CN104308728B - A kind of rubbing head with vacuum cup - Google Patents
A kind of rubbing head with vacuum cup Download PDFInfo
- Publication number
- CN104308728B CN104308728B CN201410535599.9A CN201410535599A CN104308728B CN 104308728 B CN104308728 B CN 104308728B CN 201410535599 A CN201410535599 A CN 201410535599A CN 104308728 B CN104308728 B CN 104308728B
- Authority
- CN
- China
- Prior art keywords
- sucker
- vacuum
- workpiece
- retainer
- rubbing head
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 238000005498 polishing Methods 0.000 claims abstract description 14
- 239000000463 material Substances 0.000 claims abstract description 10
- 238000010521 absorption reaction Methods 0.000 claims abstract description 8
- 238000007906 compression Methods 0.000 claims abstract description 5
- 230000006835 compression Effects 0.000 claims abstract description 5
- 238000006243 chemical reaction Methods 0.000 claims description 3
- 230000000694 effects Effects 0.000 claims description 3
- 239000012530 fluid Substances 0.000 claims description 3
- 238000011084 recovery Methods 0.000 claims description 3
- 229920000049 Carbon (fiber) Polymers 0.000 claims description 2
- 239000004917 carbon fiber Substances 0.000 claims description 2
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 claims description 2
- RTZKZFJDLAIYFH-UHFFFAOYSA-N Diethyl ether Chemical compound CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 claims 2
- 150000002576 ketones Chemical class 0.000 claims 1
- 229920000570 polyether Polymers 0.000 claims 1
- 230000005484 gravity Effects 0.000 abstract description 5
- 239000003292 glue Substances 0.000 abstract description 4
- 238000000034 method Methods 0.000 abstract description 4
- 238000003754 machining Methods 0.000 abstract description 2
- 230000010355 oscillation Effects 0.000 abstract description 2
- 230000000712 assembly Effects 0.000 description 3
- 238000000429 assembly Methods 0.000 description 3
- 239000004696 Poly ether ether ketone Substances 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000011017 operating method Methods 0.000 description 2
- 229920002530 polyetherether ketone Polymers 0.000 description 2
- 241000252254 Catostomidae Species 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- JUPQTSLXMOCDHR-UHFFFAOYSA-N benzene-1,4-diol;bis(4-fluorophenyl)methanone Chemical compound OC1=CC=C(O)C=C1.C1=CC(F)=CC=C1C(=O)C1=CC=C(F)C=C1 JUPQTSLXMOCDHR-UHFFFAOYSA-N 0.000 description 1
- 239000003153 chemical reaction reagent Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000001788 irregular Effects 0.000 description 1
- 238000007517 polishing process Methods 0.000 description 1
- 230000009466 transformation Effects 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B41/00—Component parts such as frames, beds, carriages, headstocks
- B24B41/04—Headstocks; Working-spindles; Features relating thereto
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B29/00—Machines or devices for polishing surfaces on work by means of tools made of soft or flexible material with or without the application of solid or liquid polishing agents
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Abstract
The present invention is a kind of rubbing head with vacuum cup, rubbing head can fast and stable absorption workpiece, can independently rotate and rotating speed can be adjusted by polishing machine, polish pressure can be changed.Rubbing head is composed in series in order by sucker, high-speed joint, vacuum hose, vacuum generator, wherein the sucker has two schemes：1. sucker include card, try to get to the heart of a matter, vacuum tube, connection card and bolt, the briquetting of different quality tried to get to the heart of a matter, use the polish pressure on different quality briquetting combination regulation workpiece；2. sucker include card, try to get to the heart of a matter, locating shaft, vacuum tube, positioning tube, spring, look nut, retainer, position-limited rack, retainer end face ring, the polish pressure that acts on workpiece is changed by look nut compression spring.The present invention can replace the method that the materials such as traditional glue, soluble wax bond workpiece, and cost is low, simple to operate, can improve processing efficiency and machining accuracy.The present invention is applied in combination with rotary oscillation gravity type polisher lapper.
Description
Technical field
The present invention relates to a kind of rubbing head being applied in combination with rotary oscillation gravity type polisher lapper, especially a kind of profit
With vacuum cup absorption workpiece, polish pressure, the rubbing head that can independently rotate and its operating method can be adjusted.
Background technology
One big advantage of gravity type polisher lapper exactly can be such that pressure even is distributed on workpiece, traditional work
Part method of clamping is the material using some stickup property, and workpiece is pasted onto briquetting bottom surface by such as glue, soluble wax material.It is viscous
Uniformity is difficult control when the material of patch property is applied on polished part, and makes its became uneven, can directly influence polished part polishing
Global planarizartion.Changing operating pressure needs to use different briquettings instead, and repeats to paste that clamping error can be brought.Application work
Complicated with processing Comparision after polishing, low production efficiency, consumptive material is more.
The content of the invention
It is an object of the invention to consider above mentioned problem and to provide a kind of pressure that can inherit gravity type polishing machine steady
Uniform advantage, the method for workpiece is pasted instead of tradition, workpiece global planarizartion can be realized, simple to operate, cost is relatively low, has
The rubbing head of higher production efficiency.The rubbing head can be produced vacuum by vacuum generator and utilize sucker suction workpiece, can
With adjustment effect in the polish pressure on workpiece, vacuum cup is driven to swing and rotate using polishing machine upper swing arm, and slew rate
It is adjustable with rotating speed.
The technical solution adopted for the present invention to solve the technical problems has two kinds：
First, the first scheme：Rubbing head is composed in series by sucker, swivel joint, vacuum hose, vacuum generator.Its
Described in sucker include card, try to get to the heart of a matter, vacuum tube, connection card and bolt, the briquetting of different quality tried to get to the heart of a matter, use vacuum cup
Workpiece is adsorbed, polish pressure is provided using the gravity of sucker and briquetting for workpiece, polishing machine swing arm drives rubbing head rotation and put
It is dynamic.
The invention of the first scheme is further designed as：Vacuum cup by card, try to get to the heart of a matter, vacuum tube, bolt are constituted, disk
Face is fixedly connected with bolts assemblies with trying to get to the heart of a matter, and vacuum tube and is tried to get to the heart of a matter and is threadably secured connection.The vacuum tube other end passes through screw thread
It is fixedly connected with high-speed joint.The swivel joint other end is connected by the air entry of vacuum hose and vacuum generator.Very
The air inlet of empty generator is passed through compressed air, is produced using bernoulli principle in the gas circuit being connected with air entry certain true
Sky, using the draught head polished between workpiece two sides by absorption of workpieces in the card of sucker.
The invention of the first scheme is further designed as：Aperture or groove are distributed with card, it is equally distributed
The air drain that aperture or groove combine formation with trying to get to the heart of a matter by card is connected with vacuum tube.
2nd, second scheme：Rubbing head is also to be composed in series by sucker, swivel joint, vacuum hose, vacuum generator.
Wherein described sucker include card, try to get to the heart of a matter, locating shaft, vacuum tube, positioning tube, spring, look nut, retainer, position-limited rack, guarantor
Hold frame end face ring.The card absorption workpiece of sucker, the polish pressure acted on workpiece is changed by look nut compression spring,
Polishing machine swing arm drives rubbing head rotation and swung.
The invention of second scheme is further designed as：The card of sucker is fixedly connected with bolts assemblies with trying to get to the heart of a matter, disk
Locating shaft is housed, the locating shaft other end is fixedly connected by screw thread with vacuum tube on bottom, the vacuum tube other end passes through screw thread and rotation
Adapter is fixedly connected.The swivel joint other end is connected by the air entry of vacuum hose and vacuum generator.Vacuum generator
Air inlet be passed through compressed air, certain vacuum is produced in the gas circuit being connected with air entry using bernoulli principle, utilize
The draught head between workpiece two sides is polished by absorption of workpieces in the card of sucker.
Locating shaft and positioning tube gap coordinate, and positioning tube is fixedly connected with retainer.Spring, pressure regulation are installed in positioning tube
The precession and back-out of nut cause the compression and recovery of spring, can adjust the polish pressure of workpiece.
Position-limited rack is installed on trying to get to the heart of a matter, can confinement plate bottom rotated relative to retainer.
The invention of second scheme is further designed as：Aperture or groove are distributed with card, it is equally distributed
The air drain that aperture or groove combine formation with trying to get to the heart of a matter by card is connected with vacuum tube.
Retainer end face ring be do not occur chemical reaction with polishing fluid, wearability is good, high purity material.
There is pressure value label on vacuum tube, for indicating that look nut is in the polish pressure value that the position is.
The beneficial effects of the invention are as follows：The present invention can replace the materials such as traditional use glue, soluble wax to glue workpiece
It is attached to the method for briquetting bottom surface.The cleaning after the paster work and processing of complexity is avoided, processing efficiency is improved, saves
Chemical reagent needed for stickum and cleaning, reduces cost.Avoid because the even influence of stickum became uneven is complete
Office's flattening effect, pressure is steady and uniform, and pressure and rotating speed can be adjusted easily, improve machining accuracy.Scheme
Fast sucker can adsorb the workpiece of irregular shape in two, and can correct the depth of parallelism of workpiece upper and lower surface.
Brief description of the drawings
Fig. 1 is the sectional view of sucker in scheme one.
Fig. 2 is the card top view of sucker in scheme one
Fig. 3 is the stereogram of sucker in scheme two.
Fig. 4 is the sectional view of sucker in scheme two.
Fig. 5 is the three-dimensional cutaway view of sucker in scheme two.
Fig. 6 is the overall schematic of the present invention.
In figure：1 small through hole one, 2. cards one, 3. try to get to the heart of a matter one, 4. air drains one, 5. bolts, 6. briquettings one, 7. briquettings two,
8. briquetting three, 9. briquettings four, 10. vacuum tubes one, 11. screwed holes, 12 small through hole two, 13. cards two, 14. air drains two, 15. disks
Bottom two, 16. retainer end face rings, 17. retainers, 18. position-limited racks, 19. locating shafts, 20 positioning tubes, 21. springs, 22. pressure regulation spiral shells
Mother, 23. vacuum tubes two, 24. stopper slots, 25. suckers, 26. high-speed joints, 27. vacuum hoses, 28. vacuum generators,
29. vacuum generator air inlet pipe.
Embodiment
Embodiment：
The present invention will be further described below in conjunction with the accompanying drawings.The present invention has two schemes, and the present invention is not limited to implement
The concrete structure of example, the equivalent transformation of other similar structures is each fallen within protection scope of the present invention.
The present invention has kind of a scheme, and the integral layout of two schemes is similar, as shown in fig. 6, the rubbing head of two schemes is all
It is made up of sucker 25, high-speed joint 26, vacuum hose 27, vacuum generator 28.Sucker 25 is by screw thread with rotating at a high speed
The assembly connection of joint 26, the other end of high-speed joint 26 is connected with vacuum hose 27, and the other end of vacuum hose 27 is sent out with vacuum
Raw device 28 is connected, and the air inlet of vacuum generator 28 is connected with air inlet pipe 29.
The difference of two schemes is the structure of sucker 25.Sucker in scheme one as shown in Figure 1 and Figure 2, in scheme two
Sucker is as shown in Fig. 3, Fig. 4, Fig. 5.
As shown in Figure 1 and Figure 2, the sucker in scheme one includes card 1, try to get to the heart of a matter one 3, connection card 1 and disk
Bolt 5, briquetting 1, briquetting 27, briquetting 38, briquetting 49, the vacuum tube 1 at bottom 1.Card 1
One 3 it is fixedly connected with trying to get to the heart of a matter with the assembling of bolt 5, vacuum tube 1 and tries to get to the heart of a matter and one 3 be threadably secured connection.The disk
Have screwed hole 11 and equally distributed small through hole 1 on face 1, it is described try to get to the heart of a matter on air drain 1, small through hole one is distributed with
1 connects to form vacuum air-channel by air drain 1 with vacuum tube 1, by absorption of workpieces in card 1.The pressure
Block 1, briquetting 27, briquetting 38, briquetting 49 represent the briquetting of different quality, are adjusted by the combination of different briquettings
The whole polish pressure to workpiece.
As shown in Fig. 3, Fig. 4, Fig. 5, the sucker in scheme two includes card 2 13, try to get to the heart of a matter 2 15, retainer end face
Ring 16, retainer 17, position-limited rack 18, locating shaft 19, positioning tube 20, spring 21, look nut 22, vacuum tube 2 23.Sucker
Card 2 13 2 15 be fixedly connected with bolts assemblies with trying to get to the heart of a matter, trying to get to the heart of a matter 2 15 is equipped with locating shaft 19, and locating shaft 19 is another
One end is fixedly connected by screw thread with vacuum tube 2 23, and locating shaft 19 and positioning tube 20 coordinate, positioning tube 20 and retainer 17
It is fixedly connected, the end face of retainer 17 is provided with retainer end face ring 16 by screw.20 are provided with spring 21 in positioning tube, rotation
The precession and back-out of nut 22 cause the compression and recovery of spring 21, and then the polish pressures different to workpiece offer.The disk
There is equally distributed small through hole 2 12 on face 2 13, described try to get to the heart of a matter 2 15 has air drain 2 14, the retainer end face
Ring 16 be do not occur chemical reaction with polishing fluid, wearability is good, high purity material, preferred carbon fiber polyether-ether-ketone (CF/
PEEK) material.The position-limited rack 18, which is fixedly installed in, tries to get to the heart of a matter on 2 15, and its two ends is respectively at the stopper slot 24 on retainer 17
Gap coordinates, and limitation card 2 13 and tries to get to the heart of a matter and 2 15 rotates and come off relative to retainer 17.
In scheme two, need to re-scale polish pressure indicating value when changing the thickness of polishing workpiece, pressure is shown
Value label is affixed on vacuum tube 2 23.
The operating method of rubbing head of the present invention：
1) air inlet pipe 29 of vacuum generator 28 is passed through compressed air, changes the air pressure size of compressed air and can change suction
Absorption affinity of the disk 25 to workpiece；
2) sucker 25 adsorbs workpiece and is put in after being adjusted to suitable polish pressure on polishing disk, by the swing arm band of polishing machine
The guide wheel moved in its swing, swing arm drives it to rotate, and swing speed and velocity of rotation can be adjusted.
3) after polishing process terminates, the compressed air of the air inlet pipe 29 of vacuum generator 28 is closed after sucker 25 is picked up,
Workpiece can be removed.
Claims (2)
1. a kind of rubbing head with vacuum cup, it is characterised in that：Including sucker, high-speed joint, vacuum hose, vacuum
Generator, wherein, sucker suction workpiece is simultaneously positioned on polishing disk, and the vacuum tube of sucker is connected with high-speed joint, at a high speed
The swivel joint other end is connected by vacuum hose with vacuum generator, and the sucker has retainer and spring, and retainer is with inhaling
The vacuum tube of disk is coaxial, and retainer end face is parallel with the absorption of workpieces face of sucker, and spring is placed in parallel with sucker vacuum tube, with bullet
Spring one end effect be to maintain frame and the part being fixedly connected with retainer, with the spring other end act on be sucker vacuum tube
And the part being fixedly connected with vacuum tube, by the compression and recovery of spring, the polish pressure of workpiece can be adjusted.
2. the rubbing head according to claim 1 with vacuum cup, it is characterised in that：The end face of the retainer is installed
There is a retainer end face ring, end face ring is that do not occur that chemical reaction, wearability be good, high purity carbon fiber polyethers ether with polishing fluid
Ketone material.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410535599.9A CN104308728B (en) | 2014-09-27 | 2014-09-27 | A kind of rubbing head with vacuum cup |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410535599.9A CN104308728B (en) | 2014-09-27 | 2014-09-27 | A kind of rubbing head with vacuum cup |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN104308728A CN104308728A (en) | 2015-01-28 |
| CN104308728B true CN104308728B (en) | 2017-10-24 |
Family
ID=52364111
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201410535599.9A Active CN104308728B (en) | 2014-09-27 | 2014-09-27 | A kind of rubbing head with vacuum cup |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN104308728B (en) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105108639A (en) * | 2015-09-29 | 2015-12-02 | 湖南宇晶机器股份有限公司 | Polishing head for polisher |
| CN110856905A (en) * | 2018-08-23 | 2020-03-03 | 合肥江丰电子材料有限公司 | Automatic polishing device and working method thereof |
| CN115041922A (en) * | 2022-06-24 | 2022-09-13 | 无锡市泛恩精密机械有限公司 | Thin-wall part turning process |
| CN115070615A (en) * | 2022-06-29 | 2022-09-20 | 中国航发动力股份有限公司 | Vacuum chuck device and auxiliary processing method thereof |
| CN115431169B (en) * | 2022-08-24 | 2023-09-01 | 中国电子科技集团公司第十三研究所 | Vacuum connection conversion device, slide polishing method and polishing machine |
| CN116460732A (en) * | 2023-05-29 | 2023-07-21 | 北京晶亦精微科技股份有限公司 | Substrate polishing apparatus and control method |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201140358Y (en) * | 2007-12-26 | 2008-10-29 | 中国电子科技集团公司第四十八研究所 | Apparatus for regulating pressure of accurate grind impeller head |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2004094105A1 (en) * | 2003-04-24 | 2004-11-04 | Nikon Corporation | Vacuum suction holding apparatus and method, grinding apparatus using the holding apparatus, and device producing method using the grinding apparatus |
| CN100449704C (en) * | 2006-08-11 | 2009-01-07 | 中芯国际集成电路制造(上海)有限公司 | Device for cleaning grinding head |
| JP5317119B2 (en) * | 2009-08-18 | 2013-10-16 | スピードファム株式会社 | Vacuum suction head |
| CN202491166U (en) * | 2012-02-03 | 2012-10-17 | 中芯国际集成电路制造(上海)有限公司 | Grinding head and grinding device capable of enhancing wafer grinding uniformity |
| CN204135880U (en) * | 2014-09-27 | 2015-02-04 | 广东工业大学 | A kind of rubbing head with vacuum cup |
-
2014
- 2014-09-27 CN CN201410535599.9A patent/CN104308728B/en active Active
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201140358Y (en) * | 2007-12-26 | 2008-10-29 | 中国电子科技集团公司第四十八研究所 | Apparatus for regulating pressure of accurate grind impeller head |
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| Publication number | Publication date |
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| CN104308728A (en) | 2015-01-28 |
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