CN113841041A - 分析装置 - Google Patents

分析装置 Download PDF

Info

Publication number
CN113841041A
CN113841041A CN202080036382.7A CN202080036382A CN113841041A CN 113841041 A CN113841041 A CN 113841041A CN 202080036382 A CN202080036382 A CN 202080036382A CN 113841041 A CN113841041 A CN 113841041A
Authority
CN
China
Prior art keywords
light
light source
optical element
intensity
analysis device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202080036382.7A
Other languages
English (en)
Chinese (zh)
Inventor
涩谷享司
滨内翔太
西贝大树
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Horiba Ltd
Original Assignee
Horiba Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Horiba Ltd filed Critical Horiba Ltd
Publication of CN113841041A publication Critical patent/CN113841041A/zh
Pending legal-status Critical Current

Links

Images

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/39—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using tunable lasers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/42—Absorption spectrometry; Double beam spectrometry; Flicker spectrometry; Reflection spectrometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01—Arrangements or apparatus for facilitating the optical investigation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
    • G01N21/3504—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light for analysing gases, e.g. multi-gas analysis
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/64—Fluorescence; Phosphorescence
    • G01N21/645—Specially adapted constructive features of fluorimeters
    • G01N21/6456—Spatial resolved fluorescence measurements; Imaging
    • G01N21/6458—Fluorescence microscopy
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/42—Absorption spectrometry; Double beam spectrometry; Flicker spectrometry; Reflection spectrometry
    • G01J2003/423—Spectral arrangements using lasers, e.g. tunable
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01—Arrangements or apparatus for facilitating the optical investigation
    • G01N2021/0106—General arrangement of respective parts
    • G01N2021/0112—Apparatus in one mechanical, optical or electronic block
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/314—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry with comparison of measurements at specific and non-specific wavelengths
    • G01N2021/3148—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry with comparison of measurements at specific and non-specific wavelengths using three or more wavelengths
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00—Features of devices classified in G01N21/00
    • G01N2201/06—Illumination; Optics
    • G01N2201/069—Supply of sources
    • G01N2201/0691—Modulated (not pulsed supply)

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Optics & Photonics (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
CN202080036382.7A 2019-06-27 2020-06-26 分析装置 Pending CN113841041A (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2019-120161 2019-06-27
JP2019120161 2019-06-27
PCT/JP2020/025322 WO2020262640A1 (ja) 2019-06-27 2020-06-26 分析装置

Publications (1)

Publication Number Publication Date
CN113841041A true CN113841041A (zh) 2021-12-24

Family

ID=74060591

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202080036382.7A Pending CN113841041A (zh) 2019-06-27 2020-06-26 分析装置

Country Status (5)

Country Link
US (1) US12111255B2 (https=)
EP (1) EP3992614B1 (https=)
JP (1) JP7473546B2 (https=)
CN (1) CN113841041A (https=)
WO (1) WO2020262640A1 (https=)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2024134721A (ja) * 2023-03-22 2024-10-04 セイコーエプソン株式会社 分光装置および形状測定装置
JPWO2024241920A1 (https=) * 2023-05-19 2024-11-28

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20090121154A1 (en) * 2005-11-14 2009-05-14 Peter Westphal Multispectral illuminaton Device
US20100014096A1 (en) * 2006-08-01 2010-01-21 Kamal Alameh Optical sensing system and optical devices therefor
CN108226064A (zh) * 2016-12-15 2018-06-29 株式会社堀场制作所 分析装置、计算机可读存储介质和分析方法
CN108604775A (zh) * 2016-02-03 2018-09-28 古河电气工业株式会社 激光装置
CN109856078A (zh) * 2019-01-16 2019-06-07 深圳供电局有限公司 光学气体检测系统

Family Cites Families (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5794158A (en) 1980-11-29 1982-06-11 Ricoh Co Ltd Carriage driving device
US4451147A (en) 1981-08-31 1984-05-29 Karel Dobes Refractometer
US6369893B1 (en) 1998-05-19 2002-04-09 Cepheid Multi-channel optical detection system
JP2001066250A (ja) 1999-08-30 2001-03-16 Toyota Central Res & Dev Lab Inc ガス検出装置
US6433929B1 (en) * 2000-06-12 2002-08-13 Olympus Optical Co., Ltd. Scanning optical microscope and method of acquiring image
JP2001147341A (ja) 2000-09-25 2001-05-29 Fdk Corp 光回路モジュール
US6701256B2 (en) 2001-09-11 2004-03-02 Environmental Systems Products Holdings Inc. Exhaust opacity measuring device
GB0215557D0 (en) * 2002-07-05 2002-08-14 Renishaw Plc Laser calibration apparatus
JP2005017683A (ja) 2003-06-26 2005-01-20 Nippon Telegr & Teleph Corp <Ntt> 光合分波器
WO2006134675A1 (ja) 2005-06-14 2006-12-21 Nippon Telegraph And Telephone Corporation 光合分波器およびその組み立て装置
JP4899648B2 (ja) 2006-06-05 2012-03-21 株式会社ニコン スペクトル観察方法及びスペクトル観察システム
GB2452267B (en) * 2007-08-28 2010-06-16 Teraview Ltd Scanning Terahertz probe
JP2009115654A (ja) * 2007-11-07 2009-05-28 Toyota Motor Corp 炭化水素濃度測定装置および炭化水素濃度測定方法
JP5861895B2 (ja) 2012-02-06 2016-02-16 株式会社ニコン 分光器及び顕微分光システム
DE102012216164B4 (de) 2012-09-12 2016-04-28 Forschungsverbund Berlin E.V. Vorrichtung mit einer Anordnung optischer Elemente
US9512985B2 (en) 2013-02-22 2016-12-06 Kla-Tencor Corporation Systems for providing illumination in optical metrology
US10788416B2 (en) 2013-10-03 2020-09-29 Rosemount Inc. Multiple wavelength light source for colorimetric measurement
EP3077790B1 (en) 2013-12-04 2021-10-27 Iris International, Inc. Flow cytometer
EP3325945B1 (en) 2015-07-21 2024-03-06 Fluidsens International Inc. System and method for detection of foreign particles in a liquid
US10187175B2 (en) * 2016-11-18 2019-01-22 Kohoku Kogyo Co., Ltd. Optical multiplexer/demultiplexer and optical transceiver
JP6718619B2 (ja) 2016-11-18 2020-07-08 湖北工業株式会社 光合分波器、光トランシーバ
CN109596538B (zh) 2017-10-03 2023-08-25 株式会社堀场制作所 分析装置和分析方法
US11360266B2 (en) 2018-02-09 2022-06-14 Mitsubishi Electric Corporation Method for manufacturing optical multiplexer/demultiplexer

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20090121154A1 (en) * 2005-11-14 2009-05-14 Peter Westphal Multispectral illuminaton Device
US20100014096A1 (en) * 2006-08-01 2010-01-21 Kamal Alameh Optical sensing system and optical devices therefor
CN108604775A (zh) * 2016-02-03 2018-09-28 古河电气工业株式会社 激光装置
CN108226064A (zh) * 2016-12-15 2018-06-29 株式会社堀场制作所 分析装置、计算机可读存储介质和分析方法
CN109856078A (zh) * 2019-01-16 2019-06-07 深圳供电局有限公司 光学气体检测系统

Also Published As

Publication number Publication date
JPWO2020262640A1 (https=) 2020-12-30
EP3992614A1 (en) 2022-05-04
US12111255B2 (en) 2024-10-08
EP3992614B1 (en) 2025-03-05
EP3992614A4 (en) 2023-06-28
US20220236180A1 (en) 2022-07-28
JP7473546B2 (ja) 2024-04-23
WO2020262640A1 (ja) 2020-12-30

Similar Documents

Publication Publication Date Title
CN109596538B (zh) 分析装置和分析方法
CN108226064B (zh) 分析装置、计算机可读存储介质和分析方法
JP5907442B2 (ja) レーザ式ガス分析計
JP7075862B2 (ja) 分析装置
JP6886507B2 (ja) 分析装置、分析装置用プログラム及び分析方法
EP3467473B1 (en) Multipass cell and gas analyzer
CN115667884B (zh) 分析装置、记录介质及分析方法
CN113841041A (zh) 分析装置
CN113811758A (zh) 试样分析装置
US20250389643A1 (en) Analysis device and analysis method
JP2015021879A (ja) ガス濃度測定装置及びガス濃度測定方法
US20240167877A1 (en) Single-detector double-path intensity-modulation spectrometer

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination