CN206627234U - Film torque sensor - Google Patents
Film torque sensor Download PDFInfo
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- CN206627234U CN206627234U CN201720249022.0U CN201720249022U CN206627234U CN 206627234 U CN206627234 U CN 206627234U CN 201720249022 U CN201720249022 U CN 201720249022U CN 206627234 U CN206627234 U CN 206627234U
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- film
- sensitive resistance
- strain sensitive
- elastomer
- switching
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Abstract
The utility model discloses a kind of film torque sensor, including switching upper flange, lower flange of transferring, two torsion posts being fixed in same circumference symmetric position between the upper lower flange of switching, the two elastomers composition being connected on two torsion posts, it is characterised in that：Two elastomers are fixed on the horizontal center line of two torsion posts.Elastomer manufactures four film sensing elements using Sputtering Thinfilm Technology.Four strain sensitive resistance are formed into Wheatstone bridge, when the upper lower flange twisting of switching, post is turned round by twisting force and the strain sensitive resistance that is delivered on elastomer, strain sensitive resistance changes, wheatstone bridge circuits lose out balance, output signal by measuring the wheatstone bridge circuits can obtain corresponding torque value size, as a result of Sputtering Thinfilm Technology, strain sensor is directly produced on elastomer, the lag error of sensor, repeatability error, temperature drift errors are greatly reduced, and sensor accuracy class is improved.
Description
Technical field
A kind of torque sensor is the utility model is related to, more particularly to it is a kind of using Sputtering Thinfilm Technology manufacture strain sensitive
The film torque sensor of element.
Background technology
In machine driven system, moment of torsion is one of important parameter for reflecting systematic function.Torque measurement Aero-Space,
Many industries such as war industry equipment, engineering machinery, ship, drilling well, traffic, metallurgy, generating, mining equiment or field have obtained extensively
Application.Torque measuring method have it is a variety of, wherein the application of traditional strain-type measuring method is very extensive.Strain-type torque sensing
Device is that metal strain plate is pasted onto on elastomer to form strain bridge, when elastomer causes bridge resistance to become after by torsional deformation
Change, the size of corresponding torque value is obtained by measuring resistance change.
Existing strain-type torque sensor is to use organic gel by strain gauge adhesion on elastomer, this manufacture method
Make the combination property of sensor be influenceed by following factor, these influence factors have：Elastomer adhesive surface cleannes, glue
Performance, the thickness of glue and uniformity, paste position and its consistency etc., in addition, glue by environment temperature, humidity and
The factor such as work long hours, which influences to also result in sensor performance, to change.These influences mainly result in the sluggish of sensor and missed
Difference, repeatability error, temperature drift errors become big, so as to reduce the measurement accuracy of sensor.Simultaneously because the presence of organic gel,
Working sensor environment is subject to certain restrictions.Simultaneously traditional stickup strain-type torque sensor structure is more complicated, processing
It is not easy, production efficiency is low, and cost is high.
Therefore, develop a kind of measurement accuracy height, good operating stability, simple in construction, handling ease, can be applicable it is more harsh
The high-performance torque sensor of environment is of crucial importance.
Using Sputtering Thinfilm Technology, the film torque sensor of directly manufacture film sensing element can solve on elastomer
Above-mentioned problem.
Utility model content
The purpose of this utility model is to provide a kind of film torque sensor in view of the shortcomings of the prior art, solve to pass
Uniting, strain-type torque sensor lag error, repeatability error, temperature drift errors are big, and measurement accuracy is low, is not suitable with severe ring
The problems such as border works.
To solve above technical problem, the technical solution of the utility model is：A kind of film torque sensor, including switching
Upper flange, lower flange of transferring, it is fixed in same circumference symmetric position between the switching upper flange and switching lower flange
Two torsion posts, be connected on two torsion posts two elastomers composition, it is characterised in that：Two elastomers pass through
Symmetrically it is fixed on before and after fixing hole on the horizontal center line of two torsion posts.Sputtered film is respectively adopted in two elastomers
Technology manufacture has four film sensing elements comprising four strain sensitive resistance.The four strain sensitive resistance is formed into favour
Stone bridge circuit, when the switching upper flange is with switching lower flange twisting, the torsion post by twisting force and is delivered to
The strain sensitive resistance, the strain sensitive resistance change, and wheatstone bridge circuits lose out balance, pass through measurement
The output signal of the wheatstone bridge circuits can obtain corresponding torque value size.
The film sensing element is made up of insulating barrier, strain sensitive resistance, pad, protective layer.
The figure of two film sensing elements on the elastomer is specular distribution.
Compared with prior art, had the beneficial effect that possessed by the utility model：, will as a result of Sputtering Thinfilm Technology
Strain sensor is directly produced on elastomer, overcomes the shortcomings that gluing foil gauge is brought, the lag error of sensor, again
Renaturation error, temperature drift errors are greatly reduced, and sensor accuracy class is improved.Sensor construction is simple simultaneously, processing
Easily.
Further, since without using organic gel in manufacturing process, the resistance to gentle long-time stable service behaviour of sensor is more preferable,
It can be used for a long time in more harsh environment.
Brief description of the drawings
Fig. 1 is film torque sensor structural representation of the present utility model.
Fig. 2 is distribution map of the film sensing element of film torque sensor of the present utility model on elastomer.
Fig. 3 is sectional view of the film sensing element of film torque sensor of the present utility model on elastomer (in figure
Film sensing element fraction amplifies).
In figure, 1- switching upper flanges；2- switching lower flanges；
3- turns round post；4- film sensing elements；
5- through holes；6- elastomers；
61- fixing holes；41- insulating barriers；
42- strain sensitive resistance；43- pads；
44- protective layers.
Embodiment
As shown in Figure 1, 2, 3, film torque sensor of the present utility model, including switching upper flange 1, lower flange 2 of transferring,
Two torsion posts 3, two elastomers 6 being connected on two torsion posts 3 form.
The post 3 of turning round is the square column that a kind of metal material processing forms.Two torsion posts 3 are in same circumference symmetric position
On, it is fixed between the switching upper flange 1 and switching lower flange 2.
The elastomer 6 is a kind of rectangle sheet metal, and Sputtering Thinfilm Technology is used on the surface of the elastomer 6
Manufacture two film sensing elements 4.Manufacture method is to throw the surface grinding for needing to manufacture film sensing element 4 of elastomer 6
Light, plural layers are sequentially prepared using Sputtering Thinfilm Technology on the surface, by photoetching technique, formation insulating barrier 41, strain are quick
Sensing resistor 42, pad 43, protective layer 44.Before and after manufacture has two elastomers 6 of the film sensing element 4 by fixing hole 61
Symmetrically it is fixed on the horizontal center line of two torsion posts 3.
The figure of two film sensing elements 4 on the elastomer 6 is specular distribution.
The switching upper flange 1 and switching lower flange 2 connect motor shaft and load respectively.It is described switching upper flange 1 and turn
Connect the size of lower flange 2, shape can be adjusted change according to actual conditions.On the switching upper flange 1 and switching lower flange 2
Multiple through holes 5 are provided with, cable can be passed through.
Four strain sensitive resistance 42 on two elastomers 6 are formed into wheatstone bridge circuits, when the switching
Upper flange 1 with switching lower flange 2 twist when, it is described turn round post 3 by twisting force and be delivered on elastomer 6 strain sensitive electricity
Resistance 42, the resistance of strain sensitive resistance 42 changes, and wheatstone bridge circuits lose out balance, output and torque into than
The electric signal of example, the electric signal are outwards exported using existing known technology.
The utility model utilizes Sputtering Thinfilm Technology, and sensing element is directly prepared on elastomer, composition favour stone electricity
Bridge circuit.The shortcomings that overcoming the conventional art that foil gauge is pasted on existing elastomer so that the lag error of sensor, repeat
Property error, temperature drift errors are greatly reduced, and sensor accuracy class is improved.Further, since in manufacturing process without using
Organic gel, the resistance to gentle long-time stable service behaviour of sensor is more preferable, can be used for a long time in more harsh environment.It is this
Manufacture method is simple in construction, handling ease, and production efficiency is high.
It is described above, only it is better embodiment of the present utility model, is not construed as the limit to the scope of the utility model
System, and the right that the utility model is advocated is not limited thereto, all personages for being familiar with this field skill, according to
Technology contents disclosed by the utility model, can think easily and equivalence changes, the scope of protection of the utility model all should be fallen into
It is interior.
Claims (3)
1. a kind of film torque sensor, including switching upper flange (1), switching lower flange (2), in same circumference symmetric position
On be fixed in the switching upper flange (1) and two torsion posts (3) between lower flange (2) of transferring, be connected to two torsion posts
(3) two elastomers (6) composition on, it is characterised in that：Two elastomers (6) pass through symmetrically solid before and after fixing hole (61)
It is scheduled on the horizontal center line of two torsion posts (3)；Sputtering Thinfilm Technology manufacture, which is respectively adopted, in two elastomers (6) has
Include four film sensing elements (4) of four strain sensitive resistance (42)；The four strain sensitive resistance (42) is formed
Wheatstone bridge circuits, when the switching upper flange (1) twists with switching lower flange (2), the torsion post (3) is made by torsion
With and the strain sensitive resistance (42) that is delivered on the elastomer (6), strain sensitive resistance (42) resistance change,
Wheatstone bridge circuits lose out balance, and the output signal by measuring the wheatstone bridge circuits can obtain corresponding torque value
Size.
2. film torque sensor as claimed in claim 1, it is characterised in that：The film sensing element (4) is by insulating barrier
(41), strain sensitive resistance (42), pad (43), protective layer (44) composition.
3. film torque sensor as claimed in claim 1 or 2, it is characterised in that：Two films on the elastomer (6)
The figure of sensing element (4) is specular distribution.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720249022.0U CN206627234U (en) | 2017-03-15 | 2017-03-15 | Film torque sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720249022.0U CN206627234U (en) | 2017-03-15 | 2017-03-15 | Film torque sensor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN206627234U true CN206627234U (en) | 2017-11-10 |
Family
ID=60208096
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201720249022.0U Active CN206627234U (en) | 2017-03-15 | 2017-03-15 | Film torque sensor |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN206627234U (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109900414A (en) * | 2019-03-28 | 2019-06-18 | 中国工程物理研究院总体工程研究所 | Moment of flexure sensor |
| CN111684250A (en) * | 2018-03-29 | 2020-09-18 | 日本电产科宝电子株式会社 | Torque sensor |
| CN111801559A (en) * | 2018-04-09 | 2020-10-20 | 日本电产科宝电子株式会社 | Fixing device of strain sensor and torque sensor using same |
| CN113267280A (en) * | 2021-06-25 | 2021-08-17 | 华中科技大学 | Strain type torque sensor |
| CN115683407A (en) * | 2022-11-22 | 2023-02-03 | 松诺盟科技有限公司 | Force sensitive core and pressure sensor |
-
2017
- 2017-03-15 CN CN201720249022.0U patent/CN206627234U/en active Active
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111684250A (en) * | 2018-03-29 | 2020-09-18 | 日本电产科宝电子株式会社 | Torque sensor |
| CN111684250B (en) * | 2018-03-29 | 2022-04-05 | 日本电产科宝电子株式会社 | Torque sensor |
| US11408786B2 (en) | 2018-03-29 | 2022-08-09 | Nidec Copal Electronics Corporation | Torque sensor |
| CN111801559A (en) * | 2018-04-09 | 2020-10-20 | 日本电产科宝电子株式会社 | Fixing device of strain sensor and torque sensor using same |
| US11333564B2 (en) | 2018-04-09 | 2022-05-17 | Nidec Copal Electronics Corporation | Strain sensor fixing device for a torque sensor to prevent sensor performance decrease |
| CN109900414A (en) * | 2019-03-28 | 2019-06-18 | 中国工程物理研究院总体工程研究所 | Moment of flexure sensor |
| CN109900414B (en) * | 2019-03-28 | 2024-02-23 | 中国工程物理研究院总体工程研究所 | Bending moment sensor |
| CN113267280A (en) * | 2021-06-25 | 2021-08-17 | 华中科技大学 | Strain type torque sensor |
| CN115683407A (en) * | 2022-11-22 | 2023-02-03 | 松诺盟科技有限公司 | Force sensitive core and pressure sensor |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20181018 Address after: 102200 C2065 2, 16 building, No. 37 Chao Yuan Road, Changping District science and Technology Park, Beijing. Patentee after: Weiye smart core (Beijing) Technology Co., Ltd. Address before: 102101 building 26, No. 8, Feng Gu Road, Badaling Development Zone, Yanqing, Beijing. Patentee before: BEIJING ZHONGHANG XINGSHENG MEASUREMENT AND CONTROL TECHNOLOGY CO., LTD. |
|
| TR01 | Transfer of patent right | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20190505 Address after: 102101 No. 26 Building, No. 8 Fenggu 4th Road, Badaling Development Zone, Yanqing, Beijing Patentee after: BEIJING ZHONGHANG XINGSHENG MEASUREMENT AND CONTROL TECHNOLOGY CO., LTD. Address before: 102200 C2065 2, 16 building, No. 37 Chao Yuan Road, Changping District science and Technology Park, Beijing. Patentee before: Weiye smart core (Beijing) Technology Co., Ltd. |
|
| TR01 | Transfer of patent right | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20191220 Address after: 410331 A5, Changsha e center, No. 18, Xiang Tai Road, Liuyang, Hunan. Patentee after: Suno Alliance Technology Co., Ltd. Address before: 102101 No. 26 Building, No. 8 Fenggu 4th Road, Badaling Development Zone, Yanqing, Beijing Patentee before: BEIJING ZHONGHANG XINGSHENG MEASUREMENT AND CONTROL TECHNOLOGY CO., LTD. |