CN115127286A - 一种可钢化的高透高强冰箱面板玻璃及其制备方法 - Google Patents

一种可钢化的高透高强冰箱面板玻璃及其制备方法 Download PDF

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CN115127286A
CN115127286A CN202210684029.0A CN202210684029A CN115127286A CN 115127286 A CN115127286 A CN 115127286A CN 202210684029 A CN202210684029 A CN 202210684029A CN 115127286 A CN115127286 A CN 115127286A
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glass
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史亚坤
张舒奕
韩博文
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Henan Province Zhonglian Glass Co ltd
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Abstract

本发明公开了一种可钢化的高透高强冰箱面板玻璃及制备方法,以冰箱面板玻璃的结构为基础,给出了面板玻璃的加工步骤以及其膜系结构、透明隔热涂层和硬质超疏水性透明涂层的施加工艺,该面板玻璃的结构包括两个玻璃基片,其中一个玻璃基片的表面上具有复合膜系,两个玻璃基片与铝合金框架组成中空面板玻璃;复合膜系位于中空面板玻璃的内表面上,中空面板玻璃的外表面上具有透明隔热疏水涂层,该面板玻璃具备良好的隔热、隔音、透光性和低辐射性能,膜系结构被保护,使用寿命延长,玻璃的涂层进一步提高保温性,而且防止玻璃产生起雾、结露或者挂霜的现象,保证透光性,同时增加玻璃表面的硬度,增加耐磨性,防止冰箱内的物品损坏玻璃表面。

Description

一种可钢化的高透高强冰箱面板玻璃及其制备方法
技术领域
本发明涉及冰箱面板玻璃技术领域,特别是一种可钢化的高透高强冰箱面板玻璃及其制备方法。
背景技术
玻璃生产史上,具有两个重大变革意义的壮举是:一、采用锡槽法制备大面积原片玻璃,即浮法玻璃;二、在浮法玻璃上镀制薄膜的玻璃表面处理技术。在浮法玻璃的表面镀制一层具有高的可见光透过率,并且能反射红外线的薄膜可以得到低辐射玻璃,即可钢化Low-E玻璃,在具有透光性和装饰性的基础上,可以为用户带来隔热、保温的附加性能。现在使用最多的是以金属膜为功能膜的多层膜系的镀膜玻璃,除了具备透射可见光和反射红外的特征外,还可以根据对膜层结构进行调整,以整合其他特征:如导电、耐磨等。
镀膜玻璃(Low-E玻璃)以其透光性经常作为冰箱或者冰柜等制冷储存设备门面的玻璃面板使用,具有玻璃面板的冰箱具备外表时尚和易清洗的特点,而且还可以观察到冰箱内部,冰箱的容量也比较大,但是传统的冰箱面板玻璃为了保证良好的透光性,所以一般都要求加工时,玻璃的厚度做的比较薄,导致冰箱面板玻璃在使用时有着如下缺陷:1、玻璃面板表面的强度较差、表面容易刮花,影响美观;2、阻热能力较差,冰箱的保温性不够、节能效果不好;3、在以上基础上,加之因为冰箱内外温差的影响,尤其在夏季或者开关冰箱门次数较多的时候,玻璃面板会起雾、结露或者挂霜,影响透光性和视线。
发明内容
本发明的目的在于提供一种可钢化高透高强冰箱面板镀膜玻璃及其制备方法,以解决玻璃面板的表面强度和阻热能力较差,面板容易刮花且冰箱的保温性不够;加之冰箱内外温差的影响,面板玻璃会起雾、结露或者挂霜,影响透光性和视线的问题。
为解决上述的技术问题,本发明采用以下技术方案:
一种可钢化的高透高强冰箱面板玻璃,包括两个玻璃基片,其中一个所述玻璃基片的表面上具有复合膜系,两个所述玻璃基片与铝合金框架组成中空面板玻璃;其中,
所述复合膜系位于所述中空面板玻璃的中空层;
所述中空面板玻璃的外表面上具有透明隔热疏水涂层;
所述复合膜系的八层膜结构按顺序排列为:以玻璃基片的表面为基础面,依次为底层、电介质层、保护层、功能层、保护层、电介质层、稳定层和强化层;
所述透明隔热疏水涂层包括:分别位于所述中空面板玻璃两外表面的高透性的透明隔热涂层和硬质超疏水性透明涂层。
进一步的技术方案是:所述底层、所述电介质层、所述保护层、所述功能层、所述保护层、所述电介质层、所述稳定层和所述强化层分别对应为SiN膜层、AZO膜层、NiCr膜层、Ag膜层、NiCr膜层、AZO膜层、SiN膜层和ZrO膜层。
进一步的技术方案是:所述玻璃基片的厚度为3-6mm,所述SiN膜层、AZO膜层、NiCr膜层、Ag膜层、NiCr膜层、AZO膜层、SiN膜层和ZrO膜层的膜厚分别对应为26-27nm、13-14nm、0.5-1nm、8-9nm、0.5-1nm、10-11nm、24-25nm和12-13nm。
进一步的技术方案是:所述玻璃基片选用超白玻璃原片。
一种可钢化的高透高强冰箱面板玻璃的制备方法,所述复合膜系采取真空磁控反应溅射方法,按如下步骤完成:
S1、预处理:选取无质量缺陷的所述玻璃基片经过超声清洗、烘干和静电处理,得到面板基材;
S2、镀膜:S1中的一个面板基材进入真空度在5×10-4Pa以下的镀膜室内,依次通过八个靶材,在面板基材表面沉积得到所述复合膜系;
S3、定量裁片:将S2中镀膜的面板基材与S1中未镀膜的面板基材进行一一配对,并按照冰箱面板的规格要求进行切割成相同的小块面板玻璃;
S4、钢化处理:选取S3中镀膜后的小块面板玻璃和未镀膜后的小块面板玻璃,并与内含干燥剂的铝合金框架粘结制备成镀膜面在中空层的中空面板玻璃;
S5、涂层涂覆:
1、通过辊涂、喷涂等方法将玻璃隔热涂料涂覆在于中空面板玻璃的一表面上,干燥后得到透明隔热涂层;
2、通过射频等离子刻蚀、化学气相沉积和溶胶-凝胶等方法在中空面板玻璃的另一表面上制备出高疏水性涂层;
3、在高疏水性涂层上涂刷胶体SiO2粒子液,得到硬质超疏水性透明涂层;
S6、检测入库:以可见光透过率达到78%为标准,耐磨试验机测试实验前后试样的可见光透射比差值的绝对值不大于4%,即为合格品。
进一步的技术方案是:S2中,所述复合膜系通过如下步骤得到:
a、沉积底层:靶材为旋转硅铝靶,溅射功率为287kw,工作气体为氩气,反应气体为氮
气,溅射沉积形成SiN膜层,膜层厚度26-27nm;
b、沉积电介质层:靶材为旋转氧化锌铝靶,溅射功率为20kw,工作气体为氩气,溅射沉
积形成AZO膜层,膜层厚度13-14nm;
c、沉积保护层:靶材为平面镍铬靶,溅射功率为4.5kw,工作气体为氩气,溅射沉积形
成NiCr膜层,膜层厚度0.5-1nm;
d、沉积功能层:靶材为平面银靶,溅射功率为7.3kw,工作气体为氩气,溅射沉积形成Ag膜层,膜层厚度8-9nm;
e、沉积保护层:靶材为平面镍铬靶,溅射功率为4.5kw,工作气体为氩气,溅射沉积形
成NiCr膜层,膜层厚度0.5-1nm;
f、沉积电介质层:靶材为旋转氧化锌铝靶,溅射功率为20kw,工作气体为氩气,溅射沉
积形成AZO膜层,膜层厚度10-11nm;
g、沉积稳定层:靶材为旋转硅铝靶,溅射功率为295kw,工作气体为氩气,反应气体为氮气,溅射沉积形成SiN膜层,膜层厚度24-25nm,
h、沉积强化层:靶材为旋转氧化锆靶,溅射功率为24kw,工作气体为氩气,溅射沉积形成ZrO膜层,膜层厚度12-13nm。
进一步的技术方案是:S2中,各靶材的溅射气氛流量为:
靶材为旋转氧化锌铝靶、平面镍铬靶和平面银靶,氩气为800sccm;
靶材为旋转硅铝靶,氩气为800sccm、氮气为700sccm;
靶材为旋转氧化锆靶,氩气为1050sccm。
进一步的技术方案是:h中,旋转氧化锆靶为旋转锆硅靶。
与现有技术相比,本发明至少能达到以下有益效果之一的是:
本发明还提供一种可钢化的高透高强冰箱面板玻璃及制备方法,以冰箱面板玻璃的结构为基础,给出了面板玻璃的加工步骤以及其膜系结构、透明隔热涂层和硬质超疏水性透明涂层的施加工艺,该方法可以制备出比较薄同时具备着以下优点的面板玻璃:首先,该冰箱面板玻璃具备着良好透光性和低辐射性能,在起到美观装饰的前提下,便于展示冰箱内的物品,同时优良的隔热和隔音性能,有效阻隔冰箱与外界的热交换,起到保温节能的作用;其次,而且面板玻璃镀着的膜系本身也有着较好硬度和附着力,保证其性能稳定,面板玻璃的中空设计,可以将膜系结构进行保护,延长使用寿命;最后,面板玻璃外表面的透明隔热涂层和硬质超疏水性透明涂层,透明隔热涂层可以阻隔冰箱内外的热传递,提高保温性;硬质超疏水性透明涂层有效减少了因为冰箱内外温差和经常开关冰箱门的影响,面板玻璃会起雾、结露或者挂霜的现象,保证透光性,同时硬质超疏水性透明涂层可以增加玻璃表面的硬度,增加耐磨性,防止冰箱内的物品损坏玻璃表面。
附图说明
图1为本发明一种可钢化的高透高强冰箱面板玻璃的结构示意图。
图2为本发明图1的另一个视角的结构示意图。
附图标记:1、玻璃基片;2、复合膜系;21、底层;22、电介质层;23、保护层;24、功能层;25、保护层;26、电介质层;27、稳定层;28、强化层;3、PVB胶膜;4、透明隔热疏水涂层;41、透明隔热涂层;42、硬质超疏水性透明涂层。
具体实施方式
为使本发明实施方式的目的、技术方案和优点更加清楚,下面将结合本发明实施方式中的附图,对本发明实施方式中的技术方案进行清楚、完整地描述,显然,所描述的实施方式是本发明一部分实施方式,而不是全部的实施方式。通常在此处附图中描述和示出的本发明实施方式的组件可以以各种不同的配置来布置和设计。
因此,以下对在附图中提供的本发明的实施方式的详细描述并非旨在限制要求保护的本发明的范围,而是仅仅表示本发明的选定实施方式。基于本发明中的实施方式,本领域普通技术人员在没有作出创造性劳动前提下所获得的所有其他实施方式,都属于本发明保护的范围。
需要说明的是,在不冲突的情况下,本发明中的实施方式及实施方式中的特征可以相互组合。
应注意到:相似的标号和字母在下面的附图中表示类似项,因此,一旦某一项在一个附图中被定义,则在随后的附图中不需要对其进行进一步定义和解释。
在本发明的描述中,需要说明的是,术语“中心”、“上”、“下”、“左”、“右”、“竖直”、“水平”、“内”、“外”等指示的方位或位置关系为基于附图所示的方位或位置关系,或者是该发明产品使用时惯常摆放的方位或位置关系,或者是本领域技术人员惯常理解的方位或位置关系,仅是为了便于描述本发明和简化描述,而不是指示或暗示所指的装置或元件必须具有特定的方位、以特定的方位构造和操作,因此不能理解为对本发明的限制。此外,术语“第一”、“第二”等仅用于区分描述,而不能理解为指示或暗示相对重要性。
在本发明的描述中,还需要说明的是,除非另有明确的规定和限定,术语“设置”、“安装”、“相连”、“连接”应做广义理解,例如,可以是固定连接,也可以是可拆卸连接,或一体地连接;可以是机械连接,也可以是电连接;可以是直接相连,也可以通过中间媒介间接相连,可以是两个元件内部的连通。对于本领域的普通技术人员而言,可以具体情况理解上述术语在本发明中的具体含义。
实施例一:
如图1和图2所示,一种可钢化的高透高强冰箱面板玻璃,包括两个玻璃基片1,其中一个玻璃基片1的表面上具有复合膜系2,两个所述玻璃基片与铝合金框架组成中空面板玻璃;其中,
复合膜系2位于中空面板玻璃的中空层;
中空面板玻璃的外表面上具有透明隔热疏水涂层4;
复合膜系的八层膜结构按顺序排列为:以玻璃基片1的表面为基础面,依次为底层21、电介质层22、保护层23、功能层24、保护层25、电介质层26、稳定层27和强化层28;
透明隔热疏水涂层4包括:分别位于中空面板玻璃两外表面的高透性的透明隔热涂层41和硬质超疏水性透明涂层42。
该可钢化的高透高强冰箱面板玻璃具备以下优点:首先,该冰箱面板玻璃具备着良好透光性和低辐射性能,在起到美观装饰的前提下,便于展示冰箱内的物品,同时优良的隔热性能,有效阻隔冰箱与外界的热交换,起到保温节能的作用;其次,而且面板玻璃镀着的膜系本身也有着较好硬度和附着力,保证其性能稳定,面板玻璃的中空设计,可以将膜系结构进行保护,延长使用寿命,起到隔音隔热的效果;最后,面板玻璃外表面的透明隔热涂层和硬质超疏水性透明涂层,透明隔热涂层可以阻隔冰箱内外的热传递,提高保温性;硬质超疏水性透明涂层有效减少了因为冰箱内外温差和经常开关冰箱门的影响,面板玻璃会起雾、结露或者挂霜的现象,保证透光性,同时硬质超疏水性透明涂层可以增加玻璃表面的硬度,增加耐磨性,防止冰箱内的物品损坏玻璃表面。
优选地,底层21、电介质层22、保护层23、功能层24、保护层25、电介质层26、稳定层27和强化层28分别对应为SiN膜层、AZO膜层、NiCr膜层、Ag膜层、NiCr膜层、AZO膜层、SiN膜层和ZrO膜层。
最内层的SiN膜层:提高膜层的硬度,以及与玻璃表面的附着力,阻挡玻璃上的钠扩散到膜层中;
两层的AZO膜层:提高功能层的均匀性,增强膜层的透过性与辐射率;
两层的NiCr膜层:作为功能层银层与基层间的夹层,提高两层的附着力,作为银层的保护层,阻挡玻璃中的钠扩散,阻挡氧氧化银层;
Ag膜层:反射红外线,增强透光率,防眩光;
最外层的SiN膜层:耐酸碱性好,抗划伤性好,具有保护膜层的作用;
ZrO膜层:具有较高的强度、断裂韧性以及良好的耐磨损性,主要起保护作用,提高玻璃的耐磨性。
优选地,玻璃基片1的厚度为3-6mm,SiN膜层、AZO膜层、NiCr膜层、Ag膜层、NiCr膜层、AZO膜层、SiN膜层和ZrO膜层的膜厚分别对应为26-27nm、13-14nm、0.5-1nm、8-9nm、0.5-1nm、10-11nm、24-25nm和12-13nm。
越薄越透明的物体,光线透过率越高,但是光线透过任何物体都有减损,所以在一定厚度的玻璃基片上(这里要求膜层尽可能的薄),设置以上各厚度的膜层,可以保证面板玻璃具有良好强度的基础上,进而保证面板玻璃具备78%透过率。
优选地,玻璃基片1选用超白玻璃原片。
实施例二:
本实例给出了一种可钢化的高透高强冰箱面板玻璃的制备方法,复合膜系采取真空磁控反应溅射方法,按如下步骤完成:
S1、预处理:选取无质量缺陷的玻璃基片1经过超声清洗、烘干和静电处理,得到面板基材;
S2、镀膜:S1中的一个面板基材进入真空度在5×10-4Pa以下的镀膜室内,依次通过八个靶材,在面板基材表面沉积得到复合膜系;
S3、定量裁片:将S2中镀膜的面板基材与S1中未镀膜的面板基材进行一一配对,并按照冰箱面板的规格要求进行切割成相同的小块面板玻璃;
S4、钢化处理:选取S3中镀膜后的小块面板玻璃和未镀膜后的小块面板玻璃,并与内含干燥剂的铝合金框架3粘结制备成镀膜面在中空层的中空面板玻璃;
S5、涂层涂覆:
1、通过辊涂、喷涂等方法将玻璃隔热涂料涂覆在于中空面板玻璃的一表面上,干燥后得到透明隔热涂层41;
2、通过射频等离子刻蚀、化学气相沉积和溶胶-凝胶等方法在中空面板玻璃的另一表面上制备出高疏水性涂层;
采用射频等离子体刻蚀的方法子先在中空面板玻璃的表面处理粗糙度,然后使用1H,1H,2H,2H-全氟癸基三氯硅烷进行处理,得到高疏水性涂层,即射频等离子刻蚀法;
以含有全氟烷基的硅烷作为气源在中空面板玻璃的表面上沉积得到透明的高疏水性涂层,即化学气相沉积法;
通过溶胶-凝胶技术在中空面板玻璃的表面生成氧化铝薄膜,氧化铝薄膜浸入沸水,全氟烷基的硅烷作为气源在中空面板玻璃的表面上沉积得到透明的高疏水性涂层,即溶胶-凝胶法;
3、在高疏水性涂层上涂刷胶体SiO2粒子液,得到硬质超疏水性透明涂层42;
利用溶胶-凝胶技术,在在高疏水性涂层上涂刷胶体SiO2粒子液,干燥后得到硬质超疏水性透明涂层42。
S6、检测入库:以可见光透过率达到78%为标准,耐磨试验机测试实验前后试样的可见光透射比差值的绝对值不大于4%,即为合格品。
镀膜玻璃的加工成本较高,该方法提供的可钢化的高透高强冰箱面板玻璃的制备方法,可以对玻璃基片1上膜系结构进行保护,使其有着稳定的性能和较长的使用寿命,同时,利用化学涂覆的方法代替镀膜方法,使得面板玻璃的外表面生成透明隔热涂层41和硬质超疏水性透明涂层42,在现有的方法中,同样可以加工出具备以上涂层类似性能的膜层,如:AF、AG、AR镀膜工艺,但是成本极高,所生产的产品一般用于高精端领域(手机、电脑屏幕玻璃),在经常开关碰撞的冰箱门上,不太合适用在底端的家电领域,生产维修成本都比较高,所以该方法可以以低成本和简单设备步骤加工出具备疏水性和隔热性的外涂层,并且硬质超疏水性透明涂层42的本身性质,也可在用户开关冰箱门时,不用担心物体损坏硬质超疏水性透明涂层42,起到防雾防水防霜的功能。
优选地,S2中,复合膜系通过如下步骤得到:
a、沉积底层:靶材为旋转硅铝靶,溅射功率为287kw,工作气体为氩气,反应气体为氮
气,溅射沉积形成SiN膜层,膜层厚度26-27nm;
b、沉积电介质层:靶材为旋转氧化锌铝靶,溅射功率为20kw,工作气体为氩气,溅射沉
积形成AZO膜层,膜层厚度13-14nm;
c、沉积保护层:靶材为平面镍铬靶,溅射功率为4.5kw,工作气体为氩气,溅射沉积形
成NiCr膜层,膜层厚度0.5-1nm;
d、沉积功能层:靶材为平面银靶,溅射功率为7.3kw,工作气体为氩气,溅射沉积形成Ag膜层,膜层厚度8-9nm;
e、沉积保护层:靶材为平面镍铬靶,溅射功率为4.5kw,工作气体为氩气,溅射沉积形
成NiCr膜层,膜层厚度0.5-1nm;
f、沉积电介质层:靶材为旋转氧化锌铝靶,溅射功率为20kw,工作气体为氩气,溅射沉
积形成AZO膜层,膜层厚度10-11nm;
g、沉积稳定层:靶材为旋转硅铝靶,溅射功率为295kw,工作气体为氩气,反应气体为氮气,溅射沉积形成SiN膜层,膜层厚度24-25nm,
h、沉积强化层:靶材为旋转氧化锆靶,溅射功率为24kw,工作气体为氩气,溅射沉积形成ZrO膜层,膜层厚度12-13nm。
优选地,S2中,各靶材的溅射气氛流量为:
靶材为旋转氧化锌铝靶、平面镍铬靶和平面银靶,氩气为800sccm;
靶材为旋转硅铝靶,氩气为800sccm、氮气为700sccm;
靶材为旋转氧化锆靶,氩气为1050sccm。
优选地,h中,旋转氧化锆靶为旋转锆硅靶。
尽管参照前述实施例对本发明进行了详细的说明,对于本领域的技术人员来说,其依然可以对前述各实施例所记载的技术方案进行修改,或者对其中部分技术特征进行等同替换,凡在本发明的精神和原则之内,所作的任何修改、等同替换、改进等,均应包含在本发明的保护范围之内。

Claims (8)

1.一种可钢化的高透高强冰箱面板玻璃,其特征在于:包括两个玻璃基片(1),其中一个所述玻璃基片(1)的表面上具有复合膜系(2),两个所述玻璃基片(1)与铝合金框架(3)组成中空面板玻璃;其中,
所述复合膜系(2)位于所述中空面板玻璃的中空层;
所述中空面板玻璃的外表面上具有透明隔热疏水涂层(4);
所述复合膜系的八层膜结构按顺序排列为:以玻璃基片(1)的表面为基础面,依次为底层(21)、电介质层(22)、保护层(23)、功能层(24)、保护层(25)、电介质层(26)、稳定层(27)和强化层(28);
所述透明隔热疏水涂层(4)包括:分别位于所述中空面板玻璃两外表面的高透性的透明隔热涂层(41)和硬质超疏水性透明涂层(42)。
2.根据权利要求1所述的一种可钢化的高透高强冰箱面板玻璃,其特征在于:所述底层(21)、所述电介质层(22)、所述保护层(23)、所述功能层(24)、所述保护层(25)、所述电介质层(26)、所述稳定层(27)和所述强化层(28)分别对应为SiN膜层、AZO膜层、NiCr膜层、Ag膜层、NiCr膜层、AZO膜层、SiN膜层和ZrO膜层。
3.根据权利要求2所述的一种可钢化的高透高强冰箱面板玻璃,其特征在于:所述玻璃基片(1)的厚度为3-6mm,所述SiN膜层、AZO膜层、NiCr膜层、Ag膜层、NiCr膜层、AZO膜层、SiN膜层和ZrO膜层的膜厚分别对应为26-27nm、13-14nm、0.5-1nm、8-9nm、0.5-1nm、10-11nm、24-25nm和12-13nm。
4.根据权利要求1所述的一种可钢化的高透高强冰箱面板玻璃,其特征在于:所述玻璃基片(1)选用超白玻璃原片。
5.根据权利要求1所述的一种可钢化的高透高强冰箱面板玻璃的制备方法,其特征在于,所述复合膜系采取真空磁控反应溅射方法,按如下步骤完成:
S1、预处理:选取无质量缺陷的所述玻璃基片(1)经过超声清洗、烘干和静电处理,得到面板基材;
S2、镀膜:S1中的一个面板基材进入真空度在5×10-4Pa以下的镀膜室内,依次通过八个靶材,在面板基材表面沉积得到所述复合膜系(2);
S3、定量裁片:将S2中镀膜的面板基材与S1中未镀膜的面板基材进行一一配对,并按照冰箱面板的规格要求进行切割成相同的小块面板玻璃;
S4、钢化处理:选取S3中镀膜后的小块面板玻璃和未镀膜后的小块面板玻璃,并与内含干燥剂的铝合金框架(3)粘结制备成镀膜面在中空层的中空面板玻璃;
S5、涂层涂覆:
(1)、通过辊涂、喷涂等方法将玻璃隔热涂料涂覆在于中空面板玻璃的一表面上,干燥后得到透明隔热涂层(41);
(2)、通过射频等离子刻蚀、化学气相沉积和溶胶-凝胶等方法在中空面板玻璃的另一表面上制备出高疏水性涂层;
(3)、在高疏水性涂层上涂刷胶体SiO2粒子液,得到硬质超疏水性透明涂层(42);
S6、检测入库:以可见光透过率达到78%为标准,耐磨试验机测试实验前后试样的可见光透射比差值的绝对值不大于4%,即为合格品。
6.根据权利要求5所述的一种可钢化的高透高强冰箱面板玻璃的制备方法,其特征在于,S2中,所述复合膜系通过如下步骤得到:
a、沉积底层:靶材为旋转硅铝靶,溅射功率为287kw,工作气体为氩气,反应气体为氮气,溅射沉积形成SiN膜层,膜层厚度26-27nm;
b、沉积电介质层:靶材为旋转氧化锌铝靶,溅射功率为20kw,工作气体为氩气,溅射沉积形成AZO膜层,膜层厚度13-14nm;
c、沉积保护层:靶材为平面镍铬靶,溅射功率为4.5kw,工作气体为氩气,溅射沉积形成NiCr膜层,膜层厚度0.5-1nm;
d、沉积功能层:靶材为平面银靶,溅射功率为7.3kw,工作气体为氩气,溅射沉积形成Ag膜层,膜层厚度8-9nm;
e、沉积保护层:靶材为平面镍铬靶,溅射功率为4.5kw,工作气体为氩气,溅射沉积形成NiCr膜层,膜层厚度0.5-1nm;
f、沉积电介质层:靶材为旋转氧化锌铝靶,溅射功率为20kw,工作气体为氩气,溅射沉积形成AZO膜层,膜层厚度10-11nm;
g、沉积稳定层:靶材为旋转硅铝靶,溅射功率为295kw,工作气体为氩气,反应气体为氮气,溅射沉积形成SiN膜层,膜层厚度24-25nm,
h、沉积强化层:靶材为旋转氧化锆靶,溅射功率为24kw,工作气体为氩气,溅射沉积形成ZrO膜层,膜层厚度12-13nm。
7.根据权利要求6所述的一种可钢化的高透高强冰箱面板玻璃的制备方法,其特征在于:S2中,各靶材的溅射气氛流量为:
靶材为旋转氧化锌铝靶、平面镍铬靶和平面银靶,氩气为800sccm;
靶材为旋转硅铝靶,氩气为800sccm、氮气为700sccm;
靶材为旋转氧化锆靶,氩气为1050sccm。
8.根据权利要求6所述的一种可钢化的高透高强冰箱面板玻璃的制备方法,其特征在于:h中,旋转氧化锆靶为旋转锆硅靶。
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