CN113547493B - Automatic leveling method for working platform - Google Patents
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- CN113547493B CN113547493B CN202110793591.2A CN202110793591A CN113547493B CN 113547493 B CN113547493 B CN 113547493B CN 202110793591 A CN202110793591 A CN 202110793591A CN 113547493 B CN113547493 B CN 113547493B
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- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25H—WORKSHOP EQUIPMENT, e.g. FOR MARKING-OUT WORK; STORAGE MEANS FOR WORKSHOPS
- B25H1/00—Work benches; Portable stands or supports for positioning portable tools or work to be operated on thereby
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Abstract
The invention discloses an automatic leveling method of a working platform, which comprises a drivable supporting leg, a flexible hinge and a self-sensing piezoelectric ceramic module, wherein when any point on the platform bears external acting force, voltage values generated by a piezoelectric ceramic sensor positioned in the self-sensing piezoelectric ceramic module are respectively detected, the pressure born by the drivable supporting leg is calculated, and then the pressures of different drivable supporting legs are compared, so that a leveling control strategy is made. The invention has the characteristics of clear control logic, high response speed and high adjustment precision.
Description
[ field of technology ]
The invention relates to the technical field of automatic adjustment of platform pose, in particular to an automatic leveling method of a working platform.
[ background Art ]
The automatic leveling device is used for adjusting the real-time gesture of the working platform so that the working platform keeps a horizontal position. The development of scientific technology promotes the improvement of equipment precision and performance, so that the equipment has higher and higher precision requirements on a self working platform, and the requirement relationship promotes the expansion of the range of an automatic leveling device, and the automatic leveling device becomes a necessary tool in important fields such as aviation navigation, bridge erection, petroleum drilling, machining, industrial automation, intelligent platform and the like. For example, because the advanced process of the chip puts higher requirements on the surface quality of the silicon wafer in the previous process, the levelness of a working platform for bearing the silicon wafer is an important equipment parameter in the ultra-precise grinding and flattening process and the back grinding process of the silicon wafer, but the contact arc length, the contact area and the cutting angle (the included angle between the outer circumference of the grinding wheel and the outer circumference of the workpiece) of the grinding wheel and the silicon wafer change along with the different relative positions of the grinding wheel and the workpiece in the grinding process, so that the grinding force cannot be kept constant, the changed grinding force can cause the levelness of the working platform to fluctuate, and finally the grinding surface type precision and the surface quality of the silicon wafer are influenced; in the 3D printing manufacturing process, for example, the levelness of the working platform will affect the geometric accuracy of the model, and the posture of the working platform will change with the gradual change of the load, and if the working platform is not subjected to timely and effective posture adjustment, the molding quality of the model will be affected.
The piezoelectric ceramic driver is a novel power device with piezoelectric ceramic material as driving part, and its main principle is to utilize the inverse piezoelectric effect of piezoelectric ceramic material to realize micro displacement. The inverse piezoelectric effect of the piezoelectric ceramic material means that the ceramic material can generate a trace amount of deformation under the condition of external voltage. The piezoelectric ceramic driver has the advantages of large output force, high response speed, small volume, strong anti-interference capability and the like.
At present, the leveling of the platform is most commonly realized by using a manual adjustment method, the leveling nuts are rotated by observing, manually or by using a tool, the heights of all adjustment points on the platform are adjusted, the leveling work is completed, and when one point is adjusted, the other points are influenced, so that the leveling device needs multiple times of adjustment, and has long time consumption and low precision; the method for leveling the grinding platform is realized by leveling the grinding platform before the grinding is started, and the influence of dynamic changes of the gravity center and the weight of the workpiece and the change of the grinding force on the levelness of the grinding platform in the grinding process is not considered.
[ invention ]
The invention aims to solve the problems in the prior art and provides an automatic leveling method for a working platform based on pressure feedback, which has the characteristics of clear control logic, high response speed and high adjustment precision.
In order to achieve the above purpose, the present invention provides an automatic leveling method for a working platform, wherein the working platform comprises a drivable leg, a flexible hinge and a self-sensing piezoelectric ceramic module; the driving support legs are provided with three driving support legs, namely a first driving support leg, a second driving support leg and a third driving support leg, and strip-shaped empty slots are formed below each driving support leg; the flexible hinges are respectively arranged at the left side and the right side of the strip-shaped empty groove of each drivable supporting leg; the self-sensing piezoelectric ceramic module comprises a first self-sensing piezoelectric ceramic module, a second self-sensing piezoelectric ceramic module and a third self-sensing piezoelectric ceramic module, which are respectively and fixedly arranged in strip-shaped empty slots of the first drivable supporting leg, the second drivable supporting leg and the third drivable supporting leg; the first self-sensing piezoelectric ceramic module, the second self-sensing piezoelectric ceramic module and the third self-sensing piezoelectric ceramic module are respectively composed of a piezoelectric ceramic sensor and a piezoelectric ceramic driver bonded at the bottom of the piezoelectric ceramic sensor; the bottom of each drivable supporting leg is provided with a pre-tightening threaded hole, a pre-tightening screw in threaded connection is arranged in each pre-tightening threaded hole, and the upper end of each pre-tightening screw abuts against the bottom end of the piezoelectric ceramic driver; the upper end and the lower end of the drivable support leg are respectively and fixedly connected with a platform and a base, the platform is triangular or circular, and the first drivable support leg, the second drivable support leg and the third drivable support leg are distributed in an equilateral triangle by taking the geometric center of the platform as a center point;
an automatic leveling method based on the working platform comprises the following steps:
when any point on the platform bears external acting force, voltage values generated by piezoelectric ceramic sensors in the first self-sensing piezoelectric ceramic module, the second self-sensing piezoelectric ceramic module and the third self-sensing piezoelectric ceramic module are detected respectively, and are assumed to be U respectively 1 、U 2 And U 3 The pressure shared by the first, second and third drivable legs is F 1 、F 2 And F 3 And has
A. When F 1 ＝F 2 ＝F 3 When the working platform is in use, leveling is not needed;
B. when the pressure value shared on any one of the drivable legs is less than the pressure values shared on the remaining two drivable legs, it is assumed that the pressure value shared on the first drivable leg is less than the pressure values shared on the second and third drivable legs, respectively, i.e., F 1 <F 2 And F 1 <F 3 Then
b1. Applying a driving voltage U 'to the piezoceramic actuator at the second drivable leg' 2 For the third drivable legPiezoelectric ceramic driver applies driving voltage U 3 ', and
b2. detecting an increment Δf of a force component in the first drivable leg due to extension and retraction of the second and third drivable legs 1 And (2) and
if DeltaF 1 <Delta, finishing leveling, otherwise, sequentially executing the step b3;
wherein DeltaU 1 Is at DeltaF 1 The voltage generated by the piezoelectric ceramic sensor on the first drivable leg under the action; delta is an accuracy threshold, and the value of delta is specifically set according to the leveling accuracy required by an actual working platform;
b3. reapplying the drive voltage U' to the piezoceramic actuator at the second drivable leg " 2 Applying a driving voltage U' to the piezoceramic actuator at the third drivable leg " 3 And (2) and
U” 2 ＝U’ 2 -ΔU 1 ·k 1
U” 3 ＝U’ 3 -ΔU 1 ·(1-k 1 )
k 1 is a proportionality coefficient, and
b4. step b2 is executed again;
C. when the pressure value shared by any two driving support legs is equal and is smaller than the other driving support legsThe pressure value shared on the movable leg is assumed to be equal to the pressure value shared on the second drivable leg and less than the pressure value shared on the third drivable leg, i.e., F 1 ＝F 2 <F 3 When in use, then
c1. Applying a driving voltage U 'to the piezoceramic actuator at the third drivable leg' 3 And (2) and
c2. detecting an increment Δf 'of a force component in the first drivable leg due to extension and retraction of the third drivable leg' 1 And (2) and
wherein DeltaU' 1 Is at DeltaF' 1 The voltage generated by the piezoelectric ceramic sensor on the first drivable leg under the action;
if DeltaF' 1 <D, finishing leveling, otherwise, sequentially executing the step c3;
c3. reapplying the drive voltage U' to the piezoceramic actuator at the third drivable leg " 3 And (2) and
U” 3 ＝U’ 3 -ΔU’ 1
c4. c2, executing the step again;
in the formula, c is the piezoelectric coefficient of the piezoelectric ceramic material, d is the distance between the single groups of polar plates forming the piezoelectric ceramic driver or the piezoelectric ceramic sensor, L is the length of the drivable supporting leg, E is the elastic modulus of the drivable supporting leg, A is the cross-sectional area of the drivable supporting leg, M is the electrostriction coefficient of the piezoelectric ceramic, L p Is the length of the piezoceramic actuator.
The invention has the beneficial effects that:
compared with the traditional position feedback leveling method, the method has the remarkable advantages of short response time, strong anti-interference capability and high reliability; in order to realize the pressure control of the drivable support leg, the invention provides a relation algorithm of the pressure of the drivable support leg and the detection voltage of the piezoelectric ceramic sensor, a driving voltage algorithm required by platform leveling, and an accuracy control algorithm is included in the leveling method by considering errors generated by the coupling effect when the drivable support leg is adjusted, and the provided working platform leveling control method has the characteristics of clear control logic, high response speed and high adjustment accuracy based on the algorithm.
The features and advantages of the present invention will be described in detail by way of example with reference to the accompanying drawings.
[ description of the drawings ]
FIG. 1 is a schematic structural view of a work platform;
FIG. 2 is a top view of the work platform;
FIG. 3 is a cross-sectional view A-A of FIG. 2;
fig. 4 is an enlarged view of a portion B in fig. 3.
In the figure: 1-base, 2-platform, 3-drivable leg, 4-self-sensing piezoceramic module, 5-flexible hinge, 6-pretension screw, 301-first drivable leg, 302-second drivable leg, 303-third drivable leg, 401-piezoceramic driver, 402-piezoceramic sensor, 403-epoxy.
[ detailed description ] of the invention
Referring to fig. 1 and 2, the invention relates to an automatic leveling method of a working platform, which comprises a drivable supporting leg 3, a flexible hinge 5 and a self-sensing piezoelectric ceramic module 4; the number of the drivable legs is three, namely a first drivable leg 301, a second drivable leg 302 and a third drivable leg 303, and a strip-shaped empty groove is formed below each drivable leg; the flexible hinges 5 are respectively arranged at the left side and the right side of the strip-shaped empty groove of each drivable supporting leg 3, and are directly formed by processing materials at the two sides of the strip-shaped empty groove in a linear cutting mode; the self-sensing piezoelectric ceramic module 4 comprises a first self-sensing piezoelectric ceramic module, a second self-sensing piezoelectric ceramic module and a third self-sensing piezoelectric ceramic module, which are respectively and fixedly arranged in strip-shaped empty slots of the first drivable supporting leg 301, the second drivable supporting leg 302 and the third drivable supporting leg 303; the first self-sensing piezoelectric ceramic module, the second self-sensing piezoelectric ceramic module and the third self-sensing piezoelectric ceramic module respectively consist of a piezoelectric ceramic sensor 402 and a piezoelectric ceramic driver 401 bonded at the bottom of the piezoelectric ceramic sensor, an insulating ceramic plate 403 is arranged between the piezoelectric ceramic sensor 402 and the piezoelectric ceramic driver, and the piezoelectric ceramic sensor, the insulating ceramic plate and the piezoelectric ceramic driver are fixedly connected through epoxy resin; the bottom of each drivable leg is provided with a pre-tightening threaded hole, a pre-tightening screw 6 in threaded connection is arranged in the pre-tightening threaded hole, and the upper end of the pre-tightening screw abuts against the bottom end of the piezoelectric ceramic driver 401; the upper end and the lower end of the drivable leg 3 are respectively and fixedly connected with a platform 2 and a base 1, wherein the upper end of the drivable leg 3 is fixedly connected with the platform 2 through a screw, the lower end of the drivable leg 3 is provided with external threads, the base 1 is provided with a threaded hole at a position corresponding to the drivable leg, and the lower end of the drivable leg 3 is connected with the base through threads; the platform is triangular or circular, and the first drivable supporting leg, the second drivable supporting leg and the third drivable supporting leg are distributed in an equilateral triangle by taking the geometric center of the platform as a center point;
an automatic leveling method based on the working platform comprises the following steps:
the relation between the strain and the voltage of the piezoelectric ceramic is as follows:
in the formula (1), epsilon is the expansion and contraction amount of the piezoelectric ceramic driver, c is the piezoelectric coefficient of the piezoelectric ceramic material, U is the driving voltage of the piezoelectric ceramic driver, and d is the distance between the single groups of polar plates of the piezoelectric ceramic driver or the piezoelectric ceramic sensor.
When any point on the platform bears external acting force, the first self-sensing piezoelectric ceramic module, the second self-sensing piezoelectric ceramic module and the third self-sensing piezoelectric ceramic module are respectively detectedThe voltage values generated by the piezoceramic sensors in the blocks are assumed to be U respectively 1 、U 2 And U 3 The first, second and third drivable legs are respectively subjected to a pressure of F 1 、F 2 And F 3 And has:
(2) Wherein E is the elastic modulus of the drivable support leg, A is the cross-sectional area of the drivable support leg, M is the electrostriction coefficient of the piezoelectric ceramic material, c is the piezoelectric coefficient of the piezoelectric ceramic material, d is the distance between the single groups of polar plates forming the piezoelectric ceramic driver or the piezoelectric ceramic sensor;
A. when F 1 ＝F 2 ＝F 3 When the working platform is in use, leveling is not needed;
B. when the pressure value shared on any one of the drivable legs is less than the pressure values shared on the remaining two drivable legs, it is assumed that the pressure value shared on the first drivable leg is less than the pressure values shared on the second and third drivable legs, respectively, i.e., F 1 <F 2 And F 1 <F 3 Then, as known from Hooke's law in material mechanics, at force F 1 、F 2 、F 3 The deformation amounts of the first drivable leg, the second drivable leg and the third drivable leg under the action are respectively as follows:
in the above, deltaL i (i=1, 2, 3) the deformation amounts corresponding to the first, second and third drivable legs, respectively, F i (i=1, 2, 3) respectively corresponding to the pressure shared by the first drivable leg, the second drivable leg and the third drivable leg, L being the length of the drivable leg, in an initial state the lengths of the drivable legs being equal;
at this time, the difference between the deformation amounts of the first drivable leg and the third drivable leg is:
b1. at this time, to restore the stage to the horizontal state, the elongation of the second piezoelectric actuator should be equal to ΔL 2 -ΔL 1 The elongation of the third piezoelectric actuator is equal to DeltaL 3 -ΔL 1 I.e.
In the above, L p Is the length of the piezoelectric ceramic driver;
applying a driving voltage U 'to the piezoceramic actuator at the second drivable leg' 2 The piezoelectric ceramic driver at the third drivable leg applies a driving voltage U 3 ' thereby obtaining
b2. Detecting an increment Δf of a force component in the first drivable leg due to extension and retraction of the second and third drivable legs 1 And (2) and
if DeltaF 1 <Delta, finishing leveling, otherwiseSequentially executing the step b3;
wherein DeltaU 1 Is at DeltaF 1 The voltage generated by the piezoelectric ceramic sensor on the first drivable leg under the action; delta is an accuracy threshold, and the value of delta is specifically set according to the leveling accuracy required by an actual working platform;
b3. reapplying the driving voltage U to the piezoceramic actuator at the second drivable leg 2 Applying a driving voltage U to the piezoceramic actuator at the third drivable leg 3 ", and
U 2 "＝U' 2 -ΔU 1 ·k 1
U 3 "＝U 3 '-ΔU 1 ·(1-k 1 )
k 1 is a proportionality coefficient, and
b4. step b2 is executed again;
C. when the force sensed by the piezoelectric ceramic sensors on any two drivable legs is equal and the value thereof is smaller than the force sensed by the piezoelectric ceramic sensors on the other drivable leg, assume F 1 ＝F 2 <F 3 And when the method is used, the following steps are carried out:
c1. applying a driving voltage U to the piezoceramic actuator at the third drivable leg 3 ', and
c2. detecting an increment Δf of a force component in the first drivable leg due to extension and retraction of the third drivable leg 1 ', and
wherein DeltaU 1 ' is at DeltaF 1 ' first drivable leg under actionA voltage generated by the piezoelectric ceramic sensor on the leg;
if DeltaF 1 '<D, finishing leveling, otherwise, sequentially executing the step c3;
c3. reapplying the driving voltage U to the piezoceramic actuator at the third drivable leg 3 ", and
U 3 "＝U 3 '-ΔU 1
c4. c2, executing the step again;
the traditional position feedback leveling method has the advantages that the detected variable is the displacement of the platform, the displacement of the platform has obvious hysteresis compared with the acting force because the displacement is generated as a result of acting force transmission, the hysteresis feedback can lead to the reduction of the control precision of the silicon slice surface type in the ultra-precise grinding process of the silicon slice, and the traditional position feedback leveling method is not suitable for dynamic adjustment in the ultra-precise grinding process of the silicon slice, thus preventing the further improvement of the processing precision; compared with the traditional position feedback leveling method, the method has the remarkable advantages of short response time, strong anti-interference capability and high reliability; in order to realize the pressure control of the drivable support leg, the invention provides a relation algorithm of the pressure of the drivable support leg and the detection voltage of the piezoelectric ceramic sensor, a driving voltage algorithm required by platform leveling, and an accuracy control algorithm is included in the leveling method by considering errors generated by the coupling effect when the drivable support leg is adjusted, and the provided working platform leveling control method has the characteristics of clear control logic, high response speed and high adjustment accuracy based on the algorithm.
The above embodiments are illustrative of the present invention, and not limiting, and any simple modifications of the present invention fall within the scope of the present invention.
Claims (1)
1. An automatic leveling method of a working platform comprises a drivable supporting leg, a flexible hinge and a self-sensing piezoelectric ceramic module; the three drivable legs are respectively a first drivable leg and a second drivable legThe lower part of each drivable supporting leg is provided with a strip-shaped empty groove; the flexible hinges are respectively arranged at the left side and the right side of the strip-shaped empty groove of each drivable supporting leg; the self-sensing piezoelectric ceramic module comprises a first self-sensing piezoelectric ceramic module, a second self-sensing piezoelectric ceramic module and a third self-sensing piezoelectric ceramic module, which are respectively and fixedly arranged in strip-shaped empty slots of the first drivable supporting leg, the second drivable supporting leg and the third drivable supporting leg; the first self-sensing piezoelectric ceramic module, the second self-sensing piezoelectric ceramic module and the third self-sensing piezoelectric ceramic module are respectively composed of a piezoelectric ceramic sensor and a piezoelectric ceramic driver bonded at the bottom of the piezoelectric ceramic sensor; the bottom of each drivable supporting leg is provided with a pre-tightening threaded hole, a pre-tightening screw in threaded connection is arranged in each pre-tightening threaded hole, and the upper end of each pre-tightening screw abuts against the bottom end of the piezoelectric ceramic driver; the upper end and the lower end of the drivable support leg are respectively and fixedly connected with a platform and a base, the platform is triangular or circular, and the first drivable support leg, the second drivable support leg and the third drivable support leg are distributed in an equilateral triangle by taking the geometric center of the platform as a center point; the automatic leveling method based on the working platform is characterized by comprising the following steps: when any point on the platform bears external acting force, voltage values generated by piezoelectric ceramic sensors in the first self-sensing piezoelectric ceramic module, the second self-sensing piezoelectric ceramic module and the third self-sensing piezoelectric ceramic module are detected respectively, and are assumed to be U respectively 1 、U 2 And U 3 The pressure shared by the first, second and third drivable legs is F 1 、F 2 And F 3 And has
A. When F 1 ＝F 2 ＝F 3 When the working platform is in use, leveling is not needed;
B. when the pressure value shared by any of the drivable legs is smaller than the restThe pressure value shared on the two drivable legs is assumed to be less than the pressure value shared on the second and third drivable legs, respectively, i.e., F 1 <F 2 And F 1 <F 3 Then
b1. Applying a driving voltage U 'to the piezoceramic actuator at the second drivable leg' 2 Applying a driving voltage U to the piezoceramic actuator at the third drivable leg 3 ', and
b2. detecting an increment Δf of a force component in the first drivable leg due to extension and retraction of the second and third drivable legs 1 And (2) and
if DeltaF 1 <Delta, finishing leveling, otherwise, sequentially executing the step b3;
wherein DeltaU 1 Is at DeltaF 1 The voltage generated by the piezoelectric ceramic sensor on the first drivable leg under the action; delta is an accuracy threshold, and the value of delta is specifically set according to the leveling accuracy required by an actual working platform;
b3. reapplying the drive voltage U' to the piezoceramic actuator at the second drivable leg " 2 Applying a driving voltage U' to the piezoceramic actuator at the third drivable leg " 3 And (2) and
U" 2 ＝U' 2 -ΔU 1 ·k 1
U" 3 ＝U′ 3 -ΔU 1 ·(1-k 1 )
k 1 is a proportionality coefficient, and
b4. step b2 is executed again;
C. when the pressure value shared by any two drivable legs is equal and is smaller than the pressure value shared by the other drivable leg, it is assumed that the pressure value shared by the first drivable leg is equal to the pressure value shared by the second drivable leg and is smaller than the pressure value shared by the third drivable leg, i.e., F 1 ＝F 2 <F 3 When in use, then
c1. Applying a driving voltage U to the piezoceramic actuator at the third drivable leg 3 ', and
c2. detecting an increment Δf of a force component in the first drivable leg due to extension and retraction of the third drivable leg 1 ', and
wherein DeltaU 1 ' is at DeltaF 1 The voltage generated by the piezoelectric ceramic sensor on the first drivable leg under the 'action';
if DeltaF 1 '<D, finishing leveling, otherwise, sequentially executing the step c3;
c3. reapplying the driving voltage U to the piezoceramic actuator at the third drivable leg 3 ", and
U 3 "＝U 3 '-ΔU 1 '
c4. c2, executing the step again;
in the formula, c is the piezoelectric coefficient of the piezoelectric ceramic material, and d is the piezoelectric ceramic driveThe distance between single groups of polar plates of an actuator or a piezoelectric ceramic sensor is L, the length of a drivable supporting leg is L, E is the elastic modulus of the drivable supporting leg, A is the cross section area of the drivable supporting leg, M is the electrostriction coefficient of piezoelectric ceramic, L p Is the length of the piezoceramic actuator.
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