CN114212524A - Flexible hinge assembly and substrate lifting mechanism - Google Patents
Flexible hinge assembly and substrate lifting mechanism Download PDFInfo
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- CN114212524A CN114212524A CN202111599482.3A CN202111599482A CN114212524A CN 114212524 A CN114212524 A CN 114212524A CN 202111599482 A CN202111599482 A CN 202111599482A CN 114212524 A CN114212524 A CN 114212524A
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- substrate
- flexible hinge
- flexible
- bearing surface
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
- B65G47/74—Feeding, transfer, or discharging devices of particular kinds or types
- B65G47/90—Devices for picking-up and depositing articles or materials
- B65G47/902—Devices for picking-up and depositing articles or materials provided with drive systems incorporating rotary and rectilinear movements
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
- B65G2201/02—Articles
- B65G2201/0214—Articles of special size, shape or weigh
- B65G2201/022—Flat
Abstract
The invention provides a flexible hinge assembly and a substrate lifting mechanism, wherein the flexible hinge assembly comprises: the flexible hinge comprises a first flexible hinge, a second flexible hinge and a flexible connecting rod mechanism which flexibly connects the first flexible hinge and the second flexible hinge, wherein the free end of the first flexible hinge and the free end of the second flexible hinge are used for being fixed; the flexible link mechanism comprises at least three connecting rods in flexible connection end to end, the connecting rod is located on the inner side and comprises a first bearing surface used for bearing the substrate, when the first end portion of the first flexible hinge connection flexible link mechanism is subjected to horizontal thrust to enable the first end portion to generate horizontal displacement, the connecting rod located on the inner side rotates, and at least, the first end portion generates displacement along the vertical direction to lift the substrate. According to the invention, the accuracy of the force applied in the process of lifting the substrate can be improved, so that the substrate is lifted to an accurate angle, the surface of the substrate is prevented from being scratched in the process of manually lifting the substrate, and the generation of particles is effectively inhibited.
Description
Technical Field
The invention relates to the technical field of substrate lifting equipment, in particular to a flexible hinge assembly and a substrate lifting mechanism.
Background
In order to measure, inspect or otherwise process a substrate, it is often necessary to use a fixture to hold the substrate. Taking the substrate as an example of a wafer, a wafer holder (wafer clamp) is used for clamping the wafer. The wafer holder generally includes a circular platform and at least two limiting members, for example, three limiting members higher than the circular platform and used for supporting the edge of the wafer are disposed at the edge of the circular platform, and at least one of the limiting members can clamp or separate from the wafer (i.e., release the clamping), when sampling, at least one of the limiting members is separated from the wafer, then the wafer is manually lifted, and then the wafer is clamped by a wafer clamp (wafer clamp); when the sample is sent, at least one limiting piece is separated from the wafer, then the wafer is placed on the circular platform, and then the separated limiting piece is used for clamping the wafer.
Currently, when sampling, it is usually necessary to manually lift the substrate such as a wafer. However, on the one hand, the force of manual lifting is difficult to control precisely, making it difficult to lift the substrate to an accurate angle; on the other hand, the substrate is easily scratched by fingers, and particles are generated, thereby causing pollution.
In view of the above, there is a need to improve the conventional solution for lifting the substrate such as wafer to solve the above problems.
Disclosure of Invention
The invention aims to disclose a flexible hinge assembly and a substrate lifting mechanism, which are used for improving the accuracy of force applied in the process of lifting a substrate such as a wafer and the like so as to lift the substrate to an accurate angle, simultaneously avoiding scratching the surface of the substrate in the process of manually lifting the substrate and inhibiting the generation of particles.
To achieve one of the above objects, the present invention provides a flexible hinge assembly including:
the flexible hinge comprises a first flexible hinge, a second flexible hinge and a flexible link mechanism for flexibly connecting the first flexible hinge and the second flexible hinge, wherein the free end of the first flexible hinge and the free end of the second flexible hinge are used for being fixed; flexible link mechanism includes at least three end to end flexible connection's connecting rod, is located one of inboard the connecting rod is including the first loading face that is used for bearing the weight of the base plate, works as first flexible hinged joint flexible link mechanism's first end receives horizontal thrust to make first end produce horizontal displacement, is located one of inboard the connecting rod rotates to at least, produce the displacement along vertical direction with the lifting the base plate.
As a further improvement of the present invention, when the first end portion is subjected to a horizontal pushing force to generate a horizontal displacement, the second end portion of the second flexible hinge connecting flexible link mechanism generates a vertical displacement, so that the substrate is always attached to the first carrying surface when the substrate rotates.
As a further improvement of the present invention, when the first end portion of the first flexible hinge connection flexible link mechanism receives a horizontal pushing force, the displacement of the first end portion moving in the horizontal direction is greater than or equal to the displacement of the second end portion moving in the vertical direction.
As a further improvement of the present invention, the angle α of rotation is configured to satisfy: alpha is alphamin≤α≤αmax，αminAnd alphamaxOne of the links at the inner side includes one or more sub-links, and the one of the links at the inner side is configured to rotate around a supporting point of the substrate when the substrate is lifted, so that the substrate is lifted by rotating around the supporting point.
As a further improvement of the present invention, the flexible link mechanism includes three first, second, and third links flexibly connected end to end, the first link is flexibly connected to the second flexible hinge, the third link is flexibly connected to the first flexible hinge, a first carrying surface for carrying the substrate is formed above the second link, and the first carrying surface is always attached to the surface of the substrate when the second link rotates.
As a further development of the invention, the first flexible hinge and/or the second flexible hinge comprise a parallelogram hinge.
As a further improvement of the present invention, the first flexible hinge and/or the second flexible hinge includes a parallelogram hinge pair, the parallelogram hinge pair includes two parallelogram hinges symmetrically distributed, a connecting end between the two parallelogram hinges is connected with the flexible link mechanism, and free ends of the two parallelogram hinges are used for being fixed.
Based on the same invention idea, the invention also discloses a substrate lifting mechanism, comprising:
a support body, and
a flexible hinge assembly as disclosed in any one of the above inventions;
the free end is fixed on the supporting body, the supporting body comprises a second bearing surface for bearing a substrate, when the substrate is not lifted, the first bearing surface is arranged below the second bearing surface or flush with the second bearing surface, when the substrate is lifted, the substrate is jointly borne by the first bearing surface and the second bearing surface, a supporting point is formed at the contact position of the substrate and the second bearing surface, and the connecting rod positioned on the inner side is configured to rotate around the supporting point.
As a further improvement of the present invention, the support body includes a clamp and a moving table for fixing the clamp, the clamp includes the second bearing surface, the flexible hinge assembly and the support body are used together for supporting the substrate, the free end is fixed on the clamp and/or the moving table, the substrate includes a wafer, and the clamp is provided with a limiting member for clamping the substrate.
As a further improvement of the invention, when sampling, the flexible hinge assembly is used for lifting the substrate, and then the substrate is taken away; when the sample is sent, the substrate is placed on the second bearing surface or the first bearing surface and the second bearing surface simultaneously, or the flexible connecting rod mechanism is firstly made to rotate, then the substrate is placed on the first bearing surface, and the substrate is driven to reset to a position where the substrate is borne through the second bearing surface or the first bearing surface and the second bearing surface simultaneously through the flexible hinge assembly.
Compared with the prior art, the invention has the beneficial effects that:
according to the flexible hinge assembly and the substrate lifting mechanism disclosed by the invention, the horizontal thrust can be applied to the first end part of the first flexible hinge connected with the flexible link mechanism, so that the link positioned at the inner side of the flexible link mechanism rotates, and the substrate is at least displaced in the vertical direction to be lifted, the accuracy of the applied force in the lifting process of the substrate is ensured, and the substrate can be lifted to an accurate preset angle; meanwhile, the invention also avoids scratching the surface of the substrate in the process of manually lifting the substrate and effectively inhibits the generation of particles.
Drawings
FIG. 1 is a top view of a fixture for holding a substrate mounted on a motion stage in an embodiment of the present invention;
FIG. 2 is a cross-sectional view taken along A-A of FIG. 1 and omitting the motion stage;
FIG. 3 is a schematic diagram illustrating a state where the substrate lifting mechanism does not lift the substrate according to an embodiment of the present invention, and in FIG. 3, the motion stage is not illustrated, and the clamp is not fully illustrated;
FIG. 4 is a schematic diagram illustrating a state in which a substrate lifting mechanism lifts a substrate according to an embodiment of the present invention, wherein a motion stage is not illustrated in FIG. 4, and a clamp is not illustrated completely;
FIG. 5 is a cross-sectional view of a substrate being lifted by a substrate lifting mechanism according to an embodiment of the present invention;
FIG. 6 is a detailed structural schematic of a flexible hinge assembly in an embodiment of the invention;
FIG. 7 is a schematic illustration of a flexible linkage forming a rotational angle with respect to a support point in an embodiment of the present invention;
FIG. 8 is a diagram illustrating a deformation process of a symmetrically distributed parallelogram hinge under stress in an embodiment of the present invention;
fig. 9 is a schematic structural diagram of a flexible link mechanism according to an embodiment of the present invention.
Detailed Description
The present invention is described in detail with reference to the embodiments shown in the drawings, but it should be understood that these embodiments are not intended to limit the present invention, and those skilled in the art should understand that functional, methodological, or structural equivalents or substitutions made by these embodiments are within the scope of the present invention.
Referring to fig. 1-8, in the present embodiment, the flexible hinge assembly 400 includes: a first flexible hinge 41c, a second flexible hinge 41a, and a flexible linkage 42b flexibly connecting the first flexible hinge 41c and the second flexible hinge 41a, wherein a free end 43 of the first flexible hinge 41c and a free end 41 of the second flexible hinge 41a are used to be fixed; the flexible link mechanism 42b includes at least three links flexibly connected end to end, and the link at the inner side includes a first bearing surface 4260 for bearing the substrate when the first flexible hinge 41c is connected with the flexible linkThe first end 428 of the linear linkage 42b is subjected to a horizontal thrust force FhWhen the first end 428 is horizontally displaced, a link rod at the inner side is rotated and displaced at least in the vertical direction to lift the substrate 100.
The aforementioned link located on the inner side (e.g., the second link 426) is displaced in the vertical direction in synchronization with the rotation. Wherein the horizontal thrust force FhThe first end 428 is not limited to being pushed only in the horizontal direction, but may be pushed when the thrust and the horizontal direction are inclined and the thrust has a component in the horizontal direction; because the two ends of the flexible linkage 42b are connected to the first flexible hinge 41c and the second flexible hinge 41a, respectively, the term "end-to-end flexible connection" means: the other ends of the at least three links, except for the two ends of the flexible linkage 42b, are flexibly connected end to end.
Illustratively, the link located at the inner side includes one or more sub-links, and referring to fig. 6 and 9, in the present embodiment, the link located at the inner side includes a second link 426, and the second link 426 includes one or more sub-links, each of which is connected between two adjacent links, i.e., between the first link 425 and the third link 427, for example, referring to fig. 9, the second link 426 includes two sub-links, i.e., includes a sub-link 4261 and a sub-link 4262. Illustratively, any of the at least three links includes one or more sub-links, e.g., referring to fig. 9, any link includes two sub-links and forms a parallelogram hinge, and the flexible linkage 42b includes at least three parallelogram hinges flexibly connected end-to-end.
Illustratively, with reference to FIG. 3, when the first end 428 is subjected to a horizontal pushing force FhWhen the first end portion 428 is horizontally displaced, the second end portion 429 of the second flexible hinge 41a connected to the flexible link mechanism 42b is vertically displaced, so that the substrate 100 is always attached to the first bearing surface 4260 during the rotation, and therefore, when the substrate 100 is rotated to be lifted, there is no relative displacement between the substrate 100 and the flexible hinge assembly 400, the substrate 100 is not abraded on the flexible hinge assembly 400 due to the relative displacement, and the probability of damaging the substrate 100 is reduced. In particular toGround, the horizontal thrust force FhThe second end 429 is displaced vertically downwardly as shown in fig. 6, and when reset, the second end 429 is displaced vertically upwardly (direction C in the figure).
Illustratively, when the angle of rotation α is low, it is inconvenient to take away the substrate 100, and when it is high, there is a tendency to cause relative displacement between the substrate 100 and the flexible hinge assembly 400, based on which the angle of rotation α is configured to satisfy: alpha is alphamin≤α≤αmax，αminAnd alphamaxRespectively, a preset minimum angle and a preset maximum angle to limit the rotation angle alpha to a proper range, and to stop the substrate 100 at a proper position.
In the present embodiment, referring to fig. 3 and 4, one of the links located at the inner side is configured to rotate around a supporting point 102 of the substrate 100 when the substrate 100 is lifted, so that the substrate 100 is lifted by rotating around the supporting point 102.
In the present embodiment, the first state of the flexible link mechanism 42b in fig. 3 is an initial state, and the second state of the flexible link mechanism 42b in fig. 4 is a target state, for example, in the initial state, the first flexible hinge 41c forms an angle with the vertical direction, and the second flexible hinge 41a forms another angle with the horizontal direction, and in the target state, the first flexible hinge 41c is located in the vertical direction, i.e., vertically disposed, and the second flexible hinge 41a is located in the horizontal direction, i.e., horizontally disposed, but not limited thereto.
In this embodiment, referring to FIG. 6, flexible linkage 42b includes three flexibly connected links end-to-end (i.e., first link 425, second link 426, and third link 427). Referring to fig. 7, a first bearing surface 4260 for bearing the substrate is formed above the second link 426, and the first bearing surface 4260 is always attached to the surface of the substrate when the substrate rotates, so that the angle α is formed between the first bearing surface 4260 and the second bearing surface 101 of the clamp 200 in the target state. Of course, the flexible linkage 42b may also include four or more links connected end to end. Illustratively, when the substrate 10 is usedWhen the substrate 100 is placed horizontally above the clamp 200, most of the substrate is carried by the clamp 200 and presses the flexible hinge assembly 400, and the flexible hinge assembly 400 is deformed, thereby forming the state one shown in fig. 3. Horizontal thrust FhThe application can be manually performed by a human being or automatically performed by a robot arm.
In the present embodiment, after the substrate 100 is lifted and the substrate 100 is removed, the flexible hinge assembly 400 may be automatically restored to the state where the horizontal pushing force F is not applied by using the elastic potential energy stored by the first flexible hinge 41c, the second flexible hinge 41a and the flexible link mechanism 42b based on the deformationhFor example, the flexible hinge assembly 400 is returned from the state of fig. 4 to the state of fig. 3, thereby providing the flexible hinge assembly 400 with advantages of simple and reliable structure, less number of required parts, and low manufacturing cost.
In the present embodiment, as shown in fig. 6, a first hinge point 424 is formed between the first flexible hinge 41c and the third link 427, a second hinge point 421 is formed between the second flexible hinge 41a and the first link 425, a third hinge point 422 is formed between the first link 425 and the second link 426, and a fourth hinge point 423 is formed between the second link 426 and the third link 427. Illustratively, the first flexible hinge 41c is connected end-to-end by four sides 433 to form a parallelogram, and the second flexible hinge 41a is connected end-to-end by four sides 413 to form a parallelogram. When the first flexible hinge 41c is connected to the first end 428 of the flexible linkage 42b, the horizontal pushing force F is appliedhAt this time, the first flexible hinge 41C is moved leftward in the horizontal direction in the direction opposite to the arrow D, and the second flexible hinge 41a connects the second end 429 of the flexible link mechanism to move downward in the direction opposite to the arrow C. When the horizontal thrust F is removedhThen, the elastic potential energy stored based on the deformation is restored from the state two (target state) in fig. 4 to the state one (initial state) in fig. 3, and during this restoration, the first flexible hinge 41C is moved rightward in the horizontal direction of the arrow D, and the second flexible hinge 41a connects the second end portion 429 of the flexible link mechanism to move upward in the direction of the arrow C.
In this embodiment, at least the second link 426 is driven in the vertical direction during the deformation of the flexible linkage 42bAnd moving up and down. The first end 428 connected to the flexible linkage 42b at the first flexible hinge 41c receives the horizontal pushing force FhIn the process of lifting the substrate 100, the second link 426 only forms a degree of freedom of rotation around the supporting point 102, and the supporting point 102 is located on an extension plane of the first supporting surface 4260 of the second link 426, so that the first supporting surface 4260 located above the second link 426 is always attached to the bottom surface of the substrate 100 and does not horizontally move relatively when the substrate 100 is lifted.
Specifically, the link located on the inner side is a link located in the middle, except for two links located at both ends in the flexible link mechanism 42 b. For example, in the present embodiment, the link other than the first link 425 and the third link 427 is referred to as the second link 426, and of course, if the flexible link mechanism includes five links, the flexible link mechanism refers to one link of the three links in the middle, and so on, and the description thereof is omitted.
Illustratively, the initial state of the flexible hinge assembly 400 may be flush with the second bearing surface 101 of the clamp 200 or may be below the second bearing surface 101 of the clamp 200. In the present embodiment, as shown in fig. 3, in the initial state, the initial state of the flexible hinge assembly 400 is such that the second link 426 is horizontal and flush with the second bearing surface 101 of the clamp 200, and how to switch the flexible hinge assembly 400 from the first state in fig. 3 to the second state in fig. 4 will be described below.
Referring to FIG. 3, when the first end 428 is subjected to a horizontal pushing force FhAt this time, the links in the flexible link mechanism 42b move synchronously, the two hinge points 431 of the first flexible hinge 41c located at the upper side twist synchronously with the two hinge points 432 located at the lower side, and the two obliquely arranged sides 433 rotate clockwise in fig. 3 with respect to the fixed free end 43. The two sides 413 of the second flexible hinge 41a are slightly rotated counterclockwise relative to the fixed free end 41, and the two hinge points 411 and 412 disposed at left and right are twisted synchronously. The third link 427 is rotated counterclockwise by the twisting of the first hinge point 424, and the fourth hinge point 423 and the third hinge point 422 at both ends of the second link 426 are twisted to push the second link 426 via the third link 427, the second hingeThe point 421 is twisted, and the first link 425 moves clockwise around the second hinge point 421, so as to finally change from the first state shown in fig. 3 to the second state shown in fig. 4 to lift the substrate 100 and rotate through a rotation angle of α. It should be noted that, during the switching between the first state and the second state, the second hinge point 421 moves only in the vertical direction, and the first hinge point 424 moves only in the horizontal direction. In the present embodiment, when the first end 428 is pushed horizontally by the horizontal pushing force F, the flexible linkage 42b and the first flexible hinge 41c are formed therebetweenhThe first hinge point 424, which moves only in the horizontal direction, is formed between the flexible link mechanism 42b and the second flexible hinge 41a when the first end 428 is subjected to the horizontal pushing force FhThe second hinge point 421 moving only in the vertical direction.
Illustratively, the first end 428 of the flexible linkage 42b receives a horizontal pushing force F when the first flexible hinge 41c is coupled theretohThe displacement of movement of the first end 428 in the horizontal direction is greater than or equal to the displacement of movement of the second end 429 in the vertical direction. Therefore, the rotation angle of each flexible hinge point is smaller, material fatigue and damage caused by the overlarge rotation angle of the flexible hinge point are effectively avoided, each flexible hinge point is effectively protected, and the service life of the flexible hinge assembly 400 is prolonged.
Illustratively, the first flexible hinge 41c and/or the second flexible hinge 41a comprise a parallelogram hinge, e.g., referring to fig. 6, both comprising a parallelogram hinge.
Referring to fig. 3 and 6, as previously described, if the first end 428 of the first flexible hinge 41c is subjected to a horizontal pushing force FhThe first end 428 is horizontally displaced, but the first end 428 of the first flexible hinge 41c is flexibly deformed, so that the first end 428 of the first flexible hinge not only horizontally moves but also vertically moves (parasitic movement), and therefore, a small coupling displacement is generated, the movement accuracy of the flexible hinge assembly 400 is adversely affected, the substrate 100 is not stably lifted, and the relative displacement between the substrate 100 and the flexible link mechanism 42b may be generated. It should be noted that, as shown in fig. 3, since there are both horizontal displacement and coupling displacement,the first flexible hinge 41c will be pushed horizontally by the horizontal pushing force FhTo form a rotation.
Illustratively, the first flexible hinge 41c and/or the second flexible hinge 41a includes a parallelogram hinge pair, the parallelogram hinge pair includes two symmetrically distributed parallelogram hinges, a connection end between the two parallelogram hinges is connected with the flexible link mechanism 42b, and free ends of the two parallelogram hinges are used to be fixed, when the symmetrically distributed parallelogram hinge pair is used, a coupling motion perpendicular to a displacement direction can be eliminated, so as to improve the motion accuracy of the flexible hinge assembly 400, stably lift the substrate 100, and further ensure no relative displacement between the substrate 100 and the flexible link mechanism 42 b.
As shown in fig. 8, for example, the flexible hinge 44 having a rectangular shape is composed of two flexible hinges having a parallelogram shape symmetrically distributed, the flexible hinge on the left side forms two flexible hinge points 443 on the left side and two flexible hinge points 444 on the right side, and the flexible hinge on the right side forms two flexible hinge points 445 on the left side and two flexible hinge points 446 on the right side. The flexible hinge 44 forms two free ends 441 and 442 that are both fixed. In fig. 8, the flexible hinge 44 is horizontally arranged in the X direction, and when a force F in the Y direction is applied to the two flexible hinge connection ends 447, the flexible hinge 44 changes to a state of a flexible hinge 44'. During this process, the flexible hinge 44 twists and deforms. The X direction and the Y direction are perpendicular, in the deformation process, the flexible hinges on the left and right sides symmetrically move downward, the two left flexible hinge points 443 and the two right flexible hinge points 444 are twisted by the same angle, and the two left flexible hinge points 445 and the two right flexible hinge points 446 are twisted by the same angle, so that the coupling motion (X direction) perpendicular to the displacement direction (Y direction) generated by the connecting end 447 cannot be generated, and the deformation process of the flexible hinge 44, especially the motion track of the connecting end 447 is more accurate. When the acting force F disappears, the flexible hinge 44 in the parallelogram returns to the state in which the acting force is not applied due to the elastic potential energy stored by the deformation, so as to return to the state in the rectangular structure.
Referring to fig. 3 to 6, the present embodiment further discloses a substrate lifting mechanism 1, including: a support body for supporting the substrate 100, and one (or more) flexible hinge assemblies 400; wherein the free end is fixed on a support body, the support body comprises a second bearing surface 101 for bearing the substrate 100, the first bearing surface 4260 is arranged below or flush with the second bearing surface 101 when the substrate 100 is not lifted, in the embodiment, as shown in fig. 3, the first bearing surface 4260 and the second bearing surface 101 are flush in an initial state, when the substrate 100 is lifted, the first bearing surface 4260 and the second bearing surface 101 jointly bear the substrate 100, the contact position of the substrate 100 and the second bearing surface 101 forms a supporting point 102, a link rod positioned at the inner side is configured to rotate around the supporting point 102, and when a horizontal pushing force F is applied to the first end 428 of the flexible hinge assembly 400hAt this time, a link at the inner side is rotated to lift the substrate 100.
Illustratively, the support body comprises a clamp 200 and a moving table 300 for fixing the clamp 200, the clamp 200 comprises the second carrying surface 101, the flexible hinge assembly 400 is used together with the support body for supporting the substrate 100, the free end 41(43) is fixed on the clamp 200 and/or the moving table 300, the substrate 100 comprises a wafer, but may be other plate-shaped samples, when the substrate 100 needs to be lifted, the substrate 100 is rotated by a certain angle around the supporting point 102 along the direction indicated by the arrow B in fig. 3 to lift the substrate 100, and finally, the state one shown in fig. 3 is changed into the state two shown in fig. 4.
The supporting body is provided with a limiting member (not shown) for clamping the substrate, forming a supporting point 102 as shown in fig. 3, for example, the clamp 200 is provided with at least two limiting members, and at least one of the limiting members can clamp or separate from the substrate 100 (i.e. release the clamping).
Illustratively, referring to fig. 2, 5 and 6, the side of the support body away from the supporting point 102 is horizontally recessed with a receiving cavity 210 for receiving the flexible hinge assembly 400 and a notch 220 communicating with the receiving cavity 210, the free end 43 of the first flexible hinge 41c is fixed to the bottom surface 240 of the receiving cavity 210, and the free end 41 of the second flexible hinge 41a is fixed to the inner side surface 230 of the receiving cavity 210. Illustratively, the stoppers extend upward beyond the upper surface of the fixture 200 and abut against the side edges of the substrate 100. For example, two stoppers may be provided, and the two stoppers may form a 120 degree central angle between the centers of the circular substrates 100 in a top view, or may form a central angle of another angle.
When sampling, the substrate 100 is lifted by using the flexible hinge assembly 400, and then the substrate 100 is taken away; when the sample is sent, the substrate 100 is placed on the second supporting surface 101 or on the first supporting surface 4260 and the second supporting surface 101 at the same time, or the flexible link mechanism 42b is rotated first, and then the substrate 100 is placed on the first supporting surface 4260, so that the flexible hinge assembly 400 drives the substrate 100 to return to a position where the substrate 100 is supported by the second supporting surface 101 or the first supporting surface 4260 and the second supporting surface 101 at the same time, in this embodiment, the substrate is returned to an initial state where the second link 426 is horizontal and flush with the second supporting surface 101 of the fixture 200.
The above-listed detailed description is only a specific description of a possible embodiment of the present invention, and they are not intended to limit the scope of the present invention, and equivalent embodiments or modifications made without departing from the technical spirit of the present invention should be included in the scope of the present invention.
It will be evident to those skilled in the art that the invention is not limited to the details of the foregoing illustrative embodiments, and that the present invention may be embodied in other specific forms without departing from the spirit or essential attributes thereof. The present embodiments are therefore to be considered in all respects as illustrative and not restrictive, the scope of the invention being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein. Any reference sign in a claim should not be construed as limiting the claim concerned.
Furthermore, it should be understood that although the present description refers to embodiments, not every embodiment may contain only a single embodiment, and such description is for clarity only, and those skilled in the art should integrate the description, and the embodiments may be combined as appropriate to form other embodiments understood by those skilled in the art.
Claims (10)
1. A flexible hinge assembly, comprising:
the flexible hinge comprises a first flexible hinge, a second flexible hinge and a flexible link mechanism for flexibly connecting the first flexible hinge and the second flexible hinge, wherein the free end of the first flexible hinge and the free end of the second flexible hinge are used for being fixed; flexible link mechanism includes at least three end to end flexible connection's connecting rod, is located one of inboard the connecting rod is including the first loading face that is used for bearing the weight of the base plate, works as first flexible hinged joint flexible link mechanism's first end receives horizontal thrust to make first end produce horizontal displacement, is located one of inboard the connecting rod rotates to at least, produce the displacement along vertical direction with the lifting the base plate.
2. The flexible hinge assembly of claim 1, wherein the second flexible hinge connects the second end of the flexible linkage to vertically displace when the first end is horizontally displaced by a horizontal pushing force, such that the substrate always engages the first bearing surface during the rotation.
3. The flexible hinge assembly of claim 2, wherein when the first end of the first flexible hinged flexible linkage is subjected to a horizontal pushing force, the displacement of the first end moving in the horizontal direction is greater than or equal to the displacement of the second end moving in the vertical direction.
4. The flexible hinge assembly of claim 2, wherein the angle of rotation a is configured to satisfy: alpha is alphamin≤α≤αmax，αminAnd alphamaxOne of the links at the inner side includes one or more sub-links, and the one of the links at the inner side is configured to rotate around a supporting point of the substrate when the substrate is lifted, so that the substrate is lifted by rotating around the supporting point.
5. The flexible hinge assembly of claim 2, wherein the flexible linkage mechanism comprises three first, second and third links flexibly connected end to end, the first link being flexibly connected to the second flexible hinge, the third link being flexibly connected to the first flexible hinge, a first bearing surface for bearing the substrate being formed above the second link, the first bearing surface always conforming to the substrate surface during the rotation of the second link.
6. The flexible hinge assembly of claim 1, wherein the first flexible hinge and/or the second flexible hinge comprises a parallelogram hinge.
7. The flexible hinge assembly of claim 6, wherein the first and/or second flexible hinges comprise a parallelogram hinge pair comprising two parallelogram hinges symmetrically disposed, a connecting end between the two parallelogram hinges being connected to the flexible linkage, and free ends of the two parallelogram hinges being adapted to be secured.
8. Base plate lifting mechanism, its characterized in that includes:
a support body, and
a flexible hinge assembly as claimed in any one of claims 1 to 7;
the free end is fixed on the supporting body, the supporting body comprises a second bearing surface for bearing a substrate, when the substrate is not lifted, the first bearing surface is arranged below the second bearing surface or flush with the second bearing surface, when the substrate is lifted, the substrate is jointly borne by the first bearing surface and the second bearing surface, a supporting point is formed at the contact position of the substrate and the second bearing surface, and the connecting rod positioned on the inner side is configured to rotate around the supporting point.
9. The substrate lift mechanism of claim 8, wherein the support body comprises a clamp and a motion stage to which the clamp is secured, the clamp comprising the second bearing surface, the flexible hinge assembly being used in conjunction with the support body to support the substrate, the free end being secured to the clamp and/or the motion stage, the substrate comprising a wafer, the clamp having a stop disposed thereon to hold the substrate.
10. The substrate lifting mechanism of claim 8, wherein the flexible hinge assembly is used to lift the substrate prior to removal when sampling; when the sample is sent, the substrate is placed on the second bearing surface or the first bearing surface and the second bearing surface simultaneously, or the flexible connecting rod mechanism is firstly made to rotate, then the substrate is placed on the first bearing surface, and the substrate is driven to reset to a position where the substrate is borne through the second bearing surface or the first bearing surface and the second bearing surface simultaneously through the flexible hinge assembly.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111599482.3A CN114212524B (en) | 2021-12-24 | 2021-12-24 | Flexible hinge assembly and substrate lifting mechanism |
Applications Claiming Priority (1)
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| CN114212524B (en) | 2023-08-22 |
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