CN214226896U

CN214226896U - Box for chip positioner and degumming machine

Info

Publication number: CN214226896U
Application number: CN202120476314.4U
Authority: CN
Inventors: 刘晓龙; 沈云清
Original assignee: Ningbo All Semi Micro Electronics Equipment Co ltd
Current assignee: Ningbo All Semi Micro Electronics Equipment Co ltd
Priority date: 2021-03-05
Filing date: 2021-03-05
Publication date: 2021-09-17
Anticipated expiration: 2031-03-05

Abstract

The utility model discloses a cartridge positioner and degumming machine still include: the supporting plate is provided with a plurality of positioning grooves; the locating pin with the constant head tank is used for matching the film cassettes with different widths. The utility model provides a multiple different specifications can not be fixed a position to the anchor clamps of film box the problem of film box.

Description

Box for chip positioner and degumming machine

Technical Field

The utility model relates to a semiconductor trade wafer wet processing field especially relates to a wafer box positioner and degumming machine.

Background

The wafer refers to a silicon wafer used for manufacturing a silicon semiconductor integrated circuit, and a wet processing process is generally adopted to clean the wafer in the process of manufacturing the wafer at present. Before cleaning the wafers, a plurality of wafers are fixed in the wafer box, so the wafer box needs to be fixed and positioned. Wafers of different sizes correspond to different wafer boxes, and the existing clamp for fixing the wafer boxes is only suitable for the wafer boxes of one specification and cannot meet the requirements of the wafers of different sizes.

SUMMERY OF THE UTILITY MODEL

Therefore, the embodiment of the utility model provides a film cassette positioner and degumming machine effectively solve the anchor clamps of film cassette can only install a specification film cassette, the not big problem of suitability.

On the one hand, the embodiment of the utility model provides a wafer box positioner, include: the supporting plate is provided with a plurality of positioning grooves; the locating pin with the constant head tank is used for matching the film cassettes with different widths.

The technical effect achieved after the technical scheme is adopted is as follows: the positioning grooves are used for positioning the wafer boxes with different sizes respectively, so that various wafers can be placed without replacing the supporting plate, and the wafer processing procedures are reduced.

In a first embodiment of the present invention, the support plate comprises at least one positive stop, the positive stop being provided with a stop mating surface for fitting against the sheet cassette; the locating slot is arranged on the stop block matching surface.

The technical effect achieved after the technical scheme is adopted is as follows: the positive stop is used for positioning the front side of the wafer box.

In the first embodiment of the present invention, the positioning groove corresponding to the cassette with a large width is close to the end of the front stop; the positioning groove corresponding to the small-width wafer box is far away from the end part of the front stop block.

The technical effect achieved after the technical scheme is adopted is as follows: the film box with large width and the film box with small width can be arranged at the position, relatively centered, on the supporting plate.

In a first embodiment of the present invention, the front stop block includes a first front stop block and a second front stop block, and the stop block mating surface of the first front stop block and the stop block mating surface of the second front stop block are in the same plane; each wafer box is provided with a first side plate matched with the first front stop block and a second side plate matched with the second front stop block; the positioning groove is formed in the first front stop block, and the positioning pin is arranged on the first side plate.

The technical effect achieved after the technical scheme is adopted is as follows: when the supporting plate needs to be provided with the wafer boxes with more sizes, only the first front stop block needs to be replaced, and therefore the wafer box positioning device has the advantage of being convenient to adjust.

In a first embodiment of the present invention, the magazine comprises a first magazine and a second magazine, wherein the width of the first magazine is larger than that of the second magazine; the locating slot includes first locating slot and second locating slot, first locating slot corresponds on the first piece box the locating pin, the second locating slot corresponds on the second piece box the locating pin.

The technical effect achieved after the technical scheme is adopted is as follows: the supporting plate can position two kinds of film boxes with different sizes.

The utility model discloses in the first embodiment, the backup pad still includes at least one backstop subassembly, the spool box clamp is located corresponding between the backstop subassembly and the positive stop.

The technical effect achieved after the technical scheme is adopted is as follows: the backstop is used for positioning the rear side of the wafer box.

In a first embodiment of the present invention, the rear stop assembly includes: the first sheet box is arranged between the first rear stop block and the front stop block; the second sheet box is arranged between the second rear stop block and the front stop block; the first rear stop block and the front stop block form a first mounting space, and the second rear stop block is located in the first mounting space.

The technical effect achieved after the technical scheme is adopted is as follows: the first rear stop block is used for positioning two edges and corners at the rear of the first sheet box, and the second rear stop block is used for positioning two edges and corners at the rear of the second sheet box.

In the first embodiment of the present invention, the magazine further comprises a third magazine and a fourth magazine, wherein the width of the third magazine is smaller than that of the second magazine, and the width of the third magazine is larger than that of the fourth magazine; the locating slot still includes third locating slot and fourth locating slot, the third locating slot corresponds on the third spool box the locating pin, the fourth locating slot corresponds on the fourth spool box the locating pin.

The technical effect achieved after the technical scheme is adopted is as follows: the supporting plate can position four kinds of film boxes with different sizes.

In a first embodiment of the present invention, the supporting plate further comprises a positioning hole opened between the first front block and the second front block.

The technical effect achieved after the technical scheme is adopted is as follows: the positioning hole is used for fixing the position of the supporting plate on the degumming machine.

On the other hand, the embodiment of the utility model provides a degumming machine, include film box positioner.

The technical effect achieved after the technical scheme is adopted is as follows: the photoresist stripper has the advantage of positioning various wafer box assemblies.

In summary, the above embodiments of the present application may have one or more of the following advantages or benefits:

i) the wafer box positioning device can position various wafer boxes through the positioning grooves, and different wafer boxes are not required to be positioned through replacing the supporting plate, so that the wafer cleaning efficiency can be improved;

ii) the positive and negative stop assemblies are capable of securing the horizontal position of the cassette.

Drawings

In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings used in the description of the embodiments will be briefly introduced below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art that other drawings can be obtained according to these drawings without creative efforts.

Fig. 1 is a schematic structural diagram of a cassette positioning device 100 according to a first embodiment of the present invention;

fig. 2 is a schematic view illustrating the connection between the supporting plate 110 and the second cassette 170 in fig. 1.

Fig. 3 is a schematic structural view of the first front block 120 in fig. 2.

Fig. 4 is a schematic structural view of the support plate 110 in fig. 2.

Fig. 5 is a schematic view of the cassette positioning device 100 of fig. 1 from another perspective.

Fig. 6 is a schematic structural view of fig. 2 from another view angle.

Description of the main element symbols:

100 is a film box positioning device; 110 is a support plate; 111 is a positioning hole; 112 is a sensor mounting position; 113 is a sensor; 120 is a first positive stop; 121 is a positioning groove; 122 is a stop block matching surface; 123 is a first positioning groove; 124 is a second positioning groove; 125 is a third positioning groove; 126 is a fourth positioning groove; 130 is a second front stop; 140 is a first rear stop; 150 is a second rear stop; 160 is a first cassette; 161 is a positioning pin; 162 is a first side panel; 163 is a second side plate; 170 is a second cassette.

Detailed Description

The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative efforts belong to the protection scope of the present invention.

[ first embodiment ] A method for manufacturing a semiconductor device

Referring to fig. 1-2, a first embodiment of the present invention provides a tablet cassette positioning device 100, which includes: a support plate 110 and a cassette. Wherein, the supporting plate 110 is provided with a plurality of positioning grooves 121, each wafer box is provided with at least one positioning pin 161, and the positioning pins 161 and the positioning grooves 121 are used for matching the wafer boxes with different widths.

In this embodiment, the supporting plate 110 is used to fix and position the wafer cassette, so that the robot can conveniently pick and place the wafer in the wafer cassette. Set up a plurality of constant head tanks 121 and can realize multiple different width on backup pad 110 the fixing of film cartridge compares and fixes a position the difference through different backup pads 110 the film cartridge, and this embodiment has the saving the fixed time of film cartridge improves wafer cleaning efficiency's advantage.

In particular, with reference to FIGS. 3-4, support plate 110 may include at least one positive stop having a stop mating surface 122 for engaging the cassette, for example. Wherein the other side of each front stop block opposite to the stop block matching surface 122 is flush with the side surface of the support plate 110, and the front stop blocks are positioned through the side surface of the support plate 110.

Preferably, the positioning groove 121 is opened at the stopper fitting surface 122. For example, the positioning grooves 121 are sequentially arranged on the stopper mating surface 122. The positioning groove 121 corresponding to the large-width wafer box is far away from the central line of the supporting plate; the width is little the constant head tank 121 that the spool box corresponds is close to the central line of backup pad for the width is big spool box and width are little the spool box is the one side that all can not be partial to backup pad 110, is convenient for the location of spool box.

It is apparent that the support plate 110 can only hold and position one cassette at a time. When wafers of different sizes need to be received, the cassettes on the support plate 110 need to be replaced.

Preferably, the front stop block comprises a first front stop block 120 and a second front stop block 130, and the stop block mating surface 122 of the first front stop block 120 and the stop block mating surface 122 of the second front stop block 130 are in the same plane. Also, the widths of the first and second

front stoppers

120 and 130 are equal such that the side of the first front stopper 120 opposite to the stopper mating surface 122 thereof and the side of the second front stopper 130 opposite to the stopper mating surface 122 thereof are flush with the side surface of the support plate 110.

Further, referring to fig. 1-2, each of the cassettes is provided with a first side plate 162 that engages the first positive stop 120, and a second side plate 163 that engages the second positive stop 130. The first side plate 162 and the second side plate 163 are oppositely arranged, and a plurality of wafer mounting plates are arranged on the first side plate 162 and the second side plate 163 and are arranged at equal intervals in the vertical direction for placing wafers.

The positioning groove 121 is disposed on the first front block 120, and the positioning pin 161 is disposed on the first side plate 162. Specifically, a plurality of positioning grooves 121 are sequentially arranged on the stopper matching surface 122 of the first front stopper 120, and correspondingly, a positioning pin 161 is arranged at the bottom end of the first side plate 162 of each magazine and is matched with the corresponding positioning groove 121; the second front block 130 is not provided with a positioning slot 121, and the block matching surface 122 of the second front block 130 is directly attached to the second side plate 163. Therefore, when the cartridge of a new size needs to be fixed and positioned on the support plate 110, only the first front stopper 120 needs to be replaced, and thus the cartridge positioning device 100 has an advantage of being easily adjusted.

Preferably, the cartridge includes a first cartridge 160 and a second cartridge 170, and the first cartridge 160 has a width greater than that of the second cartridge 170. For example, the first cassette 160 may be used to hold 6 "size wafers and the second cassette 170 may be used to hold 4" size wafers. Accordingly, the positioning groove 121 includes a first positioning groove 123 and a second positioning groove 124, the first positioning groove 123 corresponds to the positioning pin 161 of the first sheet cassette 160, and the second positioning groove 124 corresponds to the positioning pin 161 of the second sheet cassette 170.

Further, the first positioning groove 123 is located at an end portion of the first front block 120, and communicates the end portion of the first front block 120 with the block mating surface 122; the second positioning groove 124 is located at a side of the first positioning groove 123 close to the second front stopper 130. A counter bore or a waist hole can be respectively arranged between the first positioning groove 123 and the second positioning groove 124 and at one end of the first front stop 120 far away from the first positioning groove 123, and the first front stop 120 is fixed with the support plate 110 by a bolt, so that the first front stop 120 is prevented from loosening and being incapable of positioning the wafer box. The waist hole is provided, for example, in the width direction of the first front stopper 120, so that the position of the sheet cassette in the width direction of the first front stopper 120 is adjusted through the waist hole. Of course, the second front block 130 may also be fixed by a counterbore or a waist hole, which will not be described herein.

Preferably, referring to fig. 4, the supporting plate 110 further includes at least one back stop assembly, and the magazine is clamped between the corresponding back stop assembly and the front stop. The positioning groove 121 and the corresponding rear stop block assembly are respectively located at two ends of a side plate of the wafer box.

Specifically, the first rear block 140 includes, for example: two oppositely disposed first backstops 140 and two oppositely disposed second backstops 150. Wherein, the first magazine 160 is disposed between the first rear block 140 and the front block; the second sheet cassette 170 is disposed between the second rear stopper 150 and the front stopper. The first rear stopper 140 forms a first installation space with the front stopper, and the second rear stopper 150 is located in the first installation space.

Preferably, the support plate 110 further comprises at least one sensor mounting location 112, for example. The sensor mounting location 112 is located between the first side plate 162 and the second side plate 163 of the first cassette 160 for mounting a sensor 113 that senses the cassette. For example, the first cassette 160 corresponds to at least one sensor mounting position 112, when the first cassette 160 is placed on the supporting plate, the corresponding sensor 113 will send out the model, and the sensors 113 corresponding to other cassettes will not send out signals; the sensor 113 of the second cassette 170 is located at a side of the first cassette 160 close to the front stop and between the first side plate 162 and the second side plate 163 of the second cassette 170, which will not be described herein.

Further, each sensor mounting position 112 is provided with a plurality of sensor mounting holes, for example, the plurality of sensor mounting holes are arranged in the grooves, and the sensor mounting hole in each groove corresponds to the wafer box with one size. For example, the sensor 113 corresponding to the first sheet cassette 160 can be mounted to any one of the sensor mounting holes in the corresponding recess.

Specifically, with reference to fig. 4-5, the first backstop 140 is positioned on a side of the first cassette 160 away from its interior. Wherein, the side of the first rear block 140 facing the first cassette 160 is a first connection surface and a second connection surface perpendicular to each other. The first connecting surface is attached to one side of the first side plate 162 or the second side plate 163, which is far away from the inner cavity of the first sheet box 160, so as to prevent the first sheet box 160 from sliding along a direction perpendicular to the first side plate 162; the second connecting surface is attached to a side of the first side plate 162 away from the front block, so as to prevent the first sheet box 160 from sliding in a direction perpendicular to the front block.

Further, the first rear stopper 140 is fixed to the support plate 110, for example, by at least one kidney hole or a counterbore. Wherein the waist hole is disposed in a direction perpendicular to the first side plate 162, for example, and the position of the first sheet box 160 in the direction perpendicular to the first side plate 162 can be adjusted by adjusting the waist hole of the first rear block 140.

Specifically, referring to fig. 4 and 6, the second rear stopper 150 is located in the inner cavity of the second cartridge 170. Wherein, one side of the second rear stopper 150 connected to the second cassette 170 is a third connection surface and a fourth connection surface which are perpendicular to each other. The third connecting surface is attached to one side of the first side plate 162 or the second side plate 163 of the second magazine 170, which faces the inner cavity of the second magazine 170, so as to prevent the second magazine 170 from sliding in a direction perpendicular to the first side plate 162; the first side plate 162 of the fourth connecting surface attached to the second sheet box 170 is far away from one side of the front stop block, so that the second sheet box 170 is prevented from sliding along the direction perpendicular to the front stop block.

Further, the second rear stop block may also be fixed to the support plate 110 by using a waist hole or a counter bore, which is not described herein again.

Preferably, and with continued reference to FIG. 3, the detent 121 further includes, for example, a third detent 125 and a fourth detent 126, the third detent 125 being located on a side of the second detent 124 adjacent the second positive stop 130, and the fourth detent 126 being located on a side of the third detent 125 adjacent the second positive stop 130. Wherein the third positioning blade is used to position the cassette having a smaller width than the second cassette 170.

Correspondingly, the magazine further includes, for example, a third magazine (not shown) and a fourth magazine (not shown), the width of the third magazine is smaller than the second magazine 170, and the width of the third magazine is greater than the fourth magazine. For example, the third cassette is used for placing 3 inches of wafers, and the fourth cassette is used for placing 2 inches of wafers. Wherein, the first curb plate 162 bottom of third spool box and fourth spool box also is equipped with locating pin 161, and third constant head tank 125 corresponds locating pin 161 on the third spool box, fourth constant head tank 126 corresponds locating pin 161 on the fourth spool box.

Preferably, with continued reference to fig. 4, the support plate 110 further includes, for example, a positioning hole 111, and the positioning hole 111 opens between the first and second

front stoppers

120 and 130 and communicates with a side surface of the support plate 110. The positioning holes 111 are used for positioning the support plate 110 on the degumming machine.

Further, the supporting plate 110 is circumferentially provided with a plurality of inclined waist holes for fixing the supporting plate 110 on the degumming machine.

[ second embodiment ]

The second embodiment of the present invention provides a photoresist stripper (not shown in the figure), which comprises the film box positioning device 100 provided by the first embodiment. The photoresist remover is, for example, a full-automatic photoresist remover or a semi-automatic photoresist remover. The wafer box positioning device 100 can position the wafer box, so that the wafer box can be conveniently taken and placed by the photoresist removing machine.

Finally, it should be noted that: the above embodiments are only used to illustrate the technical solution of the present invention, and not to limit it; although the present invention has been described in detail with reference to the foregoing embodiments, it should be understood by those skilled in the art that: the technical solutions described in the foregoing embodiments may still be modified, or some technical features may be equivalently replaced; such modifications and substitutions do not depart from the spirit and scope of the present invention in its corresponding aspects.

Claims

1. A cartridge positioning device, comprising:

the supporting plate is provided with a plurality of positioning grooves;

the locating pin with the constant head tank is used for matching the film cassettes with different widths.

2. A cartridge positioning device of claim 1, wherein the support plate comprises at least one positive stop having a stop mating surface for engaging the cartridge;

the locating slot is arranged on the stop block matching surface.

3. The cartridge positioning apparatus of claim 2, wherein the positioning groove corresponding to the large-width cartridge is near an end of the front stopper;

the positioning groove corresponding to the small-width wafer box is far away from the end part of the front stop block.

4. A cartridge positioning device of claim 3, wherein the positive stop includes a first positive stop and a second positive stop, the stop mating surface of the first positive stop and the stop mating surface of the second positive stop being in a same plane;

each wafer box is provided with a first side plate matched with the first front stop block and a second side plate matched with the second front stop block;

the positioning groove is formed in the first front stop block, and the positioning pin is arranged on the first side plate.

5. The cartridge positioning apparatus of claim 4, wherein the cartridge comprises a first cartridge and a second cartridge, the first cartridge having a width greater than the second cartridge;

the locating slot includes first locating slot and second locating slot, first locating slot corresponds on the first piece box the locating pin, the second locating slot corresponds on the second piece box the locating pin.

6. A cartridge positioning device as in claim 5, wherein the support plate further comprises at least one backstop assembly, the cartridge being interposed between the respective backstop assembly and the positive stop.

7. The cassette positioning device of claim 6, wherein the backstop assembly comprises:

the first sheet box is arranged between the first rear stop block and the front stop block;

the second sheet box is arranged between the second rear stop block and the front stop block;

the first rear stop block and the front stop block form a first mounting space, and the second rear stop block is located in the first mounting space.

8. The cartridge positioning apparatus of claim 5, wherein the cartridge further comprises a third cartridge and a fourth cartridge, the third cartridge having a smaller width than the second cartridge, the third cartridge having a larger width than the fourth cartridge;

the locating slot still includes third locating slot and fourth locating slot, the third locating slot corresponds on the third spool box the locating pin, the fourth locating slot corresponds on the fourth spool box the locating pin.

9. The cartridge positioning device of claim 4, wherein the support plate further comprises a positioning hole opened between the first front stop and the second front stop.

10. A stripper comprising the cartridge positioning device of any of claims 1-9.