CN113547493A - Automatic leveling method for working platform - Google Patents
Automatic leveling method for working platform Download PDFInfo
- Publication number
- CN113547493A CN113547493A CN202110793591.2A CN202110793591A CN113547493A CN 113547493 A CN113547493 A CN 113547493A CN 202110793591 A CN202110793591 A CN 202110793591A CN 113547493 A CN113547493 A CN 113547493A
- Authority
- CN
- China
- Prior art keywords
- drivable
- leg
- piezoelectric ceramic
- self
- supporting leg
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25H—WORKSHOP EQUIPMENT, e.g. FOR MARKING-OUT WORK; STORAGE MEANS FOR WORKSHOPS
- B25H1/00—Work benches; Portable stands or supports for positioning portable tools or work to be operated on thereby
- B25H1/14—Work benches; Portable stands or supports for positioning portable tools or work to be operated on thereby with provision for adjusting the bench top
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Force Measurement Appropriate To Specific Purposes (AREA)
- Control Of Position Or Direction (AREA)
Abstract
The invention discloses an automatic leveling method of a working platform, wherein the working platform comprises a driving supporting leg, a flexible hinge and a self-sensing piezoelectric ceramic module, when any point on the platform bears an external acting force, voltage values generated by piezoelectric ceramic sensors in the self-sensing piezoelectric ceramic module are respectively detected, the pressure borne by the driving supporting leg is calculated, and then the pressures of different driving supporting legs are compared, so that a leveling control strategy is made. The invention has the characteristics of clear control logic, high response speed and high adjustment precision.
Description
[ technical field ] A method for producing a semiconductor device
The invention relates to the technical field of automatic adjustment of platform poses, in particular to an automatic leveling method of a working platform.
[ background of the invention ]
The automatic leveling device is used for adjusting the real-time posture of the working platform, so that the working platform keeps a horizontal position. The development of science and technology has led to the improvement of the precision and performance of equipment, so that the precision requirement of the equipment on a self-working platform is higher and higher, and the demand relationship promotes the range expansion of the automatic leveling device, and the automatic leveling device becomes a necessary tool in important fields such as aviation and navigation, bridge erection, oil drilling, machining, industrial automation, intelligent platforms and the like. For example, as the advanced process of the chip puts higher demands on the surface quality of the silicon wafer in the previous process, the levelness of the working platform for bearing the silicon wafer is an important equipment parameter in the ultra-precise grinding and flattening processing and back grinding processing of the silicon wafer, but as the contact arc length, the contact area and the cut-in angle (the included angle between the outer circumference of the grinding wheel and the outer circumference of the workpiece) of the grinding wheel and the silicon wafer change along with the difference of the relative positions of the grinding wheel and the workpiece in the grinding process, the grinding force cannot be kept constant, and the changed grinding force can cause the levelness of the working platform to fluctuate, thereby finally influencing the grinding surface type precision and the surface quality of the silicon wafer; if the horizontal degree of the working platform does not timely and effectively adjust the posture of the working platform, the forming quality of the model is affected.
The piezoelectric ceramic driver is a novel power device taking a piezoelectric ceramic material as a driving part, and the main principle of the piezoelectric ceramic driver is to realize micro-motion displacement by utilizing the inverse piezoelectric effect of the piezoelectric ceramic material. The inverse piezoelectric effect of the piezoceramic material means that the piezoceramic material can generate micro deformation under the condition of external voltage. The piezoelectric ceramic driver has the advantages of large output force, high response speed, small volume, strong anti-interference capability and the like.
Currently, the most common method for realizing platform leveling is leveling by using a manual adjustment method, the height of each adjusting point on the platform is adjusted by observing, manually or rotating a leveling nut by using a tool to finish leveling work, and when one point is adjusted, other points are affected, so that multiple times of adjustment are needed, the time consumption is long, and the precision is low; the leveling method for the grinding platform is realized by leveling before grinding, and the influence of dynamic change of the gravity center and weight of a workpiece and change of grinding force on the levelness of the grinding platform in the grinding process is not considered.
[ summary of the invention ]
The invention aims to solve the problems in the prior art, and provides an automatic leveling method of a working platform based on pressure feedback, which has the characteristics of clear control logic, high response speed and high adjustment precision.
In order to achieve the aim, the invention provides an automatic leveling method of a working platform, wherein the working platform comprises a driving supporting leg, a flexible hinge and a self-sensing piezoelectric ceramic module; the number of the drivable supporting legs is three, the drivable supporting legs are respectively a first drivable supporting leg, a second drivable supporting leg and a third drivable supporting leg, and a strip-shaped empty groove is formed below each drivable supporting leg; the flexible hinges are respectively arranged at the left side and the right side of the strip-shaped empty groove of each driving supporting leg; the self-sensing piezoelectric ceramic module comprises a first self-sensing piezoelectric ceramic module, a second self-sensing piezoelectric ceramic module and a third self-sensing piezoelectric ceramic module which are respectively and fixedly arranged in strip-shaped empty grooves of a first drivable supporting leg, a second drivable supporting leg and a third drivable supporting leg; the first self-sensing piezoelectric ceramic module, the second self-sensing piezoelectric ceramic module and the third self-sensing piezoelectric ceramic module respectively consist of a piezoelectric ceramic sensor and a piezoelectric ceramic driver bonded at the bottom of the piezoelectric ceramic sensor; the bottom of each drivable supporting leg is provided with a pre-tightening threaded hole, a pre-tightening screw in threaded connection is arranged in each pre-tightening threaded hole, and the upper end of each pre-tightening screw props against the bottom end of the piezoelectric ceramic driver; the upper end and the lower end of the drivable supporting leg are respectively fixedly connected with a platform and a base, the platform is triangular or circular, and the first drivable supporting leg, the second drivable supporting leg and the third drivable supporting leg are distributed in an equilateral triangle by taking the geometric center of the platform as a central point;
an automatic leveling method based on the working platform comprises the following steps:
when any point on the platform bears external acting force, respectively detecting the piezoelectric ceramics in the first self-sensing piezoelectric ceramic module, the second self-sensing piezoelectric ceramic module and the third self-sensing piezoelectric ceramic moduleThe voltage values generated by the sensors are assumed to be U respectively1、U2And U3The pressure shared by the first, second and third drivable legs is F1、F2And F3And is provided with
A. When F is present1＝F2＝F3In time, the working platform does not need to be leveled;
B. when the pressure value shared by any one of the drivable legs is less than the pressure values shared by the other two drivable legs, for example, it is assumed that the pressure value shared by the first drivable leg is less than the pressure values shared by the second drivable leg and the third drivable leg, respectively, i.e., F1<F2And F1<F3Then, then
b1. Applying a drive voltage U 'to a piezoceramic driver at a second drivable leg'2Applying a drive voltage U 'to the piezoelectric ceramic driver at the third drivable leg'3And is and
b2. detecting an increase Δ F in the force component of the first drivable leg due to extension and retraction of the second and third drivable legs1And is and
if Δ F1<δ, leveling is finished, otherwise, step b3 is executed in sequence;
wherein Δ U1Is at aF1Under the action of the voltage generated by the piezoelectric ceramic sensor on the first drivable leg; delta is a precision threshold value, and the value of the precision threshold value is specifically set according to the leveling precision required by the actual working platform;
b3. reapplying the drive voltage U to the piezo ceramic actuator at the second drivable leg "2Applying a drive voltage U to the piezoceramic driver at the third drivable leg "3And is and
U”2＝U’2-ΔU1·k1
U”3＝U’3-ΔU1·(1-k1)
k1is a proportionality coefficient, and
b4. step b2 is executed again;
C. when the pressure values shared by any two drivable legs are equal and smaller than the pressure value shared by the other drivable leg, for example, it is assumed that the pressure value shared by the first drivable leg is equal to the pressure value shared by the second drivable leg and smaller than the pressure value shared by the third drivable leg, i.e., F1＝F2<F3When it is, then
c1. Applying a drive voltage U 'to a piezoceramic driver at a third drivable leg'3And is and
c2. detecting an increment of a force component delta F 'in the first drivable leg due to extension and contraction of the third drivable leg'1And is and
wherein delta U'1Is at delta F'1Under the action of the voltage generated by the piezoelectric ceramic sensor on the first drivable leg;
if delta F'1<δ, leveling is finished, otherwise, step c3 is executed in sequence;
c3. reapplying the drive voltage U to the piezo ceramic actuator at the third drivable leg "3And is and
U”3＝U’3-ΔU’1
c4. step c2 is executed again;
in the above formula, c is the piezoelectric coefficient of the piezoelectric ceramic material, d is the distance between single group of polar plates constituting the piezoelectric ceramic driver or the piezoelectric ceramic sensor, L is the length of the drivable leg, E is the elastic modulus of the drivable leg, A is the cross-sectional area of the drivable leg, M is the electrostrictive coefficient of the piezoelectric ceramic, LpIs the length of the piezoceramic actuator.
The invention has the beneficial effects that:
the invention provides a method for leveling a working platform by using pressure parameters capable of driving supporting legs as control variables for leveling the working platform, and compared with the traditional position feedback leveling method, the method has the remarkable advantages of short response time, strong anti-interference capability and high reliability; in order to realize the pressure control of the drivable supporting legs, the invention provides a relation algorithm of the pressure of the drivable supporting legs and the detection voltage of the piezoelectric ceramic sensor and a driving voltage algorithm required by platform leveling, and the leveling method comprises a precision control algorithm by considering the error generated by the coupling action when the drivable supporting legs are adjusted.
The features and advantages of the present invention will be described in detail by embodiments in conjunction with the accompanying drawings.
[ description of the drawings ]
FIG. 1 is a schematic structural view of a work platform;
FIG. 2 is a top view of the work platform;
FIG. 3 is a sectional view A-A of FIG. 2;
fig. 4 is an enlarged view of a portion B in fig. 3.
In the figure: 1-base, 2-platform, 3-drivable leg, 4-self-sensing piezoelectric ceramic module, 5-flexible hinge, 6-pretension screw, 301-first drivable leg, 302-second drivable leg, 303-third drivable leg, 401-piezoelectric ceramic driver, 402-piezoelectric ceramic sensor, 403-epoxy resin.
[ detailed description ] embodiments
Referring to fig. 1 and 2, the invention relates to an automatic leveling method of a working platform, wherein the working platform comprises a driving support leg 3, a flexible hinge 5 and a self-sensing piezoelectric ceramic module 4; the number of the drivable supporting legs is three, namely a first drivable supporting leg 301, a second drivable supporting leg 302 and a third drivable supporting leg 303, and a strip-shaped empty groove is formed below each drivable supporting leg; the flexible hinges 5 are respectively arranged at the left side and the right side of the strip-shaped empty groove of each driving supporting leg 3, and are directly processed and molded by adopting a linear cutting mode on materials at the two sides of the strip-shaped empty groove; the self-sensing piezoelectric ceramic module 4 comprises a first self-sensing piezoelectric ceramic module, a second self-sensing piezoelectric ceramic module and a third self-sensing piezoelectric ceramic module which are respectively and fixedly arranged in strip-shaped empty grooves of a first drivable supporting leg 301, a second drivable supporting leg 302 and a third drivable supporting leg 303; the first self-sensing piezoelectric ceramic module, the second self-sensing piezoelectric ceramic module and the third self-sensing piezoelectric ceramic module are respectively composed of a piezoelectric ceramic sensor 402 and a piezoelectric ceramic driver 401 bonded at the bottom of the piezoelectric ceramic sensor, an insulating ceramic piece 403 is padded between the first self-sensing piezoelectric ceramic module and the second self-sensing piezoelectric ceramic module, and the piezoelectric ceramic sensor, the insulating ceramic piece and the piezoelectric ceramic driver are fixedly connected through epoxy resin; a pre-tightening threaded hole is formed in the bottom of each drivable supporting leg, a pre-tightening screw 6 in threaded connection is arranged in each pre-tightening threaded hole, and the upper end of each pre-tightening screw abuts against the bottom end of the piezoelectric ceramic driver 401; the upper end and the lower end of the drivable supporting leg 3 are respectively and fixedly connected with a platform 2 and a base 1, wherein the upper end of the drivable supporting leg 3 is fixedly connected with the platform 2 through a screw, the lower end of the drivable supporting leg 3 is provided with an external thread, a threaded hole is formed in the base 1 corresponding to the drivable supporting leg, and the lower end of the drivable supporting leg 3 is connected with the base through a thread; the platform is triangular or circular, and the first drivable supporting leg, the second drivable supporting leg and the third drivable supporting leg are distributed in an equilateral triangle by taking the geometric center of the platform as a central point;
an automatic leveling method based on the working platform comprises the following steps:
from the relationship between strain and voltage of the piezoelectric ceramic, it can be known that:
in the formula (1), epsilon is the expansion amount of the piezoelectric ceramic driver, c is the piezoelectric coefficient of the piezoelectric ceramic material, U is the driving voltage of the piezoelectric ceramic driver, and d is the distance between single group of polar plates of the piezoelectric ceramic driver or the piezoelectric ceramic sensor.
When any point on the platform bears external acting force, voltage values generated by piezoelectric ceramic sensors in the first self-sensing piezoelectric ceramic module, the second self-sensing piezoelectric ceramic module and the third self-sensing piezoelectric ceramic module are respectively detected, and the voltage values are assumed to be U respectively1、U2And U3The pressure on the first, second and third drivable supporting legs is F1、F2And F3And has the following components:
(2) in the formula, E is the elastic modulus of the drivable supporting leg, A is the cross-sectional area of the drivable supporting leg, M is the electrostrictive coefficient of the piezoelectric ceramic material, c is the piezoelectric coefficient of the piezoelectric ceramic material, and d is the distance between single group of polar plates forming the piezoelectric ceramic driver or the piezoelectric ceramic sensor;
A. when F is present1＝F2＝F3In time, the working platform does not need to be leveled;
B. when the pressure value shared by any drivable supporting leg is smallThe pressure values shared by the other two drivable legs, for example, if the pressure value shared by the first drivable leg is smaller than the pressure values shared by the second and third drivable legs, respectively, i.e., F1<F2And F1<F3Then, as can be seen from Hooke's law in material mechanics, at force F1、F2、F3The deformation amounts of the first drivable leg, the second drivable leg and the third drivable leg under the action are respectively:
in the above formula,. DELTA.Li(i ═ 1,2,3) correspond to the deformation amounts of the first drivable leg, the second drivable leg and the third drivable leg, respectively, Fi(i ═ 1,2,3) respectively correspond to the pressures shared by the first drivable leg, the second drivable leg and the third drivable leg, L is the length of the drivable leg, and in the initial state, the length of the drivable legs is equal;
at this time, the deformation difference between the first drivable leg and the third drivable leg is:
b1. at this time, to restore the stage to the horizontal state, the second piezoelectric actuator should be extended by Δ L2-ΔL1The elongation of the third piezoelectric actuator is equal to Δ L3-ΔL1I.e. by
In the above formula, LpIs the length of the piezoelectric ceramic actuator;
applying a drive voltage U 'to a piezoceramic driver at a second drivable leg'2Drive voltage U 'is applied by a piezoceramic driver at the third drivable leg'3From which can be obtained
b2. Detecting an increase Δ F in the force component of the first drivable leg due to extension and retraction of the second and third drivable legs1And is and
if Δ F1<δ, leveling is finished, otherwise, step b3 is executed in sequence;
wherein Δ U1Is at Δ F1Under the action of the voltage generated by the piezoelectric ceramic sensor on the first drivable leg; delta is a precision threshold value, and the value of the precision threshold value is specifically set according to the leveling precision required by the actual working platform;
b3. reapplying the drive voltage U to the piezo ceramic actuator at the second drivable leg "2Applying a drive voltage U to the piezoceramic driver at the third drivable leg "3And is and
U”2＝U’2-ΔU1·k1
U”3＝U’3-ΔU1·(1-k1)
k1is a proportionality coefficient, and
b4. step b2 is executed again;
C. when the force sensed by the piezo-ceramic sensors on any two of the actuatable legs is equal and less than the force sensed by the piezo-ceramic sensors on the other actuatable leg, for example, assume F1＝F2<F3Then:
c1. applying a drive voltage U 'to a piezoceramic driver at a third drivable leg'3And is and
c2. detecting an increment of a force component delta F 'in the first drivable leg due to extension and contraction of the third drivable leg'1And is and
wherein delta U'1Is at delta F'1Under the action of the voltage generated by the piezoelectric ceramic sensor on the first drivable leg;
if delta F'1<δ, leveling is finished, otherwise, step c3 is executed in sequence;
c3. reapplying the drive voltage U to the piezo ceramic actuator at the third drivable leg "3And is and
U”3＝U’3-ΔU1
c4. step c2 is executed again;
in the traditional position feedback leveling method, the detected variable is the displacement of the platform, and because the displacement is generated as a result of the transmission of an acting force, the displacement of the platform has obvious hysteresis compared with the acting force, and the hysteresis feedback causes the reduction of the surface type control precision of the silicon wafer in the ultra-precision grinding process of the silicon wafer, so the traditional position feedback leveling method is not suitable for the dynamic adjustment in the ultra-precision grinding process of the silicon wafer, and the further improvement of the processing precision is hindered; the invention provides a method for leveling a working platform by using pressure parameters capable of driving supporting legs as control variables for leveling the working platform, and compared with the traditional position feedback leveling method, the method has the remarkable advantages of short response time, strong anti-interference capability and high reliability; in order to realize the pressure control of the drivable supporting legs, the invention provides a relation algorithm of the pressure of the drivable supporting legs and the detection voltage of the piezoelectric ceramic sensor and a driving voltage algorithm required by platform leveling, and the leveling method comprises a precision control algorithm by considering the error generated by the coupling action when the drivable supporting legs are adjusted.
The above embodiments are illustrative of the present invention, and are not intended to limit the present invention, and any simple modifications of the present invention are within the scope of the present invention.
Claims (1)
1. A working platform automatic leveling method comprises a driving supporting leg, a flexible hinge and a self-sensing piezoelectric ceramic module; the number of the drivable supporting legs is three, the drivable supporting legs are respectively a first drivable supporting leg, a second drivable supporting leg and a third drivable supporting leg, and a strip-shaped empty groove is formed below each drivable supporting leg; the flexible hinges are respectively arranged at the left side and the right side of the strip-shaped empty groove of each driving supporting leg; the self-sensing piezoelectric ceramic module comprises a first self-sensing piezoelectric ceramic module, a second self-sensing piezoelectric ceramic module and a third self-sensing piezoelectric ceramic module which are respectively and fixedly arranged in strip-shaped empty grooves of a first drivable supporting leg, a second drivable supporting leg and a third drivable supporting leg; the first self-sensing piezoelectric ceramic module, the second self-sensing piezoelectric ceramic module and the third self-sensing piezoelectric ceramic module respectively consist of a piezoelectric ceramic sensor and a piezoelectric ceramic driver bonded at the bottom of the piezoelectric ceramic sensor; the bottom of each drivable supporting leg is provided with a pre-tightening threaded hole, a pre-tightening screw in threaded connection is arranged in each pre-tightening threaded hole, and the upper end of each pre-tightening screw props against the bottom end of the piezoelectric ceramic driver; the upper end and the lower end of the driving supporting leg are respectively fixedly connected with a platformThe platform is triangular or circular, and the first drivable supporting leg, the second drivable supporting leg and the third drivable supporting leg are distributed in an equilateral triangle by taking the geometric center of the platform as a central point; the automatic leveling method based on the working platform is characterized by comprising the following steps: when any point on the platform bears external acting force, voltage values generated by piezoelectric ceramic sensors in the first self-sensing piezoelectric ceramic module, the second self-sensing piezoelectric ceramic module and the third self-sensing piezoelectric ceramic module are respectively detected, and the voltage values are assumed to be U respectively1、U2And U3The pressure shared by the first, second and third drivable legs is F1、F2And F3And is provided with
A. When F is present1＝F2＝F3In time, the working platform does not need to be leveled;
B. when the pressure value shared by any one of the drivable legs is less than the pressure values shared by the other two drivable legs, for example, it is assumed that the pressure value shared by the first drivable leg is less than the pressure values shared by the second drivable leg and the third drivable leg, respectively, i.e., F1<F2And F1<F3Then, then
b1. Applying a drive voltage U 'to a piezoceramic driver at a second drivable leg'2Applying a drive voltage U 'to the piezoelectric ceramic driver at the third drivable leg'3And is and
b2. detecting an increase Δ F in the force component of the first drivable leg due to extension and retraction of the second and third drivable legs1And is and
if Δ F1<δ, leveling is finished, otherwise, step b3 is executed in sequence;
wherein Δ U1Is at Δ F1Under the action of the voltage generated by the piezoelectric ceramic sensor on the first drivable leg; delta is a precision threshold value, and the value of the precision threshold value is specifically set according to the leveling precision required by the actual working platform;
b3. reapplying the drive voltage U to the piezo ceramic actuator at the second drivable leg "2Applying a drive voltage U to the piezoceramic driver at the third drivable leg "3And is and
U"2＝U′2-ΔU1·k1
U"3＝U′3-ΔU1·(1-k1)
k1is a proportionality coefficient, and
b4. step b2 is executed again;
C. when the pressure values shared by any two drivable legs are equal and smaller than the pressure value shared by the other drivable leg, for example, it is assumed that the pressure value shared by the first drivable leg is equal to the pressure value shared by the second drivable leg and smaller than the pressure value shared by the third drivable leg, i.e., F1＝F2<F3When it is, then
c1. Applying a drive voltage U 'to a piezoceramic driver at a third drivable leg'3And is and
c2. detecting an increment of a force component delta F 'in the first drivable leg due to extension and contraction of the third drivable leg'1And is and
wherein delta U'1Is at delta F'1Under the action of the voltage generated by the piezoelectric ceramic sensor on the first drivable leg;
if delta F'1<δ, leveling is finished, otherwise, step c3 is executed in sequence;
c3. reapplying the drive voltage U to the piezo ceramic actuator at the third drivable leg "3And is and
U"3＝U′3-ΔU′1
c4. step c2 is executed again;
in the above formula, c is the piezoelectric coefficient of the piezoelectric ceramic material, d is the distance between single group of polar plates constituting the piezoelectric ceramic driver or the piezoelectric ceramic sensor, L is the length of the drivable leg, E is the elastic modulus of the drivable leg, A is the cross-sectional area of the drivable leg, M is the electrostrictive coefficient of the piezoelectric ceramic, LpIs the length of the piezoceramic actuator.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110793591.2A CN113547493B (en) | 2021-07-12 | 2021-07-12 | Automatic leveling method for working platform |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110793591.2A CN113547493B (en) | 2021-07-12 | 2021-07-12 | Automatic leveling method for working platform |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN113547493A true CN113547493A (en) | 2021-10-26 |
| CN113547493B CN113547493B (en) | 2023-05-09 |
Family
ID=78131699
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202110793591.2A Active CN113547493B (en) | 2021-07-12 | 2021-07-12 | Automatic leveling method for working platform |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN113547493B (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115637935A (en) * | 2022-10-25 | 2023-01-24 | 徐州徐工基础工程机械有限公司 | Mast verticality adjusting device and method for separable rotary drilling rig |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102854751A (en) * | 2011-06-30 | 2013-01-02 | 中国科学院深圳先进技术研究院 | Focusing adjustment leveling mechanism of photolithographic machine and leveling mechanism of photolithographic machine |
| US20180128416A1 (en) * | 2015-05-27 | 2018-05-10 | Beijing Unistrong Science & Technology Co., Ltd. | Two-degree-of-freedom rotation control device and application system therewith |
| CN108987316A (en) * | 2018-09-26 | 2018-12-11 | 广东工业大学 | A kind of flip-chip substrate space level device and system |
| CN109489582A (en) * | 2018-12-29 | 2019-03-19 | 广东工业大学 | A kind of three freedom degree precision movement platform |
| CN112971340A (en) * | 2021-03-10 | 2021-06-18 | 中国科学院长春光学精密机械与物理研究所 | Automatic leveling platform and leveling method |
-
2021
- 2021-07-12 CN CN202110793591.2A patent/CN113547493B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102854751A (en) * | 2011-06-30 | 2013-01-02 | 中国科学院深圳先进技术研究院 | Focusing adjustment leveling mechanism of photolithographic machine and leveling mechanism of photolithographic machine |
| US20180128416A1 (en) * | 2015-05-27 | 2018-05-10 | Beijing Unistrong Science & Technology Co., Ltd. | Two-degree-of-freedom rotation control device and application system therewith |
| CN108987316A (en) * | 2018-09-26 | 2018-12-11 | 广东工业大学 | A kind of flip-chip substrate space level device and system |
| CN109489582A (en) * | 2018-12-29 | 2019-03-19 | 广东工业大学 | A kind of three freedom degree precision movement platform |
| CN112971340A (en) * | 2021-03-10 | 2021-06-18 | 中国科学院长春光学精密机械与物理研究所 | Automatic leveling platform and leveling method |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115637935A (en) * | 2022-10-25 | 2023-01-24 | 徐州徐工基础工程机械有限公司 | Mast verticality adjusting device and method for separable rotary drilling rig |
| CN115637935B (en) * | 2022-10-25 | 2024-04-05 | 徐州徐工基础工程机械有限公司 | Separable rotary drilling rig mast verticality adjusting device and method |
Also Published As
| Publication number | Publication date |
|---|---|
| CN113547493B (en) | 2023-05-09 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| Tian et al. | A flexure-based mechanism and control methodology for ultra-precision turning operation | |
| CN113484005B (en) | Test bench and test method of automatic leveling device | |
| Park et al. | The use of active materials for machining processes: A review | |
| CN113547493A (en) | Automatic leveling method for working platform | |
| CN2900074Y (en) | Processing cutter mechanism capable of telescopically feeding | |
| WO2016197554A1 (en) | Dynamic characteristic adjustable macro-micro integrated composite platform | |
| US20020039060A1 (en) | Actuator | |
| US20060234603A1 (en) | Attitude control device and precision machining apparatus | |
| CN105927696B (en) | A kind of magnetorheological precision machine tool vibration isolator | |
| KR20030061836A (en) | Method and device for the damping of vibration in a cutting tool | |
| CN109382700B (en) | Rigidity self-adaptive quick cutter servo device and method based on magnetorheological elastomer | |
| CN105827145B (en) | Three matrix actuator and its method of work based on Piezoelectric Driving | |
| Shi et al. | NC polishing of aspheric surfaces under control of constant pressure using a magnetorheological torque servo | |
| CN112271955B (en) | Actuating method of piezoelectric actuator with small displacement overshoot and capable of keeping displacement in power-off mode | |
| CN115194737B (en) | Differential six-degree-of-freedom parallel micro-motion platform | |
| CN103354412B (en) | A kind of high frequency micro-displacement driving device and control method | |
| CN201239810Y (en) | Magnetic striction compensation mechanism for improving machine precision of numerically controlled lathe | |
| CN106441673A (en) | Device for actively measuring maximum output force of piezoelectric ceramics | |
| Rusnaldy et al. | An experimental study on microcutting of silicon using a micromilling machine | |
| CN207410248U (en) | Piezoelectricity rotation positioning platform with grand microring array kinetic characteristic | |
| CN106312591A (en) | Three-dimensional oval micro displacement motion platform under three-piezoelectric perpendicular drive | |
| JP4506461B2 (en) | Precision machining apparatus and precision machining method | |
| CN102107375B (en) | Negative stiffness principle-based grinding process system stiffness compensation mechanism | |
| CN209736652U (en) | Quick servo knife rest | |
| CN110425383B (en) | Servo motor and piezoceramics driven macro-micro composite platform |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |