tightening.

Therefore, the above-mentioned release film roll can sufficiently reduce damage such as unevenness and scratches occurring on the release layer of the release film even if the length of the release film is increased.

The repulsion hardness K(r) in the range where the distance r is less than 10 mm may be 650HL or more. As a result, it is possible to sufficiently suppress the occurrence of winding misalignment in the release film near the winding core and the occurrence of the winding core coming off from the release film roll. Note that for the portion where the distance r is less than 10 mm, the release film roll can be effectively used during replacement work without forming a ceramic green sheet. For example, it can be used as a deceleration area for reducing the feeding speed, or as a retention area in a drying oven.

The release film roll has a radial distance r ₀ of 160 mm or more from the outer peripheral surface of the winding core to the outer peripheral surface of the roll-shaped release film, and has a rebound hardness K(r) of 350 to 350 when the distance r is 160 mm or more. It may be 662.5HL. Thereby, in the entire release film roll, it is possible to sufficiently bring adjacent release films into close contact with each other, and to sufficiently suppress wrinkles from forming in the release film on the outer periphery of the release film roll.

The release film may be wound such that the repulsion hardness K(r) [HL] decreases as the distance r increases within the range of 10 to 130 mm. Thereby, the occurrence of winding misalignment can be sufficiently suppressed both near the inner periphery and near the outer periphery of the release film roll.

A method for manufacturing a ceramic component sheet according to one aspect of the present disclosure includes a step of forming a ceramic green sheet using a paste containing ceramic powder on the surface of a release layer of a release film pulled out from any of the release film rolls described above. has.

The above manufacturing method uses a release film drawn out from any of the release film rolls described above. The release layer of the above-mentioned release film is sufficiently suppressed from scratches caused by winding misalignment and sliding phenomena, and from unevenness. Therefore, it is possible to form a ceramic green sheet in which thickness variations and pinholes are sufficiently reduced over a wide area between the leading edge and the trailing edge of the release film wound around the release film roll. Therefore, a highly reliable ceramic component sheet can be manufactured. In the present disclosure, the "rear end" of the release film refers to one end of the side that contacts the core, and the "tip" of the release film refers to one end of the side that appears on the outer peripheral surface of the release film roll.

A method for manufacturing a ceramic component according to one aspect of the present disclosure includes a step of obtaining a laminate including a ceramic green sheet using a ceramic component sheet obtained by the above-described manufacturing method, and a step of firing the laminate to produce a sintered body. and a step of obtaining.

In the above manufacturing method, a ceramic component is manufactured using a release film in which scratches due to winding misalignment, sliding phenomena, etc., and unevenness are sufficiently suppressed. As a result, it is possible to form a ceramic green sheet in which thickness variations and pinholes are sufficiently reduced. Therefore, highly reliable ceramic components can be manufactured.

A ceramic component sheet according to one aspect of the present disclosure is obtained by forming a green sheet containing a ceramic green sheet on the surface of a release layer of a release film pulled out from any of the release film rolls described above.

The ceramic component sheet described above is obtained using a release film drawn from any of the release film rolls described above. The release layer of the above-mentioned release film is sufficiently suppressed from scratches caused by winding misalignment and sliding phenomena, and from unevenness. Therefore, thickness variations and pinholes in the ceramic green sheet can be sufficiently reduced. A ceramic component sheet obtained by forming a green sheet containing such a ceramic green sheet has excellent reliability.

A ceramic component according to one aspect of the present disclosure includes a sintered body obtained by forming a laminate including the ceramic green sheets of the ceramic component sheet and firing the laminate. In the ceramic green sheet, thickness variation and pinholes are sufficiently reduced. The ceramic component has excellent reliability because it includes a sintered body obtained by firing a laminate including such ceramic green sheets.

According to the present disclosure, it is possible to provide a release film roll that can sufficiently reduce damage to the release layer of the release film even when the length of the release film is increased. Further, by using such a release film roll, it is possible to provide a method for manufacturing a ceramic component sheet and a method for manufacturing a ceramic component that have excellent reliability. Furthermore, it is possible to provide a ceramic component sheet and a ceramic component that have excellent reliability.

FIG. 1 is a perspective view of a release film roll according to one embodiment. FIG. 2 is a cross-sectional view showing an example of a release film. FIG. 3 is a side view of a release film roll according to one embodiment. FIG. 4 is a diagram for explaining a method of measuring repulsion hardness K(r). FIG. 5 is a diagram illustrating an example of a release film roll manufacturing apparatus according to an embodiment. FIG. 6 is a cross-sectional view of a ceramic component sheet according to one embodiment. FIG. 7 is a cross-sectional view of a ceramic component according to one embodiment. FIG. 8 is a graph showing the relationship between the distance r and the repulsion hardness K(r) of the release film roll in Examples 1, 2, and 3. FIG. 9 is a graph showing the relationship between the distance r of the release film roll and the rebound hardness K(r) of Comparative Examples 1 and 2. FIG. 10 is a graph showing the relationship between the distance r of the release film roll and the rebound hardness K(r) of Comparative Examples 3 and 4.

Hereinafter, embodiments of the present disclosure will be described with reference to the drawings, as the case may be. In each drawing, the same or equivalent elements are given the same reference numerals, and redundant explanations will be omitted as the case may be. However, the following embodiments are examples for explaining the present disclosure, and are not intended to limit the present disclosure to the following contents.

FIG. 1 is a perspective view of a release film roll according to one embodiment. A release film roll 100 in FIG. 1 includes a release film 20 having a base film and a release layer, and a core 10 around which the release film 20 is wound. The release film 20 is used as a carrier film, for example, in the manufacturing process of ceramic components such as multilayer ceramic capacitors. In this manufacturing process, for example, a ceramic green sheet serving as a dielectric sheet and an electrode green sheet serving as an internal electrode are formed on a release film by coating or printing, and then these are peeled off and laminated. A ceramic component is manufactured by firing the laminate. The release film 20 is pulled out from the release film roll 100 and used.

Examples of the material for the winding core 10 include paper, plastic, metal, and the like. In the manufacture of ceramic parts, particles can cause pinholes, so it is preferable to use lightweight plastic that does not generate paper dust. Such materials include ABS resin, Bakelite, fiber reinforced plastics, and the like. Fiber-reinforced plastics can be preferably used because they have flexibility in addition to high mechanical strength. Examples of fiber-reinforced plastics include those in which fibers are reinforced with a thermosetting resin. Examples of the resin include epoxy resin and unsaturated polyester resin. Examples of fibers include glass fibers and aramid fibers. Considering cost and the like, the resin may be an unsaturated polyester resin. From a similar point of view, the fibers may be glass fibers.

When the winding core 10 is made of fiber-reinforced plastic, the rebound hardness K(r) in a range where r is less than 10 mm may be 950HL or less. This can suppress the occurrence of cracks in the winding core 10. On the other hand, when the winding core 10 is made of metal, the repulsion hardness K(r) may exceed 950HL in a range where r is less than 10 mm. The outer diameter of the winding core 10 may be 150 mm or less, or may be 100 mm or less. This makes it possible to reduce the size of the release film roll 100 and reduce installation space and transportation costs.

The length of the release film 20 wound around the winding core 10 may be 4000 m or more, 5000 m or more, or 6000 m or more. Thereby, in the manufacturing process of ceramic green sheets, ceramic parts, etc., the frequency of replacing the release film roll 100 can be reduced, and the production efficiency of various products can be further improved. The thickness of the release film 20 may be 10 to 110 μm, or 20 to 60 μm. The width of the release film 20 may be, for example, 100 to 1000 mm. In the present disclosure, the direction in which the release film is conveyed when the release film is pulled out and wound up is referred to as the longitudinal direction, and the direction perpendicular to the longitudinal direction of the release film is referred to as the width direction of the release film.

FIG. 2 is a cross-sectional view showing an example of a release film. The release film 20 has a base film 22 and a release layer 24 on one side thereof. The base film 22 may be a synthetic resin film. Examples of synthetic resins include polyolefin resins such as polyester resins, polypropylene resins, and polyethylene resins, acrylic resins such as polylactic acid resins, polycarbonate resins, and polymethyl methacrylate resins, polyamide resins such as polystyrene resins, nylon, polyvinyl chloride resins, and polyurethane. Examples include resins, fluororesins, and polyphenylene sulfide resins. Among these, polyester resin is preferred. Among polyester resins, polyethylene terephthalate (PET) is more preferred from the viewpoints of mechanical properties, transparency, cost, and the like.

The thickness of the base film 22 is preferably 10 to 100 μm, more preferably 20 to 50 μm. When the thickness is less than 10 μm, physical properties such as dimensional stability of the release film 20 tend to be impaired. When the thickness exceeds 100 μm, the manufacturing cost per unit area of the release film 20 tends to increase.

From the viewpoint of sufficiently increasing the mechanical strength of the release film 20, the base film 22 may contain a filler (filler) to the extent that transparency is not impaired. The release film roll 100 of this embodiment can sufficiently suppress the shape of the filler from being transferred to the release layer 24 of the adjacent release film 20 even if the base film 22 contains filler. The filler is not particularly limited, and examples thereof include calcium carbonate, calcium phosphate, silica, kaolin, talc, titanium oxide, fumed silica, alumina, and organic particles.

When using a polyester film as the base film 22, it can be manufactured using the following procedure. First, molten polyester is cast onto a rotating cooling drum using an extruder. The molten polyester is extruded through a slit-formed die. Thereafter, it is cooled and peeled off from the rotating cooling drum to obtain an unstretched polyester film. By adjusting the gap between the slits of the extruder, the thickness of the polyester film and its variation range can be adjusted.

Next, the unstretched polyester film is stretched to adjust the desired thickness and to impart mechanical strength. The polyester film is preferably stretched by biaxial stretching. In this case, after longitudinal stretching, transverse stretching is performed. The stretching temperature during stretching is preferably higher than the glass transition temperature and lower than the melting temperature of the polyester film. In the longitudinal stretching and the transverse stretching, each may be stretched several times. Even after stretching, the thickness variations of the unstretched film are inherited. Therefore, by controlling the thickness variation of the unstretched film, the width of thickness variation of the base film 22 and the release film 20 can be adjusted.

The release layer 24 is formed by applying a solution containing a release agent onto one side of the base film 22, and drying and curing the solution. The coating method is not particularly limited, and may be a reverse coating method, a gravure coating method, a rod coating method, a bar coating method, a Meyer bar coating method, a die coating method, a spray coating method, or the like. For drying, hot air drying, infrared drying, natural drying, etc. can be used. In order to suppress moisture condensation during drying, it is preferable to heat, and the temperature may be about 60 to 120°C.

Examples of the release agent used to form the release layer 24 include silicone release agents, long chain alkyl release agents, fluorine release agents, and aminoalkyd resin release agents. Silicone release agents include addition reaction type silicone release agents, condensation type silicone release agents, ultraviolet curing type release agents, etc., depending on their curing reactions.

Curing conditions may be appropriately selected depending on the curing system of the release agent. For example, if the release agent is an addition reaction silicone, it can be cured by heat treatment at 80 to 130° C. for several tens of seconds. If it is an ultraviolet curing system, it can be cured by irradiating ultraviolet light using a mercury lamp, metal halide lamp, or the like as a light source. When performing radical polymerization by irradiating ultraviolet rays, it is preferable to perform curing under a nitrogen atmosphere in order to prevent oxygen inhibition. It is preferable that the thickness variation range of the release layer 24 is small.

The addition reaction type silicone release agent is cured by reacting polydimethylsiloxane in which a vinyl group has been introduced into the terminal and/or side chain with hydrogensiloxane. A platinum catalyst can be used for curing. For example, it can be cured at a curing temperature of around 100° C. for several tens of seconds to several minutes. The thickness of the release layer 24 may be approximately 50 to 300 nm. As addition reaction type stripping agents, K847, KS847T, KS-776L, KS-776A, KS-841, KS-774, KS-3703T, KS-3601, etc. manufactured by Shin-Etsu Chemical Co., Ltd. (all product names) are used. can be mentioned.

The release layer 24 may be composed of, for example, a cured product of a (meth)acrylate component and a (meth)acrylate-modified silicone. Since such a cured product can be cured with ultraviolet rays, the thickness of the release layer 24 can be increased. Therefore, for example, when the base film 22 contains a filler, the surface (release surface) of the release layer 24 can be made smooth by covering the protrusions caused by the filler. In this case, the thickness of the release layer 24 may be 300 to 3000 nm.

A (meth)acrylate monomer and a (meth)acrylate-modified silicone oil that are not compatible with each other may be used. These are mixed together with a reaction initiator in a solvent, and after coating on the base film 22, the solvent is dried. In this way, the peeling layer 24 may be formed by curing the silicone-modified silicone oil with ultraviolet light while localizing it near the surface. As the (meth)acrylate modified silicone oil, known ones can be used. Examples include X-22-164A, X-22-164B, X-22-174DX, and X-22-2445 (all trade names) manufactured by Shin-Etsu Chemical Co., Ltd.

The surface of the release layer 24 in the release film 20 is preferably smooth. Specifically, the surface roughness (Rp) of the release layer 24 is preferably 100 nm or less, more preferably 50 nm or less. The surface roughness (Rp) of the release layer 24 in this embodiment is the maximum peak height specified in JIS B 0601-2001, and can be measured using a contact type surface roughness meter or a scanning white interference microscope. Can be done.

The width of thickness variation in the width direction of the release film 20 is preferably 0.5 μm or less, more preferably 0.4 μm or less, and still more preferably 0.3 μm or less. Particularly preferably, it is 0.2 μm or less. When this thickness variation width becomes large, the wound release films 20 come into strong contact with each other in the thick portions, so that the repulsion hardness becomes higher than in other portions. By reducing this thickness variation range, deformation of the release film 20 can be suppressed. Furthermore, when the ceramic green sheet is formed on the release film 20, the range of thickness variation of the ceramic green sheet can be reduced.

The width of thickness variation in the width direction of the release film in the present disclosure is the difference between the maximum and minimum thicknesses of the release film between both ends of the release film 20 in the width direction. This can be found as follows.

A reference point is provided on the release film 20, and positions at which the thicknesses of the plurality of release films are measured are set along the width direction. The interval between the measuring positions may be set as appropriate. For example, since the thickness of the release film does not substantially change rapidly, it may be set at intervals of about 1 mm to 10 mm. Further, the reference point can be, for example, a side edge of the release film. The thickness of the release film is measured at each measurement position, and the film is appropriately moved in the longitudinal direction, and the thickness of the release film is also measured at appropriate times in the same manner. The average value is calculated using multiple thickness measurements in the longitudinal direction measured at the same position in the width direction, and the maximum and minimum values of the average values of the thickness of the release film calculated for each measurement position in the width direction are calculated. The difference in values is the thickness variation range.

To measure the thickness, use a contact thickness measuring device, an optical thickness measuring device, a capacitive thickness measuring device, a radiation type thickness measuring device using beta rays or fluorescent X-rays, etc. method, and a method of measuring the cross section of the release film 20 by microscopic observation. If a contact type thickness measuring device is used, variations in the thickness of the release film 20 can be directly measured. Further, the thickness variation ranges of the base film 22 and the release layer 24 may be measured by the same method or different methods, and the thickness of the release film 20 may be determined by adding up the respective thicknesses. For example, the thickness of the base film 22 is measured using a radiation-type film thickness meter, the thickness of the release layer 24 is measured using an optical measurement method obtained from spectrophotometry, and the respective thickness variation widths are totaled to determine the thickness variation of the release film 20. It may also be the width. Note that in the case of an optical thickness measuring device, the measurement spot diameter may be set as appropriate, and may be approximately 0.2 m to 2 mm.

Alternatively, a thickness measuring device may be installed in a line such as a coating device or a cutting device to sequentially measure the thickness. Contact between the measuring device and the release film 20 can be prevented by performing the thickness measurement using an optical method or a radiation method by installing a measuring device in the line. Thereby, scratches and the like can be suppressed and the quality of the release film roll can be sufficiently maintained. The thickness can be measured over the entire length of the release film 20 by installing a thickness measurement device in the coating line or cutting line and performing measurements while traversing the thickness measurement device in the width direction while transporting the release film 20. .

FIG. 3 is a side view of the release film roll 100. On the side surface 12 of the release film roll 100, a side end portion of the release film 20 wound around the winding core 10 is exposed. However, in FIG. 3, only the outermost release film 20 is shown for explanation. When the distance r [mm] measured along the radial direction R of the release film roll 100 from the outer peripheral surface 10a of the winding core 10 of the release film roll 100 is 10 to 130 mm when viewed from the side as shown in FIG. Formula (1) is satisfied.
(-2r+670)≦K(r)≦(-1.25r+862.5)…(1)

In formula (1), K(r) represents repulsion hardness [HL]. This rebound hardness K(r) is determined from the rebound of a ball that collides with the surface of the release film 20 on the outer peripheral surface 26 of the release film roll 100. The rebound hardness K(r) can be measured with a measuring device commercially available under the name of a Lieb type hardness meter, a rebound type hardness meter, or the like. Examples of the measuring device manufacturing company include SMART SENSOR. Note that the repulsion hardness in the present disclosure is sometimes referred to as Lieb hardness. Note that in the above equation (1), the upper and lower limits of the repulsion hardness K(r) when the distance r is 10 to 130 mm are specified.

The lower limit of the distance r ₀ along the radial direction R from the outer circumferential surface 10a of the winding core 10 to the outer circumferential surface 26 of the roll-shaped release film 20 may be 160 mm or 200 mm. In this case, when the distance r is 160 mm or more, the repulsion hardness K(r) may be 350 to 662.5 HL. Thereby, in the entire release film roll 100, adjacent release films 20 can be brought into close contact with each other sufficiently, and wrinkles can be sufficiently suppressed from forming in the release film on the outer periphery of the release film roll 100. The upper limit of the distance r ₀ may be 500 mm.

FIG. 4 is a diagram for explaining a method of measuring repulsion hardness K(r). In the release film roll 100 of FIG. 3, when the distance r ₀ exceeds 130 mm, in order to measure the repulsion hardness K(r) in the range of distance r from 10 to 130 mm, the release film roll must be rolled until the distance r reaches 130 mm. Pull out the release film 20 wrapped around the film 100. When the distance r from the outer circumferential surface 10a of the winding core 10 along the radial direction of the release film roll 100 to the outer circumferential surface 26A of the roll 23 on the side surface 12A of the roll 23 reaches 130 mm, as shown in FIG. The sensor of the measuring device is pressed against the surface 27 of the release film 20 exposed on the outer peripheral surface 26A of the release film roll 23 (release film roll) to measure the rebound hardness K(r). At this time, the sensor is pressed against the central part of the release film 20 in the width direction. Also, as shown by arrow P, press it toward the center C of the winding core. In this way, the repulsion hardness K(r) when the distance r is 130 mm is measured. Thereafter, while pulling out the release film 20, the repulsion hardness K(r) may be measured at a distance r in the range of 10 to 130 mm. Generally, it can be said that the repulsion hardness of a release film roll does not change suddenly, so it is preferable to measure the repulsion hardness K(r) every 5 mm or so of distance r. In addition, when the distance r ₀ exceeds 130 mm, in order to measure the repulsion hardness K(r) in the range of distance r from 10 to 130 mm, the peel film is wrapped around the release film roll 100 until the distance r reaches 130 mm. In the process of drawing out the film 20, it is also possible to measure the repulsion hardness K(r) from 130 mm to the distance _r0 at appropriate intervals of distance r in the same manner as described above.

When the distance r is 10 to 130 mm, when the repulsion hardness K(r) becomes high, adjacent release films 20 come into close contact with each other, and the uneven shape of the base film 22 is easily transferred to the release layer 24. When a ceramic green sheet is formed on such a release film 20, the thickness variation range of the ceramic green sheet tends to increase. On the other hand, when the repulsion hardness K(r) decreases, more air exists between adjacent release films 20, and the release film 20 tends to slide like a bamboo shoot in the inner part of the release film roll 100. , there is a tendency for winding misalignment to occur easily due to vibration. When such a phenomenon occurs, the release layer 24 is scratched, and pinholes are likely to occur in the ceramic green sheet formed on the release film. Since the release film roll 100 of the present embodiment satisfies the above formula (1), damage (irregularities and scratches) caused to the release layer 24 of the release film 20 can be sufficiently reduced.

The release film 20 may be wound such that the repulsion hardness K(r) decreases as the distance r increases within a range of 10 to 130 mm. Thereby, the occurrence of winding misalignment can be sufficiently suppressed in both the inner and outer peripheral portions of the release film roll 100. Even when the distance r is 130 mm or more, the release film 20 may be wound so that the rebound hardness K(r) decreases as the distance r increases. In a range where the distance r is less than 10 mm, the repulsion hardness K(r) may be 650HL or more. As a result, it is possible to sufficiently suppress the occurrence of winding misalignment in the release film near the winding core 10 and the occurrence of the winding core 10 coming off from the release film roll 100. Note that the portion where the distance r is less than 10 mm can be effectively used when replacing the release film roll without forming a ceramic green sheet.

FIG. 5 is a diagram showing an example of a manufacturing apparatus for the release film roll 100. In the manufacturing apparatus 300 of FIG. 5, a release film roll 200 is used. In the release film roll 200, a release film 20A having a wider width than the release film 20 (for example, 1 to 2 m) is wound around the winding core 11. The release film roll 200 is manufactured by winding the release film 20A around the core 11 using a known method. At this time, the release film 20A may be wound around the winding core 11 with the base film side facing inside, or may be wound around the core 11 with the release layer side facing inside.

In the manufacturing apparatus 300, the winding core 11 of the release film roll 200 is inserted into the rotating shaft 202 on the upstream side, and the rotating shaft 202 rotatably supports the release film roll 200. The manufacturing apparatus 300 also includes a nip roll 50 including a pair of rolls that vertically sandwich the release film 20A pulled out from the release film roll 200, a cutting section 60, and a cutting part 60 that is inserted into the winding core 10 of the release film roll 100 and wound. A winding shaft 102 rotatably supports the core 10.

Among the nip rolls 50, the upper roll 50a may be a roll whose surface is made of rubber. The lower roll 50b may be a roll whose surface is made of metal. The nip roll 50 has a function of varying the tension of the release film 20A on its upstream and downstream sides. Thereby, the tension when winding the release film 20 around the winding core 10 can be controlled with a high degree of freedom.

The cutting section 60 has an upper blade roller 60a and a lower blade roller 60b. The upper blade roller 60a may have a plurality of upper blades attached at predetermined intervals along the direction of its rotation axis. The upper blade of the upper blade roller 60a may be adapted to mesh with the lower blade roller 60b. The release film 20A that has passed through the nip roll 50 is cut along the longitudinal direction between the upper blade roller 60a and the lower blade roller 60b. As a result, the release film 20 is divided into release films 20 each having a width of, for example, 100 to 500 mm. By attaching a plurality of cores 10 to the winding shaft 102 and winding the cut release film 20 around the core 10 while pressing it with a contact roll 70, a plurality of release film rolls 100 can be manufactured at once. . For the cutting section 60, a known slitter such as a gang blade can be used. Note that the cutting portion 60 may not be provided. In this case, one release film roll 100 is obtained from one release film roll 200.

The release film 20 obtained by cutting at the cutting section 60 is wound around the winding core 10 attached to the winding shaft 102 . At this time, the winding shaft 102 rotates with a predetermined torque, and the contact roll 70 rotating while in contact with the release layer 24 of the release film 20 presses the release film 20 being wound toward the winding core 10 side. That is, the release film 20 is rolled up while being pressed by the contact roll 70. Contact roll 70 may be rotationally driven. By using the contact roll 70 in this way, the air between the release films 20 can be sufficiently reduced without increasing the tension. As a result, the occurrence of winding misalignment, sliding phenomenon, and winding tightening can be suppressed, and the generation of wrinkles and scratches on the release layer 24 can be suppressed.

By controlling the pressing force and driving force by the contact roll 70 and by controlling the torque of the take-up shaft 102, the repulsion hardness K(r) on the surface of the release layer 24 of the release film 20 wound on the release film roll 100 is adjusted. be able to. For example, when the release film 20 is cut and wound up, the diameter (roll diameter) of the release film roll 100 gradually increases. The winding tension is adjusted to a desired tension by controlling the torque of the winding shaft 102 according to the roll diameter during winding. If the tension decreases more than necessary as the roll diameter increases and the repulsion hardness K(r) falls below the lower limit, the repulsion hardness can be increased by increasing the torque of the winding shaft 102. Furthermore, if the tension does not decrease sufficiently even when the roll diameter increases and the repulsion hardness K(r) exceeds the upper limit, the torque of the winding shaft 102 can be lowered to lower the repulsion hardness.

The method for manufacturing release film roll 100 is not limited to the above method. For example, it can also be manufactured simply by driving the contact roll and adjusting the torque of the contact roll.

FIG. 6 is a cross-sectional view of a ceramic component sheet according to an embodiment of the present disclosure. The method for manufacturing the ceramic component sheet 40 shown in FIG. 6 is to apply a paste containing ceramic powder and an electrode paste to the surface 24a of the release layer 24 of the release film 20 pulled out from the release film roll 100, to form a ceramic green sheet 32 and an electrode green sheet. The method includes a step of forming a green sheet 30 including 34.

The ceramic green sheet 32 can be formed by applying and drying a ceramic paste containing ceramic powder. The electrode green sheet 34 can be formed by applying an electrode paste on the ceramic green sheet 32 and drying it.

For example, in the case of a multilayer ceramic capacitor, the ceramic paste can be prepared by kneading a dielectric raw material (ceramic powder) and an organic vehicle. Examples of dielectric raw materials include various compounds that become composite oxides and oxides by firing. For example, carbonates, nitrates, hydroxides, organometallic compounds, etc. can be appropriately selected and used. The dielectric raw material may be a powder with an average particle size of 4 μm or less, preferably 0.1 to 3.0 μm.

The electrode paste includes at least one material selected from the group consisting of conductive materials such as various conductive metals and alloys, and materials that become conductive materials after firing with various oxides, organometallic compounds, resinates, etc. It can be prepared by kneading one and an organic vehicle. As the conductor material used in manufacturing the electrode paste, it is preferable to use Ni metal, Ni alloy, or a mixture thereof. The electrode paste may contain a plasticizer to improve adhesion. Examples of the plasticizer include phthalate esters such as benzylbutyl phthalate (BBP), adipic acid, phosphoric esters, and glycols.

The organic vehicle contained in the ceramic paste and electrode paste is prepared by dissolving a binder resin in an organic solvent. Examples of the binder resin used in the organic vehicle include ethyl cellulose, acrylic resin, butyral resin, polyvinyl acetal, polyvinyl alcohol, polyolefin, polyurethane, polystyrene, and copolymers thereof. Among these, it is preferable to use a butyral resin, specifically a polyvinyl butyral resin. By using a butyral resin, the mechanical strength of the ceramic green sheet can be increased. One or both of the ceramic paste and the electrode paste may contain at least one additive selected from the group consisting of various dispersants, plasticizers, antistatic agents, dielectrics, glass frits, insulators, etc., as necessary. Good too.

The above ceramic paste is applied to the surface 24a of the release layer 24 of the release film 20 using, for example, a doctor blade device. Then, the applied ceramic paste is dried in a drying device at a temperature of, for example, 50 to 100° C. for 1 to 20 minutes to form a ceramic green sheet 32. The ceramic green sheet 32 shrinks by 5 to 25% compared to before drying.

Thereafter, the above-mentioned electrode paste is printed on the surface 32a of the ceramic green sheet 32 in a predetermined pattern using, for example, a screen printing device. The printed electrode paste is dried in a drying device at a temperature of, for example, 50 to 100° C. for 1 to 20 minutes to form an electrode green sheet 34. In this way, a ceramic component sheet 40 can be obtained in which the ceramic green sheet 32 and the electrode green sheet 34 are sequentially laminated on the release layer 24 of the release film 20.

When the unevenness of the release film 20 on the release film roll 100 becomes larger, the thickness variation width of the ceramic green sheet 32 becomes larger. In the release film 20 pulled out from the release film roll 100, the release layer 24 has sufficiently reduced occurrence of scratches due to winding misalignment, sliding phenomenon, etc., and unevenness. Therefore, it is possible to form a ceramic green sheet 32 whose thickness variation is sufficiently suppressed over a wide area from the leading end to the trailing end of the release film 20 wound around the release film roll 100. A ceramic component manufactured using the ceramic component sheet 40 including such a ceramic green sheet has excellent reliability.

The thickness of the ceramic green sheet 32 and the electrode green sheet 34 may each be 1.0 μm or less. In this way, even if the thickness is small, the thickness variation is suppressed, so a highly reliable ceramic component can be obtained. The ceramic component sheet of the present disclosure is not limited to the one shown in FIG. 6, and may be composed only of the ceramic green sheet 32 without having an electrode green sheet, for example.

A method for manufacturing a ceramic component according to an embodiment of the present disclosure includes a lamination step of preparing a plurality of ceramic component sheets, laminating a plurality of green sheets of the ceramic component sheets to obtain a laminate, and firing the laminate. The method includes a firing step for obtaining a compact, and an electrode forming step for forming terminal electrodes on the sintered compact to obtain a multilayer ceramic capacitor.

FIG. 7 is a cross-sectional view showing an example of a multilayer ceramic capacitor manufactured by the above-described manufacturing method. The multilayer ceramic capacitor 90 includes an inner layer portion 92 and a pair of outer layer portions 93 sandwiching the inner layer portion 92 in the stacking direction. The multilayer ceramic capacitor 90 has terminal electrodes 95 on the side surfaces.

The inner layer portion 92 includes a plurality of (13 layers in this example) ceramic layers 96 (dielectric layers) and a plurality (12 layers in this example) of internal electrode layers 94. Ceramic layers 96 and internal electrode layers 94 are alternately stacked. Internal electrode layer 94 is electrically connected to terminal electrode 95 . The outer layer portion 93 is formed of a ceramic layer. This ceramic layer may be formed in the same manner as the ceramic green sheet 32, for example.

In the lamination step, the green sheet 30 is obtained by peeling off the release film 20 of the ceramic component sheet 40 shown in FIG. One side 30b of this green sheet 30 is laminated on the outer layer green sheet. Another release film 20 is peeled off from another ceramic component sheet 40 to obtain another green sheet 30, and the electrode green sheet 34 of the first peeled green sheet and the electrode green sheet 30b of another green sheet 30 are stacked so as to face each other. . Thereafter, such a procedure is repeated to laminate the green sheets 30 to obtain a laminate. That is, in this lamination step, the release film 20 is peeled off to obtain the green sheets 30, and the green sheets 30 are sequentially laminated. A laminate is formed by repeating this procedure multiple times. Finally, green sheets for the outer layer are also laminated.

The number of green sheets stacked in the laminate is not particularly limited, and may be, for example, from several tens to several hundreds of layers. A thicker outer layer green sheet on which no electrode layer is formed may be provided on both end faces of the laminate perpendicular to the lamination direction. After forming the laminate, the laminate may be cut to form a green chip.

In the firing step, the laminate (green chip) obtained in the lamination step is fired to obtain a sintered body. The firing conditions are preferably 1100 to 1300° C. in an atmosphere such as a humidified mixed gas of nitrogen and hydrogen. However, the oxygen partial pressure in the atmosphere during firing is preferably 10 ^-2 Pa or less, more preferably 10 ^-2 to 10 ^-8 Pa. Note that before firing, it is preferable to perform a binder removal treatment on the laminate. The binder removal process can be performed under normal conditions. For example, when a base metal such as Ni or Ni alloy is used as the conductor material of the internal electrode layer, it is preferable to carry out the heating at 200 to 600°C.

After firing, heat treatment may be performed to re-oxidize the ceramic layer constituting the sintered body. The holding temperature or maximum temperature in the heat treatment is preferably 1000 to 1100°C. The oxygen partial pressure during the heat treatment is preferably higher than the reducing atmosphere during firing, and more preferably from 10 ⁻² Pa to 1 Pa. It is preferable to subject the thus obtained sintered body to end face polishing, for example, by barrel polishing, sandblasting, or the like.

In the electrode forming step, a terminal electrode paste is baked on the side surface of the sintered body to form a terminal electrode 95, thereby obtaining a multilayer ceramic capacitor 90 shown in FIG. In this method of manufacturing the multilayer ceramic capacitor 90, a release film roll 100 is used which has a release layer in which scratches caused by irregularities and unwinding of the release film 20 are sufficiently reduced. Therefore, variations in thickness and pinholes in the ceramic layer 96 and the internal electrode layer 94 can be sufficiently reduced. Therefore, a decrease in breakdown voltage is suppressed and reliability is excellent.

Although several embodiments have been described above, the present disclosure is not limited to the above embodiments. For example, although an example in which a multilayer ceramic capacitor is formed as a ceramic component has been described, the ceramic component of the present disclosure is not limited to a multilayer ceramic capacitor, and may be, for example, another ceramic component. The ceramic component may be, for example, a varistor or a laminated inductor.

The contents of the present disclosure will be explained in more detail with reference to Examples and Comparative Examples, but the present disclosure is not limited to the following Examples.

(Example 1)
<Preparation of release film roll>
In order to produce a release film, a release agent solution was prepared according to the following procedure. For 100 parts by mass of nonanediol diacrylate, 0.25 parts by mass of acrylate-modified silicone oil (trade name: X-22-2445, manufactured by Shin-Etsu Chemical Co., Ltd.), 100 parts by mass of methyl ethyl ketone, and 100 parts by mass of toluene. prepared. These were placed in a metal container and mixed by stirring to obtain a colorless and transparent solution.

A coating liquid was prepared by adding 2.5 parts by mass of a reaction initiator (trade name: Omnirad 127, manufactured by IGM Rasins B.V.) to the above solution. The coating liquid was applied on one side of a biaxially stretched polyethylene terephthalate film (PET film, thickness: 30 μm) with a width of 1100 mm by extruding it through the slit of the coating device, and methyl ethyl ketone and toluene were applied by blowing hot air at a temperature of 80°C for 30 seconds. Evaporated. In this way, a coating layer was formed on the PET film.

Next, the coating layer was cured by irradiation with ultraviolet rays in a nitrogen atmosphere with an oxygen concentration of 100 ppm to form a release layer having a release function. In this way, a release film (before cutting) having a release layer on one side of the PET film was obtained. The surface roughness (Rp) of the release layer of the release film was measured using a scanning white interference microscope (device name: VS1540, manufactured by Hitachi High-Tech Science Co., Ltd.). As a result, the surface roughness (Rp) of the release layer was 30 nm. Such a release film was wound around a core to obtain a release film roll (before cutting). The thickness of the release layer was 1 μm, and the thickness variation width, which is the difference between the maximum and minimum thickness in the width direction of the release film, was 0.5 μm. Moreover, the total length of the produced release film was 7000 m.

Using a manufacturing apparatus as shown in FIG. 5, the release film roll (before cutting) was attached to a rotating shaft 202. At the cutting section 60, the release film pulled out from the release film roll (before cutting) was cut into five pieces along the longitudinal direction, each having a width of 200 mm. Each of the five release films (after cutting) was wound around the winding core 10 with the release layer 24 facing outward, as shown in FIG. During winding, the contact roll 70 was pressed against the release film roll 100, and the winding shaft 102 and the contact roll 70 were rotated while being wound around the winding core 10. In this way, five release film rolls were obtained. Five release film rolls were wound under the same conditions. The winding length of each of the five release film rolls was 6000 m. Further, in each of the five release film rolls, the distance r ₀ from the outer peripheral surface of the winding core to the outer peripheral surface of the release film wound into a roll was about 205 mm.

<Measurement of rebound hardness K(r)>
Among the five release film rolls obtained in this way, the rebound hardness K(r) of the release layer of the first release film roll was measured. A digital hardness meter (trade name: AR936, measurement range: 170 to 960HLD) manufactured by SMART SENSOR was used to measure the rebound hardness K(r).

To measure the rebound hardness K(r), point the sensor of the digital hardness meter toward the center C of the winding core on the surface of the release layer of the release film wound on the outermost side of the release film roll (center in the width direction). I pressed it against it. The measurement was performed by unwinding the release film roll and measuring the rebound hardness K(r) of the release film roll when the distance r along the radial direction reached a predetermined value. Specifically, in the range of r from 195 mm to 135 mm, measurements were made at 10 mm intervals. That is, the repulsion hardness K(r) was measured when the distance r was 195 mm, 185 mm, . . . 135 mm. Moreover, in the range of distance r from 135 mm to 5 mm, measurements were made at 5 mm intervals. That is, the repulsion hardness K(r) was measured when the distance r was 135 mm, 130 mm, . . . 5 m. In FIG. 8, the relationship between distance r and repulsion hardness K(r) in Example 1 is plotted. As shown in FIG. 8, when the distance r was 10 to 130 m, the repulsion hardness K(r) satisfied the above formula (1).

<Formation and evaluation of dielectric green sheet>
The release film was pulled out from the second release film roll out of the five release film rolls, and the surface condition of the release layer of the release film was visually checked. As a result, there were no particular abnormalities. Using the third release film roll among the five release film rolls, a dielectric green sheet was formed as a ceramic component sheet using the following procedure. BaTiO ₃ -based powder was prepared as a ceramic powder, polyvinyl butyral (PVB) as an organic binder, and methanol as a solvent. Next, 10 parts by mass of an organic binder and 165 parts by mass of a solvent were blended with 100 parts by mass of the ceramic powder, and kneaded in a ball mill to obtain a dielectric slurry.

A release film roll was set in a coating machine, and a dielectric slurry was applied to the release layer side of the release film pulled out from the release film roll to form a dielectric green sheet on the release film. The set thickness of the dielectric green sheet was 0.9 μm. The presence or absence of pinholes in the dielectric green sheet formed on the release film and the range of thickness variation of the dielectric green sheet were investigated. The presence or absence of pinholes was investigated using an image processing inspection device. The thickness variation range was continuously measured using a transmission type X-ray film thickness meter (trade name: AccureX, manufactured by Hutech Co., Ltd.) installed in-line. The thickness variation width was determined from the average value, maximum value, and minimum value of the thickness. That is, the larger value of the absolute value between the maximum value and the average value and the absolute value between the minimum value and the average value was taken as the thickness variation range.

As a result, the average value of the thickness of the dielectric green sheet was 0.9 μm, and the width of thickness variation was 0.04 μm. This variation range was within ±5% (0.045 μm or less) of the set thickness (0.9 μm), and was a good product. Moreover, no pinholes were detected.

(Example 2)
Except that the torque of the winding shaft 102 when winding up the release film (after cutting) using the winding device was adjusted so that the tension applied to the release film being wound was approximately 0.8 times that of Example 1. A release film roll was produced in the same manner as in Example 1. Then, in the same manner as in Example 1, the repulsion hardness K(r) was measured, and a dielectric green sheet was formed and evaluated. In FIG. 8, the relationship between distance r and repulsion hardness K(r) in Example 2 is plotted. As shown in FIG. 8, when the distance r was 10 to 130 m, the repulsion hardness K(r) satisfied the above formula (1). The release film was pulled out from the release film roll, and the surface condition of the release layer of the release film was visually checked. As a result, there were no particular abnormalities. The average thickness of the dielectric green sheets was 0.9 μm. Further, the variation width of the thickness of the dielectric green sheet was 0.03 μm, and it was a good product. Moreover, no pinholes were detected.

(Example 3)
Except that the torque of the winding shaft 102 when winding up the release film (after cutting) using the winding device was adjusted so that the tension applied to the release film being wound was approximately 0.6 times that of Example 1. A release film roll was produced in the same manner as in Example 1. Then, in the same manner as in Example 1, the repulsion hardness K(r) was measured, and a dielectric green sheet was formed and evaluated. In FIG. 8, the relationship between distance r and repulsion hardness K(r) in Example 3 is plotted. As shown in FIG. 8, when the distance r was 10 to 130 m, the repulsion hardness K(r) satisfied the above formula (1). Further, the release film was pulled out from the release film roll, and the surface condition of the release layer of the release film was visually checked. As a result, there were no particular abnormalities. The average thickness of the dielectric green sheets was 0.9 μm. Further, the variation width of the thickness of the dielectric green sheet was 0.03 μm, and it was a good product. Moreover, no pinholes were detected.

(Comparative example 1)
Except that the torque of the winding shaft 102 when winding up the release film (after cutting) using a winding device was adjusted so that the tension applied to the release film being wound was approximately 1.3 times that of Example 1. A release film roll was produced in the same manner as in Example 1. Then, in the same manner as in Example 1, the repulsion hardness K(r) was measured, and a dielectric green sheet was formed and evaluated. In FIG. 9, the relationship between distance r and repulsion hardness K(r) in Comparative Example 1 is plotted. As shown in FIG. 9, when the distance r was 10 to about 45 mm, the repulsion hardness K(r) exceeded the upper limit of the above equation (1). The release film was pulled out from the release film roll, and the surface condition of the release layer of the release film was visually checked. As a result, there were no particular abnormalities. On the other hand, the thickness variation range of the dielectric green sheet increased as it approached the winding core. The thickness variation of the dielectric green sheet on the release film between 40 mm from the rear edge of the release film exceeded 0.06 μm, and could not satisfy the set thickness (0.9 μm) within ±5%. .

(Comparative example 2)
Same as Example 1 except that the torque of the winding shaft 102 when winding up the release film (after cutting) using the winding device was adjusted to make the tension approximately 0.3 times that of Example 1. A release film roll was prepared. Then, in the same manner as in Example 1, the rebound hardness K(r) was measured. In FIG. 9, the relationship between distance r and repulsion hardness K(r) in Comparative Example 2 is plotted. As shown in FIG. 9, when the distance r was about 30 to about 115 mm, the repulsion hardness K(r) was below the lower limit of the above equation (1). When I tried to transport the dielectric green sheet while forming it, the release film near the core of the release film roll popped out in a bamboo shoot shape, resulting in an uneven roll shape. At this point, it was determined that the release film roll of Comparative Example 2 was inappropriate, and the evaluation was terminated.

(Comparative example 3)
During winding, the torque of the winding shaft 102 is adjusted so that the tension applied to the release film being wound is approximately constant, and the pressure of the contact roll against the release film roll is approximately 1.5 times that of Example 1. And so. A release film roll was produced in the same manner as in Example 1 except for these matters. Then, in the same manner as in Example 1, the rebound hardness K(r) was measured. In FIG. 10, the relationship between distance r and repulsion hardness K(r) in Comparative Example 3 is plotted. As shown in FIG. 10, when the distance r was about 110 to 130 mm, the rebound hardness K(r) exceeded the upper limit of the above equation (1).

The release film was pulled out from the release film roll, and the surface condition of the release layer of the release film was visually checked. As a result, in the part of the roll core side where the distance r is 70 mm or less, multiple wrinkles extending in the longitudinal direction of the release film were formed and lined up in the width direction, and it was confirmed that the release film was deformed. Ta. Such deformation due to wrinkles is considered to be due to the effect of tight winding. At this point, it was determined that the release film roll of Comparative Example 3 was inappropriate, and the evaluation was terminated.

(Comparative example 4)
The winding torque did not change much from the beginning of winding to the end of winding. Further, the pressure of the contact roll against the release film roll was approximately 0.7 times that of Example 1. Except for this, a release film roll was produced in the same manner as in Example 1. Then, in the same manner as in Example 1, the rebound hardness K(r) was measured. In FIG. 10, the relationship between distance r and repulsion hardness K(r) in Comparative Example 4 is plotted. As shown in FIG. 10, when the distance r was approximately 35 to 130 mm, the repulsion hardness K(r) was below the lower limit of the above equation (1).

The side edges (cut portions) of the release film on the outer periphery of the release film roll obtained were irregular. The release film was pulled out from the release film roll, and the surface condition of the release layer of the release film was visually checked. As a result, deformation as if the release film was broken was observed in an area within about 3 cm inside from the side edge. It is thought that as a result of the side edges becoming irregular, pressure was applied in the vicinity of the side edges, resulting in deformation of the release film. At this point, it was determined that the release film roll of Comparative Example 4 was unsuitable, and the evaluation was terminated.

According to the present disclosure, it is possible to provide a release film roll that can sufficiently reduce damage to the release layer of the release film even when the length of the release film is increased. . Further, by using such a release film roll, it is possible to provide a method for manufacturing a ceramic component sheet and a method for manufacturing a ceramic component that have excellent reliability. Furthermore, it is possible to provide a ceramic component sheet and a ceramic component that have excellent reliability.

DESCRIPTION OF SYMBOLS 10, 11... Winding core, 10a... Outer peripheral surface, 12... Side surface, 20... Peeling film, 20A... Peeling film, 22... Base film, 23... Roll, 24... Peeling layer, 24a... Surface, 26, 26A... Outer periphery Surface, 27... Surface, 30... Green sheet, 30b... One side, 32... Ceramic green sheet, 32a... Surface, 34... Electrode green sheet, 40... Ceramic component sheet, 50... Nip roll, 50a... Upper roll, 50b... Bottom Roll, 60... Cutting section, 60a... Upper blade roller, 60b... Lower blade roller, 70... Contact roll, 90... Multilayer ceramic capacitor, 92... Inner layer part, 93... Outer layer part, 94... Internal electrode layer, 95... Terminal electrode , 96... Ceramic layer, 100, 200... Peeling film roll, 102... Winding shaft, 202... Rotating shaft, 300... Manufacturing device.

Claims (8)

A release film roll comprising a release film having a base film and a release layer, and a winding core around which the release film is wound,
When the distance r [mm] along the radial direction from the outer circumferential surface of the core on the side surface is 10 to 130 mm, it is measured toward the center of the core on the surface of the release film exposed on the outer circumferential surface of the roll. , a release film roll in which the rebound hardness K(r) [HL] of the release film roll at a distance r satisfies the following formula (1).
-2r+670≦K(r)≦-1.25r+862.5...(1) The release film roll according to claim 1, wherein the repulsion hardness K(r) is 650HL or more when the distance r is less than 10 mm. The distance r ₀ along the radial direction from the outer peripheral surface of the winding core to the outer peripheral surface of the roll-shaped release film is 160 mm or more, and when the distance r is 160 mm or more, the repulsion hardness K (r) is 350 to 350. The release film roll according to claim 1 or 2, which has a diameter of 662.5HL. The release film roll according to any one of claims 1 to 3, wherein the repulsion hardness K(r) [HL] decreases as the distance r increases within a range of 10 to 130 mm. The step of forming a ceramic green sheet on the surface of the release layer of the release film pulled out from the release film roll according to any one of claims 1 to 4 using a paste containing ceramic powder, A method for manufacturing a ceramic component sheet, wherein the ceramic green sheet has a thickness of 1.0 μm or less. obtaining a laminate including the ceramic green sheet using the ceramic component sheet obtained by the manufacturing method according to claim 5;
A method for manufacturing a ceramic component including the sintered body, comprising the step of firing the laminate to obtain a sintered body. A ceramic component sheet obtained by forming a green sheet containing a ceramic green sheet on the surface of the release layer of the release film pulled out from the release film roll according to any one of claims 1 to 4. A ceramic component comprising a sintered body obtained by forming a laminate containing the ceramic green sheet of the ceramic component sheet according to claim 7 and firing the laminate.

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