WO2019157799A1 - 一种低辐射镀膜玻璃的制备方法 - Google Patents

一种低辐射镀膜玻璃的制备方法 Download PDF

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Publication number
WO2019157799A1
WO2019157799A1 PCT/CN2018/100326 CN2018100326W WO2019157799A1 WO 2019157799 A1 WO2019157799 A1 WO 2019157799A1 CN 2018100326 W CN2018100326 W CN 2018100326W WO 2019157799 A1 WO2019157799 A1 WO 2019157799A1
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film layer
glass
coated glass
low
preparing
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PCT/CN2018/100326
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English (en)
French (fr)
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黄丽莎
顾海波
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江苏奥蓝工程玻璃有限公司
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Publication of WO2019157799A1 publication Critical patent/WO2019157799A1/zh

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    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/36Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/36Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
    • C03C17/3602Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
    • C03C17/3618Coatings of type glass/inorganic compound/other inorganic layers, at least one layer being metallic
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/36Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
    • C03C17/3602Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
    • C03C17/3626Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer one layer at least containing a nitride, oxynitride, boronitride or carbonitride
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/36Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
    • C03C17/3602Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
    • C03C17/3639Multilayers containing at least two functional metal layers
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/36Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
    • C03C17/3602Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
    • C03C17/3644Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer the metal being silver
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/36Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
    • C03C17/3602Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
    • C03C17/3649Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer made of metals other than silver
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/36Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
    • C03C17/3602Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
    • C03C17/3652Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer the coating stack containing at least one sacrificial layer to protect the metal from oxidation
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/36Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
    • C03C17/3602Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
    • C03C17/3657Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer the multilayer coating having optical properties
    • C03C17/366Low-emissivity or solar control coatings
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/36Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
    • C03C17/3602Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
    • C03C17/3681Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer the multilayer coating being used in glazing, e.g. windows or windscreens
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2218/00Methods for coating glass
    • C03C2218/10Deposition methods
    • C03C2218/15Deposition methods from the vapour phase
    • C03C2218/154Deposition methods from the vapour phase by sputtering
    • C03C2218/156Deposition methods from the vapour phase by sputtering by magnetron sputtering

Definitions

  • the invention relates to the field of glass, in particular to a method for preparing low-emission coated glass.
  • Low-emission coated hollow glass can be used in large-scale construction glass curtain walls and glass doors and windows of residential buildings. It can also be used in public events such as exhibition halls and shopping malls with high requirements for see-through and heat insulation. It can also be used to keep low temperatures. The glass window of the freezer.
  • the low-emission coated glass can also be used as a laminated glass.
  • the glass In addition to having a certain function of blocking solar radiation, the glass also has excellent security performance and sound insulation performance.
  • the tough PVB film can absorb energy quickly and keep the glass fragments completely stuck together, so it can resist the damage of bullets, earthquakes, typhoons and hail, and prevent broken doors and broken windows. criminal behavior into the room. PVB film also plays an important role in blocking sound waves, making laminated glass products reduce external noise by more than 30 decibels.
  • Low-e coated glass has the advantage of transmitting visible light and reflecting infrared light, which can significantly reduce the air conditioning energy consumption of the car and improve the comfort of the driver and passengers. Therefore, it is a green product in construction and transportation. There is a huge market demand on the tool.
  • the core material of the silver-based low-emission coated glass is one or more layers of silver (Ag). Since the silver (Ag) layer is easily corroded and oxidized, it must be deposited on both the upper and lower sides of the silver (Ag) layer. Transparent dielectric layers that pass through visible light; these dielectric layers must have good compactness and high thermal stability to provide sufficient thermal, mechanical, and chemical protection for the silver layer.
  • the dielectric layer closest to the glass substrate and the dielectric layer above the silver layer farthest from the glass substrate are particularly important for the protection of the silver layer, in particular, the dielectric layer closest to the glass substrate must be capable of The osmosis of alkali metal ions and oxygen atoms from the glass is blocked at high temperatures.
  • these dielectric layers can also perform anti-reflection effects on visible light, and combine with the silver layer to achieve better transmission and reflection characteristics of visible light.
  • off-line low-emission coating can be divided into single-silver low-emission film and low-emission film according to the film structure.
  • the latter has lower emissivity E and U values than the former, and the general single-silver Low-E film mainly relies on uniformity.
  • the silver layer (Ag) distributed in the middle layer acts to reflect far-infrared heat radiation.
  • the thickness of the entire film is about 45-75 nm. However, it is quite different. Its overall structure is relatively complicated, and there are mainly two or more layers of silver.
  • the silver layer (Ag) in the film layer is overlapped in the intermediate layer, and the thickness of the silver-based film layer is between 5 and 12 nm to form a metal layer and an insulating layer.
  • the invention provides a preparation method of low-emission coated glass.
  • a method for preparing low-emission coated glass includes the following steps:
  • Glass topping use a filming machine to apply the glass to the top, and place the air side of the glass side up;
  • Cleaning treatment cleaning the glass substrate, and then uniformly spraying a mixed solution of polishing powder and water on the clean glass substrate, and then cleaning the glass substrate with water;
  • Observation room observation The cleaned glass is transported to the observation room for observation, and the qualified product is transported to the next process, and the non-conforming product is returned to the cleaning process step; the glass surface is observed to have no water stains, oil stains, and whether the cleaning is clean;
  • Coating process placing the glass substrate into the vacuum coating chamber of the vacuum magnetron sputtering coating machine, installing a metal target in the coating chamber; introducing a mixed gas of argon, nitrogen and oxygen into the coating chamber, simultaneously releasing the excitation current and exciting the current The released energy particles such as argon ions bombard the surface of the target, causing the target to be sputtered in the form of atoms or molecules, and reacting with nitrogen and oxygen during the sputtering process, and depositing on the surface of the glass to form a coating layer;
  • the coating process includes sequentially forming a first SiNx film layer, a first nickel chromium film layer, an Ag film layer, a second nickel chromium film layer, and a second SiNx film layer on the glass substrate.
  • the method further comprises:
  • On-line inspection Detecting the conformity of coated glass products
  • On-line powder spraying or filming spraying or filming on qualified products to facilitate stacking and transporting of glass.
  • the degree of vacuum after the mixed gas is filled in the coating chamber is 0.1 Pa to 0.3 Pa.
  • the first SiNx film layer has a thickness of 30-40 nm.
  • the first nickel chromium film layer has a thickness of 15-30 nm.
  • the Ag film layer has a thickness of 1-8 nm.
  • the second nickel chromium film layer has a thickness of 10-30 nm.
  • the second SiNx film layer has a thickness of 20-40 nm.
  • the invention discloses a preparation method of low-emission coated glass, comprising the following steps:
  • Glass shelf use a tablet machine to apply the glass to the top, and place the air side of the glass face up;
  • Cleaning treatment cleaning the glass substrate, and then uniformly spraying a mixed solution of polishing powder and water on the clean glass substrate, and then cleaning the glass substrate with water;
  • Observation room observation The cleaned glass is transported to the observation room for observation, and the qualified product is transported to the next process, and the non-conforming product is returned to the cleaning process step; the glass surface is observed to have no water stain, and the cleaning is clean;
  • Coating process placing the glass substrate into the vacuum coating chamber of the vacuum magnetron sputtering coating machine, installing a metal target in the coating chamber; introducing a mixed gas of argon, nitrogen and oxygen into the coating chamber, simultaneously releasing the excitation current and exciting the current The released energy particles such as argon ions bombard the surface of the target, causing the target to be sputtered in the form of atoms or molecules, and reacting with nitrogen and oxygen during the sputtering process, and depositing on the surface of the glass to form a coating layer;
  • the coating process includes sequentially forming a first SiNx film layer, a first nickel chromium film layer, an Ag film layer, a second nickel chromium film layer, and a second SiNx film layer on the glass substrate.
  • On-line inspection Detecting the conformity of coated glass products
  • On-line powder spraying or filming spraying or filming on qualified products to facilitate stacking and transporting of glass.
  • the degree of vacuum after the mixed gas was filled in the coating chamber was 0.1 Pa.
  • the first SiNx film layer has a thickness of 40 nm.
  • the first nickel chromium film layer has a thickness of 15 nm.
  • the thickness of the Ag film layer was 6 nm.
  • the second nickel chromium film layer has a thickness of 10 nm.
  • the thickness of the second SiNx film layer is 20 nm.
  • the preparation method of the low-emission coated glass of the invention adopts the SiNx film layer, and can be directly plated on the glass surface as a sodium ion barrier layer, has good acid-base resistance and scratch resistance.
  • the transmittance of the glass prepared in this example was 70%, and the single piece was left for 90 hours without oxidation.
  • the invention discloses a preparation method of low-emission coated glass, comprising the following steps:
  • Glass shelf use a tablet machine to apply the glass to the top, and place the air side of the glass face up;
  • Cleaning treatment cleaning the glass substrate, and then uniformly spraying a mixed solution of polishing powder and water on the clean glass substrate, and then cleaning the glass substrate with water;
  • Observing room observation The cleaned glass is transported to the observation room for observation, and the qualified product is transported to the next process, and the non-conforming product is returned to the cleaning process step; the glass surface is observed to have no water stain, and the cleaning is clean;
  • Coating process placing the glass substrate into the vacuum coating chamber of the vacuum magnetron sputtering coating machine, installing a metal target in the coating chamber; introducing a mixed gas of argon, nitrogen and oxygen into the coating chamber, and simultaneously releasing the excitation current, exciting current
  • the released energy particles such as argon ions bombard the surface of the target, causing the target to be sputtered in the form of atoms or molecules, and reacting with nitrogen and oxygen during the sputtering process, and depositing on the surface of the glass to form a coating layer;
  • the coating process includes sequentially forming a first SiNx film layer, a first nickel chromium film layer, an Ag film layer, a second nickel chromium film layer, and a second SiNx film layer on the glass substrate.
  • On-line inspection Detecting the conformity of coated glass products
  • On-line powder spraying or filming spraying or filming on qualified products to facilitate stacking and transporting of glass.
  • the degree of vacuum after the mixed gas was filled in the coating chamber was 0.3 Pa.
  • the first nickel chromium film layer has a thickness of 20 nm.
  • the thickness of the Ag film layer was 8 nm.
  • the second nickel chromium film layer has a thickness of 20 nm.
  • the thickness of the second SiNx film layer was 30 nm.
  • the preparation method of the low-emission coated glass of the invention adopts the SiNx film layer, and can be directly plated on the glass surface as a sodium ion barrier layer, has good acid-base resistance and scratch resistance.
  • the transmittance of the glass prepared in this example was 71%, and the single piece was bare for 90 hours without oxidation.
  • the invention discloses a preparation method of low-emission coated glass, comprising the following steps:
  • Glass shelf use a tablet machine to apply the glass to the top, and place the air side of the glass face up;
  • Cleaning treatment cleaning the glass substrate, and then uniformly spraying a mixed solution of polishing powder and water on the clean glass substrate, and then cleaning the glass substrate with water;
  • Observing room observation The cleaned glass is transported to the observation room for observation, and the qualified product is transported to the next process, and the non-conforming product is returned to the cleaning process step; the glass surface is observed to have no water stain, and the cleaning is clean;
  • Coating process placing the glass substrate into the vacuum coating chamber of the vacuum magnetron sputtering coating machine, installing a metal target in the coating chamber; introducing a mixed gas of argon, nitrogen and oxygen into the coating chamber, simultaneously releasing the excitation current and exciting the current The released energy particles such as argon ions bombard the surface of the target, causing the target to be sputtered in the form of atoms or molecules, and reacting with nitrogen and oxygen during the sputtering process, and depositing on the surface of the glass to form a coating layer;
  • the coating process includes sequentially forming a first SiNx film layer, a first nickel chromium film layer, an Ag film layer, a second nickel chromium film layer, and a second SiNx film layer on the glass substrate.
  • On-line inspection Detecting the conformity of coated glass products
  • On-line powder spraying or filming spraying or filming on qualified products to facilitate stacking and transporting of glass.
  • the degree of vacuum after the mixed gas was filled in the coating chamber was 0.25 Pa.
  • the first SiNx film layer has a thickness of 35 nm.
  • the thickness of the Ag film layer was 7 nm.
  • the second nickel chromium film layer has a thickness of 12 nm.
  • the thickness of the second SiNx film layer was 28 nm.
  • the preparation method of the low-emission coated glass of the invention adopts the SiNx film layer, and can be directly plated on the glass surface as a sodium ion barrier layer, has good acid-base resistance and scratch resistance.
  • the transmittance of the glass prepared in this example was 72%, and the single piece was bare for 90 hours without oxidation.
  • the prepared coated glass uses a SiNx film layer, and can be directly plated on the glass surface as a sodium ion barrier layer, which has good acid and alkali resistance and scratch resistance.

Abstract

本发明公开了一种低辐射镀膜玻璃的制备方法,包括步骤:玻璃上架;清洗处理;观察室观察;镀膜工序包括:在玻璃基板上依次形成第一SiNx膜层、第一镍铬膜层、Ag膜层、第二镍铬膜层、第二SiNx膜层。本发明的低辐射镀膜玻璃的制备方法,采用磁控溅射镀膜法在玻璃基板上镀了多层膜层,镀层牢固耐磨。本发明的低辐射镀膜玻璃的制备方法,制备的镀层玻璃使用了SiNx膜层,可以直接镀于玻璃面上作钠离子阻挡层,耐酸碱性能好,且抗划伤。

Description

一种低辐射镀膜玻璃的制备方法 技术领域
本发明涉及玻璃领域,尤其涉及一种低辐射镀膜玻璃的制备方法。
背景技术
低辐射镀膜玻璃,是采用高科技的真空磁控溅射技术,在大型玻璃基板上镀纳米级(1纳米=0.000001毫米)厚度的银膜及多层氧化物增透膜制造的。根据不同气候环境下使用要求,可以制作可见光透过率在40%~80%之间的一系列不同型号的产品。用一片低辐射镀膜玻璃和另一片玻璃间隔12毫米气体层制作的中空玻璃具有神奇的节能效果,夏季它反射和阻隔太阳光中的近红外辐射和室外环境中的远红外辐射(远红外辐射也叫做热辐射),保持室内清凉舒适;冬季它反射和阻隔室内暖气发出的远红外辐射,维持温暖的室内温度。这一切归功于银膜的高红外反射性能和中空内部气体的低对流性能的完美组合。低辐射玻璃的神奇之处在于,不仅保持良好的采光功能,而且像热反射玻璃那样有效阻挡太阳直接热辐射,更难能可贵的是不论白天还是黑夜始终发挥着阻挡热辐射的作用。
低辐射镀膜中空玻璃,可以大量用于大型建筑玻璃幕墙和民用住宅的玻璃门窗,也可以用在透视性和隔热性要求很高的展览馆、商场等公众活动场所,还可以用于保持低温的冰柜的玻璃窗。
低辐射镀膜玻璃还可以做成夹层玻璃使用,这种玻璃除了具有一定的阻挡太阳辐射的功能外,还具有相当优秀的保安性能和隔音性能。当夹胶玻璃受到外力袭击时,韧性很好的PVB胶片能迅速地吸收能量,并保持玻璃碎片完整地粘在一起,因此它能够抵御枪弹、地震、台风、冰雹的伤害,阻止破门、破窗入室的犯罪行为。PVB胶片在阻隔声波方面也起着重要的作用,使夹胶玻璃产品降低外界噪音30分贝以上。
低辐射(low-e)镀膜玻璃具有透过可见光和反射红外线的优点,从而可以明显地降低汽车的空调能耗以及提高驾驶员和乘客的舒适度,因此作为一种绿色环保产品在建筑和交通工具上面有巨大的市场需求。银基低辐射镀膜玻璃的核心材料是一层或者多层的银(Ag)层,由于银(Ag)层容易被腐蚀和氧化,所以必须 在银(Ag)层的上、下方都沉积有能够透过可见光的透明介质层;这些介质层必须致密性好、热稳定性高,从而为银层提供足够的热、力和化学保护。在银基低辐射镀膜玻璃的介质层中,最靠近玻璃基板的介质层和最远离玻璃基板的银层上方的介质层对银层的保护特别重要,特别是最靠近玻璃基板的介质层必须能够在高温下阻隔来自玻璃中的碱金属离子和氧原子的渗透作用。另一方面,这些介质层也能够起到对可见光的减反射作用,与银层结合在一起实现可见光较好的透过和反射特性。
目前离线低辐射镀膜按膜层结构可分为单银低辐射膜、低辐射膜两种,后者比前者具有更低的辐射率E和U值,一般单银Low-E膜主要是依靠均匀分布在中间层的银层(Ag)来起到反射远红外热辐射作用,整个膜层厚度约45~75nm;而则截然不同,它的整体结构相对比较复杂,主要有两层以上的银层均匀分布在其他起保护作用的金属氧化物之间,膜层中的银层(Ag)为相隔重叠在中间层,银基膜层的厚度约在5~12nm之间,形成金属层与绝缘层相互交叉的特殊薄膜结构。
发明内容
本发明提供了一种低辐射镀膜玻璃的制备方法。
本发明是通过以下技术方案实现的:
一种低辐射镀膜玻璃的制备方法,包括如下步骤:
玻璃上片:采用上片机对玻璃进行上片,将玻璃的空气面一侧朝上放置;
清洗处理:将玻璃基板清洗干净,然后在洁净的玻璃基板上均匀喷洒抛光粉和水的混合溶液,然后用水清洗玻璃基板;
观察室观察:将清洗后玻璃输送至观察室进行观察,将合格品输送至下一工序,将不合格品返回至清洗处理步骤;观察玻璃表面有无水渍、油渍,清洗的是否干净;
镀膜工序:将玻璃基板放进真空磁控溅射镀膜机的真空镀膜室,在镀膜室安装金属靶材;向镀膜室内通入氩、氮和氧的混合气体,并同时释放激发电流,激发电流释放出的氩离子等荷能粒子轰击靶材表面,使靶材发生以原子或分子形式的溅射,并且在溅射的过程中与氮气和氧气产生反应,并沉淀到玻璃表面形成镀膜层;
所述镀膜工序包括:在玻璃基板上依次形成第一SiNx膜层、第一镍铬膜层、Ag膜层、第二镍铬膜层、第二SiNx膜层。
优选地,所述镀膜工序之后还包括:
在线检测:检测镀膜玻璃产品是否合格;
在线喷粉或贴膜:在合格品上进行喷粉或贴膜操作,便于玻璃的叠放运输。
优选地,所述镀膜室内充入混合气体后的真空度为0.1Pa-0.3Pa。
优选地,所述第一SiNx膜层的厚度为30-40nm。
优选地,所述第一镍铬膜层的厚度为15-30nm。
优选地,所述Ag膜层的厚度为1-8nm。
优选地,所述第二镍铬膜层的厚度为10-30nm。
优选地,所述第二SiNx膜层的厚度为20-40nm。
本发明的有益效果是:
(1)本发明的低辐射镀膜玻璃的制备方法,采用磁控溅射镀膜法在玻璃基板上镀了多层膜层,镀层牢固耐磨。
(2)本发明的低辐射镀膜玻璃的制备方法,制备的镀层玻璃使用了SiNx膜层,可以直接镀于玻璃面上作钠离子阻挡层,耐酸碱性能好,且抗划伤。
(3)本发明的低辐射镀膜玻璃的制备方法,在玻璃清洗后以及镀膜后均对产品进行了观察检测,提高了成品的合格率。
具体实施方式
下面将结合本发明中的附图,对本发明实施例中的技术方案进行清楚、完整地描述,显然,所描述的实施例仅仅是本发明的一部分实施例,而不是全部的实施例。基于本发明中的实施例,本领域普通技术人员在没有作出创造性劳动的前提下所获得的所有其他实施例,都属于本发明保护的范围。
实施例1
本发明公开了一种低辐射镀膜玻璃的制备方法,包括如下步骤:
玻璃上架:采用上片机对玻璃进行上片,将玻璃的空气面一侧朝上放置;
清洗处理:将玻璃基板清洗干净,然后在洁净的玻璃基板上均匀喷洒抛光粉和水的混合溶液,然后用水清洗玻璃基板;
观察室观察:将清洗后玻璃输送至观察室进行观察,将合格品输送至下一 工序,将不合格品返回至清洗处理步骤;观察玻璃表面有无水渍,清洗的是否干净;
镀膜工序:将玻璃基板放进真空磁控溅射镀膜机的真空镀膜室,在镀膜室安装金属靶材;向镀膜室内通入氩、氮和氧的混合气体,并同时释放激发电流,激发电流释放出的氩离子等荷能粒子轰击靶材表面,使靶材发生以原子或分子形式的溅射,并且在溅射的过程中与氮气和氧气产生反应,并沉淀到玻璃表面形成镀膜层;所述镀膜工序包括:在玻璃基板上依次形成第一SiNx膜层、第一镍铬膜层、Ag膜层、第二镍铬膜层、第二SiNx膜层。
在线检测:检测镀膜玻璃产品是否合格;
在线喷粉或贴膜:在合格品上进行喷粉或贴膜操作,便于玻璃的叠放运输。
所述镀膜室内充入混合气体后的真空度为0.1Pa。
所述第一SiNx膜层的厚度为40nm。
所述第一镍铬膜层的厚度为15nm。
所述Ag膜层的厚度为6nm。
所述第二镍铬膜层的厚度为10nm。
所述第二SiNx膜层的厚度为20nm。
本发明的低辐射镀膜玻璃的制备方法,制备的镀层玻璃使用了SiNx膜层,可以直接镀于玻璃面上作钠离子阻挡层,耐酸碱性能好,且抗划伤。
本实施例制备的玻璃透过率为70%,单片裸放90h无氧化。
实施例2
本发明公开了一种低辐射镀膜玻璃的制备方法,包括如下步骤:
玻璃上架:采用上片机对玻璃进行上片,将玻璃的空气面一侧朝上放置;
清洗处理:将玻璃基板清洗干净,然后在洁净的玻璃基板上均匀喷洒抛光粉和水的混合溶液,然后用水清洗玻璃基板;
观察室观察:将清洗后玻璃输送至观察室进行观察,将合格品输送至下一工序,将不合格品返回至清洗处理步骤;观察玻璃表面有无水渍,清洗的是否干净;
镀膜工序:将玻璃基板放进真空磁控溅射镀膜机的真空镀膜室,在镀膜室安装金属靶材;向镀膜室内通入氩、氮和氧的混合气体,并同时释放激发电流, 激发电流释放出的氩离子等荷能粒子轰击靶材表面,使靶材发生以原子或分子形式的溅射,并且在溅射的过程中与氮气和氧气产生反应,并沉淀到玻璃表面形成镀膜层;所述镀膜工序包括:在玻璃基板上依次形成第一SiNx膜层、第一镍铬膜层、Ag膜层、第二镍铬膜层、第二SiNx膜层。
在线检测:检测镀膜玻璃产品是否合格;
在线喷粉或贴膜:在合格品上进行喷粉或贴膜操作,便于玻璃的叠放运输。
所述镀膜室内充入混合气体后的真空度为0.3Pa。
所述第一SiNx膜层的厚度为36nm。
所述第一镍铬膜层的厚度为20nm。
所述Ag膜层的厚度为8nm。
所述第二镍铬膜层的厚度为20nm。
所述第二SiNx膜层的厚度为30nm。
本发明的低辐射镀膜玻璃的制备方法,制备的镀层玻璃使用了SiNx膜层,可以直接镀于玻璃面上作钠离子阻挡层,耐酸碱性能好,且抗划伤。
本实施例制备的玻璃透过率为71%,单片裸放90h无氧化。
实施例3
本发明公开了一种低辐射镀膜玻璃的制备方法,包括如下步骤:
玻璃上架:采用上片机对玻璃进行上片,将玻璃的空气面一侧朝上放置;
清洗处理:将玻璃基板清洗干净,然后在洁净的玻璃基板上均匀喷洒抛光粉和水的混合溶液,然后用水清洗玻璃基板;
观察室观察:将清洗后玻璃输送至观察室进行观察,将合格品输送至下一工序,将不合格品返回至清洗处理步骤;观察玻璃表面有无水渍,清洗的是否干净;
镀膜工序:将玻璃基板放进真空磁控溅射镀膜机的真空镀膜室,在镀膜室安装金属靶材;向镀膜室内通入氩、氮和氧的混合气体,并同时释放激发电流,激发电流释放出的氩离子等荷能粒子轰击靶材表面,使靶材发生以原子或分子形式的溅射,并且在溅射的过程中与氮气和氧气产生反应,并沉淀到玻璃表面形成镀膜层;所述镀膜工序包括:在玻璃基板上依次形成第一SiNx膜层、第一镍铬膜层、Ag膜层、第二镍铬膜层、第二SiNx膜层。
在线检测:检测镀膜玻璃产品是否合格;
在线喷粉或贴膜:在合格品上进行喷粉或贴膜操作,便于玻璃的叠放运输。
所述镀膜室内充入混合气体后的真空度为0.25Pa。
所述第一SiNx膜层的厚度为35nm。
所述第一镍铬膜层的厚度为22nm。
所述Ag膜层的厚度为7nm。
所述第二镍铬膜层的厚度为12nm。
所述第二SiNx膜层的厚度为28nm。
本发明的低辐射镀膜玻璃的制备方法,制备的镀层玻璃使用了SiNx膜层,可以直接镀于玻璃面上作钠离子阻挡层,耐酸碱性能好,且抗划伤。
本实施例制备的玻璃透过率为72%,单片裸放90h无氧化。
本发明的有益效果是:
(1)本发明的低辐射镀膜玻璃的制备方法,采用磁控溅射镀膜法在玻璃基板上镀了多层膜层,镀层牢固耐磨。
(2)本发明的低辐射镀膜玻璃的制备方法,制备的镀层玻璃使用了SiNx膜层,可以直接镀于玻璃面上作钠离子阻挡层,耐酸碱性能好,且抗划伤。
(3)本发明的低辐射镀膜玻璃的制备方法,在玻璃清洗后以及镀膜后均对产品进行了观察检测,提高了成品的合格率。
以上所述是本发明的优选实施方式,应该指出,对于本技术领域的普通技术人员来说,在不脱离本发明原理的前提下,还可以做出若干改进和润饰,这些改进和润饰也视为本发明的保护范围。

Claims (8)

  1. 一种低辐射镀膜玻璃的制备方法,包括如下步骤:
    玻璃上架:采用上片机对玻璃进行上片,将玻璃的空气面一侧朝上放置;
    清洗处理:将玻璃基板清洗干净,然后在洁净的玻璃基板上均匀喷洒抛光粉和水的混合溶液,再用水清洗玻璃基板;
    观察室观察:将清洗后玻璃输送至观察室进行观察,将合格品输送至下一工序,将不合格品返回至清洗处理步骤;镀膜工序:将玻璃基板放进真空磁控溅射镀膜机的真空镀膜室,在镀膜室安装金属靶材;向镀膜室内通入氩、氮和氧的混合气体,并同时释放激发电流,激发电流释放出的氩离子等荷能粒子轰击靶材表面,使靶材发生以原子或分子形式的溅射,并且在溅射的过程中与氮气和氧气产生反应,并沉淀到玻璃表面形成镀膜层;
    所述镀膜工序包括:在玻璃基板上依次形成第一SiNx膜层、第一镍铬膜层、Ag膜层、第二镍铬膜层、第二SiNx膜层。
  2. 根据权利要求1所述的一种低辐射镀膜玻璃的制备方法,其特征在于,所述镀膜工序之后还包括:
    在线检测:检测镀膜玻璃产品是否合格;
    在线喷粉或贴膜:在合格品上进行喷粉或贴膜操作。
  3. 根据权利要求2所述的一种低辐射镀膜玻璃的制备方法,其特征在于,所述镀膜室内充入混合气体后的真空度为0.1Pa-0.3Pa。
  4. 根据权利要求3所述的一种低辐射镀膜玻璃的制备方法,其特征在于,所述第一SiNx膜层的厚度为30-40nm。
  5. 根据权利要求4所述的一种低辐射镀膜玻璃的制备方法,其特征在于,所述第一镍铬膜层的厚度为15-30nm。
  6. 根据权利要求5所述的一种低辐射镀膜玻璃的制备方法,其特征在于,所述Ag膜层的厚度为1-8nm。
  7. 根据权利要求6所述的一种低辐射镀膜玻璃的制备方法,其特征在于,所述第二镍铬膜层的厚度为10-30nm。
  8. 根据权利要求1或7所述的一种低辐射镀膜玻璃的制备方法,其特征在于,所述第二SiNx膜层的厚度为20-40nm。
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