CN113726302A - 一种声表面波滤波器的叉指换能器的制作方法 - Google Patents
一种声表面波滤波器的叉指换能器的制作方法 Download PDFInfo
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- CN113726302A CN113726302A CN202110858962.0A CN202110858962A CN113726302A CN 113726302 A CN113726302 A CN 113726302A CN 202110858962 A CN202110858962 A CN 202110858962A CN 113726302 A CN113726302 A CN 113726302A
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- metal layer
- acoustic wave
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- wave filter
- surface acoustic
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- 238000004519 manufacturing process Methods 0.000 title claims abstract description 29
- 238000010897 surface acoustic wave method Methods 0.000 title claims abstract description 28
- 229910052751 metal Inorganic materials 0.000 claims abstract description 65
- 239000002184 metal Substances 0.000 claims abstract description 65
- 239000010936 titanium Substances 0.000 claims abstract description 49
- 238000000034 method Methods 0.000 claims abstract description 41
- 239000000758 substrate Substances 0.000 claims abstract description 35
- 230000008569 process Effects 0.000 claims abstract description 33
- 229910052719 titanium Inorganic materials 0.000 claims abstract description 28
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims abstract description 27
- 229920002120 photoresistant polymer Polymers 0.000 claims abstract description 25
- WSMQKESQZFQMFW-UHFFFAOYSA-N 5-methyl-pyrazole-3-carboxylic acid Chemical compound CC1=CC(C(O)=O)=NN1 WSMQKESQZFQMFW-UHFFFAOYSA-N 0.000 claims abstract description 13
- 238000005530 etching Methods 0.000 claims abstract description 12
- GQYHUHYESMUTHG-UHFFFAOYSA-N lithium niobate Chemical compound [Li+].[O-][Nb](=O)=O GQYHUHYESMUTHG-UHFFFAOYSA-N 0.000 claims abstract description 11
- 238000001039 wet etching Methods 0.000 claims abstract description 9
- 238000001704 evaporation Methods 0.000 claims abstract description 5
- 239000010410 layer Substances 0.000 claims description 33
- 239000011241 protective layer Substances 0.000 claims description 14
- 239000000463 material Substances 0.000 claims description 13
- 239000000243 solution Substances 0.000 claims description 10
- 238000011161 development Methods 0.000 claims description 8
- 238000002791 soaking Methods 0.000 claims description 6
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- 239000003513 alkali Substances 0.000 claims description 4
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- 239000011259 mixed solution Substances 0.000 claims description 3
- 238000007747 plating Methods 0.000 claims description 3
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- 239000007788 liquid Substances 0.000 claims description 2
- 239000003814 drug Substances 0.000 claims 1
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 abstract description 29
- 229910052759 nickel Inorganic materials 0.000 abstract description 14
- 230000000694 effects Effects 0.000 abstract description 9
- 238000010438 heat treatment Methods 0.000 abstract description 6
- 238000005336 cracking Methods 0.000 abstract description 3
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- 150000002739 metals Chemical class 0.000 abstract description 2
- -1 nickel and the like Chemical class 0.000 abstract description 2
- 235000012431 wafers Nutrition 0.000 description 46
- 230000000052 comparative effect Effects 0.000 description 22
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 5
- 239000010949 copper Substances 0.000 description 5
- 230000007613 environmental effect Effects 0.000 description 5
- 229910052782 aluminium Inorganic materials 0.000 description 4
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 description 3
- SECXISVLQFMRJM-UHFFFAOYSA-N N-Methylpyrrolidone Chemical compound CN1CCCC1=O SECXISVLQFMRJM-UHFFFAOYSA-N 0.000 description 3
- 229910001385 heavy metal Inorganic materials 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 2
- MHAJPDPJQMAIIY-UHFFFAOYSA-N Hydrogen peroxide Chemical compound OO MHAJPDPJQMAIIY-UHFFFAOYSA-N 0.000 description 2
- 239000002253 acid Substances 0.000 description 2
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- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 229910002601 GaN Inorganic materials 0.000 description 1
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 229910001069 Ti alloy Inorganic materials 0.000 description 1
- 150000007513 acids Chemical class 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
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- 229910017052 cobalt Inorganic materials 0.000 description 1
- 239000010941 cobalt Substances 0.000 description 1
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
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- 229930182470 glycoside Natural products 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 230000036541 health Effects 0.000 description 1
- 230000002401 inhibitory effect Effects 0.000 description 1
- 238000001465 metallisation Methods 0.000 description 1
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- 229910052710 silicon Inorganic materials 0.000 description 1
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- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
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- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
- H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
- H03H3/02—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/02535—Details of surface acoustic wave devices
- H03H9/02543—Characteristics of substrate, e.g. cutting angles
- H03H9/02559—Characteristics of substrate, e.g. cutting angles of lithium niobate or lithium-tantalate substrates
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/02535—Details of surface acoustic wave devices
- H03H9/02637—Details concerning reflective or coupling arrays
- H03H9/02653—Grooves or arrays buried in the substrate
- H03H9/02661—Grooves or arrays buried in the substrate being located inside the interdigital transducers
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
Abstract
Description
Claims (10)
Priority Applications (1)
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CN202110858962.0A CN113726302A (zh) | 2021-07-28 | 2021-07-28 | 一种声表面波滤波器的叉指换能器的制作方法 |
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CN202110858962.0A CN113726302A (zh) | 2021-07-28 | 2021-07-28 | 一种声表面波滤波器的叉指换能器的制作方法 |
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CN202110858962.0A Pending CN113726302A (zh) | 2021-07-28 | 2021-07-28 | 一种声表面波滤波器的叉指换能器的制作方法 |
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Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN114545740A (zh) * | 2022-01-25 | 2022-05-27 | 北京中科飞鸿科技股份有限公司 | 一种半透明晶圆及其曝光过程加工方法 |
CN115242206A (zh) * | 2022-09-22 | 2022-10-25 | 杭州左蓝微电子技术有限公司 | 叉指换能器指条成型工艺以及声表滤波器 |
CN117318646A (zh) * | 2023-10-12 | 2023-12-29 | 中微龙图电子科技无锡有限责任公司 | 一种具有温度补偿功能的声表面波滤波器的制造方法 |
Citations (14)
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JP2000353928A (ja) * | 1999-06-10 | 2000-12-19 | Fujitsu Ltd | 弾性表面波素子及びその製造方法 |
JP2001053569A (ja) * | 1999-08-16 | 2001-02-23 | Hitachi Denshi Ltd | 弾性表面波素子の製造方法 |
KR20010019089A (ko) * | 1999-08-25 | 2001-03-15 | 구자홍 | 패턴 형성 방법 |
US20020164545A1 (en) * | 2001-01-12 | 2002-11-07 | Murata Manufacturing Co., Ltd. | Methods of forming resist pattern, forming electrode pattern, and manufacturing surface acoustic wave device |
JP2003168951A (ja) * | 2001-11-29 | 2003-06-13 | Murata Mfg Co Ltd | 弾性表面波素子、弾性表面波装置及びその製造方法、通信装置 |
KR20040001125A (ko) * | 2002-06-27 | 2004-01-07 | 주식회사 하이닉스반도체 | 위상반전 마스크 제작방법 |
KR20050109720A (ko) * | 2004-05-17 | 2005-11-22 | 삼성전기주식회사 | Saw 소자의 제조방법 |
TW200703894A (en) * | 2005-07-15 | 2007-01-16 | Tai Saw Technology Co Ltd | Back-side ARC edposition and duel development for high frequency surface acoustic wave device fabrication |
JP2007336417A (ja) * | 2006-06-19 | 2007-12-27 | Epson Toyocom Corp | 弾性表面波素子片およびその製造方法 |
WO2013083469A2 (de) * | 2011-12-06 | 2013-06-13 | Leibniz-Institut Für Festkörper- Und Werkstoffforschung Dresden E.V. | Akustisches oberflächenwellenbauelement und verfahren zu seiner herstellung |
WO2017011931A1 (zh) * | 2015-07-20 | 2017-01-26 | 潍坊星泰克微电子材料有限公司 | 利用光刻胶沉积金属构形的方法 |
CN109461652A (zh) * | 2018-10-31 | 2019-03-12 | 无锡中微晶园电子有限公司 | 一种改善厚金属层lift off工艺图形异常的方法 |
CN112436816A (zh) * | 2020-12-03 | 2021-03-02 | 广东广纳芯科技有限公司 | 温度补偿型声表面波器件及其制造方法 |
CN112448687A (zh) * | 2020-11-23 | 2021-03-05 | 广东广纳芯科技有限公司 | 一种tc-saw滤波器制造方法 |
-
2021
- 2021-07-28 CN CN202110858962.0A patent/CN113726302A/zh active Pending
Patent Citations (14)
Publication number | Priority date | Publication date | Assignee | Title |
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JP2000353928A (ja) * | 1999-06-10 | 2000-12-19 | Fujitsu Ltd | 弾性表面波素子及びその製造方法 |
JP2001053569A (ja) * | 1999-08-16 | 2001-02-23 | Hitachi Denshi Ltd | 弾性表面波素子の製造方法 |
KR20010019089A (ko) * | 1999-08-25 | 2001-03-15 | 구자홍 | 패턴 형성 방법 |
US20020164545A1 (en) * | 2001-01-12 | 2002-11-07 | Murata Manufacturing Co., Ltd. | Methods of forming resist pattern, forming electrode pattern, and manufacturing surface acoustic wave device |
JP2003168951A (ja) * | 2001-11-29 | 2003-06-13 | Murata Mfg Co Ltd | 弾性表面波素子、弾性表面波装置及びその製造方法、通信装置 |
KR20040001125A (ko) * | 2002-06-27 | 2004-01-07 | 주식회사 하이닉스반도체 | 위상반전 마스크 제작방법 |
KR20050109720A (ko) * | 2004-05-17 | 2005-11-22 | 삼성전기주식회사 | Saw 소자의 제조방법 |
TW200703894A (en) * | 2005-07-15 | 2007-01-16 | Tai Saw Technology Co Ltd | Back-side ARC edposition and duel development for high frequency surface acoustic wave device fabrication |
JP2007336417A (ja) * | 2006-06-19 | 2007-12-27 | Epson Toyocom Corp | 弾性表面波素子片およびその製造方法 |
WO2013083469A2 (de) * | 2011-12-06 | 2013-06-13 | Leibniz-Institut Für Festkörper- Und Werkstoffforschung Dresden E.V. | Akustisches oberflächenwellenbauelement und verfahren zu seiner herstellung |
WO2017011931A1 (zh) * | 2015-07-20 | 2017-01-26 | 潍坊星泰克微电子材料有限公司 | 利用光刻胶沉积金属构形的方法 |
CN109461652A (zh) * | 2018-10-31 | 2019-03-12 | 无锡中微晶园电子有限公司 | 一种改善厚金属层lift off工艺图形异常的方法 |
CN112448687A (zh) * | 2020-11-23 | 2021-03-05 | 广东广纳芯科技有限公司 | 一种tc-saw滤波器制造方法 |
CN112436816A (zh) * | 2020-12-03 | 2021-03-02 | 广东广纳芯科技有限公司 | 温度补偿型声表面波器件及其制造方法 |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN114545740A (zh) * | 2022-01-25 | 2022-05-27 | 北京中科飞鸿科技股份有限公司 | 一种半透明晶圆及其曝光过程加工方法 |
CN115242206A (zh) * | 2022-09-22 | 2022-10-25 | 杭州左蓝微电子技术有限公司 | 叉指换能器指条成型工艺以及声表滤波器 |
CN117318646A (zh) * | 2023-10-12 | 2023-12-29 | 中微龙图电子科技无锡有限责任公司 | 一种具有温度补偿功能的声表面波滤波器的制造方法 |
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Effective date of registration: 20240506 Address after: 362000 No. 2, Lianshan Industrial Zone, Gushan village, Shijing Town, Nan'an City, Quanzhou City, Fujian Province Applicant after: Quanzhou San'an integrated circuit Co.,Ltd. Country or region after: China Address before: No.753-799 Min'an Avenue, Hongtang Town, Tong'an District, Xiamen City, Fujian Province, 361000 Applicant before: XIAMEN SANAN INTEGRATED CIRCUIT Co.,Ltd. Country or region before: China |