KR102636227B1 - 탄성파 장치 - Google Patents

탄성파 장치 Download PDF

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Publication number
KR102636227B1
KR102636227B1 KR1020227002063A KR20227002063A KR102636227B1 KR 102636227 B1 KR102636227 B1 KR 102636227B1 KR 1020227002063 A KR1020227002063 A KR 1020227002063A KR 20227002063 A KR20227002063 A KR 20227002063A KR 102636227 B1 KR102636227 B1 KR 102636227B1
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KR
South Korea
Prior art keywords
elastic wave
wave resonator
film
electrode
edge regions
Prior art date
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KR1020227002063A
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English (en)
Korean (ko)
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KR20220024799A (ko
Inventor
카츠야 다이몬
카즈히로 타키가와
Original Assignee
가부시키가이샤 무라타 세이사쿠쇼
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Publication of KR20220024799A publication Critical patent/KR20220024799A/ko
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Publication of KR102636227B1 publication Critical patent/KR102636227B1/ko
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Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/64—Filters using surface acoustic waves
    • H03H9/6423—Means for obtaining a particular transfer characteristic
    • H03H9/6433—Coupled resonator filters
    • H03H9/6436—Coupled resonator filters having one acoustic track only
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/125—Driving means, e.g. electrodes, coils
    • H03H9/145—Driving means, e.g. electrodes, coils for networks using surface acoustic waves
    • H03H9/14538—Formation
    • H03H9/14541—Multilayer finger or busbar electrode
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02535—Details of surface acoustic wave devices
    • H03H9/02543—Characteristics of substrate, e.g. cutting angles
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02535—Details of surface acoustic wave devices
    • H03H9/02543—Characteristics of substrate, e.g. cutting angles
    • H03H9/02574—Characteristics of substrate, e.g. cutting angles of combined substrates, multilayered substrates, piezoelectrical layers on not-piezoelectrical substrate
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02535—Details of surface acoustic wave devices
    • H03H9/02992—Details of bus bars, contact pads or other electrical connections for finger electrodes
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/125—Driving means, e.g. electrodes, coils
    • H03H9/13—Driving means, e.g. electrodes, coils for networks consisting of piezoelectric or electrostrictive materials
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/125—Driving means, e.g. electrodes, coils
    • H03H9/145—Driving means, e.g. electrodes, coils for networks using surface acoustic waves
    • H03H9/14544—Transducers of particular shape or position
    • H03H9/1457—Transducers having different finger widths
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/25—Constructional features of resonators using surface acoustic waves
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/64—Filters using surface acoustic waves
    • H03H9/6423—Means for obtaining a particular transfer characteristic
    • H03H9/6433—Coupled resonator filters
    • H03H9/6483—Ladder SAW filters

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
KR1020227002063A 2019-08-30 2020-08-21 탄성파 장치 Active KR102636227B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JPJP-P-2019-158337 2019-08-30
JP2019158337 2019-08-30
PCT/JP2020/031658 WO2021039639A1 (ja) 2019-08-30 2020-08-21 弾性波装置

Publications (2)

Publication Number Publication Date
KR20220024799A KR20220024799A (ko) 2022-03-03
KR102636227B1 true KR102636227B1 (ko) 2024-02-16

Family

ID=74683526

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020227002063A Active KR102636227B1 (ko) 2019-08-30 2020-08-21 탄성파 장치

Country Status (5)

Country Link
US (1) US12355425B2 (https=)
JP (1) JP7268747B2 (https=)
KR (1) KR102636227B1 (https=)
CN (1) CN114270707B (https=)
WO (1) WO2021039639A1 (https=)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2022264933A1 (ja) * 2021-06-16 2022-12-22 株式会社村田製作所 弾性波装置
CN117652097A (zh) * 2021-07-21 2024-03-05 株式会社村田制作所 弹性波装置及滤波器装置
WO2023048140A1 (ja) * 2021-09-21 2023-03-30 株式会社村田製作所 弾性波装置
WO2024043347A1 (ja) * 2022-08-26 2024-02-29 株式会社村田製作所 弾性波装置及びフィルタ装置

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2015198897A1 (ja) 2014-06-23 2015-12-30 株式会社村田製作所 弾性波装置
WO2018003338A1 (ja) 2016-06-27 2018-01-04 株式会社村田製作所 弾性波フィルタ装置
JP2019146233A (ja) 2014-04-08 2019-08-29 スカイワークスフィルターソリューションズジャパン株式会社 弾性波共振器と弾性波フィルタ

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS553020Y2 (https=) 1976-10-08 1980-01-24
DE102010005596B4 (de) 2010-01-25 2015-11-05 Epcos Ag Elektroakustischer Wandler mit verringerten Verlusten durch transversale Emission und verbesserter Performance durch Unterdrückung transversaler Moden
WO2014192755A1 (ja) * 2013-05-29 2014-12-04 株式会社村田製作所 弾性波フィルタ装置
KR101838085B1 (ko) * 2014-05-26 2018-03-13 가부시키가이샤 무라타 세이사쿠쇼 탄성파 장치
WO2016170982A1 (ja) * 2015-04-24 2016-10-27 株式会社村田製作所 弾性波装置
CN107615654B (zh) 2015-06-24 2020-08-21 株式会社村田制作所 滤波器装置
WO2018079284A1 (ja) * 2016-10-28 2018-05-03 株式会社村田製作所 ラダー型フィルタ、デュプレクサ及び弾性波フィルタ装置
CN110140296B (zh) * 2016-12-28 2023-01-13 株式会社村田制作所 纵耦合谐振器型弹性波滤波器
KR102332100B1 (ko) * 2017-06-06 2021-11-29 가부시키가이샤 무라타 세이사쿠쇼 탄성파 필터 장치, 멀티플렉서 및 복합 필터 장치

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2019146233A (ja) 2014-04-08 2019-08-29 スカイワークスフィルターソリューションズジャパン株式会社 弾性波共振器と弾性波フィルタ
WO2015198897A1 (ja) 2014-06-23 2015-12-30 株式会社村田製作所 弾性波装置
WO2018003338A1 (ja) 2016-06-27 2018-01-04 株式会社村田製作所 弾性波フィルタ装置

Also Published As

Publication number Publication date
WO2021039639A1 (ja) 2021-03-04
CN114270707A (zh) 2022-04-01
CN114270707B (zh) 2026-02-27
JPWO2021039639A1 (https=) 2021-03-04
JP7268747B2 (ja) 2023-05-08
US20220182037A1 (en) 2022-06-09
KR20220024799A (ko) 2022-03-03
US12355425B2 (en) 2025-07-08

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