JP7268747B2 - 弾性波装置 - Google Patents

弾性波装置 Download PDF

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Publication number
JP7268747B2
JP7268747B2 JP2021542843A JP2021542843A JP7268747B2 JP 7268747 B2 JP7268747 B2 JP 7268747B2 JP 2021542843 A JP2021542843 A JP 2021542843A JP 2021542843 A JP2021542843 A JP 2021542843A JP 7268747 B2 JP7268747 B2 JP 7268747B2
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Japan
Prior art keywords
elastic wave
wave resonator
edge regions
film
acoustic velocity
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English (en)
Japanese (ja)
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JPWO2021039639A1 (https=
JPWO2021039639A5 (https=
Inventor
克也 大門
和大 瀧川
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Murata Manufacturing Co Ltd
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Murata Manufacturing Co Ltd
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Publication of JPWO2021039639A5 publication Critical patent/JPWO2021039639A5/ja
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    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/125—Driving means, e.g. electrodes, coils
    • H03H9/145—Driving means, e.g. electrodes, coils for networks using surface acoustic waves
    • H03H9/14538—Formation
    • H03H9/14541—Multilayer finger or busbar electrode
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/64—Filters using surface acoustic waves
    • H03H9/6423—Means for obtaining a particular transfer characteristic
    • H03H9/6433—Coupled resonator filters
    • H03H9/6436—Coupled resonator filters having one acoustic track only
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02535—Details of surface acoustic wave devices
    • H03H9/02543—Characteristics of substrate, e.g. cutting angles
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02535—Details of surface acoustic wave devices
    • H03H9/02543—Characteristics of substrate, e.g. cutting angles
    • H03H9/02574—Characteristics of substrate, e.g. cutting angles of combined substrates, multilayered substrates, piezoelectrical layers on not-piezoelectrical substrate
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02535—Details of surface acoustic wave devices
    • H03H9/02992—Details of bus bars, contact pads or other electrical connections for finger electrodes
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/125—Driving means, e.g. electrodes, coils
    • H03H9/13—Driving means, e.g. electrodes, coils for networks consisting of piezoelectric or electrostrictive materials
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/125—Driving means, e.g. electrodes, coils
    • H03H9/145—Driving means, e.g. electrodes, coils for networks using surface acoustic waves
    • H03H9/14544—Transducers of particular shape or position
    • H03H9/1457—Transducers having different finger widths
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/25—Constructional features of resonators using surface acoustic waves
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/64—Filters using surface acoustic waves
    • H03H9/6423—Means for obtaining a particular transfer characteristic
    • H03H9/6433—Coupled resonator filters
    • H03H9/6483—Ladder SAW filters

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  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
JP2021542843A 2019-08-30 2020-08-21 弾性波装置 Active JP7268747B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2019158337 2019-08-30
JP2019158337 2019-08-30
PCT/JP2020/031658 WO2021039639A1 (ja) 2019-08-30 2020-08-21 弾性波装置

Publications (3)

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JPWO2021039639A1 JPWO2021039639A1 (https=) 2021-03-04
JPWO2021039639A5 JPWO2021039639A5 (https=) 2022-04-04
JP7268747B2 true JP7268747B2 (ja) 2023-05-08

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JP2021542843A Active JP7268747B2 (ja) 2019-08-30 2020-08-21 弾性波装置

Country Status (5)

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US (1) US12355425B2 (https=)
JP (1) JP7268747B2 (https=)
KR (1) KR102636227B1 (https=)
CN (1) CN114270707B (https=)
WO (1) WO2021039639A1 (https=)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2022264933A1 (ja) * 2021-06-16 2022-12-22 株式会社村田製作所 弾性波装置
CN117652097A (zh) * 2021-07-21 2024-03-05 株式会社村田制作所 弹性波装置及滤波器装置
WO2023048140A1 (ja) * 2021-09-21 2023-03-30 株式会社村田製作所 弾性波装置
WO2024043347A1 (ja) * 2022-08-26 2024-02-29 株式会社村田製作所 弾性波装置及びフィルタ装置

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2015182522A1 (ja) 2014-05-26 2015-12-03 株式会社村田製作所 弾性波装置
WO2016208446A1 (ja) 2015-06-24 2016-12-29 株式会社村田製作所 フィルタ装置
WO2018003338A1 (ja) 2016-06-27 2018-01-04 株式会社村田製作所 弾性波フィルタ装置
WO2018225650A1 (ja) 2017-06-06 2018-12-13 株式会社村田製作所 弾性波フィルタ装置、マルチプレクサ及び複合フィルタ装置

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS553020Y2 (https=) 1976-10-08 1980-01-24
DE102010005596B4 (de) 2010-01-25 2015-11-05 Epcos Ag Elektroakustischer Wandler mit verringerten Verlusten durch transversale Emission und verbesserter Performance durch Unterdrückung transversaler Moden
WO2014192755A1 (ja) * 2013-05-29 2014-12-04 株式会社村田製作所 弾性波フィルタ装置
WO2015155984A1 (en) * 2014-04-08 2015-10-15 Skyworks Panasonic Filter Solutions Japan Co., Ltd. Acoustic wave resonators, acoustic wave filters, antenna duplexers, modules and communication devices using the same
KR102083803B1 (ko) * 2014-06-23 2020-03-03 가부시키가이샤 무라타 세이사쿠쇼 탄성파 장치
WO2016170982A1 (ja) * 2015-04-24 2016-10-27 株式会社村田製作所 弾性波装置
WO2018079284A1 (ja) * 2016-10-28 2018-05-03 株式会社村田製作所 ラダー型フィルタ、デュプレクサ及び弾性波フィルタ装置
CN110140296B (zh) * 2016-12-28 2023-01-13 株式会社村田制作所 纵耦合谐振器型弹性波滤波器

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2015182522A1 (ja) 2014-05-26 2015-12-03 株式会社村田製作所 弾性波装置
WO2016208446A1 (ja) 2015-06-24 2016-12-29 株式会社村田製作所 フィルタ装置
WO2018003338A1 (ja) 2016-06-27 2018-01-04 株式会社村田製作所 弾性波フィルタ装置
WO2018225650A1 (ja) 2017-06-06 2018-12-13 株式会社村田製作所 弾性波フィルタ装置、マルチプレクサ及び複合フィルタ装置

Also Published As

Publication number Publication date
WO2021039639A1 (ja) 2021-03-04
CN114270707A (zh) 2022-04-01
CN114270707B (zh) 2026-02-27
KR102636227B1 (ko) 2024-02-16
JPWO2021039639A1 (https=) 2021-03-04
US20220182037A1 (en) 2022-06-09
KR20220024799A (ko) 2022-03-03
US12355425B2 (en) 2025-07-08

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