CN114426138A - Can be at spool box that oven used - Google Patents
Can be at spool box that oven used Download PDFInfo
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- CN114426138A CN114426138A CN202111306407.3A CN202111306407A CN114426138A CN 114426138 A CN114426138 A CN 114426138A CN 202111306407 A CN202111306407 A CN 202111306407A CN 114426138 A CN114426138 A CN 114426138A
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- Prior art keywords
- block
- placing
- base
- rack
- limiting
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- 230000000670 limiting effect Effects 0.000 claims description 55
- 239000000463 material Substances 0.000 claims description 5
- 239000004696 Poly ether ether ketone Substances 0.000 claims description 4
- JUPQTSLXMOCDHR-UHFFFAOYSA-N benzene-1,4-diol;bis(4-fluorophenyl)methanone Chemical group OC1=CC=C(O)C=C1.C1=CC(F)=CC=C1C(=O)C1=CC=C(F)C=C1 JUPQTSLXMOCDHR-UHFFFAOYSA-N 0.000 claims description 4
- 229920002530 polyetherether ketone Polymers 0.000 claims description 4
- 239000000853 adhesive Substances 0.000 abstract description 4
- 230000001070 adhesive effect Effects 0.000 abstract description 4
- 235000012431 wafers Nutrition 0.000 description 14
- 238000000034 method Methods 0.000 description 9
- 239000004065 semiconductor Substances 0.000 description 6
- 230000006978 adaptation Effects 0.000 description 2
- 230000003044 adaptive effect Effects 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 238000004377 microelectronic Methods 0.000 description 2
- 241000220317 Rosa Species 0.000 description 1
- 125000003118 aryl group Chemical group 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 229920006351 engineering plastic Polymers 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000003292 glue Substances 0.000 description 1
- 230000004941 influx Effects 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229920003023 plastic Polymers 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 238000004528 spin coating Methods 0.000 description 1
- 230000000087 stabilizing effect Effects 0.000 description 1
- 238000009423 ventilation Methods 0.000 description 1
Images
Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
- B65D25/00—Details of other kinds or types of rigid or semi-rigid containers
- B65D25/02—Internal fittings
- B65D25/10—Devices to locate articles in containers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
- B65D25/00—Details of other kinds or types of rigid or semi-rigid containers
- B65D25/02—Internal fittings
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
- B65D25/00—Details of other kinds or types of rigid or semi-rigid containers
- B65D25/20—External fittings
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
- B65D81/00—Containers, packaging elements, or packages, for contents presenting particular transport or storage problems, or adapted to be used for non-packaging purposes after removal of contents
- B65D81/02—Containers, packaging elements, or packages, for contents presenting particular transport or storage problems, or adapted to be used for non-packaging purposes after removal of contents specially adapted to protect contents from mechanical damage
- B65D81/05—Containers, packaging elements, or packages, for contents presenting particular transport or storage problems, or adapted to be used for non-packaging purposes after removal of contents specially adapted to protect contents from mechanical damage maintaining contents at spaced relation from package walls, or from other contents
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
- B65D85/00—Containers, packaging elements or packages, specially adapted for particular articles or materials
- B65D85/30—Containers, packaging elements or packages, specially adapted for particular articles or materials for articles particularly sensitive to damage by shock or pressure
Abstract
The invention discloses a sheet box capable of being used in an oven, which comprises a base and a placing rack, wherein a positioning block for determining the position of the placing rack is arranged on the base, the placing rack is arranged above the base and comprises two vertically arranged placing plates, a storage space is arranged between the two placing plates, a plurality of vertically arranged placing grooves are arranged on one side, close to the storage space, of the side wall of each placing plate, the placing grooves on the two placing plates are in one-to-one correspondence, and the lower bottom surfaces of the placing grooves are inclined towards one side of the other placing plate from the placing plate provided with the placing groove. The invention provides a chip box capable of being used in an oven, which can realize stacking and baking of a plurality of chip products, and the contact position of a placing plate is in line contact, so that adhesive pollution is reduced.
Description
Technical Field
The invention relates to the technical field of wafer processing, in particular to a wafer box capable of being used in an oven.
Background
Nowadays, the semiconductor industry is rapidly developing, and the semiconductor equipment related to the semiconductor industry is continuously updated. The semiconductor industry is a technology-intensive industry, and the development level of the semiconductor industry is closely related to process flows and hardware facilities. In recent years, the domestic microelectronic industry is developed greatly, but many of the microelectronic industry rely on foreign semiconductor equipment, and a spin coater is an important process equipment. In the face of the influx of high-end equipment abroad and the shortage of related technologies in China, the development of own high-end equipment is urgently needed. In the prior art, a wafer spin coater is divided into a spin coater developer and a spin coater developer, and the efficiency of the coater needs to be further improved on the basis of meeting the requirement of full-automatic operation of the coater. In order to solve the problems, the full-automatic spin coater developed by the applicant completes automatic picking, placing and processing of the wafer by matching a robot with a spin coating cavity, and then the wafer can be automatically fed into the next step of processing equipment, so that the processing process is free from human participation, the safety performance is guaranteed, the wafer processing efficiency is greatly improved, and all-weather uninterrupted wafer processing can be realized. When wafers are automatically taken, placed and processed, a wafer box is needed, the wafer box can be used for storing the flaky wafers, and the wafers coated with glue are placed into an oven for baking.
Disclosure of Invention
The invention provides a wafer box capable of being used in an oven, which can meet the requirement of full-automatic work of a wafer spin coater, can realize stacking and baking of a plurality of sheet products, and reduces adhesive pollution because a placing plate is in line contact with a contact position.
In order to achieve the purpose, the invention adopts the following technical scheme:
the utility model provides a can be at spool box that oven used, includes base and rack, is equipped with the locating piece that is used for confirming the rack position on the base, and the rack setting is in the base top, and the rack includes two of vertical setting and places the board, and two are placed and are equipped with storage space between the board, and the lateral wall of placing the board is close to and is equipped with the standing groove of the vertical range of a plurality of on one side of storage space, and two standing groove one-to-one on placing the board, the lower bottom surface of standing groove is placed board lopsidedness to another by setting up this standing groove.
Among the above-mentioned technical scheme, can pile up a plurality of thin slice products in the storage space, the both sides of thin slice respectively with the lower bottom surface contact of standing groove, because the lower bottom surface slope of standing groove, the thin slice is line contact with the contact position who places the board, rather than face contact, reduces sticky pollution. During the use, only need place the rack on the position that the base corresponds, then hold the thin slice through the arm, one side that will scribble coating again puts into the standing groove up in proper order and piles up can, is equipped with the clearance between each thin slice, and the thin slice is piled up the back, takes off the rack from the base again, places the baking in the oven.
Preferably, the material of the placing plate is PEEK. The PEEK material is a novel semi-crystalline aromatic plastic engineering plastic, has extremely excellent physical and mechanical properties, can replace traditional materials such as metal, ceramic and the like in many special fields, and has outstanding contribution to the aspects of reducing mass and improving performance.
Preferably, the tops of the two placing plates are fixed through the connecting plate.
Preferably, a vent is provided on a side of the connecting plate near the open end of the storage space. The structure is convenient for heat exchange during later baking.
Preferably, the base is provided with a plurality of positioning blocks with different positions. Different limiting positions can be formed by positioning blocks with different positions, so that the base can be adapted to placing racks with different sizes, and products with different sizes can be adapted.
Preferably, the base is provided with a plurality of proximity switches, and the proximity switches are arranged at positions close to the positioning positions. Proximity switch can detect whether this position is equipped with the rack, and the proximity switch that different place framves were put and are started on the base is different, can detect the size of rack through proximity switch.
Preferably, the storage space comprises an opening end and a limiting end in a horizontal position, and a limiting block for limiting the slide-out of the sheets is arranged on one side, close to the limiting end, of the placing plate; a sliding limiting structure is arranged on one side, close to the opening end, of the placing plate, the limiting structure comprises a lifting block, a plurality of limiting strips which are vertically and sequentially arranged are arranged on the lifting block, the limiting strips correspond to the placing grooves one to one, and the lifting block is connected with the placing frame in a sliding mode along the vertical direction; when the rack is placed on the base, the bottom of the lifting block is in contact with the base and slides upwards, the gap between adjacent limiting strips is flush with the placing groove, when the rack is placed away from the base, the lifting block slides downwards, and the limiting strips are flush with the placing groove and block thin slices in the placing groove.
Among the above-mentioned technical scheme, the rack is after leaving the base, and spacing can avoid the thin slice to follow the standing groove roll-off in transporting the in-process. And the limiting structure does not need other driving parts and is determined by the position relation of the placing frame on the base, so that the limiting structure is safe and reliable. After the oven is placed into the placing rack, the bottom of the lifting block is in contact with the bottom surface in the oven, and the limiting strips can be opened as well, so that the influence of a sliding limiting structure on the product quality in the baking process is avoided.
Preferably, the limiting strip is provided with a curved surface matched with the profile of the side surface of the sheet. The limiting strip is provided with a curved surface matched with the profile of the side surface of the thin slice, so that the limiting strip is fully attached to the side wall of the thin slice, and a better limiting and stabilizing effect is achieved.
Preferably, the lifting block comprises a connecting block, a pressing block and a first spring, the connecting block and the placing frame are connected in a sliding mode in the vertical direction, the pressing block and the connecting block are connected in a sliding mode in the horizontal direction, two ends of the first spring are connected with the pressing block and the connecting block respectively (the first spring enables the pressing block and the connecting block to keep away from the moving trend), the limiting strip is arranged on the pressing block, a contact ejecting block is arranged on a position, contacted with the lifting block, of the base, and comprises an upper ejecting block and an inclined ejecting block, the upper ejecting block is arranged below the connecting block, the inclined ejecting block is arranged below the pressing block, a first guide inclined plane is arranged on the inclined ejecting block, and a second guide inclined plane is arranged on a position, contacted with the first guide inclined plane, of the pressing block.
Among the above-mentioned technical scheme, when the rack was placed on the base, first direction inclined plane contacted earlier with the second direction inclined plane, and compact heap relative connection piece horizontal slip, when last kicking block and connecting block bottom surface contact, the connecting block rose with the compact heap together, made the clearance between the spacing flush with the standing groove, made the thin slice can pass through. When the rack leaves the base, the connecting block descends together with the compressing block, so that the limiting strips are flush with the placing groove and block thin slices in the placing groove, and then under the action of the first spring, the compressing block horizontally slides relative to the connecting block, so that the limiting strips compress the side walls of thin slice products.
Preferably, the placing plate is provided with a second spring, two ends of the second spring are respectively connected with the placing plate and the connecting block, and the second spring enables the connecting block to keep moving downward relative to the placing plate. The structure can guarantee that the connecting block can place the board downstream relatively when the rack breaks away from the base.
Preferably, the placing plate is provided with an L-shaped guide groove, the guide groove comprises a vertical groove and a horizontal groove, a U-shaped sliding block and a strip-shaped sliding block are arranged in the guide groove, the U-shaped sliding block is fixed with the connecting block, and the strip-shaped sliding block is fixed with the pressing block; u-shaped slider and vertical groove are along vertical direction sliding connection, and the one end setting of bar slider is in U-shaped slider and along horizontal direction sliding connection with U-shaped slider, and the open end of U-shaped slider is towards the horizontal groove, and when the open end of U-shaped slider was leveled with the horizontal groove, the horizontal groove could be stretched into to the one end of bar slider.
Among the above-mentioned technical scheme, horizontal groove and bar slider adaptation. The structure can strictly limit the sliding sequence of the pressing blocks of the connecting block. When spacing compresses tightly the thin slice lateral wall, the base is kept away from to the rack this moment, need put the rack on the base, when perhaps on the base of overware, bar slider part is located the horizontal groove, U-shaped slider can't slide in vertical inslot this moment, the compact heap can only the relative connection piece horizontal slip promptly, get into the U-shaped opening of U-shaped slider back in completely when the bar slider, the limiting displacement of bar slider disappears, U-shaped slider and bar slider can slide in vertical inslot together, compact heap and connecting block can place the board relatively and move together in vertical direction promptly. When the placing frame is placed on the base and needs to be taken away, the U-shaped sliding block and the bar-shaped sliding block are located in the vertical groove, the vertical sliding in the vertical groove can be achieved, after the placing frame leaves the base, the connecting block and the U-shaped sliding block move downwards together, the U-shaped sliding block moves to the position where the U-shaped sliding block flushes with the horizontal groove, the open end of the U-shaped sliding block is aligned to the horizontal groove, the bar-shaped sliding block can be partially separated from the U-shaped sliding block to enter the horizontal groove, the pressing block and the limiting bar transverse moving press the side wall of a product at the moment, and the part of the bar-shaped sliding block entering the horizontal groove limits the sliding of the U-shaped sliding block in the vertical groove. The compression blocks of the connecting blocks are strictly limited in sliding sequence, so that the side walls of the products are prevented from being scratched by the limiting strips, or the products are prevented from being deformed and damaged due to the fact that the limiting strips move up and down.
The invention has the beneficial effects that: (1) stacking and baking of a plurality of sheet products can be realized, and the contact position between the placing plate and the placing plate is in line contact, so that the adhesive pollution is reduced; (2) the positioning blocks with different positions can form different limiting positions, so that the base is adaptive to placing frames with different sizes, and is adaptive to products with different sizes; (3) the thin slices can be prevented from sliding out of the placing groove in the conveying process; (4) the structure can severely limit the sequence of the sliding of the pressing blocks of the connecting blocks, and the sliding sequence of the pressing blocks of the connecting blocks is strictly limited, so that the side wall of a product is prevented from being scratched by the limiting strips, or the product is prevented from being deformed and damaged due to the fact that the limiting strips move up and down.
Drawings
FIG. 1 is a schematic structural view of the present invention;
FIG. 2 is an enlarged view of a portion of the present invention;
FIG. 3 is a schematic view of the structure of the base of the present invention;
FIG. 4 is a schematic structural view of example 2;
FIG. 5 is a partial structural view of embodiment 2;
FIG. 6 is a partial structural view of embodiment 3.
In the figure: the base 1, the rack 2, place board 2.1, guide slot 2.1.1, vertical groove 2.1.2, horizontal groove 2.1.3, storage space 2.2, open end 2.2.1, spacing end 2.2.2, standing groove 2.3, connecting plate 2.4, vent 2.5, stopper 2.6, locating piece 3, proximity switch 4, slip limit structure 5, elevator 5.1, connecting block 5.1.1, compact heap 5.1.2, first spring 5.1.3, second direction inclined plane 5.1.4, spacing strip 5.2, contact kicking block 5.3, last kicking block 5.3.1, oblique kicking block 5.3.2, first direction inclined plane 5.3.3, U-shaped slider 5.5, bar slider 5.6.
Detailed Description
The invention is further described with reference to the following figures and specific embodiments.
Example 1:
as shown in fig. 1, 2 and 3, a sheet box capable of being used in an oven comprises a base 1 and a placing rack 2, wherein a plurality of positioning blocks 3 with different positions for determining the position of the placing rack 2 are arranged on the base 1, the placing rack 2 is arranged above the base 1, the placing rack 2 comprises a connecting plate 2.4 and two vertically arranged placing plates 2.1, and the tops of the two placing plates 2.1 are fixed through the connecting plate 2.4. The storage space 2.2 is arranged between the two placing plates 2.1, the side wall of the placing plate 2.1 close to the storage space 2.2 is provided with a plurality of vertically arranged placing grooves 2.3, the placing grooves 2.3 on the two placing plates 2.1 are in one-to-one correspondence, as shown in fig. 2, the lower bottom surface of the placing groove 2.3 is inclined towards one side of the other placing plate 2.1 by the placing plate 2.1 provided with the placing groove 2.3.
The storage space 2.2 comprises an opening end 2.2.1 and a limiting end 2.2.2 in the horizontal position, and a limiting block 2.6 for limiting the slide-out of the thin sheets is arranged on one side, close to the limiting end 2.2.2, of the placing plate 2.1; the side of the connecting plate 2.4 close to the open end 2.2.1 of the storage space 2.2 is provided with a ventilation opening 2.5. The base 1 is provided with a plurality of proximity switches 4, and the proximity switches 4 are arranged at positions close to the positioning positions. The material of the placement plate 2.1 is PEEK.
Among the above-mentioned technical scheme, can stack a plurality of thin slice products in storage space 2.2, the both sides of thin slice respectively with standing groove 2.3's lower bottom surface contact, because standing groove 2.3's lower bottom surface slope, the thin slice is line contact with standing plate 2.1's contact position, rather than face contact, reduces sticky pollution. During the use, only need place rack 2 on the position that base 1 corresponds, then hold the thin slice through the arm, again will scribble one side of coating and put into standing groove 2.3 upwards in proper order and pile up can, be equipped with the clearance between each thin slice, the thin slice is piled up the back, takes off rack 2 from base 1 again, places the baking in the oven.
Example 2:
as shown in fig. 4, on the basis of embodiment 1, a sliding limiting structure 5 is arranged on one side of the placing plate 2.1 close to the open end 2.2.1, as shown in fig. 5, the limiting structure includes a lifting block 5.1, the lifting block 5.1 includes a connecting block 5.1.1, a pressing block 5.1.2 and a first spring 5.1.3, a plurality of limiting strips 5.2 which are vertically arranged in sequence are arranged on the pressing block 5.1.2, and the limiting strips 5.2 correspond to the placing grooves 2.3 one by one; connecting block 5.1.1 and rack 2 are along vertical direction sliding connection, compact heap 5.1.2 and connecting block 5.1.1 are along horizontal direction sliding connection, and first spring 5.1.3 both ends are connected with compact heap 5.1.2 and connecting block 5.1.1 respectively, and first spring 5.1.3 makes compact heap 5.1.2 and connecting block 5.1.1 keep away from the trend of motion, be equipped with contact kicking block 5.3 on the position of base 1 and elevator 5.1 contact, contact kicking block 5.3 is equipped with first direction inclined plane 5.3.3 including setting up last kicking block 5.3.1 below connecting block 5.1.1 and setting up the oblique kicking block 5.3.2 below compact heap 5.1.2 on the oblique kicking block 5.3.2, be equipped with second direction inclined plane 5.1.4 on the position that compact heap 5.1.2 and first direction inclined plane 5.3.3 contact. The placing plate 2.1 is provided with a second spring, the two ends of the second spring are respectively connected with the placing plate 2.1 and the connecting block 5.1.1, and the connecting block 5.1.1 is enabled to relatively place the plate 2.1 by the second spring to keep moving downward. When the placing frame 2 is placed on the base 1, the bottom of the lifting block 5.1 is in contact with the base 1 and slides upwards, the gap between the adjacent limiting strips 5.2 is flushed with the placing groove 2.3, when the placing frame 2 is placed away from the base 1, the lifting block 5.1 slides downwards, the limiting strips 5.2 are flushed with the placing groove 2.3 and block thin slices in the placing groove 2.3.
Among the above-mentioned technical scheme, rack 2 is leaving base 1 back, and spacing 5.2 can avoid the thin slice to slide out from standing groove 2.3 in transporting the in-process, be equipped with on spacing 5.2 with the curved surface of thin slice side profile adaptation, make the lateral wall of spacing 5.2 and thin slice fully laminate, reach better spacing stable effect. And the limiting structure does not need other driving parts and is determined by the position relation of the placing frame 2 on the base 1, so that the device is safe and reliable. After the placing frame 2 is placed into the oven, the bottom of the lifting block 5.1 is in contact with the bottom surface in the oven, the limiting strip 5.2 can be opened as well, and the influence of the sliding limiting structure 5 on the product quality in the baking process is avoided.
Example 3:
as shown in fig. 6, on the basis of embodiment 2, an L-shaped guide groove 2.1.1 is provided on the placement plate 2.1, the guide groove 2.1.1 includes a vertical groove 2.1.2 and a horizontal groove 2.1.3, a U-shaped slider 5.5 and a strip-shaped slider 5.6 are provided in the guide groove 2.1.1, the U-shaped slider 5.5 is fixed to a connection block 5.1.1, and the strip-shaped slider 5.6 is fixed to a pressing block 5.1.2; u-shaped slider 5.5 and vertical groove 2.1.2 along vertical direction sliding connection, the one end setting of bar slider 5.6 is in U-shaped slider 5.5 and along horizontal direction sliding connection with U-shaped slider 5.5, and open end 2.2.1 of U-shaped slider 5.5 is towards horizontal groove 2.1.3, and when open end 2.2.1 of U-shaped slider 5.5 was leveled with horizontal groove 2.1.3, the one end of bar slider 5.6 can stretch into horizontal groove 2.1.3.
In the technical scheme, the horizontal groove 2.1.3 is matched with the strip-shaped sliding block 5.6. The structure can strictly limit the sliding sequence of the pressing blocks 5.1.2 of the connecting block 5.1.1. When the limiting strip 5.2 compresses the side wall of the thin sheet, the placing frame 2 is far away from the base 1 at the moment, the placing frame 2 needs to be placed on the base 1, or when the base 1 of the baking tray is placed on, the strip-shaped sliding block 5.6 is partially positioned in the horizontal groove 2.1.3, the U-shaped sliding block 5.5 cannot slide in the vertical groove 2.1.2 at the moment, namely, the pressing block 5.1.2 can only horizontally slide relative to the connecting block 5.1.1, after the strip-shaped sliding block 5.6 completely enters the U-shaped opening of the U-shaped sliding block 5.5, the limiting effect of the strip-shaped sliding block 5.6 disappears, the U-shaped sliding block 5.5 and the strip-shaped sliding block 5.6 can slide together in the vertical groove 2.1.2, namely, the pressing block 5.1.2 and the connecting block 5.1.1 can relatively place the plate 2.1 to move together in the vertical direction. When the placing frame 2 is placed on the base 1 and needs to be taken away, the U-shaped sliding block 5.5 and the strip-shaped sliding block 5.6 are located in the vertical groove 2.1.2 and can vertically slide in the vertical groove 2.1.2, after the placing frame 2 leaves the base 1, the connecting block 5.1.1 and the U-shaped sliding block 5.5 move downwards together, the U-shaped sliding block 5.5 moves to be flush with the horizontal groove 2.1.3, the open end 2.2.1 of the U-shaped sliding block 5.5 is aligned with the horizontal groove 2.1.3, the strip-shaped sliding block 5.6 can be partially separated from the U-shaped sliding block 5.5 and enters the horizontal groove 2.1.3, the pressing block 5.1.2 and the limiting strip-shaped sliding block 5.6 transversely move to press the side wall of a product, and the strip-shaped sliding block 5.6 partially entering the horizontal groove 2.1.3 limits the sliding of the U-shaped sliding block 5.5 in the vertical groove 2.1.2. The sliding sequence of the pressing blocks 5.1.2 of the connecting blocks 5.1.1 is strictly limited, so that the side wall of a product is prevented from being scratched by the limiting strips 5.2, or the product is prevented from being deformed and damaged due to the fact that the limiting strips 5.2 move up and down.
The invention has the beneficial effects that: (1) stacking and baking of a plurality of sheet products can be realized, and the contact position of the placing plate 2.1 is in line contact with the placing plate, so that adhesive pollution is reduced; (2) the positioning blocks 3 with different positions can form different limiting positions, so that the base 1 is matched with the placing racks 2 with different sizes, and the products with different sizes are matched; (3) the sheets can be prevented from sliding out of the placing groove 2.3 in the conveying process; (4) the structure can strictly limit the sliding sequence of the pressing blocks 5.1.2 of the connecting block 5.1.1, and the sliding sequence of the pressing blocks 5.1.2 of the connecting block 5.1.1 is strictly limited, so that the side wall of a product is prevented from being scratched by the limiting strips 5.2, or the product is prevented from being deformed and damaged due to the fact that the limiting strips 5.2 move up and down.
Claims (7)
1. The utility model provides a can be at spool box that oven used, characterized by, includes base and rack, is equipped with the locating piece that is used for confirming the rack position on the base, and the rack setting is in the base top, and the rack includes two of vertical setting place the board, and two are placed and are equipped with storage space between the board, and the lateral wall of placing the board is close to and is equipped with the standing groove of a plurality of vertical arrangement on one side of storage space, and two standing groove one-to-one on placing the board, the lower bottom surface of standing groove is placed board one side slope to another by setting up this standing groove.
2. The cartridge of claim 1, wherein the material of the plate is PEEK.
3. A cartridge case for use in an oven as claimed in claim 1, wherein the top of the two placement plates are fixed by a connection plate.
4. A cartridge for use in an oven as claimed in claim 3 wherein the side of the connecting plate adjacent the open end of the storage space is provided with a vent.
5. The chip box of claim 1, 2, 3 or 4, wherein the storage space comprises an opening end and a limiting end in a horizontal position, and a limiting block for limiting the slide-out of the chips is arranged on one side of the placing plate close to the limiting end; one side of placing the board and being close to the open end is equipped with slip limit structure, and limit structure includes the elevator, be equipped with the vertical spacing of arranging in proper order of a plurality of on the elevator, spacing and standing groove one-to-one, elevator and rack are along vertical direction sliding connection.
6. A box containing box capable of being used in an oven as claimed in claim 5, wherein the lifting block comprises a connecting block, a pressing block and a first spring, the connecting block is connected with the placing frame in a sliding mode along a vertical direction, the pressing block is connected with the connecting block in a sliding mode along a horizontal direction, two ends of the first spring are respectively connected with the pressing block and the connecting block, the limiting strip is arranged on the pressing block, a contact top block is arranged at a position where the base is in contact with the lifting block, the contact top block comprises an upper top block arranged below the connecting block and an inclined top block arranged below the pressing block, a first guide inclined surface is arranged on the inclined top block, and a second guide inclined surface is arranged at a position where the pressing block is in contact with the first guide inclined surface.
7. A chip box used in an oven as claimed in claim 5, wherein the placing plate is provided with a second spring, the two ends of the second spring are respectively connected with the placing plate and the connecting block, and the second spring keeps the connecting block moving downward relative to the placing plate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111306407.3A CN114426138A (en) | 2021-11-05 | 2021-11-05 | Can be at spool box that oven used |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111306407.3A CN114426138A (en) | 2021-11-05 | 2021-11-05 | Can be at spool box that oven used |
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| CN114426138A true CN114426138A (en) | 2022-05-03 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN202111306407.3A Pending CN114426138A (en) | 2021-11-05 | 2021-11-05 | Can be at spool box that oven used |
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Citations (8)
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| JPH0853187A (en) * | 1994-08-09 | 1996-02-27 | Sony Corp | Carrier for storing plate-like article |
| JP2001102394A (en) * | 1999-10-01 | 2001-04-13 | Seiko Epson Corp | Carrier |
| US6432849B1 (en) * | 1998-02-04 | 2002-08-13 | Nikon Corporation | Substrate storage cassette positioning device and method |
| CN101303993A (en) * | 2007-05-10 | 2008-11-12 | 南亚科技股份有限公司 | Wafer bearing device |
| CN103811384A (en) * | 2012-11-06 | 2014-05-21 | 沈阳芯源微电子设备有限公司 | Wafer box inclination and homing device |
| CN210913451U (en) * | 2019-09-27 | 2020-07-03 | 深圳赛意法微电子有限公司 | Wafer material box and wafer material box handling equipment |
| CN211629055U (en) * | 2020-05-25 | 2020-10-02 | 荆州市弘晟光电科技有限公司 | Novel LED support storage box |
| CN214226896U (en) * | 2021-03-05 | 2021-09-17 | 宁波润华全芯微电子设备有限公司 | Box for chip positioner and degumming machine |
-
2021
- 2021-11-05 CN CN202111306407.3A patent/CN114426138A/en active Pending
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0853187A (en) * | 1994-08-09 | 1996-02-27 | Sony Corp | Carrier for storing plate-like article |
| US6432849B1 (en) * | 1998-02-04 | 2002-08-13 | Nikon Corporation | Substrate storage cassette positioning device and method |
| JP2001102394A (en) * | 1999-10-01 | 2001-04-13 | Seiko Epson Corp | Carrier |
| CN101303993A (en) * | 2007-05-10 | 2008-11-12 | 南亚科技股份有限公司 | Wafer bearing device |
| CN103811384A (en) * | 2012-11-06 | 2014-05-21 | 沈阳芯源微电子设备有限公司 | Wafer box inclination and homing device |
| CN210913451U (en) * | 2019-09-27 | 2020-07-03 | 深圳赛意法微电子有限公司 | Wafer material box and wafer material box handling equipment |
| CN211629055U (en) * | 2020-05-25 | 2020-10-02 | 荆州市弘晟光电科技有限公司 | Novel LED support storage box |
| CN214226896U (en) * | 2021-03-05 | 2021-09-17 | 宁波润华全芯微电子设备有限公司 | Box for chip positioner and degumming machine |
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