CN114762128B - 开关元件 - Google Patents

开关元件

Info

Publication number
CN114762128B
CN114762128B CN201980102398.0A CN201980102398A CN114762128B CN 114762128 B CN114762128 B CN 114762128B CN 201980102398 A CN201980102398 A CN 201980102398A CN 114762128 B CN114762128 B CN 114762128B
Authority
CN
China
Prior art keywords
region
electric field
trench
connection
insulating film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN201980102398.0A
Other languages
English (en)
Chinese (zh)
Other versions
CN114762128A (zh
Inventor
斋藤顺
阴泳信
片冈惠太
山下侑佑
渡边行彦
朽木克博
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Denso Corp
Original Assignee
Denso Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Denso Corp filed Critical Denso Corp
Priority to CN202610093701.7A priority Critical patent/CN121888652A/zh
Publication of CN114762128A publication Critical patent/CN114762128A/zh
Application granted granted Critical
Publication of CN114762128B publication Critical patent/CN114762128B/zh
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00—Field-effect transistors [FET]
    • H10D30/60—Insulated-gate field-effect transistors [IGFET]
    • H10D30/64—Double-diffused metal-oxide semiconductor [DMOS] FETs
    • H10D30/66—Vertical DMOS [VDMOS] FETs
    • H10D30/668—Vertical DMOS [VDMOS] FETs having trench gate electrodes, e.g. UMOS transistors
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D62/00—Semiconductor bodies, or regions thereof, of devices having potential barriers
    • H10D62/10—Shapes, relative sizes or dispositions of the regions of the semiconductor bodies; Shapes of the semiconductor bodies
    • H10D62/102—Constructional design considerations for preventing surface leakage or controlling electric field concentration
    • H10D62/103—Constructional design considerations for preventing surface leakage or controlling electric field concentration for increasing or controlling the breakdown voltage of reverse-biased devices
    • H10D62/105—Constructional design considerations for preventing surface leakage or controlling electric field concentration for increasing or controlling the breakdown voltage of reverse-biased devices by having particular doping profiles, shapes or arrangements of PN junctions; by having supplementary regions, e.g. junction termination extension [JTE] 
    • H10D62/106—Constructional design considerations for preventing surface leakage or controlling electric field concentration for increasing or controlling the breakdown voltage of reverse-biased devices by having particular doping profiles, shapes or arrangements of PN junctions; by having supplementary regions, e.g. junction termination extension [JTE]  having supplementary regions doped oppositely to or in rectifying contact with regions of the semiconductor bodies, e.g. guard rings with PN or Schottky junctions
    • H10D62/107—Buried supplementary regions, e.g. buried guard rings 
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D62/00—Semiconductor bodies, or regions thereof, of devices having potential barriers
    • H10D62/10—Shapes, relative sizes or dispositions of the regions of the semiconductor bodies; Shapes of the semiconductor bodies
    • H10D62/124—Shapes, relative sizes or dispositions of the regions of semiconductor bodies or of junctions between the regions
    • H10D62/126—Top-view geometrical layouts of the regions or the junctions
    • H10D62/127—Top-view geometrical layouts of the regions or the junctions of cellular field-effect devices, e.g. multicellular DMOS transistors or IGBTs
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D62/00—Semiconductor bodies, or regions thereof, of devices having potential barriers
    • H10D62/10—Shapes, relative sizes or dispositions of the regions of the semiconductor bodies; Shapes of the semiconductor bodies
    • H10D62/17—Semiconductor regions connected to electrodes not carrying current to be rectified, amplified or switched, e.g. channel regions
    • H10D62/393—Body regions of DMOS transistors or IGBTs 
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D62/00—Semiconductor bodies, or regions thereof, of devices having potential barriers
    • H10D62/80—Semiconductor bodies, or regions thereof, of devices having potential barriers characterised by the materials
    • H10D62/83—Semiconductor bodies, or regions thereof, of devices having potential barriers characterised by the materials being Group IV materials, e.g. B-doped Si or undoped Ge
    • H10D62/832—Semiconductor bodies, or regions thereof, of devices having potential barriers characterised by the materials being Group IV materials, e.g. B-doped Si or undoped Ge being Group IV materials comprising two or more elements, e.g. SiGe
    • H10D62/8325—Silicon carbide
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D64/00—Electrodes of devices having potential barriers
    • H10D64/20—Electrodes characterised by their shapes, relative sizes or dispositions 
    • H10D64/27—Electrodes not carrying the current to be rectified, amplified, oscillated or switched, e.g. gates
    • H10D64/311—Gate electrodes for field-effect devices
    • H10D64/411—Gate electrodes for field-effect devices for FETs
    • H10D64/511—Gate electrodes for field-effect devices for FETs for IGFETs
    • H10D64/512—Disposition of the gate electrodes, e.g. buried gates
    • H10D64/513—Disposition of the gate electrodes, e.g. buried gates within recesses in the substrate, e.g. trench gates, groove gates or buried gates

Landscapes

  • Electrodes Of Semiconductors (AREA)
CN201980102398.0A 2019-11-22 2019-11-22 开关元件 Active CN114762128B (zh)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202610093701.7A CN121888652A (zh) 2019-11-22 2019-11-22 开关元件

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2019/045858 WO2021100206A1 (ja) 2019-11-22 2019-11-22 スイッチング素子

Related Child Applications (1)

Application Number Title Priority Date Filing Date
CN202610093701.7A Division CN121888652A (zh) 2019-11-22 2019-11-22 开关元件

Publications (2)

Publication Number Publication Date
CN114762128A CN114762128A (zh) 2022-07-15
CN114762128B true CN114762128B (zh) 2026-02-13

Family

ID=75981529

Family Applications (2)

Application Number Title Priority Date Filing Date
CN202610093701.7A Pending CN121888652A (zh) 2019-11-22 2019-11-22 开关元件
CN201980102398.0A Active CN114762128B (zh) 2019-11-22 2019-11-22 开关元件

Family Applications Before (1)

Application Number Title Priority Date Filing Date
CN202610093701.7A Pending CN121888652A (zh) 2019-11-22 2019-11-22 开关元件

Country Status (4)

Country Link
US (2) US12471312B2 (https=)
JP (1) JPWO2021100206A1 (https=)
CN (2) CN121888652A (https=)
WO (1) WO2021100206A1 (https=)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2024135369A (ja) * 2023-03-22 2024-10-04 株式会社東芝 半導体装置
CN119029042B (zh) * 2024-08-15 2025-09-19 长飞先进半导体(武汉)有限公司 一种半导体器件、制备方法、功率模块、转换电路和车辆
CN119730290B (zh) * 2025-02-28 2025-06-20 强华时代(成都)科技有限公司 一种降低栅氧电场的沟槽栅SiC MOSFET的制备方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2019016775A (ja) * 2017-07-07 2019-01-31 株式会社デンソー 半導体装置およびその製造方法

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4798119B2 (ja) * 2007-11-06 2011-10-19 株式会社デンソー 炭化珪素半導体装置およびその製造方法
JP4577355B2 (ja) 2007-12-26 2010-11-10 株式会社デンソー 炭化珪素半導体装置およびその製造方法
JP4640436B2 (ja) * 2008-04-14 2011-03-02 株式会社デンソー 炭化珪素半導体装置の製造方法
JP2012169384A (ja) * 2011-02-11 2012-09-06 Denso Corp 炭化珪素半導体装置およびその製造方法
US9306061B2 (en) * 2013-03-13 2016-04-05 Cree, Inc. Field effect transistor devices with protective regions
WO2017043607A1 (ja) * 2015-09-09 2017-03-16 住友電気工業株式会社 縦型炭化珪素半導体装置のトレンチのアニール処理装置、縦型炭化珪素半導体装置の製造方法および縦型炭化珪素半導体装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2019016775A (ja) * 2017-07-07 2019-01-31 株式会社デンソー 半導体装置およびその製造方法

Also Published As

Publication number Publication date
CN121888652A (zh) 2026-04-17
JPWO2021100206A1 (https=) 2021-05-27
CN114762128A (zh) 2022-07-15
US12471312B2 (en) 2025-11-11
WO2021100206A1 (ja) 2021-05-27
US20260013176A1 (en) 2026-01-08
US20220278231A1 (en) 2022-09-01

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