CN114242839A - 一种提升制造perc电池用热扩散炉流场均匀性的进气方法 - Google Patents

一种提升制造perc电池用热扩散炉流场均匀性的进气方法 Download PDF

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CN114242839A
CN114242839A CN202111558427.XA CN202111558427A CN114242839A CN 114242839 A CN114242839 A CN 114242839A CN 202111558427 A CN202111558427 A CN 202111558427A CN 114242839 A CN114242839 A CN 114242839A
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张鹏
谢耀辉
常青
曾玉婷
王琳琳
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Abstract

本发明属于晶硅太阳能电池生产制造技术领域，具体涉及一种提升制造PERC电池用热扩散炉流场均匀性的进气方法，所述热扩散炉的炉管底部分布均匀进气，所述热扩散炉的顶部分布均匀出气。本发明的进气方式可有效提升扩散后方的阻均匀性，进而减少因为扩散均匀性差引起的效率波动大，表面死层多等问题，节约扩散炉消耗成本，提升扩散后方阻均匀性，同时，也使PERC电池获得性能优良的PN结，最终获得PERC电池光电转换效率增益。

Description

一种提升制造PERC电池用热扩散炉流场均匀性的进气方法
技术领域
本发明属于晶硅太阳能电池生产制造技术领域，具体涉及一种提升制造PERC电池用热扩散炉流场均匀性的进气方法。
背景技术
常规扩散炉管结构示意图如图1、图2所示，图1为通过头部进气方式，尾部排废的扩散炉结构，此结构是目前低压扩散炉管常用的一种设计形式，该设计优势为头部进气可以弥补由于炉口温度温场和流场波动大造成的方阻高的问题，同时，此通气方式可以简化设备，对石英材料耗费较少；但是该通气方式缺点也十分明显，由于炉口进气，炉尾出气造成气体流程过长，气体在管内流动时容易受到温场不稳定影响，致使容易发生气流紊乱，形成紊流和湍流等不良气体流动形态，致使炉内气体均匀性较差，在进行扩散工艺时，由于气体分布均匀性较差导致杂质分布差，最终导致硅片扩散后方阻均匀性差的问题，同时改进气、出气方式只有一根管，在长时间工艺加工中如若出现堵塞会严重影响工艺质量；还有因为该结构进气端气流量大，在机械泵快速抽气到低压过程中容易造成管内压力不均问题，进气口压力小，出气口压力大，不但影响炉管使用寿命，同时，也会影响扩散均匀性，最终使得扩散后硅片片间、片内均匀性偏差较大，不够能形成均匀且性能优良的PN结。图2为通过尾部进气方式，头部排废的扩散炉结构，此结构也是目前低压扩散炉管常用的一种设计形式，该设计优势为尾部进气可以弥补由于炉尾温度容易低造成方阻偏高的问题，但是会加剧炉口方阻高的问题，对炉口解决方阻高问题不能起到积极的作用，同时此通气方式可以简化设备，对石英材料耗费较少；但是该通气方式的缺点也十分明显，由于炉口出气，炉尾进气造成气体流程过长，气体在管内流动时容易受到温场不稳定影响，致使容易发生气流紊乱，形成紊流和湍流等不良气体流动形态，致使炉内气体均匀性较差，在进行扩散工艺时，由于气体分布均匀性差导致杂质分布差，最终导致硅片扩散后方阻均匀性差的问题，同时进气、出气方式只有一根管，在长时间工艺加工中如若出现堵塞会严重影响工艺质量；还有因为该结构进气端气流量大，机械泵抽真空管路一般也在尾部，如此在机械泵快速抽气到低压过程中容易造成气体在进入炉管内会有部分气体为完全经过循环被机械泵抽走，造成气体反应不充分、管内压力不均的问题，影响扩散均匀性；还有气流方向与硅片放置方向垂直，致使流场在流动过程中发生碰撞，导致流程发生多种形态流动，也会增加均匀性不好的风险，同时，也造成靠近进气口沉积杂质浓度高，方阻控制性差等问题，综上最终使得扩散后硅片片间、片内均匀性偏差较大，不能形成均匀且性能优良的PN结。
发明内容
本发明目的在于克服现有技术的不足，提供一种提升制造PERC电池用热扩散炉流场均匀性的进气方法，主要解决目前工业化生产PERC(钝化发射极背面接触)太阳电池用热扩散炉，由于进气方式引起的流场稳定性差，最终导致扩散后均匀性差的问题。
为达到上述目的，本发明采用的技术方案如下：
一种提升制造PERC电池用热扩散炉流场均匀性的进气方法，所述热扩散炉的炉管底部分布均匀进气，所述热扩散炉的顶部分布均匀出气。
优选地，所述热扩散炉的进气管路为5～100个。
优选地，所述热扩散炉的出气管路为5～100个。
优选地，所述进气管路的直径为2～200mm。
优选地，所述出气管路的直径为2～200mm。
与现有技术相比，本发明的进气方式可有效提升扩散后方的阻均匀性，进而减少因为扩散均匀性差引起的效率波动大，表面死层多等问题，节约扩散炉消耗成本，提升扩散后方阻均匀性，同时，也使PERC电池获得性能优良的PN结，最终获得PERC电池光电转换效率增益。
附图说明
图1头部进气方式扩散炉管；
图2尾部进气方式扩散炉管；
图3本发明均匀分布进气方式扩散炉管。
具体实施方式
为使本发明的目的、技术方案和优点更加明白清楚，结合具体实施方式，对本发明做进一步描述，但是本发明并不限于这些实施例。需要说明的是，在不相冲突的前提下，以下描述的各实施例之间或各技术特征之间可以任意组合形成新的实施例。在本发明中，若非特指，所有的份、百分比均为质量单位，所采用的设备和原料等均可从市场购得或是本领域常用的。下述实施例中的方法，如没有特别说明，均为本领域的常规方法。
下面结合附图对本发明的具体实施例做详细说明。
一种提升制造PERC电池用热扩散炉流场均匀性的进气方法，所述热扩散炉的炉管底部分布均匀进气，所述热扩散炉的顶部分布均匀出气。
所述热扩散炉的进气管路和出气管路均为60个，所述进气管路的直径以及所述出气管路的直径均为100mm。
图3为本发明进气方法对应的炉管结构，相较图1和图2，本发明进气出气方式完全与目前产线使用炉管进气出气方式不一致，本发明采用炉管底部分布均匀进气，炉管顶部分布均匀出气。此方法和结构设计可以完全避免常规低压扩散炉管存在流场不稳定，炉管头尾方阻控制不稳定，均匀性不理想等由于结构设计缺陷带来的方阻不均匀，工艺波动大等问题。其中，该结构中气流路径极大缩短，炉管底部进气，顶部出气，气流路径完全可控，气流路径从底部到顶部经过硅片，可以充分浸没过硅片，气流中的携带的杂质源可以充分与硅片接触，均匀的附着在硅片表面，同时气流方向与硅片是平行的，不会因为硅片的排列方式扰乱气流形态，保证气流形态稳定的从进气口到出气口。同时此方法和结构设计可以避免炉口炉尾由于温场波动造成流场波动问题，当炉管炉口闭合开始抽真空，炉口的温度也开始快速回升，常规扩散炉管结构由于抽真空气流会带走大量热量，导致炉口温度最低的部分温度回升受影响，最终导致工艺过程中炉口温度饱和不够，给生产带来损害；但是图3结构的设计能够有效避免该问题，当炉门关闭，开始抽真空，炉口温度快速回升，此时可以控制炉口进气管气流量，有效降低气流带走热量，使炉口位置在有效时间内快速升温至设定温度，并实现炉口温度饱和，在后续整个工艺过程中实现良好的均匀性和稳定性。还有该炉管结构的设计可以有效降低工艺气体和杂质源的使用量，主要是因为气流经过路径短，且反应比较充分，总体降低气体成本。
综上所述，本发明所设计的进气方式，可以有效增加流场均匀性和稳定性，使炉管内工艺步骤切换更加灵敏，操作性好，所得硅片方阻均匀性好，值可控，每个温区的均匀性差异缩小，不需要进行人为过于干涉设备，同时改进气方式可以防止尾气管堵塞和其他由于工艺时间久引起的其他设备问题。具有很好的创新性和实用性。本发明的方法可以在旧设备改造，也可以在新设备设计时直接采用该方法进行制作炉管进气装置。
上述实施例仅是本发明的较优实施方式，凡是依据本发明的技术实质对以上实施例所做的任何简单修饰、修改及替代变化，均属于本发明技术方案的范围内。

Claims (5)

1.一种提升制造PERC电池用热扩散炉流场均匀性的进气方法，其特征在于，所述热扩散炉的炉管底部分布均匀进气，所述热扩散炉的顶部分布均匀出气。
2.根据权利要求1所述的一种提升制造PERC电池用热扩散炉流场均匀性的进气方法，其特征在于，所述热扩散炉的进气管路为5～100个。
3.根据权利要求1所述的一种提升制造PERC电池用热扩散炉流场均匀性的进气方法，其特征在于，所述热扩散炉的出气管路为5～100个。
4.根据权利要求2所述的一种提升制造PERC电池用热扩散炉流场均匀性的进气方法，其特征在于，所述进气管路的直径为2～200mm。
5.根据权利要求3所述的一种提升制造PERC电池用热扩散炉流场均匀性的进气方法，其特征在于，所述出气管路的直径为2～200mm。
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