CN115298783A - Release film roll, ceramic member sheet and method for producing the same, and ceramic member and method for producing the same - Google Patents

Abstract

The release film roll of the present disclosure has: a release film having a base film and a release layer; and a core on which the release film is wound. Rebound hardness K ( r) [HL] satisfies the following formula (1). ‑2r+670≤K(r)≤‑1.25r+862.5…(1).

Description

Release film roll, ceramic component sheet and manufacturing method thereof, and ceramic component and manufacturing method thereof manufacturing method

technical field

The present disclosure relates to a release film roll, a ceramic component sheet and its manufacturing method, and a ceramic component and its manufacturing method.

Background technique

In recent years, electronic components have become increasingly miniaturized in response to demands for miniaturization of electronic equipment. Ceramic components, which are one type of electronic components, are also being miniaturized year by year. For example, in a multilayer ceramic capacitor which is one type of ceramic components, the thickness of the dielectric layer and internal electrodes is reduced to increase the capacity. A general laminated ceramic capacitor is manufactured by using a release film as a carrier film, forming a dielectric layer and internal electrodes on the carrier film to form a green sheet, peeling off the green sheet, and laminating them.

When the thickness of the dielectric layer of the multilayer ceramic capacitor becomes thinner, the withstand voltage performance indicating the resistance at the voltage intensity that would cause a short circuit or the like tends to decrease. In particular, when the thickness of the dielectric layer is not uniform, the thinner portion becomes a cause of lowering of withstand voltage performance. A multilayer ceramic capacitor including a dielectric layer having such a thin portion has poor withstand voltage, and the yield of the multilayer ceramic capacitor decreases. On the other hand, when the thickness of the dielectric layer is uniform, the withstand voltage performance is good, and the yield of the multilayer ceramic capacitor is improved.

The damage or the like in the release film used as the carrier film of the dielectric layer becomes a factor of the variation in the thickness of the dielectric layer. In addition, the smoothness of the release film surface affects the thickness uniformity of the dielectric layer. In view of such circumstances, for example, in Patent Document 1, a release film roll that can smooth a release film and reduce unevenness in the thickness of a dielectric layer is considered.

prior art literature

patent documents

Patent Document 1: Japanese Patent Laid-Open No. 2011-206995

Contents of the invention

The technical problem that the invention wants to solve

In the manufacturing process of a ceramic component, a ceramic green sheet is formed on the release film pulled out from the release film roll. Here, as a measure for improving the productivity of ceramic components, it is considered effective to lengthen the winding length of the release film wound up on the release film roll and reduce the frequency of replacement of the release film roll.

Such a release film roll is fixed or supported by a roll core during storage and transportation. When the winding length becomes long, there may be a phenomenon that the peeling film wound into a roll may slide like a bamboo shoot due to vibrations at the time of conveyance or the like. In addition, there is a possibility that the peeling layer may be damaged due to winding misalignment due to vibration. If damage occurs in the release layer, it may become a factor causing pinholes in the dielectric layer. It is thought that it is effective to increase the winding strength of the peeling film as a measure for avoiding occurrence of such winding deviation and slipping phenomenon.

However, when the winding strength of a peeling film is made large, it will become easy to transfer the uneven|corrugated shape of a base film to a peeling layer. If the winding length becomes longer, the pressure received by the inner release film will increase, making it easier to transfer the concave-convex shape in particular. As a measure for avoiding such a phenomenon, it is considered effective to reduce the winding strength of the release film.

In this way, there are cases where it is desired to reduce the winding strength in order to suppress the transfer of uneven shapes near the winding core. On the other hand, there are also cases where it is desired to increase the winding strength in order to suppress winding deviation and slippage during transportation. The case of winding strength. In order to lengthen the winding length of a peeling film, it is necessary to satisfy such contrary requirements.

Here, the present disclosure provides a release film roll capable of sufficiently reducing damages generated in the release layer of the release film even if the winding length of the release film is lengthened. Moreover, this disclosure provides the manufacturing method of the ceramic component sheet which has excellent reliability by using such a release film roll, and the manufacturing method of a ceramic component. In addition, the present disclosure provides a ceramic component sheet and a ceramic component having excellent reliability.

means of solving technical problems

A release film roll according to one aspect of the present disclosure has: a release film having a base film and a release layer; and a winding core on which the release film is wound; the distance r in the radial direction from the outer peripheral surface of the winding core on the side surface r [mm ] is 10 to 130 mm, the surface of the release film exposed on the outer peripheral surface of the roll, the rebound hardness (reboundhardness) K (r) [HL] of the release film roll at the distance r measured towards the center of the core core satisfies the following Formula 1).

-2r+670≤K(r)≤-1.25r+862.5...(1)

The rebound hardness K(r) changes according to the amount of air present in the gap between the wound release films. When the amount of air present between the peeling films increases, the rebound hardness K(r) decreases, and when the air decreases, the rebound hardness increases. Here, when the repulsion hardness K(r) is too high, adjacent release films will adhere too much, and it will become easy to transfer the uneven|corrugated shape of a base film to a release layer. Since the rebound hardness tends to be high on the inside of the release film roll, the irregular shape is easily transferred to the release film on the inside. Here, the said peeling film roll makes the rebound hardness K(r) into specific upper limit value (-1.25r+862.5) or less in the part where the distance r which is an inner part is 10-130 mm. Thereby, transfer of the uneven|corrugated shape to a release film is suppressed.

On the other hand, when the rebound hardness K(r) is too low, the air that exists between the adjacent release films increases, and the inner part of the release film roll tends to slide like a bamboo shoot, and is prone to vibration. There is a tendency for winding deviation to occur. In addition, when the peeling film is wound, the force when the peeling film is wound outside acts on the peeling film wound inside the peeling film, and the winding direction is shifted so that the winding is too tight and wrinkles are formed. Here, in the said peeling film roll, the rebound hardness K(r) shall be more than specific lower limit value (-2r+670) at the part where distance r is 10-130 mm. Thereby, bamboo shoot slipping of the peeling film, occurrence of winding deviation due to vibration, and occurrence of winding overtightening are suppressed.

Therefore, even if the winding length of a peeling film is made long in the said peeling film roll, damages, such as uneven|corrugated and scratches which arise in the peeling layer of a peeling film, can be fully reduced.

The rebound hardness K(r) in the range where the distance r is less than 10 mm is preferably 650HL or more. Thereby, it can fully suppress that a peeling film is wound misaligned in the vicinity of a winding core, or a winding core falls out from a peeling film roll. In addition, for the portion where the distance r is less than 10 mm, the release film roll can be effectively used in replacement work without forming a ceramic green sheet. For example, it can be used as a deceleration area for decelerating the delivery speed, and as a portion staying in a drying furnace.

The distance r in the radial direction from the outer peripheral surface of the winding core to the outer peripheral surface of the roll-shaped peeling film of the above-mentioned release film roll may be 160 mm or more, and the rebound hardness K (r) may be 350 to _662.5 when the distance r is 160 mm or more. HL. Thereby, in the whole peeling film roll, adjacent peeling films can be fully adhered, and generation|occurrence|production of a wrinkle in the peeling film in the outer peripheral part of a peeling film roll can fully be suppressed.

The above-mentioned distance r is within the range of 10 to 130 mm, and the peeling film can be wound so that the rebound hardness K(r)[HL] decreases as the distance r increases. Thereby, generation|occurence|production of a winding misalignment in both the vicinity of the inner periphery and the vicinity of the outer periphery of a peeling film roll can fully be suppressed.

A method of manufacturing a ceramic component sheet according to one aspect of the present disclosure includes a step of forming a ceramic green sheet using a slurry containing ceramic powder on the surface of the release layer of the release film drawn from the arbitrary release film roll.

The said manufacturing method uses the release film drawn from the said arbitrary release film roll. Occurrence of damage and unevenness due to miswinding, slipping, etc., of the release layer of the release film are sufficiently suppressed. Therefore, it is possible to form a ceramic green sheet with sufficiently reduced thickness variation and pinholes over a wide region from the front end to the rear end of the release film wound on the release film roll. Therefore, a ceramic component sheet excellent in reliability can be produced. In the present disclosure, the "rear end" of the release film means the end on the side in contact with the core, and the "front end" of the release film means the end on the side that appears on the outer peripheral surface of the release film roll.

A method of manufacturing a ceramic component according to one aspect of the present disclosure includes the steps of obtaining a laminated body including ceramic green sheets using the ceramic component sheet obtained by the above-mentioned manufacturing method, and firing the laminated body to obtain a sintered body.

In the above production method, the ceramic component is produced using a release film that sufficiently suppresses the generation of damage due to winding misalignment, slippage, and the like, and unevenness. Thereby, a ceramic green sheet in which thickness variations and pinholes are sufficiently reduced can be formed. Therefore, a ceramic component excellent in reliability can be manufactured.

A ceramic component sheet according to one aspect of the present disclosure can be obtained by forming a green sheet comprising a ceramic green sheet on the surface of a release layer of a release film drawn from any of the release film rolls described above.

The above-mentioned ceramic component sheet can be obtained by using a release film drawn from any of the above-mentioned release film rolls. The peeling layer of the above-mentioned peeling film sufficiently suppresses the occurrence of scratches due to winding misalignment, slipping phenomenon, and the like, and unevenness. Therefore, thickness variation and pinholes of the ceramic green sheet can be sufficiently reduced. A ceramic component sheet obtained by forming a green sheet including such a ceramic green sheet has excellent reliability.

A ceramic component according to one aspect of the present disclosure includes a sintered body obtained by forming a laminate of ceramic green sheets including the ceramic component sheet described above, and firing the laminate. The above-mentioned thickness variation and pinholes of the ceramic green sheet have been substantially reduced. Since the above-mentioned ceramic component includes a sintered body obtained by firing a laminated body including such ceramic green sheets, it is excellent in reliability.

The effect of the invention

According to this indication, the peeling film roll which can fully reduce the damage which arises in the peeling layer of a peeling film even if it lengthens the winding length of a peeling film can be provided. In addition, it is possible to provide a method of manufacturing a ceramic component sheet and a method of manufacturing a ceramic component having excellent reliability by using such a release film roll. In addition, a ceramic component sheet and a ceramic component having excellent reliability can be provided.

Description of drawings

FIG. 1 is a perspective view of a release film roll according to one embodiment.

Fig. 2 is a cross-sectional view showing an example of a release film.

Fig. 3 is a side view of a release film roll of one embodiment.

FIG. 4 is a diagram for explaining a method of measuring rebound hardness K(r).

It is a figure which shows an example of the manufacturing apparatus of the peeling film roll of one Embodiment.

Fig. 6 is a cross-sectional view of a ceramic component sheet according to one embodiment.

Fig. 7 is a cross-sectional view showing a ceramic component of one embodiment.

8 is a graph showing the relationship between the distance r and the rebound hardness K(r) of the release film rolls of Examples 1, 2, and 3.

9 is a graph showing the relationship between the distance r and the rebound hardness K(r) of the release film rolls of Comparative Examples 1 and 2. FIG.

10 is a graph showing the relationship between the distance r and the rebound hardness K(r) of the release film rolls of Comparative Example 3 and Comparative Example 4. FIG.

Symbol Description

10, 11... Core; 10a... Perimeter; 12... Side; 20... Peeling film; 20A... Peeling film; 22... Substrate film; 23... Roll; 24... Peeling layer; 24a …surface; 26, 26A…peripheral surface; 27…surface; 30…green sheet; 30b…one side; 32…ceramic green sheet; 32a…surface; 34…electrode green sheet; 40… Ceramic component sheet; 50...nip roll; 50a...upper roll; 50b...lower roll; 60...cutting part; 60a...upper knife roll; 60b...lower knife roll; 70...contact Roll; 90...Laminated ceramic capacitor; 92...Inner layer part; 93...Outer layer part; 94...Internal electrode layer; 95...Terminal electrode; 96...Ceramic layer; 100, 200...Peel film roll ; 102...coiling shaft; 202...rotating shaft; 300...manufacturing device.

Detailed ways

Hereinafter, embodiments of the present disclosure will be described with reference to the drawings as the case may be. In each drawing, the same or equivalent elements are assigned the same symbols, and overlapping descriptions are omitted as appropriate. However, the following embodiments are examples for explaining the present disclosure, and are not intended to limit the present disclosure to the following contents.

FIG. 1 is a perspective view of a release film roll according to one embodiment. The peeling film roll 100 of FIG. 1 is equipped with the peeling film 20 which has a base film and a peeling layer, and the core 10 by which the peeling film 20 was wound. The release film 20 is used, for example, as a carrier film in the manufacturing process of ceramic components typified by multilayer ceramic capacitors. In this manufacturing process, for example, a ceramic green sheet to be a dielectric sheet and an electrode green sheet to be an internal electrode are formed by coating or printing on a release film, and then these are peeled off and laminated, and the laminate is fired. And manufacture ceramic parts. The release film 20 is used by pulling out from the release film roll 100 .

As a material of the core 10, paper, plastic, metal, etc. are mentioned. When manufacturing ceramic parts, it is preferable to include lightweight plastics that do not generate paper dust because particles can cause pinholes. Examples of such materials include ABS resin, bakelite, and fiber-reinforced plastic. Fiber-reinforced plastics are preferably used because they have not only high mechanical strength but also flexibility. Examples of fiber-reinforced plastics include fiber-reinforced plastics obtained by reinforcing fibers with a thermosetting resin. As resin, epoxy resin, unsaturated polyester resin, etc. are mentioned. Examples of the fibers include glass fibers, aramid fibers, and the like. In consideration of cost and the like, the resin may be an unsaturated polyester resin. From the same point of view, the fibers may be glass fibers.

In the case where the winding core 10 is made of fiber-reinforced plastic, the rebound hardness K(r) in the range where r is less than 10 mm may be 950HL or less. Thus, the occurrence of cracks in the winding core 10 can be suppressed. On the other hand, in the case where the winding core 10 is made of metal, the rebound hardness K(r) in the range where r is less than 10 mm can exceed 950HL. The outer diameter of the winding core 10 may be 150 mm or less, or may be 100 mm or less. Thereby, the size of the peeling film roll 100 can be reduced, and installation space and transportation cost can be reduced.

The winding length of the peeling film 20 wound up on the core 10 may be 4000 m or more, 5000 m or more, or 6000 m or more. Thereby, in the manufacturing process of a ceramic green sheet, a ceramic component, etc., the replacement|exchange frequency of the peeling film roll 100 can be reduced, and the production efficiency of various products can be improved. The thickness of the release film 20 may be 10 to 110 μm, or may be 20 to 60 μm. The width of the release film 20 may be, for example, 100 to 1000 mm. In addition, in this indication, the direction which conveys a peeling film at the time of pulling out and winding up a peeling film is called a longitudinal direction, and the direction orthogonal to the longitudinal direction of a peeling film is called the width direction of a peeling film.

Fig. 2 is a cross-sectional view showing an example of a release film. The release film 20 has a base film 22 and a release layer 24 on one surface thereof. The base film 22 may be a synthetic resin film. Examples of synthetic resins include polyolefin resins such as polyester resins, polypropylene resins, and polyethylene resins, acrylic resins such as polylactic acid resins, polycarbonate resins, and polymethyl methacrylate resins, polystyrene resins, and nylon. Polyamide resins, polyvinyl chloride resins, polyurethane resins, fluorine resins, polyphenylene sulfide resins, and the like. Among them, polyester resin is preferable. Among polyester resins, polyethylene terephthalate (PET, polyethylene terephthalate) is more preferable from the viewpoint of mechanical properties, transparency, cost, and the like.

The thickness of the base film 22 is preferably 10 to 100 μm, more preferably 20 to 50 μm. When the thickness is less than 10 μm, physical properties such as dimensional stability of the release film 20 tend to be impaired. When the thickness exceeds 100 μm, the production cost per unit area of the release film 20 tends to increase.

From the viewpoint of sufficiently improving the mechanical strength of the peeling film 20, the base film 22 may contain a filler (filler) to the extent that transparency is not impaired. In the peeling film roll 100 of this embodiment, even if the base film 22 contains a filler, it can fully suppress that the shape of a filler transfers to the peeling layer 24 of the adjacent peeling film 20. The filler is not particularly limited, and examples thereof include calcium carbonate, calcium phosphate, silica, kaolin, talc, titanium oxide, fumed silica, alumina, and organic particles.

When using a polyester film as the base film 22, it can manufacture by the following procedure. First, molten polyester is cast on a rotating cooling drum using an extruder. Molten polyester is extruded through a metal opening formed with a slit. Thereafter, it was cooled and peeled off from the rotating cooling drum, whereby an unstretched polyester film was obtained. By adjusting the clearance of the slit of the extruder, the thickness of the polyester film and its variation range can be adjusted.

Next, the unstretched polyester film is stretched, adjusted to a desired thickness, and given mechanical strength. The stretching of the polyester film is preferably performed by biaxial stretching. In this case, lateral stretching is performed after longitudinal stretching. The stretching temperature at the time of stretching is preferably equal to or higher than the glass transition temperature and lower than the melting temperature of the polyester film. When extending vertically and horizontally, it can be extended several times respectively. The thickness variation of the unstretched film is also inherited after stretching. Therefore, by controlling the variation in thickness of the unstretched film, the range of variation in thickness of the base film 22 and the release film 20 can be adjusted.

The release layer 24 is formed by applying a solution containing a release agent to one surface of the base film 22, drying and curing the solution. The coating method is not particularly limited, and a reverse coating method, a gravure coating method, a rod coating method, a rod coating method, a Mayer bar coating method (Miya Bar Coat method), a die coating method, and spraying method etc. For drying, hot air drying, infrared drying, natural drying, etc. can be used. In order to suppress moisture condensation during drying, it is preferable to heat, and it may be about 60 to 120°C.

Examples of the release agent used to form the release layer 24 include silicone-based release agents, long-chain alkyl-based release agents, fluorine-based release agents, and amino alkyd resin-based release agents. Silicone-based release agents include addition-reaction silicone release agents, condensation-reaction ketone-silicon release agents, and UV-curable release agents, depending on the curing reaction.

The curing conditions may be appropriately selected according to the curing system of the release agent. For example, if the release agent is an addition reaction type silicone, it can be cured by performing a heat treatment at 80 to 130° C. for several tens of seconds. In the case of an ultraviolet curing type, a mercury lamp, a metal halide lamp, or the like can be used as a light source to irradiate ultraviolet rays to be cured. In the case of irradiating ultraviolet rays to perform radical polymerization, it is preferable to perform curing under a nitrogen atmosphere in order to prevent oxygen inhibition. It is preferable that the variation range of the thickness of the peeling layer 24 is small.

The addition reaction silicone release agent is cured by reacting a vinyl group introduced into the terminal and/or side chain of polydimethylsiloxane with hydrogen siloxane. Platinum catalysts may be used in curing. For example, it can be cured at a curing temperature of about 100° C. for tens of seconds to several minutes. The thickness of the release layer 24 may be about 50 to 300 nm. As the release agent of the addition reaction type, K847, KS847T, KS-776L, KS-776A, KS-841, KS-774, KS-3703T, KS-3601, etc. manufactured by Shin-Etsu Chemical Co., Ltd. (all are commercial products) name).

The peeling layer 24 may be composed of, for example, a cured product of a (meth)acrylate component and a (meth)acrylate-modified silicone. This cured product can be cured by ultraviolet light, so the thickness of the peeling layer 24 can be increased. Therefore, for example, when the base material film 22 contains a filler, the protrusion by a filler can be covered and the surface (peeling surface) of the peeling layer 24 can be smoothed. In this case, the thickness of the release layer 24 may be 30 to 3000 nm.

It is also possible to use mutually immiscible (meth)acrylate monomers and (meth)acrylate modified silicone oils. These are mixed with a reaction initiator in a solvent and coated on the base film 22, and then the solvent is dried. Accordingly, the release layer 24 can be formed by curing the silicone-modified silicone oil with ultraviolet light in a state where the silicone-modified silicone oil is localized near the surface. Known ones can be used as the (meth)acrylate-modified silicone oil. For example, X-22-164A, X-22-164B, X-22-174DX, X-22-2445 (all are brand names) etc. by Shin-Etsu Chemical Co., Ltd. are mentioned.

The surface of the release layer 24 of the release film 20 is preferably smooth. Specifically, the surface roughness (Rp) of the release layer 24 is preferably 100 nm or less, more preferably 50 nm or less. The surface roughness (Rp) of the peeling layer 24 of this embodiment is the maximum protrusion height prescribed|regulated by JISB0601-2001, and can be measured using a contact surface roughness meter or a scanning white interference microscope.

The thickness variation width of the release film 20 in the width direction is preferably 0.5 μm or less, more preferably 0.4 μm or less, and still more preferably 0.3 μm or less. It is particularly preferably 0.2 μm or less. When this thickness variation width becomes large, since the peeling film 20 wound up will contact strongly in a thick part, rebound hardness will become higher than other parts. The deformation of the peeling film 20 can be suppressed by narrowing this thickness fluctuation range. In addition, when the ceramic green sheet is formed on the release film 20, the thickness variation range of the ceramic green sheet can be reduced.

The thickness variation range in the width direction of the release film of the present disclosure is the difference between the maximum value and the minimum value of the thickness of the release film between both ends in the width direction of the release film 20 . It is obtained as follows.

A reference point is provided on the release film 20, and a plurality of positions for measuring the thickness of the release film are set along the width direction. The interval between the positions to be measured may be appropriately set. For example, since the thickness of the peeling film does not change rapidly substantially, it may be set at intervals of about 1 mm to 10 mm. In addition, a reference point can be set as the side edge of a peeling film, for example. The thickness of the release film was measured at each measurement position, and the film was appropriately moved in the longitudinal direction to measure the thickness of the release film at appropriate times in the same manner. The average value is calculated using a plurality of thickness measurement values in the longitudinal direction measured at the same position in the width direction, and the difference between the maximum value and the minimum value of the average value of the thickness of the release film calculated for each measurement position in the width direction is Variation in thickness.

As the thickness measuring method, a method using a contact type thickness measuring device, an optical type thickness measuring device, an electrostatic capacitance type thickness measuring device, a radiation type thickness measuring device such as a beta ray or a fluorescent X-ray, etc. is used, and The method etc. which observe and measure the cross section of the peeling film 20 with a microscope. If a contact type thickness measuring device is used, the thickness variation of the peeling film 20 can be measured directly. In addition, the range of variation in thickness of the base film 22 and the release layer 24 may be measured by the same method or a different method, and the respective thicknesses may be summed up as the thickness of the release film 20 . For example, it is also possible to measure the thickness of the base film 22 with a radiation-type film thickness meter, measure the thickness of the peeling layer 24 by optical measurement obtained by spectrophotometry, and add up the respective thickness variations as the thickness variation of the peeling film 20. magnitude. In addition, in the optical thickness measuring device, it is only necessary to appropriately set the diameter of the measurement point, and it can be set to about 0.2 m to 2 mm.

In addition, a thickness measuring device may be provided in-line of a coating device, a cutting device, etc., and the thickness may be sequentially measured. By optically or radially performing the thickness measurement by installing the measuring device in the line, it is possible to prevent the measuring device from coming into contact with the release film 20 . Thereby, while suppressing damage etc., the quality of a peeling film roll can fully be maintained. The thickness can be measured over the entire length of the release film 20 by installing a thickness gauge in the coating line or the cutting line, and measuring while moving the thickness gauge back and forth in the width direction during conveyance of the release film 20 .

FIG. 3 is a side view of the release film roll 100 . On the side surface 12 of the peeling film roll 100, the side edge part of the peeling film 20 wound up on the core 10 is exposed. However, in FIG. 3, only the outermost peeling film 20 is shown for explanation. As shown in FIG. 3, in a side view, when the distance r [mm] measured from the outer peripheral surface 10a of the core 10 of the release film roll 100 along the radial direction R of the release film roll 100 is 10 to 130 mm, the following formula ( 1).

(-2r+670)≤K(r)≤(-1.25r+862.5)...(1)

In the formula (1), K(r) represents the rebound hardness [HL]. This rebound hardness K(r) is calculated|required from the rebound of the surface of the peeling film 20 in the outer peripheral surface 26 of the peeling film roll 100 which hits a ball. The rebound hardness K(r) can be measured with a Leeb hardness tester or a commercially available measuring device called a rebound hardness tester. Examples of manufacturers of the measuring device include SMART SENSOR, Inc., and the like. In addition, the rebound hardness in the present disclosure may be referred to as Leeb hardness. In addition, in the above-mentioned formula (1), the upper limit and the lower limit of the rebound hardness K(r) when the distance r is 10 to 130 mm are specified.

The lower limit of the distance r ₀ in the radial direction R from the outer peripheral surface 10 a of the winding core 10 to the outer peripheral surface 26 of the roll release film 20 may be 160 mm or 200 mm. In this case, when the distance r is 160 mm or more, the rebound hardness K(r) may be 350 to 662.5 HL. Thereby, in the whole peeling film roll 100, the adjacent peeling film 20 can fully adhere|attach, and generation|occurrence|production of the peeling film in the outer peripheral part of the peeling film roll 100 can fully be suppressed. The upper limit of the distance r ₀ may be 500 mm.

FIG. 4 is a diagram for explaining a method of measuring rebound hardness K(r). In the release film roll 100 shown in FIG. 3 , when the distance r ₀ exceeds 130 mm, in order to measure the rebound hardness K(r) at a distance r in the range of 10 to 130 mm, it is necessary to pull out the release film wound on the release film roll 100 20 until the distance r is 130mm. And, in the side surface 12A of the roll 23, after the distance r from the outer peripheral surface 10a of the core 10 in the radial direction of the release film roll 100 to the outer peripheral surface 26A of the roll 23 reaches 130 mm, as shown in FIG. The sensor is pressed against the surface 27 of the release film 20 exposed on the outer peripheral surface 26A of the roll 23 (release film roll), and the rebound hardness K(r) is measured. At this time, the sensor is pressed against the central portion in the width direction of the release film 20 . In addition, as indicated by the arrow P, it is pressed toward the center C of the core. Thus, the rebound hardness K(r) when the distance r was 130 mm was measured. Then, what is necessary is just to measure the rebound hardness K(r) in the range of distance r of 10-130 mm, pulling out the peeling film 20. In general, since it can be said that the springback hardness does not change drastically in the release film roll, the springback hardness K(r) can be measured every distance r of about 5 mm. In addition, when the distance r exceeds 130 mm, the release film ₂₀ wound on the release film roll 100 is pulled out until the distance r becomes 130 mm in order to measure the rebound hardness K(r) at a distance r of 10 to 130 mm. In the process, it is also convenient to measure the rebound hardness K(r) from 130 mm to the distance r ₀ by appropriately setting the interval of the distance r in the same manner as above.

When the distance r is 10 to 130 mm, if the rebound hardness K(r) becomes high, the adjacent release films 20 will be in close contact with each other too much, and the irregular shape of the base film 22 will be easily transferred to the release layer 24 . When a ceramic green sheet is formed on such a release film 20, the thickness variation range of the ceramic green sheet tends to increase. On the other hand, when the rebound hardness K(r) becomes lower, the air that exists between the adjacent release films 20 increases, and the release film 20 tends to slide like a bamboo shoot at the inner part of the release film roll 100. And prone to winding deviation due to vibration. If such a phenomenon occurs, the release layer 24 will be damaged, and pinholes will easily occur in the ceramic green sheet formed on the release film. Since the peeling film roll 100 of this embodiment satisfies the above-mentioned formula (1), the damage (corrugation and damage) which arises in the peeling layer 24 of the peeling film 20 can fully be reduced.

The peeling film 20 can be wound so that the rebound hardness K(r) may decrease as distance r increases within the range of 10-130 mm. Thereby, occurrence of winding misalignment in both the inner peripheral part and the outer peripheral part of the release film roll 100 can be sufficiently suppressed. When the distance r is 130 mm or more, the peeling film 20 may be wound up so that the rebound hardness K(r) decreases as the distance r increases. In the range where the distance r is less than 10mm, the rebound hardness K(r) can be above 650HL. Thereby, it can fully suppress that the peeling film is wound misaligned in the vicinity of the core 10, or the core 10 falls off from the peeling film roll 100. In addition, the portion where the distance r is less than 10 mm can be effectively used in the replacement work of the release film roll without forming a ceramic green sheet.

FIG. 5 : is a figure which shows an example of the manufacturing apparatus of the peeling film roll 100. As shown in FIG. In the manufacturing apparatus 300 of FIG. 5, the release film roll 200 is used. The release film roll 200 winds up the release film 20A having a width (for example, 1 to 2 m) wider than the release film 20 around the core 11 . The peeling film roll 200 is manufactured by winding the peeling film 20A around the core 11 by a well-known method. At this time, the base film side of 20 A of peeling films may be wound up on the core 11 inside, and may wind up the peeling layer side inside.

The manufacturing apparatus 300 inserts the core 11 of the peeling film roll 200 into the rotating shaft 202 on the upstream side, and the rotating shaft 202 supports the peeling film roll 200 rotatably. Moreover, the manufacturing apparatus 300 is equipped with: the roll 50 which has a pair of roller which pinches|interposes the release film 20A pulled out from the release film roll 200 in the up-down direction; the cutting part 60; The winding shaft 102 of the winding core 10 is rotatably supported.

Among the rolls 50, the upper roll 50a may be a roll whose surface is made of rubber. The lower roller 50b may be a roller whose surface is made of metal. The nip roll 50 has a function of making the tension of the release film 20A different between the upstream side and the downstream side. Thereby, tension control at the time of winding the peeling film 20 around the winding core 10 can be performed highly freely.

The cutting unit 60 has an upper knife roll 60a and a lower knife roll 60b. The upper knife roll 60a may have a plurality of upper knives mounted at certain intervals along the direction of its rotational axis. The upper knife of the upper knife roll 60a is engageable with the lower knife roll 60b. The peeling film 20A which passed the roll 50 is cut|disconnected in the longitudinal direction between the upper knife roll 60a and the lower knife roll 60b. Thereby, it divide|segments into the peeling film 20 which has a width of 100-500 mm, for example. When a plurality of winding cores 10 are attached to the winding shaft 102, and the cut release film 20 is wound up on the winding core 10 while pressing the cut release film 20 with the touch roller 70, a plurality of release film rolls 100 can be manufactured at a time. As the cutting unit 60, known slitters such as gang blades can be used. In addition, the cutting part 60 may not be provided. In this case, one release film roll 100 can be obtained from one release film roll 200 .

The release film 20 cut by the cutting unit 60 is wound up on the core 10 attached to the winding shaft 102 . At this time, the take-up shaft 102 rotates with a predetermined torque, and the touch roller 70 rotating while contacting the release layer 24 of the release film 20 presses the wound release film 20 against the winding core 10 side. That is, the release film 20 is wound up while being pressed by the touch roll 70 . The contact roller 70 can also be driven in rotation. In this way, by using the touch roll 70, the air between the peeling films 20 can be sufficiently reduced without increasing the tension. Thereby, the generation|occurence|production of misalignment of a winding, a slipping phenomenon, and a winding overtightness can be suppressed, and the generation|occurrence|production of a wrinkle and damage to the peeling layer 24 can be suppressed.

The rebound hardness K(r) on the surface of the release layer 24 of the release film 20 wound on the release film roll 100 can be adjusted by controlling the pressing force and driving force of the touch roller 70 and the torque control of the take-up shaft 102 . For example, when the release film 20 is cut and wound, the diameter (roll diameter) of the release film roll 100 gradually increases. The winding tension is adjusted to a desired tension by controlling the torque of the winding shaft 102 according to the winding diameter at the time of winding. As the winding diameter increases, the tension decreases more than necessary, and when the springback hardness K(r) is below the lower limit, the springback hardness can be increased by increasing the torque of the winding shaft 102 . In addition, even if the winding diameter is increased, the tension is not sufficiently reduced, and when the rebound hardness K(r) exceeds the upper limit, the torque of the winding shaft 102 can be reduced to lower the rebound hardness.

The manufacturing method of the peeling film roll 100 is not limited to the said method. For example, it can also be manufactured only by driving the touch roll and adjusting the torque of the touch roll.

6 is a cross-sectional view of a ceramic component sheet according to one embodiment of the present disclosure. The manufacturing method of the ceramic component sheet 40 of FIG. 6 has the following steps: On the surface 24a of the release layer 24 of the release film 20 pulled out from the release film roll 100, a paste containing ceramic powder and an electrode paste are used to form a sheet containing ceramic powder. The green sheet 30 of the green sheet 32 and the electrode green sheet 34 .

The ceramic green sheet 32 can be formed by applying and drying a ceramic slurry containing ceramic powder. The electrode green sheet 34 may be formed by coating an electrode slurry on the ceramic green sheet 32 and drying it.

The ceramic slurry can be prepared by kneading a dielectric raw material (ceramic powder) and an organic medium, for example, in the case of a laminated ceramic capacitor. Examples of dielectric raw materials include various compounds that become composite oxides or oxides by firing. For example, carbonates, nitrates, hydroxides, organometallic compounds and the like can be appropriately selected and used. The dielectric raw material is a powder having an average particle size of 4 μm or less, preferably 0.1 to 3.0 μm.

The electrode paste can be made, for example, by mixing at least one of the conductor materials selected from various conductive metals and alloys, and various oxides, organometallic compounds, resinates, etc., which become conductor materials after firing. One, prepared by mixing with organic medium. As the conductor material used for producing the electrode paste, Ni metal, Ni alloy, or a mixture thereof is preferably used. In order to improve adhesion, the electrode paste may also contain a plasticizer. Examples of the plasticizer include phthalates such as butyl benzyl phthalate (BBP, Butyl Benzyl Phthalate), adipic acid, phosphoric acid esters, glycols, and the like.

The organic vehicle contained in the ceramic slurry and the electrode slurry can be prepared by dissolving a binder resin in an organic solvent. Binder resins used in organic media include, for example, ethyl cellulose, acrylic resins, butyral resins, polyvinyl acetal, polyvinyl alcohol, polyolefins, polyurethanes, polystyrene Ethylene, and these copolymers, etc. Among them, it is preferable to use a butyral-based resin, specifically, a polyvinyl butyral-based resin. By using a butyral resin, the mechanical strength of a ceramic green sheet can be improved. One or both of the ceramic slurry and the electrode slurry may contain at least one additive selected from various dispersants, plasticizers, antistatic agents, dielectrics, glass frits, insulators, and the like as needed.

The above-mentioned ceramic slurry is applied to the surface 24a of the release layer 24 of the release film 20 using, for example, a doctor blade device or the like. Then, the coated ceramic slurry is dried in a drying device, for example, at a temperature of 50-100° C. for 1-20 minutes to form a ceramic green sheet 32 . The ceramic green sheet 32 shrinks by 5 to 25% compared with that before drying.

Then, for example, using a screen printing device, the above-mentioned electrode paste is printed on the surface 32a of the ceramic green sheet 32 so as to form a specific pattern. The printed electrode paste is dried in a drying device, for example, at a temperature of 50-100° C. for 1-20 minutes to form an electrode green sheet 34 . In this way, the ceramic component sheet 40 in which the ceramic green sheet 32 and the electrode green sheet 34 are sequentially laminated on the release layer 24 of the release film 20 can be obtained.

When the unevenness of the peeling film 20 in the peeling film roll 100 becomes larger, the thickness variation range of the ceramic green sheet 32 becomes larger. The peeling film 20 pulled out from the peeling film roll 100 has sufficiently reduced the occurrence of scratches and unevenness due to winding misalignment, slipping phenomena, and the like on the peeling layer 24 . Therefore, the ceramic green sheet 32 whose thickness variation is sufficiently suppressed can be formed over a wide area from the front end to the rear end of the release film 20 wound up on the release film roll 100 . A ceramic component produced using the ceramic component sheet 40 including such a ceramic green sheet has excellent reliability.

The thicknesses of the ceramic green sheet 32 and the electrode green sheet 34 may each be 1.0 μm or less. Even with such a small thickness, variations in thickness are suppressed, so ceramic parts with high reliability can be obtained. The ceramic component sheet of the present disclosure is not limited to the sheet shown in FIG. 6 , and may be composed of only the ceramic green sheet 32 without, for example, the electrode green sheet.

A method for manufacturing a ceramic component according to an embodiment of the present disclosure includes: a lamination step of preparing a plurality of ceramic component sheets and stacking green sheets of the plurality of ceramic component sheets to obtain a laminate; a firing step of firing the laminate to obtain a sintered body; and an electrode forming step of forming terminal electrodes on the sintered body to obtain a multilayer ceramic capacitor.

Fig. 7 is a cross-sectional view showing an example of a multilayer ceramic capacitor manufactured by the above-mentioned manufacturing method. Multilayer ceramic capacitor 90 includes an inner layer portion 92 and a pair of outer layer portions 93 sandwiching inner layer portion 92 in the stacking direction. Multilayer ceramic capacitor 90 has terminal electrodes 95 on side surfaces.

The inner layer part 92 has a multilayer (13 layers in this example) ceramic layer 96 (dielectric layer) and a multilayer (12 layers in this example) internal electrode layer 94 . Ceramic layers 96 and internal electrode layers 94 are laminated alternately. The internal electrode layer 94 is electrically connected to the terminal electrode 95 . The outer layer portion 93 is formed of a ceramic layer. The ceramic layer can also be formed, for example, in the same manner as the ceramic green sheet 32 .

In the lamination process, the release film 20 of the ceramic component sheet 40 shown in FIG. 6 is peeled off to obtain the green sheet 30 . One side 30b of this green sheet 30 is laminated on the outer layer green sheet. The other peeling film 20 is peeled off from the other ceramic component sheet 40 to obtain another green sheet 30 , and the electrode green sheet 34 of the first peeled green sheet is laminated so that the electrode green sheet 34 of the other green sheet 30 faces each other. Thereafter, by repeating this procedure, the green sheets 30 are laminated to obtain a laminated body. That is, in this lamination process, the release film 20 is peeled off to obtain the green sheet 30, and the green sheet 30 is sequentially laminated. By repeating this sequence a plurality of times, a laminated body is formed. Finally, the green sheets for outer layers are also laminated.

The number of laminated green sheets of the laminate is not particularly limited, and may be, for example, several tens to several hundreds of layers. A slightly thick outer layer green sheet on which no electrode layer is formed may be provided on both end surfaces perpendicular to the lamination direction of the laminate. After forming the laminated body, the laminated body may be cut to obtain a green sheet.

In the firing step, the laminate (green sheet) obtained in the lamination step is fired to obtain a sintered body. The firing conditions are preferably performed at 1100 to 1300° C. in an atmosphere of a humidified nitrogen-hydrogen gas mixture or the like. However, the oxygen partial pressure in the atmosphere during firing is preferably 10 ^-2 Pa or less, more preferably 10 ^-2 to 10 ^-8 Pa. In addition, it is preferable to perform binder removal treatment of the laminate before firing. The binder removal treatment can be performed under normal conditions. For example, in the case of using a base metal such as Ni or a Ni alloy as the conductor material of the internal electrode layer, it is preferable to conduct the process at 200 to 600°C.

After firing, heat treatment may be performed in order to re-oxidize the ceramic layer constituting the sintered body. The holding temperature or the highest temperature of the heat treatment is preferably 1000 to 1100°C. The oxygen partial pressure during heat treatment is preferably higher than that of the reducing atmosphere during firing, more preferably 10 ^-2 Pa to 1 Pa. The sintered body obtained in this way is preferably subjected to end surface grinding by, for example, barrel grinding, sandblasting, or the like.

In the electrode forming step, the terminal electrode 95 is formed by firing the terminal electrode paste on the side surface of the sintered body, thereby obtaining the multilayer ceramic capacitor 90 shown in FIG. 7 . In this method of manufacturing multilayer ceramic capacitor 90 , a release film roll 100 having a release layer that sufficiently reduces damage due to unevenness, winding misalignment, and the like of release film 20 is used. Therefore, thickness unevenness and pinholes in the ceramic layer 96 and the internal electrode layer 94 can be sufficiently reduced. Therefore, a decrease in withstand voltage is suppressed, and reliability is excellent.

As mentioned above, although some embodiment was described, this indication is not limited to the said embodiment. For example, an example in which a laminated ceramic capacitor is formed as a ceramic component has been described, but the ceramic component of the present disclosure is not limited to a laminated ceramic capacitor, and may be other ceramic components, for example. The ceramic component may also be, for example, a varistor or a laminated inductor.

Example

The contents of the present disclosure will be described in more detail with reference to Examples and Comparative Examples, but the present disclosure is not limited to the following Examples.

(Example 1)

<Manufacturing of release film roll>

In order to produce a release film, a release agent solution was prepared according to the following procedure. With respect to 100 parts by mass of nonanediol diacrylate, 0.25 parts by mass of acrylate-modified silicone oil (trade name: X-22-2445, manufactured by Shin-Etsu Chemical Co., Ltd.), 100 parts by mass of methyl ethyl ketone were prepared. , and 100 parts by mass of toluene. These were put into a metal container, stirred and mixed, and a colorless transparent solution was obtained.

2.5 parts by mass of a reaction initiator (trade name: Omnirad 127, manufactured by IGM Rasins B.V.) was added to the above solution to prepare a coating solution. Extrude the coating solution from the slit of the coating device, apply it on one side of a biaxially stretched polyethylene terephthalate film (PET film, thickness: 30 μm) with a width of 1100 mm, and blow it with hot air at a temperature of 80 ° C for 30 seconds , to evaporate methyl ethyl ketone and toluene. Thus, a coating layer was formed on the PET film.

Next, ultraviolet rays were irradiated in a nitrogen atmosphere having an oxygen concentration of 100 ppm to cure the coating layer and form a peeling layer having a peeling function. In this way, a release film (before cutting) having a release layer on one side of the PET film was obtained. The surface roughness (Rp) of the release layer of the release film was measured using a scanning white interference microscope (device name: VS1540, manufactured by Hitachi High-Tech Science Corporation). As a result, the surface roughness (Rp) of the peeling layer was 30 nm. Such a release film was wound up on a core to obtain a release film roll (before cutting). In addition, the thickness of the release layer was 1 μm, and the difference between the maximum value and the minimum value of the thickness in the width direction of the release film, that is, the width of thickness variation was 0.5 μm. In addition, the total length of the produced release film was 7000 m.

The above-mentioned release film roll (before cutting) is attached to the rotating shaft 202 using the manufacturing apparatus shown in FIG. 5 . The peeling film pulled out from the peeling film roll (before cutting) was cut|disconnected by the cutting part 60 along the long side into 5 pieces, and it was made into the dimension of width 200mm. As shown in FIG. 5 , each of the five release films (after cutting) is wound up on the core 10 so that the release layer 24 becomes the outer side. At the time of winding, the touch roll 70 is pressed against the release film roll 100 , and the wind-up shaft 102 and the touch roll 70 are driven to rotate, and are wound up on the winding core 10 . Thus, five peeling film rolls were obtained. Five release film rolls were wound up under the same conditions. The winding lengths of the five release film rolls were all 6000 m. Moreover, the distance _r0 from the outer peripheral surface of a winding core to the outer peripheral surface of the peeling film wound in roll form was about 205 mm in all five release film rolls.

<Measurement of rebound hardness K(r)>

The rebound hardness K (r) in the peeling layer of the 1st peeling film roll among the 5 peeling film rolls obtained in this way was measured. A digital hardness tester (trade name: AR936, measurement range: 170 to 960 HLD) manufactured by SMART SENSOR was used for the measurement of the rebound hardness K(r).

Rebound hardness K(r) is measured by winding the peeling layer surface (central part in the width direction) of the outermost peeling film in the peeling film roll, and pressing the sensor of the digital hardness meter against the center of the core C and carried out. The measurement is to measure the springback hardness K(r) of the release film roll when the distance r in the radial direction reaches a specific value while unrolling the release film roll. Specifically, r was measured at intervals of 10 mm in the range of 195 mm to 135 mm. That is, the rebound hardness K(r) was measured when the distance r was 195 mm, 185 mm, ... 135 mm, respectively. In addition, the distance r was measured at intervals of 5 mm in the range of 135 mm to 5 mm. That is, the rebound hardness K(r) was measured when the distance r was 135 mm, 130 mm, ... 5 m, respectively. The relationship between the distance r and the rebound hardness K(r) of Example 1 is plotted in FIG. 8 . As shown in FIG. 8 , when the distance r is 10 to 130 m, the rebound hardness K(r) satisfies the above formula (1).

<Formation and Evaluation of Dielectric Green Sheet>

The release film was pulled out from the second release film roll among the five release film rolls, and the surface state of the release layer of the release film was visually inspected. As a result, there was no abnormality in particular. Using the third release film roll among the five release film rolls, a dielectric green sheet was formed as a ceramic component sheet in the following procedure. BaTiO ₃ -based powder as a ceramic powder, polyvinyl butyral (PVB, Polyvinyl butyral) as an organic binder, and methanol as a solvent were prepared. Next, 10 parts by mass of an organic binder and 165 parts by mass of a solvent were prepared with respect to 100 parts by mass of ceramic powder, and kneaded with a ball mill to obtain a dielectric slurry.

The release film roll was mounted on the coater, and the dielectric slurry was applied to the release layer side of the release film pulled out from the release film roll to form a dielectric green sheet on the release film. The predetermined thickness of the dielectric green sheet was 0.9 μm. The presence or absence of pinholes in the dielectric green sheet formed on the release film and the thickness variation range of the dielectric green sheet were investigated. Check for the presence or absence of pinholes with an image processing inspection device. The thickness variation range was continuously measured using a transmission type X-ray film thickness meter (trade name: AccureX, manufactured by FUTECINC.) installed on one line. The thickness variation range is obtained from the average value, maximum value, and minimum value of the thickness. That is, the larger value of the absolute value of the maximum value-average value and the absolute value of the minimum value-average value is used as the width of thickness variation.

As a result, the average value of the thickness of the dielectric green sheet was 0.9 μm, and the thickness variation range was 0.04 μm. The fluctuation range is within ±5% (0.045 μm) of the set thickness (0.9 μm), which is a good product. In addition, no pinholes were detected.

(Example 2)

Except for adjusting the torque of the take-up shaft 102 when winding the release film (after cutting) with a winding device, and setting the tension applied to the release film to be about 0.8 times that of Example 1, the other conditions were the same as in Example 1. 1 Prepare a release film roll in the same manner. In addition, the measurement of the rebound hardness K(r), the formation and evaluation of the dielectric green sheet were carried out in the same manner as in Example 1. The relationship between the distance r and the rebound hardness K(r) of Example 2 is plotted in FIG. 8 . As shown in FIG. 8 , when the distance r is 10 to 130 m, the rebound hardness K(r) satisfies the above formula (1). The release film was pulled out from the release film roll, and the surface state of the release layer of the release film was visually inspected. As a result, there was no abnormality in particular. The average value of the thickness of the dielectric green sheet was 0.9 μm. In addition, the variation width of the thickness of the dielectric green sheet was 0.03 μm, which was a good product. In addition, no pinholes were detected.

(Example 3)

Except for adjusting the torque of the take-up shaft 102 when winding the release film (after cutting) with a winding device, and setting the tension applied to the release film to be about 0.6 times that of Example 1, the other conditions were the same as in Example 1. 1 A release film roll was produced in the same manner. In addition, the measurement of the rebound hardness K(r), the formation and evaluation of the dielectric green sheet were carried out in the same manner as in Example 1. The relationship between the distance r and the rebound hardness K(r) of Example 3 is plotted in FIG. 8 . As shown in FIG. 8 , when the distance r is 10 to 130 m, the rebound hardness K(r) satisfies the above formula (1). Moreover, the peeling film was pulled out from the peeling film roll, and the surface state of the peeling layer of the peeling film was visually inspected. As a result, there was no abnormality in particular. The average thickness of the dielectric green sheet was 0.9 μm. In addition, the variation width of the thickness of the dielectric green sheet was 0.03 μm, which was a good product. In addition, no pinholes were detected.

(comparative example 1)

Except for adjusting the torque of the take-up shaft 102 when winding the release film (after cutting) with a winding device, and setting the tension applied to the release film to be about 1.3 times that of Example 1, the other conditions were the same as in Example 1. 1 A release film roll was produced in the same manner. In addition, the measurement of the rebound hardness K(r), the formation and evaluation of the dielectric green sheet were carried out in the same manner as in Example 1. The relationship between the distance r and the rebound hardness K(r) of Comparative Example 1 is plotted in FIG. 9 . As shown in FIG. 9 , when the distance r is 10 to about 45 mm, the rebound hardness K(r) exceeds the upper limit of the above-mentioned formula (1). The release film was pulled out from the release film roll, and the surface state of the release layer of the release film was visually inspected. As a result, there was no abnormality in particular. On the other hand, the thickness variation range of the dielectric green sheet increases as it approaches the winding core. The thickness variation of the dielectric green sheet on the release film between 40 mm from the rear end of the release film exceeded 0.06 μm, and could not be within ±5% of the set thickness (0.9 μm).

(comparative example 2)

A release film roll was produced in the same manner as in Example 1, except that the torque of the take-up shaft 102 was adjusted when the release film was wound up (after cutting) using a winding device, and the tension was about 0.3 times that of Example 1. And, the measurement of the rebound hardness K(r) was performed similarly to Example 1. The relationship between the distance r and the rebound hardness K(r) of Comparative Example 2 is plotted in FIG. 9 . As shown in FIG. 9 , when the distance r is about 30 to about 115 mm, the rebound hardness K(r) is lower than the lower limit of the above formula (1). When the dielectric green sheet is formed and transported, the release film near the core of the release film roll bulges like a bamboo shoot, resulting in uneven roll shape. At this point, the release film roll of Comparative Example 2 was judged to be unsuitable, and the evaluation was ended.

(comparative example 3)

During winding, the torque of the take-up shaft 102 was prepared so that the tension applied to the wound release film was substantially constant, and the pressure of the touch roll relative to the release film roll was about 1.5 times that of Example 1. Except for this, it carried out similarly to Example 1, and produced the peeling film roll. Furthermore, the measurement of the rebound hardness K(r) was performed similarly to Example 1. FIG. 10 plots the relationship between the distance r and the rebound hardness K(r) of Comparative Example 3. In FIG. As shown in FIG. 10 , when the distance r is approximately 110 to 130 mm, the rebound hardness K(r) exceeds the upper limit of the above formula (1).

The release film was pulled out from the release film roll, and the surface state of the release layer of the release film was visually inspected. As a result, a plurality of wrinkles extending in the longitudinal direction of the release film arranged in the width direction occurred in the portion on the winding core side where the distance r was 70 mm or less, and deformation of the release film was confirmed. Deformation due to such wrinkles is believed to be effected by over-tightening of the winding. At this point, it was judged that the release film roll of Comparative Example 3 was unsuitable, and the evaluation was terminated.

(comparative example 4)

From the start of winding to the end of winding, the winding torque does not change greatly. In addition, the pressure of the touch roll with respect to the release film roll was about 0.7 times that of Example 1. Moreover, the peeling film roll was produced similarly to Example 1. Furthermore, the measurement of the rebound hardness K(r) was performed similarly to Example 1. In FIG. 10 , the distance r and the rebound hardness K(r) of Comparative Example 4 are plotted. As shown in FIG. 10 , when the distance r is about 35 to 130 mm, the rebound hardness K(r) is lower than the lower limit of the above-mentioned formula (1).

The side edge part (cut part) of the peeling film in the outer peripheral part of the obtained peeling film roll became uneven. The release film was pulled out from the release film roll, and the surface state of the release layer of the release film was visually inspected. As a result, deformation such as bending of the release film was observed in the region within about 3 cm inward from the side end. As a result of the irregularity of the side ends, the pressure deformation acts on the vicinity of the side ends, and as a result, the release film is considered to be deformed. At this point, the release film roll of Comparative Example 4 was judged to be unsuitable, and the evaluation was ended.

[industrial availability]

According to this disclosure, even if the winding length of a peeling film is lengthened, the peeling film roll which can fully reduce the damage which arises in the peeling layer of a peeling film can be provided. In addition, it is possible to provide a method of manufacturing a ceramic component sheet and a method of manufacturing a ceramic component having excellent reliability by using such a release film roll. In addition, a ceramic component sheet and a ceramic component having excellent reliability can be provided.

Claims (8)

1. A roll of release film wherein, The release film roll has: a release film having a base film and a release layer, and a core wound with the release film; Among the side faces, when the distance r in the radial direction from the outer peripheral surface of the winding core is 10 to 130 mm, the surface of the release film exposed on the outer peripheral surface of the roll at the distance r measured toward the center of the winding core The rebound hardness K (r) of the release film roll satisfies the following formula (1), -2r+670≤K(r)≤-1.25r+862.5...(1), The unit of r is mm, and the unit of K(r) is HL. 2. The release film roll of claim 1, wherein: When the distance r is less than 10 mm, the rebound hardness K(r) is above 650HL. 3. The roll of release film according to claim 1 or 2, wherein, The distance r _along the radial direction from the outer peripheral surface of the core to the outer peripheral surface of the roll-shaped release film is 160 mm or more, and when the distance r is 160 mm or more, the rebound hardness K (r) is 350 to 350 mm. 662.5HL. 4. The release film roll according to any one of claims 1 to 3, wherein Within the range of the distance r being 10-130 mm, as the distance r increases, the rebound hardness K(r) decreases, wherein the unit of K(r) is HL. 5. A method of manufacturing a ceramic component sheet, wherein, has the step of forming a ceramic green sheet using a slurry containing ceramic powder on the surface of the release layer of the release film drawn from the release film roll according to any one of claims 1 to 4, The thickness of the ceramic green sheet is 1.0 μm or less. 6. A method of manufacturing a ceramic component, wherein, have: A step of obtaining a laminated body including the ceramic green sheet using the ceramic component sheet obtained by the manufacturing method according to claim 5; and A step of firing the laminated body to obtain a sintered body. 7. A ceramic component sheet, wherein, The ceramic component sheet is obtained by forming a green sheet comprising a ceramic green sheet on the surface of the release layer of the release film drawn from the release film roll according to any one of claims 1 to 4. 8. A ceramic component wherein, With sintered body, The sintered body is obtained by forming a laminated body of ceramic green sheets including the ceramic component sheet according to claim 7, and firing the laminated body.

Images