CN1146301C - 薄膜式加热元件及其制作方法 - Google Patents
薄膜式加热元件及其制作方法 Download PDFInfo
- Publication number
- CN1146301C CN1146301C CNB998107727A CN99810772A CN1146301C CN 1146301 C CN1146301 C CN 1146301C CN B998107727 A CNB998107727 A CN B998107727A CN 99810772 A CN99810772 A CN 99810772A CN 1146301 C CN1146301 C CN 1146301C
- Authority
- CN
- China
- Prior art keywords
- heating element
- solution
- thin film
- rare earth
- metal oxide
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000010438 heat treatment Methods 0.000 title claims abstract description 41
- 239000010409 thin film Substances 0.000 title claims abstract description 22
- 229910052761 rare earth metal Inorganic materials 0.000 claims abstract description 23
- 239000000758 substrate Substances 0.000 claims abstract description 14
- 229910052684 Cerium Inorganic materials 0.000 claims abstract description 13
- GWXLDORMOJMVQZ-UHFFFAOYSA-N cerium Chemical compound [Ce] GWXLDORMOJMVQZ-UHFFFAOYSA-N 0.000 claims abstract description 13
- 229910052746 lanthanum Inorganic materials 0.000 claims abstract description 13
- FZLIPJUXYLNCLC-UHFFFAOYSA-N lanthanum atom Chemical compound [La] FZLIPJUXYLNCLC-UHFFFAOYSA-N 0.000 claims abstract description 13
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 claims abstract description 7
- 229910052787 antimony Inorganic materials 0.000 claims abstract description 7
- WATWJIUSRGPENY-UHFFFAOYSA-N antimony atom Chemical compound [Sb] WATWJIUSRGPENY-UHFFFAOYSA-N 0.000 claims abstract description 7
- 238000000197 pyrolysis Methods 0.000 claims abstract description 7
- 229910052725 zinc Inorganic materials 0.000 claims abstract description 7
- 239000011701 zinc Substances 0.000 claims abstract description 7
- YMLFYGFCXGNERH-UHFFFAOYSA-K butyltin trichloride Chemical compound CCCC[Sn](Cl)(Cl)Cl YMLFYGFCXGNERH-UHFFFAOYSA-K 0.000 claims abstract description 5
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 claims abstract description 5
- 229910001887 tin oxide Inorganic materials 0.000 claims abstract description 5
- 229910044991 metal oxide Inorganic materials 0.000 claims description 19
- 150000004706 metal oxides Chemical class 0.000 claims description 19
- 238000000034 method Methods 0.000 claims description 15
- 229910052751 metal Inorganic materials 0.000 claims description 7
- 239000002184 metal Substances 0.000 claims description 7
- 229910052731 fluorine Inorganic materials 0.000 claims description 6
- 239000011737 fluorine Substances 0.000 claims description 6
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 claims description 5
- 239000007921 spray Substances 0.000 claims description 5
- JIAARYAFYJHUJI-UHFFFAOYSA-L zinc dichloride Chemical compound [Cl-].[Cl-].[Zn+2] JIAARYAFYJHUJI-UHFFFAOYSA-L 0.000 claims description 4
- FAPDDOBMIUGHIN-UHFFFAOYSA-K antimony trichloride Chemical group Cl[Sb](Cl)Cl FAPDDOBMIUGHIN-UHFFFAOYSA-K 0.000 claims description 2
- 235000005074 zinc chloride Nutrition 0.000 claims description 2
- 239000011592 zinc chloride Substances 0.000 claims description 2
- VEXZGXHMUGYJMC-UHFFFAOYSA-M Chloride anion Chemical compound [Cl-] VEXZGXHMUGYJMC-UHFFFAOYSA-M 0.000 claims 4
- 238000000137 annealing Methods 0.000 claims 1
- NPAIMXWXWPJRES-UHFFFAOYSA-N butyltin(3+) Chemical compound CCCC[Sn+3] NPAIMXWXWPJRES-UHFFFAOYSA-N 0.000 claims 1
- 125000001153 fluoro group Chemical group F* 0.000 claims 1
- 239000010408 film Substances 0.000 description 23
- 239000002019 doping agent Substances 0.000 description 5
- 150000002910 rare earth metals Chemical class 0.000 description 5
- 230000000694 effects Effects 0.000 description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- 239000002241 glass-ceramic Substances 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 229910052581 Si3N4 Inorganic materials 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 239000000976 ink Substances 0.000 description 2
- 230000003647 oxidation Effects 0.000 description 2
- 238000007254 oxidation reaction Methods 0.000 description 2
- 230000009183 running Effects 0.000 description 2
- 235000012239 silicon dioxide Nutrition 0.000 description 2
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 2
- HPGGPRDJHPYFRM-UHFFFAOYSA-J tin(iv) chloride Chemical compound Cl[Sn](Cl)(Cl)Cl HPGGPRDJHPYFRM-UHFFFAOYSA-J 0.000 description 2
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- DGAQECJNVWCQMB-PUAWFVPOSA-M Ilexoside XXIX Chemical compound C[C@@H]1CC[C@@]2(CC[C@@]3(C(=CC[C@H]4[C@]3(CC[C@@H]5[C@@]4(CC[C@@H](C5(C)C)OS(=O)(=O)[O-])C)C)[C@@H]2[C@]1(C)O)C)C(=O)O[C@H]6[C@@H]([C@H]([C@@H]([C@H](O6)CO)O)O)O.[Na+] DGAQECJNVWCQMB-PUAWFVPOSA-M 0.000 description 1
- WHXSMMKQMYFTQS-UHFFFAOYSA-N Lithium Chemical compound [Li] WHXSMMKQMYFTQS-UHFFFAOYSA-N 0.000 description 1
- 238000004378 air conditioning Methods 0.000 description 1
- 229940037003 alum Drugs 0.000 description 1
- 239000004411 aluminium Substances 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 230000004087 circulation Effects 0.000 description 1
- 239000004927 clay Substances 0.000 description 1
- 230000001447 compensatory effect Effects 0.000 description 1
- 238000010411 cooking Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000007710 freezing Methods 0.000 description 1
- 230000008014 freezing Effects 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 229910052738 indium Inorganic materials 0.000 description 1
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 229910052744 lithium Inorganic materials 0.000 description 1
- 125000002524 organometallic group Chemical group 0.000 description 1
- 230000002028 premature Effects 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- 239000010458 rotten stone Substances 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 229910052708 sodium Inorganic materials 0.000 description 1
- 239000011734 sodium Substances 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 230000000087 stabilizing effect Effects 0.000 description 1
- 238000010257 thawing Methods 0.000 description 1
- 238000000427 thin-film deposition Methods 0.000 description 1
- 230000001052 transient effect Effects 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B3/00—Ohmic-resistance heating
- H05B3/10—Heating elements characterised by the composition or nature of the materials or by the arrangement of the conductor
- H05B3/12—Heating elements characterised by the composition or nature of the materials or by the arrangement of the conductor characterised by the composition or nature of the conductive material
- H05B3/14—Heating elements characterised by the composition or nature of the materials or by the arrangement of the conductor characterised by the composition or nature of the conductive material the material being non-metallic
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B3/00—Ohmic-resistance heating
- H05B3/10—Heating elements characterised by the composition or nature of the materials or by the arrangement of the conductor
- H05B3/12—Heating elements characterised by the composition or nature of the materials or by the arrangement of the conductor characterised by the composition or nature of the conductive material
- H05B3/14—Heating elements characterised by the composition or nature of the materials or by the arrangement of the conductor characterised by the composition or nature of the conductive material the material being non-metallic
- H05B3/141—Conductive ceramics, e.g. metal oxides, metal carbides, barium titanate, ferrites, zirconia, vitrous compounds
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B3/00—Ohmic-resistance heating
- H05B3/10—Heating elements characterised by the composition or nature of the materials or by the arrangement of the conductor
- H05B3/12—Heating elements characterised by the composition or nature of the materials or by the arrangement of the conductor characterised by the composition or nature of the conductive material
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Ceramic Engineering (AREA)
- Resistance Heating (AREA)
- Surface Heating Bodies (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| AUPP5995 | 1998-09-18 | ||
| AUPP5995A AUPP599598A0 (en) | 1998-09-18 | 1998-09-18 | Self-regulating nanoscale heating element |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1317223A CN1317223A (zh) | 2001-10-10 |
| CN1146301C true CN1146301C (zh) | 2004-04-14 |
Family
ID=3810212
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB998107727A Expired - Fee Related CN1146301C (zh) | 1998-09-18 | 1999-09-17 | 薄膜式加热元件及其制作方法 |
Country Status (10)
| Country | Link |
|---|---|
| EP (1) | EP1120014A4 (ko) |
| JP (1) | JP2002525829A (ko) |
| KR (1) | KR20010079859A (ko) |
| CN (1) | CN1146301C (ko) |
| AU (1) | AUPP599598A0 (ko) |
| BR (1) | BR9913812A (ko) |
| CA (1) | CA2344486A1 (ko) |
| ID (1) | ID29148A (ko) |
| NZ (1) | NZ510655A (ko) |
| WO (1) | WO2000018189A1 (ko) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE10110792B4 (de) * | 2001-03-06 | 2004-09-23 | Schott Glas | Keramisches Kochsystem mit Glaskeramikplatte,Isolationsschicht und Heizelementen |
| DE10110789C1 (de) * | 2001-03-06 | 2002-07-04 | Schott Glas | Kochgerät mit einer nicht planaren, mehrdimensional geformten Kochfläche aus Glas- oder Glaskeramik |
| DE602004011386T2 (de) | 2003-11-20 | 2009-01-08 | Koninklijke Philips Electronics N.V. | Dünnschichtheizelement |
| CN100466865C (zh) * | 2005-03-21 | 2009-03-04 | 冷同桂 | 一种复合金属电热膜溶胶及其制备方法 |
| US8193475B2 (en) | 2007-02-13 | 2012-06-05 | Advanced Materials Enterprises Company Limited | Heating apparatus and method for making the same |
| US7926209B2 (en) | 2007-02-13 | 2011-04-19 | Advanced Materials Enterprises Company Limited | Electric iron |
| WO2009105945A1 (en) * | 2008-02-28 | 2009-09-03 | Advanced Materials Enterprises Co., Ltd. | Electric iron |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| SU886328A1 (ru) * | 1980-03-28 | 1981-11-30 | Институт Электроники Ан Белсср | Токопровод щий материал дл пленочных электронагревателей |
| DE3324647A1 (de) * | 1983-07-08 | 1985-01-17 | Schott Glaswerke, 6500 Mainz | Tauchverfahren zur herstellung transparenter, elektrisch leitfaehiger, dotierter indiumoxidschichten |
| DE3705639A1 (de) * | 1987-02-21 | 1988-09-01 | Philips Patentverwaltung | Duennschicht-heizelement |
| JPH07105282B2 (ja) * | 1988-05-13 | 1995-11-13 | 富士ゼロックス株式会社 | 抵抗体及び抵抗体の製造方法 |
| CN1036432C (zh) * | 1992-07-09 | 1997-11-12 | 连铁军 | 一种耐高温透明电热膜及其生产方法 |
| US5616266A (en) * | 1994-07-29 | 1997-04-01 | Thermal Dynamics U.S.A. Ltd. Co. | Resistance heating element with large area, thin film and method |
-
1998
- 1998-09-18 AU AUPP5995A patent/AUPP599598A0/en not_active Abandoned
-
1999
- 1999-09-17 ID IDW20010871A patent/ID29148A/id unknown
- 1999-09-17 WO PCT/AU1999/000791 patent/WO2000018189A1/en not_active Application Discontinuation
- 1999-09-17 CN CNB998107727A patent/CN1146301C/zh not_active Expired - Fee Related
- 1999-09-17 JP JP2000571716A patent/JP2002525829A/ja active Pending
- 1999-09-17 BR BR9913812-3A patent/BR9913812A/pt not_active IP Right Cessation
- 1999-09-17 CA CA002344486A patent/CA2344486A1/en not_active Abandoned
- 1999-09-17 NZ NZ510655A patent/NZ510655A/en unknown
- 1999-09-17 EP EP99947118A patent/EP1120014A4/en not_active Withdrawn
- 1999-09-17 KR KR1020017003505A patent/KR20010079859A/ko not_active Application Discontinuation
Also Published As
| Publication number | Publication date |
|---|---|
| ID29148A (id) | 2001-08-02 |
| AUPP599598A0 (en) | 1998-10-08 |
| KR20010079859A (ko) | 2001-08-22 |
| WO2000018189A1 (en) | 2000-03-30 |
| CA2344486A1 (en) | 2000-03-30 |
| JP2002525829A (ja) | 2002-08-13 |
| EP1120014A1 (en) | 2001-08-01 |
| BR9913812A (pt) | 2001-08-14 |
| NZ510655A (en) | 2003-05-30 |
| EP1120014A4 (en) | 2004-06-16 |
| CN1317223A (zh) | 2001-10-10 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| ASS | Succession or assignment of patent right |
Owner name: GRAMWOOD MANAGEMENT CO., LTD. Free format text: FORMER OWNER: ELECTROX DOMESTIC PRODUCT CO., LTD. Effective date: 20041029 |
|
| C41 | Transfer of patent application or patent right or utility model | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20041029 Address after: New South Wales, Australia Patentee after: Graem Wood Management Company Limited Address before: New South Wales, Australia Patentee before: Electrox Domestic Product Co., Ltd. |
|
| C19 | Lapse of patent right due to non-payment of the annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |