CN201140358Y - Apparatus for regulating pressure of accurate grind impeller head - Google Patents
Apparatus for regulating pressure of accurate grind impeller head Download PDFInfo
- Publication number
- CN201140358Y CN201140358Y CNU2007200655615U CN200720065561U CN201140358Y CN 201140358 Y CN201140358 Y CN 201140358Y CN U2007200655615 U CNU2007200655615 U CN U2007200655615U CN 200720065561 U CN200720065561 U CN 200720065561U CN 201140358 Y CN201140358 Y CN 201140358Y
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- rod
- grinding
- locking cap
- piston rod
- plate
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Abstract
A device for adjusting the pressure of a precision grinding polishing head is used for the precision grinding polishing machine for the production of semi conductor, which comprises a top plate and a piston set support plate connected by a support rod, wherein a driving ring element and a grinding head plate are provided under the piston set support plate, the piston set is provided on the piston set support plate, the lower end face of the piston rod in the piston set is provided on the grinding head plate, an air exhaust rod is provided in the piston rod, whose upper end is connected with a vacuum nozzle, the upper end of the piston rod is protruded outside the top of the piston set and is provided with a locking cap, a radial screw hole at one side of the locking cap is provided with a stop screw stopped relative to the piston rod, the lower end of a load nut is sheathed on the upper end of the piston set via screws, a spring is provided between the bottom of the locking cap and the support step of the load nut. The utility model adopts spring force to control the pressure of a precision grinding polishing head on a sample, having simple structure, reliable property, and wide application of grinding and polishing machines, glass and ceramics.
Description
Technical field
The utility model relates to accurate grinding and polishing machine, further is meant the device that utilizes spring force control accurate milling throwing wheel that the grinding and polishing sample strain is regulated, and belongs to field of manufacturing semiconductor devices.
Background technology
Accurate grinding and polishing machine is one of grinding and polishing equipment crucial during semiconductor devices is made, it is the special-purpose grinding and polishing treatment facility of special processing semiconductor material surface, it should be able to realize the Surface Machining processing of high accuracy, low damage to multiple different size, semi-conducting material dissimilar, different qualities, the quality of semiconductor surface quality directly has influence on the size of surface leakage, thereby influences the performance of chip.Process for treating surface comprises two aspects: the one, and surperficial grinding and polishing, the 2nd, surface passivation.The surface grinding and polishing is the basis of surface passivation, and surperficial grinding and polishing is exactly to obtain intact, a nearly undamaged surface.Theoretically, the grinding and polishing process of the wafer process of a mechanical damage just.Therefore, in order to obtain nearly undamaged surface, must constantly remove big mechanical damage, until minimum with little mechanical damage.The flatness of wafer surface is the important parameter of crystal substrates.The out-of-flatness of wafer surface, in the time of will making photoetching, mask and crystal substrates surface driving fit well contact, and cause degenerating of litho pattern.Simultaneously, in order to satisfy the demand of aspects such as device performance and uniformity thereof, the physical dimension of wafer is also had higher requirements, must be accurate to micron dimension.More than these requirements only depend on manually and can not finish, must rely on process equipment---the accurate grinding and polishing machine of function admirable, can realize required purpose.The grinding and polishing head of regulating accurate grinding and polishing machine is extremely suitable to the pressure of grinding and polishing sample, is related to the quality of rubbing down quality.
The utility model content
The technical problems to be solved in the utility model is, deficiency at the prior art existence, design a kind of device of regulating accurate milling throwing wheel pressure, utilize spring force control accurate milling throwing wheel also can regulate to the size of this pressure to the grinding and polishing sample strain, satisfying the needs of process for fabrication of semiconductor device, and can be applied to the grinding and polishing processing in fields such as machinery, glass, pottery.
The technical solution of the utility model is, the device of described adjusting accurate milling throwing wheel pressure has top board and the piston bush gripper shoe that is connected by strut, there are driving ring assembly and bistrique plate in described piston bush gripper shoe below, piston bush places on the described piston bush gripper shoe, the lower surface that is contained in the piston rod in the piston bush places on the bistrique plate, air exhaust rod is contained in the described piston rod and is connected to vacuum on this air exhaust rod and connects mouth, its design feature is, the upper end of described piston rod stretch out by the piston bush top and its on locking cap is housed, limit screw with respect to described piston rod stop is housed in the radially screw of this locking cap one side, the lower end of load nut is sleeved on the upper end of described piston bush and the two with being threaded, and spring is contained between the supporting step of locking nut bottom and load nut.
Below the utility model made further specify.
Referring to Fig. 1, the device of adjusting accurate milling throwing wheel pressure described in the utility model has top board 6 and the piston bush gripper shoe 4 that is connected by strut 5, there are driving ring assembly 1 and bistrique plate 3 in described piston bush gripper shoe 4 belows, piston bush 13 places on the described piston bush gripper shoe 4, the lower surface that is contained in the piston rod 10 in the piston bush 13 places on the bistrique plate 3, air exhaust rod 8 is contained in the described piston rod 10 and these air exhaust rod 8 upper ends are connected to vacuum and connect mouth 7, its design feature is, the upper end of described piston rod 10 stretch out by piston bush 13 tops and its on locking cap 9 is housed, limit screw 14 with respect to described piston rod stop is housed in the radially screw of these locking cap 9 one sides, the lower end of load nut 12 is sleeved on the upper end of described piston bush 13 and the two with being threaded, and spring 11 is contained between the supporting step of locking cap 9 bottoms and load nut 12.
Operation principle of the present utility model is (referring to Fig. 1), and described bistrique plate 3 utilizes vacuum action absorption grinding and polishing sample 2; Limit screw 14 makes locking cap 9 fixedly connected with piston rod 8, and locking cap 9 places on the spring 11; Piston rod 10 can be in axial sliding in piston bush 13, rotary load nut 12 and it is moved axially with respect to piston bush 13, can regulate the pressure of bistrique plate 3: when anticlockwise (up) rotary load nut 12, promoting locking cap 9 under the effect of spring 11 moves up and drives piston rod 10 and bistrique plate 3 moves up, increase the distance of bistrique plate 3 and mill, alleviate the pressure of 3 pairs of grinding and polishing samples 2 of bistrique plate thus; Otherwise the downward regulating load nut 12 of clockwise along with loosening of spring 11, makes locking cap 9, piston rod 10, bistrique plate 3 move down together under the effect of bistrique plate 3 gravity, to increase the pressure of 3 pairs of grinding and polishing samples 2 of bistrique plate; The size of pressure depends on the weight of bistrique plate 3 self, diameter 75mm bistrique weight is that 1500g, diameter 100mm bistrique weight are 3000g, as long as the elastic parameter of spring 11 done suitably choose the pressure that just can control bistrique plate 3, that is can realize very easily that in this way bistrique controls the pressure of grinding and polishing sample.During practical application, bistrique plate 3 and grinding and polishing sample 2 can be placed on the weighing instrument, weighing instrument can directly show the pressure of bistrique to sample, and this pressure is determined according to different materials.
As known from the above, the utility model is a kind of device of regulating accurate milling throwing wheel pressure, it utilizes spring force control accurate milling throwing wheel that the grinding and polishing sample strain is regulated, simple in structure, dependable performance, generally can realize the adjusting of wheelhead pressure from the 0-3000 gram, can also be applied to the grinding and polishing processing in many fields such as machinery, glass, pottery, a covering device, multiple use.
Description of drawings
Fig. 1 is a kind of example structure schematic diagram of the utility model.In the drawings:
1-driving ring assembly, 2-grinding and polishing sample, 3-bistrique plate,
4-piston bush gripper shoe, the 5-strut, the 6-top board,
The 7-vacuum connects mouth, the 8-air exhaust rod, and the 9-locking cap,
The 10-piston rod, the 11-spring, the 12-load nut,
The 13-piston bush, the 14-limit screw.
The specific embodiment
As shown in Figure 1, the device of adjusting accurate milling throwing wheel pressure described in the utility model has top board 6 and the piston bush gripper shoe 4 that is connected by strut 5, there are driving ring assembly 1 and bistrique plate 3 in described piston bush gripper shoe 4 belows, piston bush 13 places on the described piston bush gripper shoe 4, the lower surface that is contained in the piston rod 10 in the piston bush 13 places on the bistrique plate 3, air exhaust rod 8 is contained in the described piston rod 10 and these air exhaust rod 8 upper ends are connected to vacuum and connect mouth 7, its design feature is, the upper end of described piston rod 10 stretch out by piston bush 13 tops and its on locking cap 9 is housed, limit screw 14 with respect to described piston rod stop is housed in the radially screw of these locking cap 9 one sides, the lower end of load nut 12 is sleeved on the upper end of described piston bush 13 and the two with being threaded, and spring 11 is contained between the supporting step of locking cap 9 bottoms and load nut 12.
Claims (1)
1, a kind of device of regulating accurate milling throwing wheel pressure, the top board (6) and the piston bush gripper shoe (4) that are connected by strut (5) are arranged, there are driving ring assembly (1) and bistrique plate (3) in described piston bush gripper shoe (4) below, piston bush (13) places on the described piston bush gripper shoe (4), the lower surface that is contained in the piston rod (10) in the piston bush (13) places on the bistrique plate (3), air exhaust rod (8) is contained in the described piston rod (10) and this air exhaust rod (8) upper end is connected to vacuum and connects mouth (7), it is characterized in that, the upper end of described piston rod (10) stretch out by piston bush (13) top and its on locking cap (9) is housed, limit screw (14) with respect to described piston rod stop is housed in the radially screw of these locking cap (9) one sides, the lower end of load nut (12) is sleeved on the upper end of described piston bush (13) and the two with being threaded, and spring (11) is contained between the supporting step of locking cap (9) bottom and load nut (12).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNU2007200655615U CN201140358Y (en) | 2007-12-26 | 2007-12-26 | Apparatus for regulating pressure of accurate grind impeller head |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNU2007200655615U CN201140358Y (en) | 2007-12-26 | 2007-12-26 | Apparatus for regulating pressure of accurate grind impeller head |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201140358Y true CN201140358Y (en) | 2008-10-29 |
Family
ID=40068074
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNU2007200655615U Expired - Fee Related CN201140358Y (en) | 2007-12-26 | 2007-12-26 | Apparatus for regulating pressure of accurate grind impeller head |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN201140358Y (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103481187A (en) * | 2013-09-17 | 2014-01-01 | 浙江工业大学 | Automatic pressurizing method of grinding equipment |
| CN104308728A (en) * | 2014-09-27 | 2015-01-28 | 广东工业大学 | Polishing head with vacuum suction cup |
| CN110962039A (en) * | 2018-09-29 | 2020-04-07 | 康宁股份有限公司 | Carrier wafer and method of forming a carrier wafer |
| CN116872071A (en) * | 2023-09-07 | 2023-10-13 | 成都泽雅科技发展有限公司 | Polishing device for injection mold |
-
2007
- 2007-12-26 CN CNU2007200655615U patent/CN201140358Y/en not_active Expired - Fee Related
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103481187A (en) * | 2013-09-17 | 2014-01-01 | 浙江工业大学 | Automatic pressurizing method of grinding equipment |
| CN104308728A (en) * | 2014-09-27 | 2015-01-28 | 广东工业大学 | Polishing head with vacuum suction cup |
| CN104308728B (en) * | 2014-09-27 | 2017-10-24 | 广东工业大学 | A kind of rubbing head with vacuum cup |
| CN110962039A (en) * | 2018-09-29 | 2020-04-07 | 康宁股份有限公司 | Carrier wafer and method of forming a carrier wafer |
| US11919125B2 (en) | 2018-09-29 | 2024-03-05 | Corning Incorporated | Carrier wafers and methods of forming carrier wafers |
| CN116872071A (en) * | 2023-09-07 | 2023-10-13 | 成都泽雅科技发展有限公司 | Polishing device for injection mold |
| CN116872071B (en) * | 2023-09-07 | 2023-11-14 | 成都泽雅科技发展有限公司 | Polishing device for injection mold |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20081029 Termination date: 20121226 |