CN121888652A - 开关元件 - Google Patents
开关元件Info
- Publication number
- CN121888652A CN121888652A CN202610093701.7A CN202610093701A CN121888652A CN 121888652 A CN121888652 A CN 121888652A CN 202610093701 A CN202610093701 A CN 202610093701A CN 121888652 A CN121888652 A CN 121888652A
- Authority
- CN
- China
- Prior art keywords
- region
- trench
- electric field
- type
- insulating film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D30/00—Field-effect transistors [FET]
- H10D30/60—Insulated-gate field-effect transistors [IGFET]
- H10D30/64—Double-diffused metal-oxide semiconductor [DMOS] FETs
- H10D30/66—Vertical DMOS [VDMOS] FETs
- H10D30/668—Vertical DMOS [VDMOS] FETs having trench gate electrodes, e.g. UMOS transistors
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D62/00—Semiconductor bodies, or regions thereof, of devices having potential barriers
- H10D62/10—Shapes, relative sizes or dispositions of the regions of the semiconductor bodies; Shapes of the semiconductor bodies
- H10D62/102—Constructional design considerations for preventing surface leakage or controlling electric field concentration
- H10D62/103—Constructional design considerations for preventing surface leakage or controlling electric field concentration for increasing or controlling the breakdown voltage of reverse-biased devices
- H10D62/105—Constructional design considerations for preventing surface leakage or controlling electric field concentration for increasing or controlling the breakdown voltage of reverse-biased devices by having particular doping profiles, shapes or arrangements of PN junctions; by having supplementary regions, e.g. junction termination extension [JTE]
- H10D62/106—Constructional design considerations for preventing surface leakage or controlling electric field concentration for increasing or controlling the breakdown voltage of reverse-biased devices by having particular doping profiles, shapes or arrangements of PN junctions; by having supplementary regions, e.g. junction termination extension [JTE] having supplementary regions doped oppositely to or in rectifying contact with regions of the semiconductor bodies, e.g. guard rings with PN or Schottky junctions
- H10D62/107—Buried supplementary regions, e.g. buried guard rings
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D62/00—Semiconductor bodies, or regions thereof, of devices having potential barriers
- H10D62/10—Shapes, relative sizes or dispositions of the regions of the semiconductor bodies; Shapes of the semiconductor bodies
- H10D62/124—Shapes, relative sizes or dispositions of the regions of semiconductor bodies or of junctions between the regions
- H10D62/126—Top-view geometrical layouts of the regions or the junctions
- H10D62/127—Top-view geometrical layouts of the regions or the junctions of cellular field-effect devices, e.g. multicellular DMOS transistors or IGBTs
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D62/00—Semiconductor bodies, or regions thereof, of devices having potential barriers
- H10D62/10—Shapes, relative sizes or dispositions of the regions of the semiconductor bodies; Shapes of the semiconductor bodies
- H10D62/17—Semiconductor regions connected to electrodes not carrying current to be rectified, amplified or switched, e.g. channel regions
- H10D62/393—Body regions of DMOS transistors or IGBTs
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D62/00—Semiconductor bodies, or regions thereof, of devices having potential barriers
- H10D62/80—Semiconductor bodies, or regions thereof, of devices having potential barriers characterised by the materials
- H10D62/83—Semiconductor bodies, or regions thereof, of devices having potential barriers characterised by the materials being Group IV materials, e.g. B-doped Si or undoped Ge
- H10D62/832—Semiconductor bodies, or regions thereof, of devices having potential barriers characterised by the materials being Group IV materials, e.g. B-doped Si or undoped Ge being Group IV materials comprising two or more elements, e.g. SiGe
- H10D62/8325—Silicon carbide
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D64/00—Electrodes of devices having potential barriers
- H10D64/20—Electrodes characterised by their shapes, relative sizes or dispositions
- H10D64/27—Electrodes not carrying the current to be rectified, amplified, oscillated or switched, e.g. gates
- H10D64/311—Gate electrodes for field-effect devices
- H10D64/411—Gate electrodes for field-effect devices for FETs
- H10D64/511—Gate electrodes for field-effect devices for FETs for IGFETs
- H10D64/512—Disposition of the gate electrodes, e.g. buried gates
- H10D64/513—Disposition of the gate electrodes, e.g. buried gates within recesses in the substrate, e.g. trench gates, groove gates or buried gates
Landscapes
- Electrodes Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202610093701.7A CN121888652A (zh) | 2019-11-22 | 2019-11-22 | 开关元件 |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| PCT/JP2019/045858 WO2021100206A1 (ja) | 2019-11-22 | 2019-11-22 | スイッチング素子 |
| CN202610093701.7A CN121888652A (zh) | 2019-11-22 | 2019-11-22 | 开关元件 |
| CN201980102398.0A CN114762128B (zh) | 2019-11-22 | 2019-11-22 | 开关元件 |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201980102398.0A Division CN114762128B (zh) | 2019-11-22 | 2019-11-22 | 开关元件 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN121888652A true CN121888652A (zh) | 2026-04-17 |
Family
ID=75981529
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202610093701.7A Pending CN121888652A (zh) | 2019-11-22 | 2019-11-22 | 开关元件 |
| CN201980102398.0A Active CN114762128B (zh) | 2019-11-22 | 2019-11-22 | 开关元件 |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201980102398.0A Active CN114762128B (zh) | 2019-11-22 | 2019-11-22 | 开关元件 |
Country Status (4)
| Country | Link |
|---|---|
| US (2) | US12471312B2 (https=) |
| JP (1) | JPWO2021100206A1 (https=) |
| CN (2) | CN121888652A (https=) |
| WO (1) | WO2021100206A1 (https=) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2024135369A (ja) * | 2023-03-22 | 2024-10-04 | 株式会社東芝 | 半導体装置 |
| CN119029042B (zh) * | 2024-08-15 | 2025-09-19 | 长飞先进半导体(武汉)有限公司 | 一种半导体器件、制备方法、功率模块、转换电路和车辆 |
| CN119730290B (zh) * | 2025-02-28 | 2025-06-20 | 强华时代(成都)科技有限公司 | 一种降低栅氧电场的沟槽栅SiC MOSFET的制备方法 |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4798119B2 (ja) * | 2007-11-06 | 2011-10-19 | 株式会社デンソー | 炭化珪素半導体装置およびその製造方法 |
| JP4577355B2 (ja) | 2007-12-26 | 2010-11-10 | 株式会社デンソー | 炭化珪素半導体装置およびその製造方法 |
| JP4640436B2 (ja) * | 2008-04-14 | 2011-03-02 | 株式会社デンソー | 炭化珪素半導体装置の製造方法 |
| JP2012169384A (ja) * | 2011-02-11 | 2012-09-06 | Denso Corp | 炭化珪素半導体装置およびその製造方法 |
| US9306061B2 (en) * | 2013-03-13 | 2016-04-05 | Cree, Inc. | Field effect transistor devices with protective regions |
| WO2017043607A1 (ja) * | 2015-09-09 | 2017-03-16 | 住友電気工業株式会社 | 縦型炭化珪素半導体装置のトレンチのアニール処理装置、縦型炭化珪素半導体装置の製造方法および縦型炭化珪素半導体装置 |
| JP7327905B2 (ja) * | 2017-07-07 | 2023-08-16 | 株式会社デンソー | 半導体装置およびその製造方法 |
-
2019
- 2019-11-22 CN CN202610093701.7A patent/CN121888652A/zh active Pending
- 2019-11-22 JP JP2021558148A patent/JPWO2021100206A1/ja active Pending
- 2019-11-22 CN CN201980102398.0A patent/CN114762128B/zh active Active
- 2019-11-22 WO PCT/JP2019/045858 patent/WO2021100206A1/ja not_active Ceased
-
2022
- 2022-05-18 US US17/747,293 patent/US12471312B2/en active Active
-
2025
- 2025-09-15 US US19/328,849 patent/US20260013176A1/en active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| CN114762128B (zh) | 2026-02-13 |
| JPWO2021100206A1 (https=) | 2021-05-27 |
| CN114762128A (zh) | 2022-07-15 |
| US12471312B2 (en) | 2025-11-11 |
| WO2021100206A1 (ja) | 2021-05-27 |
| US20260013176A1 (en) | 2026-01-08 |
| US20220278231A1 (en) | 2022-09-01 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination |