CN114270707B - 弹性波装置 - Google Patents

弹性波装置

Info

Publication number
CN114270707B
CN114270707B CN202080059195.0A CN202080059195A CN114270707B CN 114270707 B CN114270707 B CN 114270707B CN 202080059195 A CN202080059195 A CN 202080059195A CN 114270707 B CN114270707 B CN 114270707B
Authority
CN
China
Prior art keywords
elastic wave
wave resonator
film
edge regions
piezoelectric substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN202080059195.0A
Other languages
English (en)
Chinese (zh)
Other versions
CN114270707A (zh
Inventor
大门克也
泷川和大
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Manufacturing Co Ltd
Original Assignee
Murata Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co Ltd filed Critical Murata Manufacturing Co Ltd
Publication of CN114270707A publication Critical patent/CN114270707A/zh
Application granted granted Critical
Publication of CN114270707B publication Critical patent/CN114270707B/zh
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/64—Filters using surface acoustic waves
    • H03H9/6423—Means for obtaining a particular transfer characteristic
    • H03H9/6433—Coupled resonator filters
    • H03H9/6436—Coupled resonator filters having one acoustic track only
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/125—Driving means, e.g. electrodes, coils
    • H03H9/145—Driving means, e.g. electrodes, coils for networks using surface acoustic waves
    • H03H9/14538—Formation
    • H03H9/14541—Multilayer finger or busbar electrode
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02535—Details of surface acoustic wave devices
    • H03H9/02543—Characteristics of substrate, e.g. cutting angles
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02535—Details of surface acoustic wave devices
    • H03H9/02543—Characteristics of substrate, e.g. cutting angles
    • H03H9/02574—Characteristics of substrate, e.g. cutting angles of combined substrates, multilayered substrates, piezoelectrical layers on not-piezoelectrical substrate
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02535—Details of surface acoustic wave devices
    • H03H9/02992—Details of bus bars, contact pads or other electrical connections for finger electrodes
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/125—Driving means, e.g. electrodes, coils
    • H03H9/13—Driving means, e.g. electrodes, coils for networks consisting of piezoelectric or electrostrictive materials
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/125—Driving means, e.g. electrodes, coils
    • H03H9/145—Driving means, e.g. electrodes, coils for networks using surface acoustic waves
    • H03H9/14544—Transducers of particular shape or position
    • H03H9/1457—Transducers having different finger widths
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/25—Constructional features of resonators using surface acoustic waves
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/64—Filters using surface acoustic waves
    • H03H9/6423—Means for obtaining a particular transfer characteristic
    • H03H9/6433—Coupled resonator filters
    • H03H9/6483—Ladder SAW filters

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
CN202080059195.0A 2019-08-30 2020-08-21 弹性波装置 Active CN114270707B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2019-158337 2019-08-30
JP2019158337 2019-08-30
PCT/JP2020/031658 WO2021039639A1 (ja) 2019-08-30 2020-08-21 弾性波装置

Publications (2)

Publication Number Publication Date
CN114270707A CN114270707A (zh) 2022-04-01
CN114270707B true CN114270707B (zh) 2026-02-27

Family

ID=74683526

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202080059195.0A Active CN114270707B (zh) 2019-08-30 2020-08-21 弹性波装置

Country Status (5)

Country Link
US (1) US12355425B2 (https=)
JP (1) JP7268747B2 (https=)
KR (1) KR102636227B1 (https=)
CN (1) CN114270707B (https=)
WO (1) WO2021039639A1 (https=)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2022264933A1 (ja) * 2021-06-16 2022-12-22 株式会社村田製作所 弾性波装置
CN117652097A (zh) * 2021-07-21 2024-03-05 株式会社村田制作所 弹性波装置及滤波器装置
WO2023048140A1 (ja) * 2021-09-21 2023-03-30 株式会社村田製作所 弾性波装置
WO2024043347A1 (ja) * 2022-08-26 2024-02-29 株式会社村田製作所 弾性波装置及びフィルタ装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106464229A (zh) * 2014-05-26 2017-02-22 株式会社村田制作所 弹性波装置
CN109863695A (zh) * 2016-10-28 2019-06-07 株式会社村田制作所 梯型滤波器、双工器以及弹性波滤波器装置

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS553020Y2 (https=) 1976-10-08 1980-01-24
DE102010005596B4 (de) 2010-01-25 2015-11-05 Epcos Ag Elektroakustischer Wandler mit verringerten Verlusten durch transversale Emission und verbesserter Performance durch Unterdrückung transversaler Moden
WO2014192755A1 (ja) * 2013-05-29 2014-12-04 株式会社村田製作所 弾性波フィルタ装置
WO2015155984A1 (en) * 2014-04-08 2015-10-15 Skyworks Panasonic Filter Solutions Japan Co., Ltd. Acoustic wave resonators, acoustic wave filters, antenna duplexers, modules and communication devices using the same
KR102083803B1 (ko) * 2014-06-23 2020-03-03 가부시키가이샤 무라타 세이사쿠쇼 탄성파 장치
WO2016170982A1 (ja) * 2015-04-24 2016-10-27 株式会社村田製作所 弾性波装置
CN107615654B (zh) 2015-06-24 2020-08-21 株式会社村田制作所 滤波器装置
DE112017003190B4 (de) * 2016-06-27 2025-02-20 Murata Manufacturing Co., Ltd. Vorrichtung für elastische Wellen
CN110140296B (zh) * 2016-12-28 2023-01-13 株式会社村田制作所 纵耦合谐振器型弹性波滤波器
KR102332100B1 (ko) * 2017-06-06 2021-11-29 가부시키가이샤 무라타 세이사쿠쇼 탄성파 필터 장치, 멀티플렉서 및 복합 필터 장치

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106464229A (zh) * 2014-05-26 2017-02-22 株式会社村田制作所 弹性波装置
CN109863695A (zh) * 2016-10-28 2019-06-07 株式会社村田制作所 梯型滤波器、双工器以及弹性波滤波器装置

Also Published As

Publication number Publication date
WO2021039639A1 (ja) 2021-03-04
CN114270707A (zh) 2022-04-01
KR102636227B1 (ko) 2024-02-16
JPWO2021039639A1 (https=) 2021-03-04
JP7268747B2 (ja) 2023-05-08
US20220182037A1 (en) 2022-06-09
KR20220024799A (ko) 2022-03-03
US12355425B2 (en) 2025-07-08

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