CN206756350U - Thin film strain formula torque sensor - Google Patents
Thin film strain formula torque sensor Download PDFInfo
- Publication number
- CN206756350U CN206756350U CN201720249023.5U CN201720249023U CN206756350U CN 206756350 U CN206756350 U CN 206756350U CN 201720249023 U CN201720249023 U CN 201720249023U CN 206756350 U CN206756350 U CN 206756350U
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- strain
- switching
- sensor
- wheatstone bridge
- lower flange
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Abstract
The utility model discloses a kind of thin film strain formula torque sensor, including switching upper flange, lower flange of transferring, the torsion post composition being fixed in the switching between lower flange, it is characterised in that：The post of turning round is that left and right side is machined with arc groove, top and the bottom and is machined with delthyrium respectively, is had the metal column of four film sensing elements comprising four strain sensitive resistance on a side plane using Sputtering Thinfilm Technology manufacture respectively.The four strain sensitive resistance is formed into wheatstone bridge circuits, when lower flange twists in the switching, wheatstone bridge circuits lose out balance, output signal by measuring the wheatstone bridge circuits can obtain corresponding torque value size, as a result of Sputtering Thinfilm Technology, strain sensor is directly produced on elastic shaft, the lag error of sensor, repeatability error, temperature drift errors are greatly reduced, and sensor accuracy class is improved.Sensor construction is simple, handling ease.
Description
Technical field
A kind of torque sensor is the utility model is related to, more particularly to it is a kind of using Sputtering Thinfilm Technology manufacture strain sensitive
The thin film strain formula torque sensor of element.
Background technology
In machine driven system, moment of torsion is one of important parameter for reflecting systematic function.Torque measurement Aero-Space,
Many industries such as war industry equipment, engineering machinery, ship, drilling well, traffic, metallurgy, generating, mining equiment or field have obtained extensively
Application.Torque measuring method have it is a variety of, wherein the application of traditional strain-type measuring method is very extensive.Strain-type torque sensing
Device is that metal strain plate is pasted onto on elastic shaft to form strain bridge, when elastic shaft causes bridge resistance to become after by torsional deformation
Change, the size of corresponding torque value is obtained by measuring resistance change.
Existing strain-type torque sensor is to use organic gel by strain gauge adhesion on elastomer, this manufacture method
Make the combination property of sensor be influenceed by following factor, these influence factors have：Elastomer adhesive surface cleannes, glue
Performance, the thickness of glue and uniformity, paste position and its consistency etc., in addition, glue by environment temperature, humidity and
The factor such as work long hours, which influences to also result in sensor performance, to change.These influences mainly result in the sluggish of sensor and missed
Difference, repeatability error, temperature drift errors become big, so as to reduce the measurement accuracy of sensor.Simultaneously because the presence of organic gel,
Working sensor environment is subject to certain restrictions.Simultaneously traditional stickup strain-type torque sensor structure is more complicated, processing
It is not easy, production efficiency is low, and cost is high.
Therefore, develop a kind of measurement accuracy height, good operating stability, simple in construction, handling ease, can be applicable it is more harsh
The high-performance torque sensor of environment is of crucial importance.
Using Sputtering Thinfilm Technology, the thin film strain formula torque sensor of film sensing element is directly manufactured on elastic shaft
Can solve above-mentioned problem.
Utility model content
The purpose of this utility model is to provide a kind of thin film strain formula torque sensor, in view of the shortcomings of the prior art,
Solve that traditional strain-type torque sensor lag error, repeatability error, temperature drift errors are big, and measurement accuracy is low, inadaptable
The problems such as adverse circumstances work.
To solve above technical problem, the technical solution of the utility model is：A kind of thin film strain formula torque sensor, bag
Switching upper flange is included, lower flange of transferring, the torsion post for being fixed in the switching upper flange between lower flange of transferring forms, its feature
It is：The torsion post is that left and right side is machined with arc groove, top and the bottom and is machined with delthyrium respectively, adopts on a side plane respectively
The metal column of four film sensing elements comprising four strain sensitive resistance is manufactured with Sputtering Thinfilm Technology；By described four
Strain sensitive resistance form wheatstone bridge circuits, when it is described switching upper flange with switching lower flange twisting when, it is described torsion post by
To twisting force and the strain sensitive resistance is delivered to, the strain sensitive resistance changes, Wheatstone bridge electricity
Balance is lost out on road, and the output signal by measuring the wheatstone bridge circuits can obtain corresponding torque value size.
The film sensing element is made up of insulating barrier, strain sensitive resistance, pad, protective layer.
The figure of the top for turning round post or so two film sensing elements is that specular is distributed, two, top film
The figure of sensing element and the two film sensing elements in bottom is specular distribution.
Compared with prior art, had the beneficial effect that possessed by the utility model：, will as a result of Sputtering Thinfilm Technology
Strain sensor is directly produced on elastic shaft, overcomes the shortcomings that gluing foil gauge is brought, the lag error of sensor, again
Renaturation error, temperature drift errors are greatly reduced, and sensor accuracy class is improved.Sensor construction is simple simultaneously, processing
Easily.
Further, since without using organic gel in manufacturing process, the resistance to gentle long-time stable service behaviour of sensor is more preferable,
It can be used for a long time in more harsh environment.
Brief description of the drawings
Fig. 1 is thin film strain formula torque sensor structural representation of the present utility model.
Fig. 2 is the film sensing element shape graph of thin film strain formula torque sensor of the present utility model.
Fig. 3 is sectional view of the film sensing element of thin film strain formula torque sensor of the present utility model on post is turned round
(film sensing element fraction amplifies in figure).
In figure, 1- switching upper flanges；2- switching lower flanges；
3- turns round post；4- film sensing elements；
5- through holes；31- arc grooves；
32- delthyriums；41- insulating barriers；
42- strain sensitive resistance；43- pads；
44- protective layers.
Embodiment
As shown in Figure 1, 2, 3, thin film strain formula torque sensor of the present utility model, including switching upper flange 1, under switching
Flange 2, the torsion post 3 for being fixed in the switching upper flange 1 between lower flange 2 of transferring form.
The post 3 of turning round is the flat post that a kind of metal material processing forms.In order to increase the sensitivity of sensor, the torsion
The left and right side of post 3 is machined with arc groove 31 respectively, and top and the bottom are machined with delthyrium 32 respectively.Arc groove 31 and delthyrium
Depending on 32 size is because of the range size of sensor.
Four film sensing elements 4 are manufactured using Sputtering Thinfilm Technology in a plane for turning round post 3.Manufacture method is
The parallel surfaces grinding and polishing for needing to manufacture film sensing element 4 of post 3 will be turned round, using Sputtering Thinfilm Technology on the surface successively
Plural layers are prepared, by photoetching technique, form insulating barrier 41, strain sensitive resistance 42, pad 43, protective layer 44.
The figure of the top for turning round post 3 or so two film sensing elements 4 is specular distribution, and top is two thin
The figure of film sensing element 4 and the two film sensing elements 4 in bottom is specular distribution.
The switching upper flange 1 and switching lower flange 2 connect motor shaft and load respectively.It is described switching upper flange 1 and turn
Connect the size of lower flange 2, shape can be adjusted change according to actual conditions.On the switching upper flange 1 and switching lower flange 2
Multiple through holes 5 are provided with, cable can be passed through.
Four strain sensitive resistance 42 on the torsion post 3 are formed into wheatstone bridge circuits, when the switching upper flange 1
When being twisted with switching lower flange 2, the torsion post 3 by twisting force and is delivered to the strain sensitive resistance 42, the strain
The resistance of sensitive resistance 42 changes, and wheatstone bridge circuits lose out balance, and the output electric signal proportional to torque should
Electric signal is outwards exported using existing known technology.
The utility model utilizes Sputtering Thinfilm Technology, and sensing element is directly prepared on elastic shaft, composition favour stone electricity
Bridge circuit.The shortcomings that overcoming the conventional art that foil gauge is pasted on existing elastic shaft so that the lag error of sensor, repeat
Property error, temperature drift errors are greatly reduced, and sensor accuracy class is improved.Further, since in manufacturing process without using
Organic gel, the resistance to gentle long-time stable service behaviour of sensor is more preferable, can be used for a long time in more harsh environment.Simultaneously
The torsion post 3 is machined with arc groove 31 and delthyrium 32, can effectively improve the sensitivity of sensor.This manufacture method structure
Simply, handling ease, production efficiency are high.
It is described above, only it is better embodiment of the present utility model, is not construed as the limit to the scope of the utility model
System, and the right that the utility model is advocated is not limited thereto, all personages for being familiar with this field skill, according to
Technology contents disclosed by the utility model, can think easily and equivalence changes, the scope of protection of the utility model all should be fallen into
It is interior.
Claims (3)
1. a kind of thin film strain formula torque sensor, including switching upper flange (1), switching lower flange (2), are fixed in the switching
Torsion post (3) between upper flange (1) and switching lower flange (2) forms, it is characterised in that：The torsion post (3) is left and right side point
Arc groove (31) is not machined with, top and the bottom are machined with delthyrium (32) respectively, use Sputtering Thinfilm Technology system on a side plane
Make the metal column of four film sensing elements (4) comprising four strain sensitive resistance (42)；By four strain sensitives
Resistance (42) forms wheatstone bridge circuits, when the switching upper flange (1) twists with switching lower flange (2), the torsion post
(3) by twisting force and the strain sensitive resistance (42) being delivered to, strain sensitive resistance (42) resistance changes,
Wheatstone bridge circuits lose out balance, and the output signal by measuring the wheatstone bridge circuits can obtain corresponding torque value
Size.
2. thin film strain formula torque sensor as claimed in claim 1, it is characterised in that：The film sensing element (4) by
Insulating barrier (41), strain sensitive resistance (42), pad (43), protective layer (44) composition.
3. thin film strain formula torque sensor as claimed in claim 1 or 2, it is characterised in that：The top for turning round post (3) is left
The figure of right two film sensing elements (4) is specular distribution, two, top film sensing element (4) and bottom two
The figure of film sensing element (4) is specular distribution.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720249023.5U CN206756350U (en) | 2017-03-15 | 2017-03-15 | Thin film strain formula torque sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720249023.5U CN206756350U (en) | 2017-03-15 | 2017-03-15 | Thin film strain formula torque sensor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN206756350U true CN206756350U (en) | 2017-12-15 |
Family
ID=60610158
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201720249023.5U Active CN206756350U (en) | 2017-03-15 | 2017-03-15 | Thin film strain formula torque sensor |
Country Status (1)
| Country | Link |
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| CN (1) | CN206756350U (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110060573A (en) * | 2019-04-22 | 2019-07-26 | 昆山国显光电有限公司 | Flexible modular structure and display device |
| CN111684251A (en) * | 2018-03-29 | 2020-09-18 | 日本电产科宝电子株式会社 | Torque sensor |
| CN113798921A (en) * | 2021-10-18 | 2021-12-17 | 电子科技大学 | Milling force measuring instrument based on film strain gauge |
| WO2022134904A1 (en) * | 2020-12-21 | 2022-06-30 | 陕西电器研究所 | Anti-overload torque sensor based on thin film sputtering |
-
2017
- 2017-03-15 CN CN201720249023.5U patent/CN206756350U/en active Active
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111684251A (en) * | 2018-03-29 | 2020-09-18 | 日本电产科宝电子株式会社 | Torque sensor |
| US11499879B2 (en) | 2018-03-29 | 2022-11-15 | Nidec Copal Electronics Corporation | Torque sensor having a strain sensor |
| CN110060573A (en) * | 2019-04-22 | 2019-07-26 | 昆山国显光电有限公司 | Flexible modular structure and display device |
| CN110060573B (en) * | 2019-04-22 | 2020-12-29 | 昆山国显光电有限公司 | Flexible module structure and display device |
| WO2022134904A1 (en) * | 2020-12-21 | 2022-06-30 | 陕西电器研究所 | Anti-overload torque sensor based on thin film sputtering |
| CN113798921A (en) * | 2021-10-18 | 2021-12-17 | 电子科技大学 | Milling force measuring instrument based on film strain gauge |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20181024 Address after: 102200 C2065 2, 16 building, No. 37 Chao Yuan Road, Changping District science and Technology Park, Beijing. Patentee after: Weiye smart core (Beijing) Technology Co., Ltd. Address before: 102101 building 26, No. 8, Feng Gu Road, Badaling Development Zone, Yanqing, Beijing. Patentee before: BEIJING ZHONGHANG XINGSHENG MEASUREMENT AND CONTROL TECHNOLOGY CO., LTD. |
|
| TR01 | Transfer of patent right | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20191218 Address after: 410331 A5, Changsha e center, No. 18, Xiang Tai Road, Liuyang, Hunan. Patentee after: Suno Alliance Technology Co., Ltd. Address before: 102200 C2065 2, 16 building, No. 37 Chao Yuan Road, Changping District science and Technology Park, Beijing. Patentee before: Weiye Zhixin (Beijing) Technology Co., Ltd. |
|
| TR01 | Transfer of patent right |