TW202200376A - Release film roll, ceramic component sheet and method for producing same, and ceramic component and method for producing same - Google Patents
Release film roll, ceramic component sheet and method for producing same, and ceramic component and method for producing same Download PDFInfo
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- TW202200376A TW202200376A TW110107287A TW110107287A TW202200376A TW 202200376 A TW202200376 A TW 202200376A TW 110107287 A TW110107287 A TW 110107287A TW 110107287 A TW110107287 A TW 110107287A TW 202200376 A TW202200376 A TW 202200376A
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
- B65H75/00—Storing webs, tapes, or filamentary material, e.g. on reels
- B65H75/02—Cores, formers, supports, or holders for coiled, wound, or folded material, e.g. reels, spindles, bobbins, cop tubes, cans, mandrels or chucks
- B65H75/04—Kinds or types
- B65H75/08—Kinds or types of circular or polygonal cross-section
- B65H75/10—Kinds or types of circular or polygonal cross-section without flanges, e.g. cop tubes
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28B—SHAPING CLAY OR OTHER CERAMIC COMPOSITIONS; SHAPING SLAG; SHAPING MIXTURES CONTAINING CEMENTITIOUS MATERIAL, e.g. PLASTER
- B28B1/00—Producing shaped prefabricated articles from the material
- B28B1/30—Producing shaped prefabricated articles from the material by applying the material on to a core or other moulding surface to form a layer thereon
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B27/00—Layered products comprising a layer of synthetic resin
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
- B65H18/00—Winding webs
- B65H18/28—Wound package of webs
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
- H01G4/00—Fixed capacitors; Processes of their manufacture
- H01G4/30—Stacked capacitors
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
- B65H2701/00—Handled material; Storage means
- B65H2701/10—Handled articles or webs
- B65H2701/17—Nature of material
- B65H2701/172—Composite material
- B65H2701/1726—Composite material including detachable components
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
- B65H2701/00—Handled material; Storage means
- B65H2701/50—Storage means for webs, tapes, or filamentary material
- B65H2701/51—Cores or reels characterised by the material
- B65H2701/512—Cores or reels characterised by the material moulded
- B65H2701/5122—Plastics
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- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Chemical & Material Sciences (AREA)
- Ceramic Engineering (AREA)
- Mechanical Engineering (AREA)
- Laminated Bodies (AREA)
- Absorbent Articles And Supports Therefor (AREA)
- Ceramic Capacitors (AREA)
Abstract
Description
本發明係關於一種剝離膜卷、陶瓷零件片材及其製造方法、以及陶瓷零件及其製造方法。The present invention relates to a release film roll, a ceramic part sheet and a method for producing the same, and a ceramic part and a method for producing the same.
近年來,隨著越來越要求電子機器小型化,電子零件亦變得越來越小型化。作為電子零件之一種之陶瓷零件亦一年年地越來越小型化。例如,作為陶瓷零件之一種之積層陶瓷電容器將介電層及內部電極之厚度減薄以謀求大容量化。一般的積層陶瓷電容器係以如下方式製造,即,將剝離膜作為承載膜,於承載膜上形成介電層及內部電極而製成坯片,且將坯片剝離並積層。In recent years, as electronic equipment is increasingly required to be miniaturized, electronic components are also becoming more and more miniaturized. Ceramic parts, which are one of electronic parts, are also getting smaller and smaller year by year. For example, in a multilayer ceramic capacitor, which is a type of ceramic parts, the thickness of the dielectric layer and the internal electrode is reduced to increase the capacitance. A general multilayer ceramic capacitor is produced by using a release film as a carrier film, forming a dielectric layer and an internal electrode on the carrier film to form a green sheet, and peeling off the green sheet and laminating the green sheet.
若積層陶瓷電容器之介電層之厚度變薄,則有表示產生短路等不良情況之電壓強度下之耐久性之耐電壓性能降低之傾向。尤其於介電層之厚度不均勻之情形時,較薄之部分成為耐電壓性能降低之因素。具備具有此種較薄部分之介電層之積層陶瓷電容器之耐電壓不良,從而積層陶瓷電容器之良率降低。另一方面,若介電層之厚度均勻則耐電壓性能良好,積層陶瓷電容器之良率提昇。When the thickness of the dielectric layer of the multilayer ceramic capacitor becomes thinner, there is a tendency that the durability and the withstand voltage performance under the voltage strength, which represents a short-circuit or the like, will decrease. In particular, when the thickness of the dielectric layer is not uniform, the thinner portion becomes a factor that reduces the withstand voltage performance. The withstand voltage of the multilayer ceramic capacitor having the dielectric layer having such a thin portion is poor, so that the yield of the multilayer ceramic capacitor decreases. On the other hand, if the thickness of the dielectric layer is uniform, the withstand voltage performance is good, and the yield of the multilayer ceramic capacitor is improved.
用作介電層之承載膜之剝離膜中若存在皺褶及折痕等,則會導致厚度變動。又,剝離膜表面之平滑性對介電層厚度之均勻性造成影響。根據此種情況,例如專利文獻1中,研究一種能夠使剝離膜平滑以降低介電層之厚度不均之剝離膜卷。 先前技術文獻 專利文獻If there are wrinkles and creases in the release film used as the carrier film for the dielectric layer, the thickness will fluctuate. In addition, the smoothness of the surface of the release film affects the uniformity of the thickness of the dielectric layer. In view of such a situation, for example, in Patent Document 1, a release film roll that can smooth the release film and reduce the thickness unevenness of the dielectric layer is studied. prior art literature Patent Literature
專利文獻1:日本專利特開2011-206995號公報Patent Document 1: Japanese Patent Laid-Open No. 2011-206995
[發明所欲解決之問題][Problems to be Solved by Invention]
陶瓷零件之製造步驟中,於自剝離膜卷拉出之剝離膜上形成陶瓷坯片。此處,作為用以提高陶瓷零件之生產性之方法,認為有效的是加長捲繞為剝離膜卷之剝離膜之捲繞長度而減少剝離膜卷之更換頻率。但是,若加長剝離膜之捲繞長度,則導致剝離膜卷大型化,剝離膜卷之內側部分、即卷芯附近之剝離膜受到之壓力變大。In the manufacturing step of the ceramic part, a ceramic green sheet is formed on the release film drawn from the release film roll. Here, as a method for improving the productivity of ceramic parts, it is considered effective to lengthen the winding length of the release film wound into the release film roll and reduce the frequency of replacement of the release film roll. However, if the winding length of the peeling film is increased, the size of the peeling film roll will be increased, and the inner part of the peeling film roll, that is, the pressure applied to the peeling film in the vicinity of the core will increase.
因此,若於卷芯存在突起(凸部),則卷芯之突起形狀會轉印至卷芯附近之剝離膜。於厚度較薄之陶瓷坯片之情形時,此種轉印之突起形狀成為陶瓷坯片之厚度變動之因素。該厚度變動雖然會隨著遠離卷芯而得以改善,但因卷芯附近部分之剝離膜之變形較大,故陶瓷坯片之厚度變動較大,為了抑制陶瓷坯片之厚度變動,採取不使用而廢棄等對策。若能活用此未得到有效活用之剝離膜,則可實現剝離膜之有效利用,並且可降低剝離膜卷之更換頻率,從而可期待陶瓷坯片及陶瓷零件等各種製品之生產效率提高。Therefore, when a protrusion (convex portion) is present on the core, the protrusion shape of the core is transferred to the release film in the vicinity of the core. In the case of a thin ceramic green sheet, the transferred protrusion shape becomes a factor of thickness variation of the ceramic green sheet. Although the thickness variation improves as it moves away from the core, the thickness of the ceramic green sheet fluctuates greatly due to the large deformation of the release film near the core. In order to suppress the thickness variation of the ceramic green sheet, do not use and abandonment and other countermeasures. If the peeling film that has not been effectively utilized can be utilized, the peeling film can be effectively utilized, and the frequency of replacing the peeling film roll can be reduced, so that the production efficiency of various products such as ceramic green sheets and ceramic parts can be expected to be improved.
因此,本發明提供一種能夠直至卷芯附近為止有效活用剝離膜之剝離膜卷。又,本發明提供一種藉由使用此種剝離膜卷而能夠以較高之生產效率製造陶瓷零件片材及陶瓷零件之製造方法。又,本發明提供一種可靠性優異之陶瓷零件片材及陶瓷零件。 [解決問題之技術手段]Therefore, this invention provides the release film roll which can utilize a release film effectively up to the vicinity of a core. Moreover, this invention provides the manufacturing method which can manufacture a ceramic component sheet|seat and a ceramic component with high productivity by using such a peeling film roll. Furthermore, the present invention provides a ceramic component sheet and ceramic component excellent in reliability. [Technical means to solve problems]
本發明之一觀點之剝離膜卷係具備具有基材膜及剝離層之剝離膜、及捲繞有該剝離膜之卷芯者,卷芯之外周面之表面粗糙度(Rp)為1.5 μm以下。A release film roll according to one aspect of the present invention includes a release film having a base film and a release layer, and a core on which the release film is wound, and the surface roughness (Rp) of the outer peripheral surface of the core is 1.5 μm or less .
卷芯之外周面之突起對剝離膜卷之內側部分、即卷芯附近部分之剝離膜之變形產生較大影響。上述剝離膜卷中,卷芯之外周面之表面粗糙度(Rp)為1.5 μm以下,故即便捲繞長度變長而使施加至內側之剝離膜之壓力變大,亦可抑制卷芯附近之剝離膜變形,降低剝離膜之厚度變動。因此,即便加長剝離膜之捲繞長度亦可直至芯附近為止有效活用剝離膜。The protrusion on the outer peripheral surface of the core has a great influence on the deformation of the release film in the inner part of the release film roll, that is, the part near the core. In the above-mentioned release film roll, the surface roughness (Rp) of the outer peripheral surface of the core is 1.5 μm or less, so even if the winding length is increased and the pressure applied to the inner release film is increased, it is possible to suppress the pressure near the core. The release film is deformed and the thickness variation of the release film is reduced. Therefore, even if the winding length of the release film is lengthened, the release film can be effectively utilized up to the vicinity of the core.
再者,表面粗糙度(Rp)表示測定卷芯之外周面而獲得之粗糙度曲線中最高之凸起(突起)之高度。於卷芯之外周面若存在哪怕一個較大之突起,則藉由突起而將形狀轉印至剝離膜,從而卷芯附近之剝離膜之變形顯著,導致陶瓷坯片之厚度較大地變動。另一方面,卷芯之外周面之凹陷相較突起難以將形狀轉印至剝離膜。因此,作為上述卷芯之表面粗糙度,藉由將Rp(最大凸起高度)而非Ra(算術平均粗糙度)及Rv(最大凹陷深度)指定為特定值以下而可降低卷芯附近之剝離膜之變形。In addition, the surface roughness (Rp) shows the height of the highest protrusion (protrusion) in the roughness curve obtained by measuring the outer peripheral surface of a winding core. If there is even one large protrusion on the outer peripheral surface of the core, the shape is transferred to the release film by the protrusion, so that the deformation of the release film near the core is remarkable, and the thickness of the ceramic green sheet changes greatly. On the other hand, it is more difficult to transfer the shape to the release film by the depressions on the outer peripheral surface of the core than by the protrusions. Therefore, as the surface roughness of the above-mentioned core, by specifying Rp (maximum protrusion height) instead of Ra (arithmetic mean roughness) and Rv (maximum depression depth) to be below specific values, peeling near the core can be reduced Deformation of the membrane.
捲繞於卷芯之剝離膜之寬度方向之厚度變動幅度亦可為0.5 μm以下。若剝離膜之寬度方向之厚度變動幅度為0.5 μm以下,則由厚度不同而產生之壓力差變小,從而可進一步抑制剝離膜之變形。尤其於卷徑較大之剝離膜卷之情形時,抑制變形之效果更大。The thickness fluctuation range of the width direction of the release film wound around the core may be 0.5 μm or less. When the thickness variation in the width direction of the release film is 0.5 μm or less, the pressure difference due to the difference in thickness is reduced, and the deformation of the release film can be further suppressed. Especially in the case of peeling film rolls with large roll diameters, the effect of suppressing deformation is greater.
卷芯可包含纖維強化塑膠。藉此,可提高卷芯表面之平滑性,並且可提高卷芯之機械強度。因此,可充分抑制因卷芯變形而導致剝離膜產生皺褶及折痕等。再者,亦有將纖維強化塑膠稱為FRP(Fiber Reinforced Plastics,纖維增強塑料)、或FWD(Fiber Winding Plastics,纖維纏繞塑料)之情形。The core may contain fiber reinforced plastic. Thereby, the smoothness of the surface of the core can be improved, and the mechanical strength of the core can be improved. Therefore, the generation of wrinkles, creases, etc. in the release film due to deformation of the core can be sufficiently suppressed. Furthermore, there are cases where fiber reinforced plastics are called FRP (Fiber Reinforced Plastics, fiber reinforced plastics) or FWD (Fiber Winding Plastics, filament wound plastics).
卷芯之外徑可為170 mm以下。因捲繞剝離膜卷,故自卷芯之形狀轉印對應於與捲繞剝離膜之直徑對應之周長度而以該周長度之間隔週期性地出現。若卷芯之外徑變小則該間隔變窄。卷芯之突起形狀之轉印有隨著剝離膜之捲繞遠離卷芯而變小之傾向。突起形狀之轉印間隔於卷芯較小時變窄。因此,產生突起形狀之轉印之剝離膜之長度於卷芯較小時變短。因此,可縮短隨著轉印而不得不廢棄之剝離膜之長度。又,亦可減小剝離膜卷之尺寸,從而減少設置空間及運輸成本。The outer diameter of the core can be 170 mm or less. As the release film roll is wound, the shape transfer from the core occurs periodically at intervals of the circumferential length corresponding to the circumferential length corresponding to the diameter of the wound release film. This interval becomes narrower as the outer diameter of the core becomes smaller. The transfer of the protruding shape of the core tends to become smaller as the release film is wound away from the core. The transfer interval of the protrusion shape becomes narrower when the core is smaller. Therefore, the length of the release film that produces the transfer of the protruding shape becomes shorter when the core is small. Therefore, the length of the release film which has to be discarded with transfer can be shortened. In addition, the size of the release film roll can be reduced, thereby reducing installation space and transportation costs.
捲繞於卷芯之剝離膜之長度可為4000 m以上。若剝離膜之長度變長,則施加至卷芯附近之剝離膜之壓力變大,從而易受到卷芯外周面之突起之影響。由於上述剝離膜卷之外周面之突起之高度充分小,故即便加長剝離膜之長度,亦可抑制剝離膜之變形。因此,可降低剝離膜卷之更換頻率,充分提高陶瓷坯片及陶瓷零件等各種製品之生產效率。The length of the release film wound on the core can be more than 4000 m. When the length of the release film becomes longer, the pressure applied to the release film in the vicinity of the core increases, and it is easily influenced by the protrusions on the outer peripheral surface of the core. Since the height of the protrusions on the outer peripheral surface of the peeling film roll is sufficiently small, even if the length of the peeling film is lengthened, the deformation of the peeling film can be suppressed. Therefore, the replacement frequency of the peeling film roll can be reduced, and the production efficiency of various products such as ceramic green sheets and ceramic parts can be fully improved.
本發明之一觀點之陶瓷零件片材之製造方法具有以下步驟,即,使用包含陶瓷粉末之漿料於自上述任一剝離膜卷拉出之剝離膜之剝離層之表面形成陶瓷坯片。A method for producing a ceramic component sheet according to one aspect of the present invention includes a step of forming a ceramic green sheet on the surface of the release layer of the release film drawn from any of the above-mentioned release film rolls using a slurry containing ceramic powder.
上述製造方法使用自上述任一剝離膜卷拉出之剝離膜。上述剝離膜可形成陶瓷坯片,該陶瓷坯片於卷芯附近厚度變動亦降低。因此,可有效活用卷芯附近之剝離膜,製造具備厚度變動降低之陶瓷坯片之陶瓷零件片材。如此,亦可活用卷芯附近之剝離膜而製造陶瓷零件片材,故可提高陶瓷零件片材之生產效率。The above-mentioned production method uses the release film drawn from any of the above-mentioned release film rolls. The above-mentioned release film can form a ceramic green sheet, and the thickness variation of the ceramic green sheet in the vicinity of the core is also reduced. Therefore, the release film in the vicinity of the core can be effectively utilized, and a ceramic component sheet having a ceramic green sheet with reduced thickness variation can be produced. In this way, since the release film in the vicinity of the core can be utilized to manufacture the ceramic parts sheet, the production efficiency of the ceramic parts sheet can be improved.
於形成上述陶瓷坯片之步驟中,亦可於自剝離膜卷拉出之剝離膜中自後端起300 m以內之部分形成陶瓷坯片。即便如此使用卷芯附近之剝離膜,亦可製造厚度變動得以抑制之陶瓷坯片。藉此,可充分減小陶瓷坯片之製造成本。本發明中剝離膜之「後端」係指安裝於卷芯之側之一端,剝離膜之「前端」係指呈現於剝離膜卷之外周面之側之一端。In the step of forming the above-mentioned ceramic green sheet, the ceramic green sheet may also be formed in a portion within 300 m from the rear end of the release film drawn from the release film roll. Even if the release film in the vicinity of the core is used in this manner, a ceramic green sheet whose thickness variation is suppressed can be produced. Thereby, the manufacturing cost of the ceramic green sheet can be sufficiently reduced. In the present invention, the "rear end" of the release film refers to an end mounted on the side of the core, and the "front end" of the release film refers to an end on the side of the outer peripheral surface of the release film roll.
本發明之一觀點之陶瓷零件之製造方法具有以下步驟,即,使用以上述製造方法獲得之陶瓷零件片材而獲得包含陶瓷坯片之積層體;及煅燒積層體而獲得燒結體。該製造方法亦可活用卷芯附近之剝離膜而製造陶瓷零件。因此,可提高陶瓷零件之生產效率。A method for producing a ceramic part according to one aspect of the present invention includes the steps of obtaining a laminate including a ceramic green sheet using the ceramic part sheet obtained by the above-mentioned production method; and calcining the laminate to obtain a sintered body. In this manufacturing method, the release film in the vicinity of the core can also be utilized to manufacture ceramic parts. Therefore, the production efficiency of ceramic parts can be improved.
本發明之一觀點之陶瓷零件片材可於自上述任一剝離膜卷拉出之剝離膜之剝離層之表面形成包含陶瓷坯片之坯片而獲得。The ceramic part sheet of one aspect of the present invention can be obtained by forming a green sheet including a ceramic green sheet on the surface of the release layer of the release film drawn from any of the above-mentioned release film rolls.
上述陶瓷零件片材可使用自上述任一剝離膜卷拉出之剝離膜而獲得。該剝離膜係厚度變動得以抑制者,故陶瓷零件片材之坯片之厚度變動得以抑制,從而可靠性優異。又,可使用卷芯附近之剝離膜進行生產,故可提高良率。The above-mentioned ceramic component sheet can be obtained using a release film drawn from any of the above-mentioned release film rolls. Since the thickness variation of the release film is suppressed, the thickness variation of the green sheet of the ceramic component sheet is suppressed, and the reliability is excellent. Moreover, since the release film near the core can be used for production, the yield can be improved.
本發明之一觀點之陶瓷零件具備燒結體,該燒結體係形成包含上述陶瓷零件片材之陶瓷坯片之積層體,且對該積層體進行煅燒而獲得。上述陶瓷坯片之厚度變動得以抑制,故上述陶瓷零件之可靠性優異。又,可使用利用卷芯附近之剝離膜生產之陶瓷坯片,故可提高良率。 [發明之效果]A ceramic component according to one aspect of the present invention includes a sintered body, and the sintered system forms a layered body of ceramic green sheets including the above-mentioned ceramic component sheet, and the layered body is obtained by calcining the layered body. Since the thickness variation of the ceramic green sheet is suppressed, the reliability of the ceramic component is excellent. In addition, since a ceramic green sheet produced using a release film near the core can be used, the yield can be improved. [Effect of invention]
根據本發明,可提供一種即便加長剝離膜之捲繞長度亦能夠直至卷芯附近為止有效活用剝離膜之剝離膜卷。又,本發明可提供一種藉由使用此種剝離膜卷而能夠以較高之生產效率製造陶瓷零件片材及陶瓷零件之製造方法。又,本發明可提供一種可靠性優異之陶瓷零件片材及陶瓷零件。ADVANTAGE OF THE INVENTION According to this invention, even if the winding length of a release film is lengthened, the release film roll which can effectively utilize a release film up to the vicinity of a core can be provided. Moreover, this invention can provide the manufacturing method which can manufacture a ceramic component sheet|seat and a ceramic component with high productivity by using such a peeling film roll. Furthermore, the present invention can provide a ceramic component sheet and ceramic component excellent in reliability.
以下,視情形參照圖式而說明本發明之實施方式。於各圖式中,對於相同或同等之要素標註相同符號,視情形省略重複之說明。但是,以下實施方式為用以說明本發明之例示,並非旨在將本發明限定於以下內容。Hereinafter, embodiments of the present invention will be described with reference to the drawings as appropriate. In each drawing, the same or equivalent elements are marked with the same symbols, and repeated descriptions are omitted as appropriate. However, the following embodiments are examples for explaining the present invention, and are not intended to limit the present invention to the following contents.
圖1係一實施方式之剝離膜卷之立體圖。圖1之剝離膜卷100具備:剝離膜20,其具有基材膜及剝離層;及卷芯10,其捲繞有剝離膜20。剝離膜20例如於由積層陶瓷電容器所代表之陶瓷零件之製造步驟中用作承載膜。該製造步驟中,例如於剝離膜上,藉由塗佈或印刷而形成成為介電片材之陶瓷坯片、及成為內部電極之電極坯片,其後,將該等剝離並積層,且對積層體進行煅燒而製造陶瓷零件。剝離膜20係自剝離膜卷100拉出而使用。FIG. 1 is a perspective view of a release film roll according to one embodiment. The
作為卷芯10之材質,可列舉紙、塑膠、金屬等。於陶瓷零件之製造中微粒會引起產生針孔,故較佳為包含不產生紙粉之輕量塑膠者。作為此種材質,可列舉ABS樹脂、電木及纖維強化塑膠等。其中,ABS樹脂有使用一次後卷芯10變形從而真圓度降低之情形。As a material of the core 10, paper, plastic, metal, etc. are mentioned. Particles can cause pinholes in the manufacture of ceramic parts, so it is preferable to include lightweight plastics that do not produce paper dust. As such a material, ABS resin, bakelite, fiber-reinforced plastic, etc. are mentioned. Among them, the ABS resin may be deformed after one use, and the roundness may be reduced.
另一方面,因纖維強化塑膠及電木具有較高之機械強度,故可重複利用卷芯10。如此,能夠作為卷芯10反覆使用,故可降低產業廢棄物而謀求資源之有效活用。又,於加長剝離膜20之捲繞長度之情形時可充分抑制卷芯10之變形。纖維強化塑膠及電木中,纖維強化塑膠除較高之機械強度外還具有柔軟性,故特別佳。作為纖維強化塑膠,可列舉將纖維以熱硬化性樹脂補強者。On the other hand, since fiber-reinforced plastic and bakelite have higher mechanical strength, the core 10 can be reused. In this way, since it can be used repeatedly as the winding
卷芯10為圓柱體,外周面之表面粗糙度(Rp)為1.5 μm以下。卷芯10之表面粗糙度(Rp)較佳為1.0 μm以下,更佳為0.6 μm以下。若表面粗糙度(Rp)大於1.5 μm,則卷芯10之外周面之突起(凸部)壓抵剝離膜20而轉印突起之形狀,從而剝離膜20變形。其結果,剝離膜20之剝離面(剝離層之表面)朝外側捲繞而成之剝離膜卷中剝離面側變形為凸形狀。另一方面,剝離面朝內側捲繞而成之剝離膜卷中剝離面變形為凹形狀。使用此種剝離膜20製造之積層陶瓷電容器中,介電層之厚度不均,於介電層之厚度較小之處產生耐電壓之降低,於厚度較大之處產生靜電電容之降低。另一方面,若卷芯10之外周面之表面粗糙度(Rp)變小,則突起變小,可抑制剝離膜20之變形。其結果,可提高使用剝離膜20製造之積層陶瓷電容器之可靠性。The winding
卷芯10之表面粗糙度(Rp)及表面粗糙度(Rv)係JIS(Japanese Industrial Standards,日本工業標準) B 0601-2001所規定之「最大凸起高度」及「最大凹陷高度」。該等表面粗糙度可使用接觸式表面粗糙度計來測定。The surface roughness (Rp) and surface roughness (Rv) of the winding
卷芯10之外周面之表面粗糙度(Rp)可藉由緻密地進行外周面之切削而減小。例如於製造包含纖維強化塑膠之卷芯10之情形時,首先,將含浸有樹脂之纖維纏繞於心軸,視需要進而纏繞樹脂片材。亦可取代纏繞樹脂片材而塗覆樹脂。其次,進行加熱而利用熱等使樹脂硬化之後,卸除心軸而獲得成為卷芯之裸管。The surface roughness (Rp) of the outer peripheral surface of the core 10 can be reduced by densely cutting the outer peripheral surface. For example, in the case of manufacturing the
作為樹脂,可列舉環氧樹脂、不飽和聚酯樹脂等。作為纖維,可列舉玻璃纖維、芳香族聚醯胺纖維等。若考慮成本方面等,則作為樹脂,較佳為不飽和聚酯樹脂。根據相同之觀點,作為纖維,較佳為玻璃纖維。As resin, epoxy resin, unsaturated polyester resin, etc. are mentioned. As fiber, glass fiber, aramid fiber, etc. are mentioned. In consideration of cost and the like, the resin is preferably an unsaturated polyester resin. From the same viewpoint, the fiber is preferably a glass fiber.
其次,使用車床等進行切削,使裸管之外周面平滑。例如,藉由減慢車刀之進給速度而可減小外周面之表面粗糙度(Rp)。又,進而藉由使用研磨紙或包含研磨材之研磨液等進行研磨(例如精研研磨),而可充分減小外周面之表面粗糙度(Rp)。研磨可使用粗眼之研磨紙或粗眼之研磨材進行,亦可自粗眼之研磨紙或研磨材慢慢變更為細眼之研磨紙或研磨材而進行。藉由進行此種研磨而可減小外周面之表面粗糙度(Rp)。Next, the outer peripheral surface of the bare tube is smoothed by cutting with a lathe or the like. For example, the surface roughness (Rp) of the outer peripheral surface can be reduced by slowing down the feed speed of the turning tool. Moreover, the surface roughness (Rp) of an outer peripheral surface can be made small enough by performing grinding|polishing (for example, fine grinding|polishing) using a grinding paper or a polishing liquid containing an abrasive material. Grinding can be carried out using coarse-grained abrasive paper or coarse-grained abrasive, or by gradually changing from coarse-grained abrasive paper or abrasive to fine-grained abrasive paper or abrasive material. By performing such grinding, the surface roughness (Rp) of the outer peripheral surface can be reduced.
將經表面處理之裸管裁斷成特定之長度。視需要可進行去除切斷面之毛邊等處理。又,藉由將切削、研磨、及切斷中所產生之碎屑(異物)去除而可抑制陶瓷坯片中產生針孔。Cut the surface-treated bare tube to a specific length. If necessary, the burrs on the cut surface can be removed. In addition, pinholes can be suppressed from being generated in the ceramic green sheet by removing chips (foreign matters) generated during cutting, grinding, and cutting.
圖2係表示剝離膜之剖面之一例之剖視圖。剝離膜20具有基材膜22、及於其一面上之剝離層24。基材膜22可為合成樹脂之膜。作為合成樹脂,可列舉聚酯樹脂、聚丙烯樹脂及聚乙烯樹脂等聚烯烴樹脂、聚乳酸樹脂、聚碳酸酯樹脂、聚甲基丙烯酸甲酯樹脂等丙烯酸系樹脂、聚苯乙烯樹脂、尼龍等聚醯胺樹脂、聚氯乙烯樹脂、聚胺基甲酸酯樹脂、氟系樹脂、以及聚苯硫醚樹脂等。該等之中,較佳為聚酯樹脂。聚酯樹脂中,就力學性質、透明性、成本等觀點而言,更佳為聚對苯二甲酸乙二酯(PET,polyethylene terephthalate)。FIG. 2 is a cross-sectional view showing an example of a cross-section of the release film. The
基材膜22之厚度較佳為10~100 μm,更佳為20~50 μm。於厚度未達10 μm之情形時,有剝離膜20之尺寸穩定性等物理特性受損之傾向。於厚度超出100 μm之情形時,有剝離膜20之每單位面積之製造成本上升之傾向。The thickness of the
就充分提高剝離膜20之機械強度之觀點而言,基材膜22亦可於不損及透明性之程度下含有填料(填充劑)。填料並非特別限定,例如可列舉碳酸鈣、磷酸鈣、二氧化矽、高嶺土、滑石、氧化鈦、薰製二氧化矽、氧化鋁、及有機粒子等。From the viewpoint of sufficiently improving the mechanical strength of the
使用聚酯膜作為基材膜22之情形時,可按以下順序製造。首先,利用擠出機將熔融之聚酯澆鑄至冷卻轉筒。熔融之聚酯自形成有狹縫之噴嘴擠出。其後冷卻,自冷卻轉筒剝下而獲得未延伸之聚酯膜。只要調整擠出機之狹縫之間隙,則可調整聚酯膜之厚度及其變動幅度。When a polyester film is used as the
其次,將未延伸之聚酯膜延伸而調整成所需之厚度,並且賦予機械強度。聚酯膜之延伸較佳為以雙軸延伸進行。該情形時,於縱向延伸後,進行橫向延伸。延伸時之延伸溫度較佳為以聚酯膜之玻璃轉移溫度以上、且熔融溫度以下進行。縱向延伸及橫向延伸可分別延伸數倍左右。於延伸後亦會延續未延伸膜之厚度變動。因此,藉由控制未延伸膜之厚度變動而可調節基材膜22及剝離膜20之厚度變動幅度。Next, the unstretched polyester film is stretched to adjust to a desired thickness and impart mechanical strength. The stretching of the polyester film is preferably carried out by biaxial stretching. In this case, after longitudinal extension, lateral extension is performed. The stretching temperature at the time of stretching is preferably performed at a temperature equal to or higher than the glass transition temperature of the polyester film and equal to or lower than the melting temperature. The longitudinal extension and the transverse extension can be respectively extended several times or so. The thickness variation of the unstretched film will also continue after stretching. Therefore, the thickness fluctuation range of the
剝離層24係將包含剝離劑之溶液塗佈於基材膜22之一面上,使其乾燥及硬化而形成。塗佈方法並未特別限定,使用反向塗佈法、凹版塗佈法、桿式塗佈法、棒式塗佈法、邁耶棒式塗佈法、模嘴塗佈法、及噴塗法等即可。乾燥可使用熱風乾燥、紅外線乾燥、自然乾燥等。為了抑制乾燥時之水分冷凝,較佳為加熱,可為60~120℃左右。The
作為用於形成剝離層24之剝離劑,可列舉例如矽酮系剝離劑、長鏈烷基系剝離劑、氟系剝離劑、及胺基醇酸樹脂系者。矽酮系剝離劑根據硬化反應之不同而有加成反應系矽酮剝離劑、縮合反應系矽酮剝離劑、及紫外線硬化系剝離劑等。As a release agent for forming the
硬化條件根據剝離劑之硬化系統而適當選擇即可。例如,若剝離劑為加成反應系矽酮,則可藉由以80~130℃進行數十秒鐘之加熱處理而硬化。若為紫外線硬化系,則可將水銀燈、金屬鹵化物燈等作為光源照射紫外線而硬化。於照射紫外線而使自由基聚合之情形時,為了防止氧抑制,較佳為於氮氣氛圍中進行硬化。剝離層24之厚度變動幅度較小為佳。The curing conditions may be appropriately selected according to the curing system of the release agent. For example, if the release agent is an addition reaction silicone, it can be cured by heat treatment at 80 to 130° C. for several tens of seconds. In the case of an ultraviolet curing system, a mercury lamp, a metal halide lamp, or the like can be irradiated with ultraviolet rays as a light source and cured. In the case of radical polymerization by irradiation with ultraviolet rays, in order to prevent oxygen inhibition, it is preferable to perform curing in a nitrogen atmosphere. It is preferable that the variation in the thickness of the
加成反應系矽酮剝離劑使將乙烯基導入至聚二甲基矽氧烷之末端及/或側鏈而成者、與氫矽氧烷反應而硬化。硬化可使用鉑觸媒。例如,可以100℃左右之硬化溫度硬化數十秒鐘至數分鐘。剝離層24之厚度可為50~300 nm左右。作為加成反應系之剝離劑,可列舉信越化學工業股份公司製造之KS-847、KS-847T、KS-776L、KS-776A、KS-841、KS-774、KS-3703T、KS-3601等(均為商品名)。The addition reaction-based silicone release agent is formed by introducing a vinyl group to the terminal and/or side chain of polydimethylsiloxane, reacts with hydrosiloxane, and hardens it. Hardening can use platinum catalyst. For example, it can be hardened at a hardening temperature of about 100°C for several tens of seconds to several minutes. The thickness of the
剝離層24例如亦可包含(甲基)丙烯酸酯成分與(甲基)丙烯酸酯改性矽酮之硬化物。此種硬化物可由紫外線硬化,故可加大剝離層24之厚度。因此,例如於基材膜22包含填料之情形時,可覆蓋由填料引起之突起而使剝離層24之表面平滑。該情形時,剝離層24之厚度可為300~3000 nm。The
亦可使用彼此不相容之(甲基)丙烯酸酯單體與(甲基)丙烯酸酯改性矽酮油。將該等與反應起始劑一併混合至溶劑中,塗佈於基材膜22之後,使溶劑乾燥。以此方式,亦可於使矽酮改性矽酮油定位於表面附近之狀態下,藉由紫外線進行硬化而形成剝離層24。作為(甲基)丙烯酸酯改性矽酮油可使用周知者。例如可列舉信越化學工業股份公司製造之X-22-164A、X-22-164B、X-22-174DX、X-22-2445(均為商品名)等。It is also possible to use (meth)acrylate monomers and (meth)acrylate modified silicone oils that are incompatible with each other. These are mixed with a reaction initiator in a solvent, and after apply|coating to the
剝離膜20之剝離層24之表面(剝離面)平滑為佳。具體而言,剝離層24之表面粗糙度(Rp)較佳為100 nm以下,更佳為50 nm以下。本實施方式之剝離層24之表面粗糙度(Rp)為JIS B 0601-2001所規定之最大凸起高度,可使用掃描型白色干涉顯微鏡或接觸式等周知之表面粗糙度計而測定。It is preferable that the surface (release surface) of the
剝離膜20之寬度方向之厚度變動幅度較佳為0.5 μm以下,更佳為0.4 μm以下,進而佳為0.3 μm以下。特佳為0.2 μm以下。藉由減小該變動幅度,於將剝離膜20纏繞於卷芯10而形成剝離膜卷100時,由剝離膜20之厚度不同而產生之壓力差變小,從而可充分抑制卷芯10附近之剝離膜20變形。The thickness fluctuation range in the width direction of the
本發明中,於捲出及捲取剝離膜時,將搬送剝離膜之方向稱為長度方向,將與剝離膜之長度方向正交之方向稱為剝離膜之寬度方向。本發明之剝離膜之寬度方向之厚度變動幅度,為剝離膜20之寬度方向之兩端間之剝離膜之厚度之最大值與最小值之差。其以如下方式求出。In the present invention, when unwinding and winding the release film, the direction in which the release film is conveyed is referred to as the longitudinal direction, and the direction orthogonal to the longitudinal direction of the release film is referred to as the width direction of the release film. The width of the thickness variation in the width direction of the release film of the present invention is the difference between the maximum value and the minimum value of the thickness of the release film between both ends in the width direction of the
於剝離膜20設置基準點,沿寬度方向設定複數個測定剝離膜之厚度之位置。測定之位置之間隔適當設定即可,剝離膜之厚度實質上難以急遽變化,故只要設為1 mm至10 mm左右之間隔即可。又,基準點例如可設為剝離膜之側端。於各個測定位置測定剝離膜之厚度並且使膜沿長度方向適當移動,以相同方式適時測定剝離膜之厚度。使用於寬度方向上在相同位置測定之複數個長度方向之厚度測定值而算出平均值,對寬度方向之各個測定位置算出之剝離膜厚度之平均值中最大值與最小值之差成為厚度變動幅度。A reference point is set on the
作為厚度之測定方法,可列舉使用接觸式厚度測定器、光學式厚度測定器、靜電電容式厚度測定器、及使用有β射線或螢光X射線等之放射線式厚度測定器等方法、以及藉由顯微鏡觀察而測定剝離膜20之剖面之方法等。若使用接觸式厚度測定器,則可直接測定剝離膜20之厚度變動。又,可以相同方法或不同方法分別測定基材膜22、與剝離層24之厚度變動幅度,並將各自之厚度合計作為剝離膜20之厚度。例如,亦可以放射線式膜厚計測定基材膜22之厚度,利用自分光光度求出之光學式測定而測定剝離層24之厚度,將各自之厚度變動幅度合計而作為剝離膜20之厚度變動幅度。再者,光學式厚度測定器只要適當設定測定點直徑即可,亦可設為0.2 m~2 mm左右。As a method for measuring thickness, methods using a contact thickness measuring device, an optical thickness measuring device, an electrostatic capacitance thickness measuring device, and a radiation thickness measuring device using beta rays, fluorescent X-rays, etc., and methods using The method of measuring the cross section of the
又,亦可於塗佈裝置或切斷裝置等之線內設置厚度測定器,逐次測定厚度。藉由以光學式或放射線式進行將測定器設置於線內之厚度測定,而可防止測定器與剝離膜20之接觸。藉此,可抑制損傷等,從而充分維持剝離膜卷之品質。藉由於塗佈線或切斷線內設置厚度測定器,且於剝離膜20搬送時將厚度測定器沿寬度方向來回移動並進行測定而可遍及剝離膜20之全長測量厚度。Moreover, a thickness measuring device may be installed in the line of a coating apparatus, a cutting apparatus, etc., and thickness may be measured successively. By carrying out the thickness measurement in which the measuring device is installed in the line by an optical type or a radiation type, the contact between the measuring device and the
切斷前剝離膜之寬度例如可為1~2 m。切斷前之剝離膜卷藉由將剝離膜纏繞於卷芯而製造。此時,可將剝離膜之剝離面側作為內側及外側之任一者而纏繞於卷芯。切斷前之剝離膜亦可沿長度方向切斷並纏繞於一個或複數個卷芯10。藉此,可將剝離膜20調整為適當之寬度。剝離膜之切斷方法適當選擇即可。例如,可使用具有上刀輥及下刀輥之切斷裝置進行切斷。上刀輥可沿其旋轉軸方向以特定間隔安裝複數片上刀。上刀輥之上刀可與下刀輥嚙合。The width of the peeling film before cutting may be, for example, 1 to 2 m. The release film roll before cutting is manufactured by winding the release film around the core. In this case, the release surface side of the release film may be wound around the core as either the inner side or the outer side. The release film before cutting can also be cut along the length direction and wound around one or a plurality of
將自切斷前之剝離膜卷拉出之剝離膜輸送至切斷裝置之上刀輥與下刀輥之間。切斷裝置中,上刀輥與下刀輥彼此朝相反方向旋轉而將剝離膜切斷。切斷後,剝離膜再次捲繞於卷芯而成為一實施方式之剝離膜卷100(切斷後)。朝卷芯10之捲取可適當調節張力,又,可將剝離面側作為內側、外側之任一者而纏繞於卷芯10。為了抑制運輸時之捲繞偏移,亦可增強開始捲繞之張力,並慢慢減弱。亦可促進藉由接觸輥而纏繞之剝離膜20之間之空氣之排出。The peeling film pulled out from the peeling film roll before cutting is conveyed between the upper knife roll and the lower knife roll of the cutting device. In the cutting device, the upper blade roll and the lower blade roll rotate in opposite directions to each other to cut the release film. After cutting, the release film is wound around the core again to be the
卷芯10之外徑可為170 mm以下,亦可為100 mm以下。藉此,可減小剝離膜卷100之尺寸,降低設置空間及運輸成本。The outer diameter of the core 10 may be 170 mm or less, or 100 mm or less. Thereby, the size of the peeling
捲繞於卷芯10之剝離膜20之長度可為4000 m以上,亦可為5000 m以上,還可為6000 m以上。藉此,可降低剝離膜卷100之更換頻率,充分提高陶瓷坯片及陶瓷零件等各種製品之生產效率。The length of the
剝離膜卷100中,卷芯10之表面粗糙度(Rp)充分小,故即便於卷芯10附近,亦可抑制剝離膜20之變形。因此,於製作剝離膜卷100時可加大剝離膜20之捲取力。藉此,可充分抑制於運輸中剝離膜卷100崩塌、或產生捲繞偏移。In the
圖3係本發明之一實施方式之陶瓷零件片材之剖視圖。圖3之陶瓷零件片材40之製造方法具有以下步驟,即,於自剝離膜卷拉出之剝離膜20之剝離層24之表面24a,使用包含陶瓷粉末之漿料與電極漿料形成包含陶瓷坯片32及電極坯片34之坯片30。3 is a cross-sectional view of a ceramic component sheet according to an embodiment of the present invention. The manufacturing method of the
陶瓷坯片32係可塗佈含有陶瓷粉末之陶瓷漿料並使其乾燥而形成。電極坯片34可於陶瓷坯片32上塗佈電極漿料並使其乾燥而形成。The ceramic
例如若為積層陶瓷電容器,則可將介電原料(陶瓷粉末)與有機媒劑混練而製備陶瓷漿料。作為介電原料,可列舉藉由煅燒而成為複合氧化物或氧化物之各種化合物。例如,可自碳酸鹽、硝酸鹽、氫氧化物、有機金屬化合物等適當選擇使用。介電原料係平均粒徑為4 μm以下,較佳為0.1~3.0 μm之粉末。For example, in the case of a multilayer ceramic capacitor, a ceramic slurry can be prepared by kneading a dielectric raw material (ceramic powder) and an organic vehicle. As a dielectric raw material, various compounds which become composite oxides or oxides by firing can be mentioned. For example, carbonates, nitrates, hydroxides, organometallic compounds and the like can be appropriately selected and used. The dielectric raw material is a powder with an average particle size of 4 μm or less, preferably 0.1 to 3.0 μm.
電極漿料例如可將選自由各種導電性金屬及合金等導電體材料、以及與各種氧化物、有機金屬化合物、及樹脂鹽酸等煅燒後成為導電體材料之材料等所組成之群中之至少一者、與有機媒劑混練而製備成。作為製造電極漿料時使用之導電體材料,較佳為使用Ni金屬、Ni合金、或該等之混合物。為了提高接著性,電極漿料亦可包含可塑劑。作為可塑劑,可列舉鄰苯二甲酸丁苄酯(BBP)等鄰苯二甲酸酯、己二酸、磷酸酯、二醇類等。The electrode paste can be, for example, at least one selected from the group consisting of conductive materials such as various conductive metals and alloys, and materials that become conductive materials after calcination with various oxides, organometallic compounds, and resin hydrochloric acid, etc. It is prepared by mixing with organic media. As the conductor material used in the production of the electrode paste, Ni metal, Ni alloy, or a mixture thereof is preferably used. In order to improve adhesion, the electrode paste may also contain a plasticizer. As a plasticizer, phthalates, such as butyl benzyl phthalate (BBP), adipic acid, phosphoric acid ester, glycols, etc. are mentioned.
陶瓷漿料及電極漿料中包含之有機媒劑係將黏合劑樹脂溶解於有機溶劑中而製備成。作為用於有機媒劑之黏合劑樹脂,可列舉例如乙基纖維素、丙烯酸系樹脂、丁醛系樹脂、聚乙烯醇縮醛、聚乙烯醇、聚烯烴、聚胺基甲酸酯、聚苯乙烯、及該等之共聚物等。該等之中,較佳為丁醛系樹脂,具體而言使用聚乙烯丁醛系樹脂。藉由使用丁醛系樹脂而可提高陶瓷坯片之機械強度。陶瓷漿料及電極漿料之一者或兩者視需要亦可含有選自由各種分散劑、可塑劑、除靜電劑、介電體、玻璃料、絕緣體等所組成之群中之至少一種添加物。The organic vehicle contained in the ceramic slurry and the electrode slurry is prepared by dissolving a binder resin in an organic solvent. Examples of the binder resin used for the organic vehicle include ethyl cellulose, acrylic resin, butyral resin, polyvinyl acetal, polyvinyl alcohol, polyolefin, polyurethane, polyphenylene Ethylene, and their copolymers, etc. Among these, butyral-based resins are preferred, and polyvinyl butyral-based resins are specifically used. The mechanical strength of the ceramic green sheet can be improved by using the butyraldehyde-based resin. One or both of the ceramic paste and the electrode paste may also contain at least one additive selected from the group consisting of various dispersants, plasticizers, antistatic agents, dielectrics, glass frits, insulators, etc. .
將上述陶瓷漿料例如使用刮刀裝置等塗佈於剝離膜20之剝離層24之表面24a。然後,使塗佈之陶瓷漿料於乾燥裝置內例如以50~100℃之溫度乾燥1~20分鐘而形成陶瓷坯片32。陶瓷坯片32與乾燥前相比收縮至5~25%。The said ceramic slurry is apply|coated to the
其後,例如使用網版印刷裝置,於陶瓷坯片32之表面32a上以成為特定圖案之方式印刷上述電極漿料。使所印刷之電極漿料於乾燥裝置內例如以50~100℃之溫度乾燥1~20分鐘而形成電極坯片34。以此方式,可獲得於剝離膜20之剝離層24上依序積層有陶瓷坯片32與電極坯片34之陶瓷零件片材40。Then, the above-mentioned electrode paste is printed on the
若剝離膜卷100之剝離膜20之厚度變動幅度變大,則陶瓷坯片32之厚度變動變大。自剝離膜卷100拉出之剝離膜20於卷芯10附近變形較小,且剝離膜20之厚度變動幅度亦較小,故可形成卷芯10附近之剝離膜20之厚度變動幅度亦充分降低之陶瓷坯片32。When the thickness fluctuation range of the
由於卷芯10附近之剝離膜20之厚度變動亦得以抑制,故例如亦可直至距卷芯10側之剝離膜20之後端300 m以內之部分為止形成包含陶瓷坯片32及電極坯片34之坯片30。亦可直至距該後端250 m以內之部分、或200 m以內之部分形成坯片30。如此,直至卷芯10附近之剝離片材12均可有效活用,故可降低製造成本,並且減少剝離膜卷100之更換頻率而提高坯片30之生產效率。Since the thickness variation of the
陶瓷零件片材40中,包含陶瓷坯片32及電極坯片34之坯片30之厚度變動幅度得以充分降低。使用此種陶瓷零件片材40製作之陶瓷零件之可靠性優異。又,此種陶瓷零件片材40及陶瓷零件可以較低之製造成本製造。In the
陶瓷坯片32及電極坯片34之厚度分別可為1.0 μm以下。如此即便厚度較小亦可抑制厚度變動,故可獲得具有較高可靠性之陶瓷零件。本發明之陶瓷零件片材並不限定於圖3者,例如,亦可不具有電極坯片,僅包含陶瓷坯片32。The thickness of the ceramic
本發明之一實施方式之陶瓷零件之製造方法具有:積層步驟,其係準備複數個陶瓷零件片材,將複數個陶瓷零件片材之坯片積層而獲得積層體;煅燒步驟,其係將積層體煅燒而獲得燒結體;及電極形成步驟,其係於該燒結體形成端子電極而獲得積層陶瓷電容器。A method of manufacturing a ceramic part according to an embodiment of the present invention includes: a lamination step of preparing a plurality of ceramic part sheets, and laminating green sheets of the plurality of ceramic part sheets to obtain a laminate; and a calcination step of laminating the laminate A sintered body is obtained by calcining the body; and an electrode forming step is to form a terminal electrode on the sintered body to obtain a multilayer ceramic capacitor.
圖4係表示以上述製造方法製造之積層陶瓷電容器之一例之剖視圖。積層陶瓷電容器90具備內層部92、及沿積層方向夾隔該內層部92之一對外層部93。積層陶瓷電容器90於側面具有端子電極95。FIG. 4 is a cross-sectional view showing an example of a multilayer ceramic capacitor manufactured by the above-mentioned manufacturing method. The multilayer
內層部92具有複數層(本例中為13層)陶瓷層96、及複數層(本例中為12層)內部電極層94。陶瓷層96與內部電極層94交替積層。內部電極層94與端子電極95電性連接。外層部93由陶瓷層形成。該陶瓷層例如可以與陶瓷坯片32相同之方式形成。The
作為積層步驟之一例,將圖3所示之陶瓷零件片材40之剝離膜20剝離而獲得坯片30。將該坯片30之一面30b積層於外層用坯片。自另一陶瓷零件片材40將另一剝離膜20剝離而獲得另一坯片30,將最初剝離後之坯片之電極坯片34與另一坯片30之30b以相向方式積層。其後,反覆執行該順序而將坯片30積層,藉此可獲得積層體。即,該積層步驟中,將剝離膜20剝離而獲得坯片30並依序將坯片30積層。藉由反覆執行複數次該順序而形成積層體。最後亦可進行外層用坯片之積層。As an example of the lamination step, the
積層體中之坯片之積層片數並未特別限制,例如,可為數十層至數百層。於積層體之與積層方向正交之兩端面,亦可設置未形成電極層之較厚之外層用坯片。於形成積層體之後,亦可將積層體切斷而製成生片(greenchip)。The number of laminated sheets of the green sheets in the laminated body is not particularly limited, for example, it may be several tens to hundreds of layers. On both end surfaces of the laminated body orthogonal to the lamination direction, green sheets for thick outer layers on which no electrode layers are formed may be provided. After the layered body is formed, the layered body may be cut to form a green chip.
於煅燒步驟中,將於積層步驟獲得之積層體(生片)煅燒而獲得燒結體。煅燒條件以1100~1300℃、於加濕之氮氣與氫氣之混合氣體等氣體氛圍中進行即可。但是,煅燒時氣體氛圍中之氧分壓較佳為10-2 Pa以下,更佳為10-2 ~10-8 Pa。再者,於煅燒前,較佳為實施積層體之脫黏合劑處理。脫黏合劑處理可於一般之條件下進行。例如,於使用Ni或Ni合金等卑金屬作為內部電極層之導電體材料之情形時,較佳為以200~600℃進行。In the firing step, the layered body (green sheet) obtained in the layering step is fired to obtain a sintered body. The calcination conditions may be carried out at 1100 to 1300° C. in a gas atmosphere such as a humidified mixed gas of nitrogen and hydrogen. However, the oxygen partial pressure in the gas atmosphere during calcination is preferably 10 -2 Pa or less, more preferably 10 -2 to 10 -8 Pa. Furthermore, before calcination, it is preferable to perform the debinder process of a laminated body. The debinder treatment can be carried out under normal conditions. For example, when a base metal such as Ni or a Ni alloy is used as the conductor material of the internal electrode layer, the temperature is preferably 200 to 600°C.
於煅燒後,為了使構成燒結體之介電層再氧化,亦可進行熱處理。熱處理中之保持溫度或最高溫度較佳為1000~1100℃。熱處理時之氧分壓較佳為較煅燒時之還原氣體氛圍高之氧分壓,更佳為10-2 Pa~1 Pa。較佳為對以此方式獲得之燒結體例如實施滾筒研磨、以噴砂等實施端面研磨。After calcination, a heat treatment may be performed in order to reoxidize the dielectric layer constituting the sintered body. The holding temperature or the maximum temperature in the heat treatment is preferably 1000 to 1100°C. The oxygen partial pressure during heat treatment is preferably a higher oxygen partial pressure than the reducing gas atmosphere during calcination, more preferably 10 -2 Pa to 1 Pa. Preferably, the sintered body obtained in this way is subjected to, for example, barrel grinding, and face grinding by sandblasting or the like.
電極形成步驟中,於燒結體之側面上燒附端子電極用漿料而形成端子電極95,藉此可獲得圖4所示之積層陶瓷電容器90。該積層陶瓷電容器90之製造方法中,可使用形成於剝離膜卷100之卷芯10附近之剝離膜20上之坯片30而製造積層陶瓷電容器90。剝離膜卷100中,卷芯10附近之剝離膜20之厚度變動幅度得以充分降低,故坯片30之厚度變動幅度亦可充分降低。因此,形成於卷芯10附近之剝離膜20之坯片30亦可用於積層陶瓷電容器90之製造。In the electrode formation step, the terminal electrode paste is baked on the side surface of the sintered body to form the
此種積層陶瓷電容器90可抑制耐電壓之降低,可靠性優異。因此,根據上述製造方法,可以較高之良率製造可靠性優異之積層陶瓷電容器90。又,亦可使用先前未使用之剝離膜20,故可降低製造成本。Such a multilayer
以上,說明了若干實施方式,但本發明絲毫不限定於上述實施方式。例如,已說明形成積層陶瓷電容器作為陶瓷零件之例,但本發明之陶瓷零件並不限定於積層陶瓷電容器,例如亦可為其他陶瓷零件。陶瓷零件例如亦可為變阻器、或積層電感器。 實施例As mentioned above, although some embodiment was demonstrated, this invention is not limited to the said embodiment at all. For example, an example of forming a multilayer ceramic capacitor as a ceramic component has been described, but the ceramic component of the present invention is not limited to a multilayer ceramic capacitor, and may be other ceramic components, for example. The ceramic part may be, for example, a varistor or a multilayer inductor. Example
參照實施例及比較例更詳細地說明本發明之內容,但本發明並非限定於下述實施例。The content of the present invention will be described in more detail with reference to Examples and Comparative Examples, but the present invention is not limited to the following Examples.
(實施例1) 為製作剝離膜,按以下順序製備剝離劑溶液。相對於壬二醇二丙烯酸酯100質量份,準備丙烯酸酯改性矽酮油(商品名:X-22-2445,信越化學工業股份公司製造)0.415質量份、甲基乙基酮100質量份、及甲苯100質量份。將該等放入金屬製容器中並攪拌混合,獲得無色透明之溶液。(Example 1) To make a release film, a release agent solution was prepared in the following procedure. With respect to 100 parts by mass of nonanediol diacrylate, acrylate-modified silicone oil (trade name: X-22-2445, manufactured by Shin-Etsu Chemical Co., Ltd.) 0.415 parts by mass, 100 parts by mass of methyl ethyl ketone, and 100 parts by mass of toluene. These were put into a metal container and stirred and mixed to obtain a colorless and transparent solution.
於上述溶液中,添加反應起始劑(商品名:Omnirad127,IGM Rasins B.V.製造)2.5質量份而製備塗佈液。自塗佈裝置之狹縫擠出塗佈液而塗佈於寬度1100 mm之雙軸延伸聚對苯二甲酸乙二酯膜(PET膜,厚度:31 μm,寬度方向之厚度變動幅度:0.46 μm)之一面,吹30秒溫度80℃之熱風而使甲基乙基酮及甲苯蒸發。以此方式於PET膜上形成塗佈層。To the above solution, 2.5 parts by mass of a reaction initiator (trade name: Omnirad127, manufactured by IGM Rasins B.V.) was added to prepare a coating liquid. The coating liquid was extruded from the slit of the coating device and coated on a biaxially stretched polyethylene terephthalate film (PET film, thickness: 31 μm, width direction thickness: 0.46 μm) with a width of 1100 mm ), blowing hot air at a temperature of 80° C. for 30 seconds to evaporate methyl ethyl ketone and toluene. In this way, a coating layer was formed on the PET film.
其次,於氧濃度100 ppm之氮氣氛圍下照射紫外線而使塗佈層硬化,形成具有剝離功能之剝離層。以此方式獲得於PET膜之一面具有剝離層之剝離膜。Next, ultraviolet rays are irradiated in a nitrogen atmosphere with an oxygen concentration of 100 ppm to harden the coating layer to form a peeling layer with a peeling function. In this way, a release film having a release layer on one side of the PET film was obtained.
按以下順序測定剝離膜之厚度。於塗佈裝置之紫外線硬化部與剝離膜之捲取機之間設置光學式厚度測定器而測定剝離膜之厚度。厚度測定器分別具備測定波長域互不相同之剝離層之厚度測定用檢測部、及PET膜之厚度測定用檢測部。再者,測定點直徑設為1 mm,以剝離膜之單一之側端為基準且以4 mm間隔設定測定位置。一面將該等檢測部沿寬度方向移動,一面於寬度方向上以4 mm間隔分別測定剝離層及PET膜之厚度。將由光學式厚度測定器求出之剝離層與PET膜之各測定值相加作為剝離膜之厚度。又,一面搬送剝離膜且使厚度測定器來回移動,一面持續進行厚度測定。藉此,遍及剝離膜之全長測定剝離膜之厚度。剝離層之厚度之平均值為0.5 μm。The thickness of the release film was measured in the following procedure. An optical thickness measuring device was installed between the ultraviolet curing part of the coating device and the winder of the peeling film, and the thickness of the peeling film was measured. Each of the thickness measuring instruments is provided with a detection part for thickness measurement for measuring the peeling layers having mutually different wavelength ranges, and a detection part for thickness measurement of a PET film. In addition, the diameter of the measurement point was set to 1 mm, and the measurement positions were set at intervals of 4 mm on the basis of a single side end of the release film. The thicknesses of the peeling layer and the PET film were measured at intervals of 4 mm in the width direction while moving these detection units in the width direction. Each measured value of the peeling layer and the PET film calculated|required by the optical thickness measuring apparatus was added together, and it was set as the thickness of a peeling film. Moreover, while conveying a peeling film, the thickness measurement device was moved back and forth, and the thickness measurement was continued. Thereby, the thickness of a peeling film was measured over the whole length of a peeling film. The average value of the thickness of the peeling layer was 0.5 μm.
使用掃描型白色干涉顯微鏡(裝置名:VS1540,股份公司Hitachi High-Tech Science製造),測定剝離膜之剝離層之表面粗糙度(Rp)。其結果,剝離層之表面粗糙度(Rp)為30 nm。再者,所製作之剝離膜之全長為8500 m。Using a scanning white interference microscope (device name: VS1540, manufactured by Hitachi High-Tech Science Co., Ltd.), the surface roughness (Rp) of the release layer of the release film was measured. As a result, the surface roughness (Rp) of the peeling layer was 30 nm. In addition, the whole length of the produced release film was 8500 m.
使用切斷機將剝離膜沿長度方法切斷,切下寬度200 mm之尺寸。將該剝離膜以剝離面成為外側之方式捲取於卷芯。捲取係以使施加至所捲取之剝離膜之張力自開始捲繞至結束捲繞慢慢變弱之斜張力進行。以此方式,獲得剝離膜之捲繞長度為4000 m之5條剝離膜卷。再者,將切斷前之剝離膜之自兩端朝內側50 mm之部分切斷並廢棄。Use a cutter to cut the release film along the length, and cut out a size of 200 mm in width. This release film was wound up on the core so that the release surface was outside. The winding is performed with an oblique tension in which the tension applied to the release film to be wound is gradually weakened from the start of the winding to the end of the winding. In this way, 5 release film rolls with a roll length of the release film of 4000 m were obtained. Furthermore, the part of 50 mm from both ends of the peeling film before cutting was cut|disconnected and discarded.
針對切斷之各個剝離膜卷,使以上述順序測定之剝離膜之厚度資料對應於各個剝離膜之位置而進行計算,對每一剝離膜卷求出寬度方向之厚度變動幅度。For each peeling film roll that was cut, the thickness data of the peeling film measured in the above-mentioned procedure were calculated according to the position of each peeling film, and the thickness fluctuation range in the width direction was obtained for each peeling film roll.
用於捲取之纖維強化塑膠製之卷芯係使環氧樹脂含浸於玻璃纖維,加壓並積層成形而成者。卷芯之內徑為76.2 mm、及外徑為88.2 mm。使用研磨紙進行卷芯外周面之研磨。研磨係將研磨紙自粗眼紙階段性地變為細眼紙而進行。以此方式進行表面處理,調整卷芯外周面之表面粗糙度。Fiber-reinforced plastic cores for winding are made by impregnating glass fibers with epoxy resin, pressurizing them, and laminating them. The inner diameter of the winding core is 76.2 mm, and the outer diameter is 88.2 mm. Use abrasive paper to grind the outer peripheral surface of the core. The polishing system is performed by gradually changing the polishing paper from coarse eye paper to fine eye paper. Surface treatment is performed in this way to adjust the surface roughness of the outer peripheral surface of the core.
於表面處理後,卷芯外周面之表面粗糙度Rp及Rv分別為1.5 μm及3.0 μm。該表面粗糙度(Rp及Rv)係使用股份公司三豐製造之表面粗糙度測定機(商品名:SJ-210)按以下順序測定。將寬度202 mm之卷芯之外周面沿著與剝離膜之寬度方向對應之方向劃分成14塊,測定各塊之表面粗糙度。卷芯每旋轉1/4圈均要反覆進行此種測定,共計於56塊測定表面粗糙度。56塊各自之Rp、Rv中,將各自之最大值作為卷芯外周面之表面粗糙度Rp、Rv。結果如表1所示。After the surface treatment, the surface roughness Rp and Rv of the outer peripheral surface of the core were 1.5 μm and 3.0 μm, respectively. The surface roughness (Rp and Rv) was measured by the following procedure using the surface roughness measuring machine (trade name: SJ-210) manufactured by Mitutoyo Co., Ltd. The outer peripheral surface of the core with a width of 202 mm was divided into 14 pieces along the direction corresponding to the width direction of the release film, and the surface roughness of each piece was measured. This measurement is repeated every 1/4 rotation of the core, and the surface roughness is measured on a total of 56 pieces. Among the 56 pieces of Rp, Rv, the maximum value of each was used as the surface roughness Rp, Rv of the outer peripheral surface of the core. The results are shown in Table 1.
自將剝離膜切斷獲得之剝離膜卷中,選出1條寬度方向之厚度變動幅度為0.5 μm之剝離膜卷。自該剝離膜卷拉出剝離膜,按以下順序製作介電片材作為陶瓷零件片材。分別準備作為陶瓷粉末之BaTiO3 系之粉末、作為有機黏合劑之聚乙烯丁醛(PVB)、及作為溶媒之甲醇。其次,相對陶瓷粉末100質量份而調配10質量份之有機黏合劑、及165質量份之溶媒,以球磨機混練而獲得介電漿料。From the release film roll obtained by cutting the release film, one release film roll having a thickness variation range of 0.5 μm in the width direction was selected. The release film was pulled out from this release film roll, and a dielectric sheet was produced as a ceramic component sheet in the following procedure. A BaTiO3 - based powder as a ceramic powder, polyvinyl butyral (PVB) as an organic binder, and methanol as a solvent were prepared, respectively. Next, 10 parts by mass of an organic binder and 165 parts by mass of a solvent were blended with respect to 100 parts by mass of the ceramic powder, and kneaded with a ball mill to obtain a dielectric slurry.
將剝離膜卷置於塗佈機,將介電漿料塗佈於自剝離膜卷拉出之剝離膜之剝離層側,於剝離膜上形成介電坯片。介電坯片之厚度設為0.9 μm。該厚度係使用設置於生產線上之穿透式X射線膜厚計(商品名:AccureX,(股)FUTEC製造)連續測定。於捲繞於卷芯之剝離膜剩餘100 m之狀態下結束介電漿料之塗佈。其後,於未塗佈之狀態下自卷芯拉出剝離膜而使其於塗佈機內移行,於卷芯上剝離膜剩餘70 m之狀態下停止移行。根據由穿透式X射線膜厚計測定之資料來調查介電坯片厚度之平均值及厚度之變動幅度(厚度變動幅度)。再者,厚度變動幅度係根據厚度之平均值、最大值及最小值而求出。即,將最大值-平均值之絕對值與最小值-平均值之絕對值中較大之值作為厚度變動幅度。The release film roll is placed in a coating machine, and the dielectric slurry is coated on the release layer side of the release film pulled out from the release film roll, and a dielectric blank is formed on the release film. The thickness of the dielectric green sheet was set to 0.9 μm. The thickness was continuously measured using a transmission-type X-ray film thickness meter (trade name: AccureX, manufactured by FUTEC) installed on a production line. The coating of the dielectric paste was completed in a state where 100 m of the release film wound around the core remained. Then, the release film was pulled out from the core in an uncoated state and moved in the coating machine, and the movement was stopped in a state where the release film remained on the core by 70 m. The average value of the thickness of the dielectric green sheets and the variation width of the thickness (thickness variation width) were investigated based on the data measured by the transmission type X-ray film thickness meter. In addition, the thickness fluctuation range was calculated|required from the average value, the maximum value, and the minimum value of thickness. That is, the larger value of the absolute value of the maximum value and the average value and the absolute value of the minimum value and the average value is used as the thickness variation range.
自開始塗佈介電漿料之剝離膜之前端側至剩餘500 m之部分為止之介電坯片之厚度變動幅度為0.03 μm。另一方面,自剩餘500 m至剩餘100 m為止之部分(剝離膜之後端側之部分)之介電坯片之厚度變動幅度為0.04 μm。將各種條件及結果彙總示於表1。The thickness variation of the dielectric green sheet was 0.03 μm from the front end side of the release film where the dielectric paste was started to the remaining 500 m portion. On the other hand, the thickness variation of the dielectric green sheet in the portion from the remaining 500 m to the remaining 100 m (the portion on the rear end side of the peeling film) was 0.04 μm. Various conditions and results are summarized in Table 1.
(實施例2~3) 除調整卷芯外周面之研磨條件,改變卷芯外周面之表面粗糙度以外,以與實施例1相同之方式製作剝離膜卷。然後,以與實施例1相同之方式於自剝離膜卷拉出之剝離膜上形成介電坯片,調查厚度變動幅度。結果如表1所示。(Examples 2 to 3) A release film roll was produced in the same manner as in Example 1, except that the grinding conditions of the outer peripheral surface of the core were adjusted and the surface roughness of the outer peripheral surface of the core was changed. Then, in the same manner as in Example 1, a dielectric green sheet was formed on the release film drawn out from the release film roll, and the thickness fluctuation range was investigated. The results are shown in Table 1.
(實施例4,5) 將熔融之聚對苯二甲酸乙二酯自設置有狹縫之噴嘴澆鑄至冷卻轉筒而製作PET膜。此時,藉由更精密地調整該狹縫之間隙,而獲得寬度方向之厚度變動幅度與實施例1不同之PET膜。除使用該PET膜以外,以與實施例1相同之方式製作剝離膜,獲得寬度方向之厚度變動幅度相較實施例1小之剝離膜卷。然後,以與實施例1相同之方式,於自剝離膜卷拉出之剝離膜上形成介電坯片,調查介電坯片之厚度變動幅度。結果如表1所示。(Example 4, 5) A PET film was produced by casting molten polyethylene terephthalate from a nozzle provided with a slit to a cooling drum. At this time, by adjusting the gap of the slit more precisely, a PET film whose thickness variation range in the width direction was different from that of Example 1 was obtained. A release film was produced in the same manner as in Example 1 except that this PET film was used, and a release film roll having a smaller thickness variation in the width direction than in Example 1 was obtained. Then, in the same manner as in Example 1, a dielectric green sheet was formed on the release film pulled out from the release film roll, and the thickness fluctuation range of the dielectric green sheet was investigated. The results are shown in Table 1.
(實施例6) 以與實施例1、4、5相同之方式製作PET膜。此時,並不相較實施例1、4、5更精密地進行狹縫間隙之調整而製作PET膜。藉此,獲得寬度方向之厚度變動幅度與實施例1、4、5不同之PET膜。除使用該PET膜以外,以與實施例1相同之方式製作剝離膜,獲得寬度方向之厚度變動幅度相較實施例1大之剝離膜卷。以與實施例1相同之方式,於自剝離膜卷拉出之剝離膜上形成介電坯片,調查介電坯片之厚度變動幅度。結果如表1所示。(Example 6) PET films were produced in the same manner as in Examples 1, 4, and 5. At this time, the slit gap was not adjusted more precisely than in Examples 1, 4, and 5, and a PET film was produced. Thereby, the PET film whose thickness fluctuation range in the width direction was different from that of Examples 1, 4, and 5 was obtained. A release film was produced in the same manner as in Example 1 except that this PET film was used, and a release film roll having a larger thickness variation in the width direction than in Example 1 was obtained. In the same manner as in Example 1, a dielectric green sheet was formed on the release film pulled out from the release film roll, and the thickness fluctuation range of the dielectric green sheet was investigated. The results are shown in Table 1.
(實施例7) 除代替纖維強化塑膠製之卷芯而使用ABS(丙烯腈-丁二烯-苯乙烯共聚樹脂)製之卷芯以外,以與實施例1相同之方式獲得剝離膜卷。該ABS製之卷芯係利用擠出成形來製作。由於不進行外周面之研磨,故卷芯外周面之表面粗糙度取決於模具之表面形狀。以與實施例1相同之方式於自剝離膜卷拉出之剝離膜上形成介電坯片,調查厚度變動幅度。結果如表1所示。(Example 7) A release film roll was obtained in the same manner as in Example 1, except that a core made of ABS (acrylonitrile-butadiene-styrene copolymer resin) was used instead of the core made of fiber-reinforced plastic. The core made of ABS is produced by extrusion molding. Since the outer peripheral surface is not ground, the surface roughness of the outer peripheral surface of the core depends on the surface shape of the mold. In the same manner as in Example 1, a dielectric green sheet was formed on the release film pulled out from the release film roll, and the thickness fluctuation range was investigated. The results are shown in Table 1.
(實施例8) 除使用與實施例2相同之卷芯、使用與實施例4相同之剝離膜、及將捲繞長度設為8000 m以外,以與實施例1相同之方式製作剝離膜。除根據捲繞剝離膜之長度而相較實施例1更長地形成介電坯片以外,以與實施例1相同之方式調查厚度變動幅度。結果如表1所示。(Example 8) A release film was produced in the same manner as in Example 1, except that the same core as in Example 2 was used, the same release film as in Example 4 was used, and the winding length was set to 8000 m. The thickness fluctuation range was investigated in the same manner as in Example 1 except that the dielectric green sheet was formed longer than in Example 1 according to the length of the wound release film. The results are shown in Table 1.
(實施例9) 除使用與實施例3相同之卷芯、使用與實施例4相同之剝離膜、及將捲繞長度設為6000 m以外,以與實施例1相同之方式製作剝離膜。除根據捲繞剝離膜之長度而相較實施例1更長地形成介電坯片以外,以與實施例1相同之方式調查厚度變動幅度。結果如表1所示。(Example 9) A release film was produced in the same manner as in Example 1 except that the same core as in Example 3 was used, the same release film as in Example 4 was used, and the winding length was set to 6000 m. The thickness fluctuation range was investigated in the same manner as in Example 1 except that the dielectric green sheet was formed longer than in Example 1 according to the length of the wound release film. The results are shown in Table 1.
(實施例10) 除使用與實施例3相同之卷芯、使用與實施例5相同之剝離膜、及將捲繞長度設為8000 m以外,以與實施例1相同之方式製作剝離膜。除根據捲繞剝離膜之長度而相較實施例1更長地形成介電坯片以外,以與實施例1相同之方式調查厚度變動幅度。結果如表1所示。(Example 10) A release film was produced in the same manner as in Example 1, except that the same core as in Example 3 was used, the same release film as in Example 5 was used, and the winding length was set to 8000 m. The thickness fluctuation range was investigated in the same manner as in Example 1 except that the dielectric green sheet was formed longer than in Example 1 according to the length of the wound release film. The results are shown in Table 1.
(實施例11) 於實施例1中在自剝離膜卷拉出之剝離膜上形成介電坯片之後,重複利用卷芯而再次製作實施例1之剝離膜卷。於自該剝離膜卷拉出之剝離膜上再次形成介電坯片。如此將剝離膜卷之製作、與自該剝離膜卷拉出之剝離膜上之介電坯片之製作共計反覆進行30次。調查第30次製作之介電坯片之厚度變動幅度。結果如表1所示。(Example 11) After the dielectric blank was formed on the release film pulled out from the release film roll in Example 1, the roll core was reused to produce the release film roll of Example 1 again. A dielectric green sheet is again formed on the release film drawn from the release film roll. In this way, the production of the release film roll and the production of the dielectric green sheet on the release film drawn from the release film roll were repeated 30 times in total. The thickness variation of the dielectric green sheets produced for the 30th time was investigated. The results are shown in Table 1.
(實施例12) 除於向卷芯之捲取中將剝離面作為內側而捲取剝離膜以外,以與實施例1相同之方式製作剝離膜卷。然後,以與實施例1相同之方式於自剝離膜卷拉出之剝離膜上形成介電坯片,調查厚度變動幅度。結果如表1所示。(Example 12) A release film roll was produced in the same manner as in Example 1, except that the release film was wound with the release surface as the inner side in the winding to the core. Then, in the same manner as in Example 1, a dielectric green sheet was formed on the release film drawn out from the release film roll, and the thickness fluctuation range was investigated. The results are shown in Table 1.
(比較例1) 除僅以粗眼之研磨紙進行卷芯外周面之研磨而改變卷芯外周面之表面粗糙度以外,以與實施例1相同之方式製作剝離膜卷。然後,以與實施例1相同之方式於自剝離膜卷拉出之剝離膜上形成介電坯片,調查厚度變動幅度。結果如表1所示。(Comparative Example 1) A release film roll was produced in the same manner as in Example 1, except that only the outer peripheral surface of the core was ground with coarse-grained abrasive paper to change the surface roughness of the outer peripheral surface of the core. Then, in the same manner as in Example 1, a dielectric green sheet was formed on the release film drawn out from the release film roll, and the thickness fluctuation range was investigated. The results are shown in Table 1.
(比較例2) 除使用厚度變動幅度不同之PET膜、及使捲取於卷芯之剝離膜之長度如表1所示變動以外,以與比較例1相同之方式獲得剝離膜卷。以與比較例1相同之方式於自剝離膜卷拉出之剝離膜上,根據捲繞長度而相較比較例1更長地形成介電坯片,調查厚度變動幅度。結果如表1所示。自500 m附近起介電坯片之膜厚變動開始變大,自300 m起膜厚特別大地變動。(Comparative Example 2) A release film roll was obtained in the same manner as in Comparative Example 1, except that a PET film having a different thickness fluctuation range was used, and the length of the release film wound around the core was changed as shown in Table 1. In the same manner as in Comparative Example 1, on the release film drawn from the release film roll, a dielectric green sheet was formed longer than in Comparative Example 1 according to the winding length, and the thickness fluctuation range was investigated. The results are shown in Table 1. The film thickness variation of the dielectric green sheet started to increase from about 500 m, and the film thickness changed particularly greatly from 300 m.
(比較例3) 代替FRP製之卷芯,使用外周面之表面粗糙度為表1所示之電木製之卷芯。除使用該卷芯以外,以與實施例1相同之方式獲得剝離膜卷。以與實施例1相同之方式於自剝離膜卷拉出之剝離膜上形成介電坯片,調查厚度變動幅度。結果如表1所示。自500 m附近起介電坯片之膜厚變動開始變大,自300 m起膜厚特別大地變動。(Comparative Example 3) In place of the core made of FRP, the core of bakelite whose outer peripheral surface roughness is shown in Table 1 was used. A release film roll was obtained in the same manner as in Example 1 except that the roll core was used. In the same manner as in Example 1, a dielectric green sheet was formed on the release film pulled out from the release film roll, and the thickness fluctuation range was investigated. The results are shown in Table 1. The film thickness variation of the dielectric green sheet started to increase from about 500 m, and the film thickness changed particularly greatly from 300 m.
[表1]
比較例1~3中,於卷芯側、即剝離膜之後端側(500 m~100 m),介電坯片之厚度變動幅度變大。將此種介電坯片積層並煅燒而獲得之積層陶瓷電容器中,有產生耐電壓不良之顧慮。另一方面,實施例1~12中,於卷芯側、即剝離膜之後端側(500 m~100 m),亦可使介電坯片之厚度變動幅度減小。將此種介電坯片積層並煅燒而獲得之電容器之耐電壓高,可靠性優異。又,根據實施例11之結果,纖維強化塑膠製之卷芯能夠反覆利用,確認到耐久性亦優異。另一方面,實施例7之ABS製之卷芯雖介電坯片之厚度變動幅度較小,但使用後卷芯變形,難以重複利用。 [產業上之可利用性]In Comparative Examples 1 to 3, on the core side, that is, on the rear end side (500 m to 100 m) of the release film, the thickness fluctuation range of the dielectric green sheet became large. In a multilayer ceramic capacitor obtained by laminating and firing such a dielectric green sheet, there is a concern that a breakdown in withstand voltage will occur. On the other hand, in Examples 1 to 12, on the core side, that is, on the rear end side (500 m to 100 m) of the release film, the thickness fluctuation range of the dielectric green sheet was also reduced. Capacitors obtained by laminating and firing such dielectric green sheets have high withstand voltage and excellent reliability. Moreover, according to the result of Example 11, the core made of fiber-reinforced plastic can be used repeatedly, and it was confirmed that it is excellent also in durability. On the other hand, although the thickness of the core made of ABS in Example 7 has a small variation in the thickness of the dielectric green sheet, the core is deformed after use, making it difficult to reuse. [Industrial Availability]
根據本發明,可提供一種能夠將剝離膜有效活用至卷芯附近為止之剝離膜卷。又,本發明可提供一種藉由使用此種剝離膜卷而能夠以較高之生產效率製造陶瓷零件片材及陶瓷零件之製造方法。又,本發明可提供一種可靠性優異之陶瓷零件片材及陶瓷零件。ADVANTAGE OF THE INVENTION According to this invention, the release film roll which can utilize a release film effectively to the core vicinity can be provided. Moreover, this invention can provide the manufacturing method which can manufacture a ceramic component sheet|seat and a ceramic component with high productivity by using such a peeling film roll. Furthermore, the present invention can provide a ceramic component sheet and ceramic component excellent in reliability.
10:卷芯
20:剝離膜
22:基材膜
24:剝離層
24a:剝離層之表面
30:坯片
30b:坯片之一面
32:陶瓷坯片
32a:陶瓷坯片之表面
34:電極坯片
40:陶瓷零件片材
90:積層陶瓷電容器
92:內層部
93:外層部
94:內部電極層
95:端子電極
96:陶瓷層
100:剝離膜卷10: roll core
20: peel off film
22: substrate film
24:
圖1係一實施方式之剝離膜卷之立體圖。 圖2係表示剝離膜之剖面之一例之剖視圖。 圖3係一實施方式之陶瓷零件片材之剖視圖。 圖4係表示一實施方式之陶瓷零件之剖視圖。FIG. 1 is a perspective view of a release film roll according to one embodiment. FIG. 2 is a cross-sectional view showing an example of a cross-section of the release film. 3 is a cross-sectional view of a ceramic component sheet according to an embodiment. FIG. 4 is a cross-sectional view showing a ceramic part according to an embodiment.
10:卷芯 10: roll core
20:剝離膜 20: peel off film
100:剝離膜卷 100: peel off film roll
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JP2000109274A (en) * | 1998-08-07 | 2000-04-18 | Nitto Shinko Kk | Core of fiberglass reinforced plastics |
KR100766184B1 (en) * | 2003-06-20 | 2007-10-10 | 티디케이가부시기가이샤 | Method of layering green sheet and method of producing laminated ceramic electronic component |
JP4391858B2 (en) * | 2004-03-16 | 2009-12-24 | 三菱樹脂株式会社 | Release film for green sheet molding |
JP5157350B2 (en) * | 2007-09-28 | 2013-03-06 | Tdk株式会社 | Method for producing laminated film and laminated ceramic electronic component |
JP5423975B2 (en) | 2010-03-29 | 2014-02-19 | Tdk株式会社 | Release film, release film roll, ceramic component sheet, and method for producing ceramic component |
KR101997310B1 (en) * | 2012-03-28 | 2019-07-05 | 린텍 가부시키가이샤 | Peeling film for step for producing ceramic green sheet |
JP6091287B2 (en) * | 2013-03-28 | 2017-03-08 | リンテック株式会社 | Release film for green sheet manufacturing |
JP6339809B2 (en) * | 2014-01-17 | 2018-06-06 | リンテック株式会社 | Release film, green sheet manufacturing method, and multilayer ceramic electronic component manufacturing method |
JP7144715B2 (en) * | 2018-03-16 | 2022-09-30 | 東洋紡株式会社 | Release film roll for manufacturing ceramic green sheets |
-
2021
- 2021-02-26 CN CN202180017964.5A patent/CN115210052A/en active Pending
- 2021-02-26 JP JP2022505184A patent/JPWO2021177179A1/ja active Pending
- 2021-02-26 KR KR1020227031939A patent/KR20220141858A/en not_active Application Discontinuation
- 2021-02-26 WO PCT/JP2021/007444 patent/WO2021177179A1/en active Application Filing
- 2021-03-02 TW TW110107287A patent/TWI781540B/en active
Also Published As
Publication number | Publication date |
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JPWO2021177179A1 (en) | 2021-09-10 |
TWI781540B (en) | 2022-10-21 |
KR20220141858A (en) | 2022-10-20 |
CN115210052A (en) | 2022-10-18 |
WO2021177179A1 (en) | 2021-09-10 |
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