CN206725134U - High-performance torque sensor based on Sputtering Thinfilm Technology - Google Patents
High-performance torque sensor based on Sputtering Thinfilm Technology Download PDFInfo
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- CN206725134U CN206725134U CN201720250774.9U CN201720250774U CN206725134U CN 206725134 U CN206725134 U CN 206725134U CN 201720250774 U CN201720250774 U CN 201720250774U CN 206725134 U CN206725134 U CN 206725134U
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- sensitive resistance
- strain sensitive
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Abstract
The utility model discloses a kind of high-performance torque sensor based on Sputtering Thinfilm Technology, including switching upper flange, lower flange of transferring, the torsion post being connected between the upper lower flange of switching, it is characterised in that：The post of turning round is that two relative parallel surfaces are respectively adopted sputtering technology manufacture and have film sensing element, the metal column of another two relative parallel surface processing arc grooves.Four strain sensitive resistance are formed into wheatstone bridge circuits, when the upper lower flange twisting of switching, turn round post and by twisting force and be delivered to strain sensitive resistance, strain sensitive resistance changes, wheatstone bridge circuits lose out balance, and the output signal by measuring the wheatstone bridge circuits can obtain corresponding torque value size.As a result of Sputtering Thinfilm Technology, strain sensor is directly produced on elastic shaft, the lag error of sensor, repeatability error, temperature drift errors are greatly reduced, and sensor accuracy class is improved.Sensor construction is simple, handling ease.
Description
Technical field
A kind of torque sensor is the utility model is related to, more particularly to it is a kind of using Sputtering Thinfilm Technology manufacture strain sensitive
The high-performance torque sensor of element.
Background technology
In machine driven system, moment of torsion is one of important parameter for reflecting systematic function.Torque measurement Aero-Space,
Many industries such as war industry equipment, engineering machinery, ship, drilling well, traffic, metallurgy, generating, mining equiment or field have obtained extensively
Application.Torque measuring method have it is a variety of, wherein the application of traditional strain-type measuring method is very extensive.Strain-type torque sensing
Device is that metal strain plate is pasted onto on elastic shaft to form strain bridge, when elastic shaft causes bridge resistance to become after by torsional deformation
Change, the size of corresponding torque value is obtained by measuring resistance change.
Existing strain-type torque sensor is to use organic gel by strain gauge adhesion on elastomer, this manufacture method
Make the combination property of sensor be influenceed by following factor, these influence factors have：Elastomer adhesive surface cleannes, glue
Performance, the thickness of glue and uniformity, paste position and its consistency etc., in addition, glue by environment temperature, humidity and
The factor such as work long hours, which influences to also result in sensor performance, to change.These influences mainly result in the sluggish of sensor and missed
Difference, repeatability error, temperature drift errors become big, so as to reduce the measurement accuracy of sensor.Simultaneously because the presence of organic gel,
Working sensor environment is subject to certain restrictions.Simultaneously traditional stickup strain-type torque sensor structure is more complicated, processing
It is not easy, production efficiency is low, and cost is high.
Therefore, develop a kind of measurement accuracy height, good operating stability, simple in construction, handling ease, can be applicable it is more harsh
The high-performance torque sensor of environment is of crucial importance.
Using Sputtering Thinfilm Technology, the height based on Sputtering Thinfilm Technology of film sensing element is directly manufactured on elastic shaft
Performance torque sensor can solve above-mentioned problem.
Utility model content
The purpose of this utility model is to provide a kind of high-performance torque sensor based on Sputtering Thinfilm Technology, for existing
There is the deficiency of technology, it is big to solve traditional strain-type torque sensor lag error, repeatability error, temperature drift errors, measurement
Precision is low, is not suitable with the problems such as adverse circumstances work.
To solve above technical problem, the technical solution of the utility model is：A kind of high property based on Sputtering Thinfilm Technology
Energy torque sensor, including switching upper flange, lower flange of transferring, are connected between the switching upper flange and switching lower flange
Turn round post composition, it is characterised in that：It is described torsion post be two relative parallel surfaces be respectively adopted Sputtering Thinfilm Technology manufacture include
The film sensing element of strain sensitive resistance, another two relative parallel surfaces are machined with the metal column of arc groove；The film
Sensing element contains two strain sensitive resistance, and the four strain sensitive resistance is formed into wheatstone bridge circuits, when
When the switching upper flange is with switching lower flange twisting, the torsion post is by twisting force and is delivered to the strain sensitive electricity
Resistance, the strain sensitive resistance change, and wheatstone bridge circuits lose out balance, by measuring the Wheatstone bridge
The output signal of circuit can obtain corresponding torque value size.
The film sensing element is made up of insulating barrier, strain sensitive resistance, pad, protective layer.
The strain sensitive resistance is a kind of alloy firm resistance.
The figure of two film sensing elements of the relative parallel surface on the torsion post is specular distribution.
Compared with prior art, had the beneficial effect that possessed by the utility model：, will as a result of Sputtering Thinfilm Technology
Strain sensor is directly produced on elastic shaft, overcomes the shortcomings that gluing foil gauge is brought, the lag error of sensor, again
Renaturation error, temperature drift errors are greatly reduced, and sensor accuracy class is improved.Sensor construction is simple simultaneously, processing
Easily.
Further, since without using organic gel in manufacturing process, the resistance to gentle long-time stable service behaviour of sensor is more preferable,
It can be used for a long time in more harsh environment.
Brief description of the drawings
Fig. 1 is the high-performance torque sensor structural representation of the present utility model based on Sputtering Thinfilm Technology.
Fig. 2 is that the film sensing element of the high-performance torque sensor of the present utility model based on Sputtering Thinfilm Technology is being turned round
Layout drawing on one parallel surface of post.
Fig. 3 is that the film sensing element of the high-performance torque sensor of the present utility model based on Sputtering Thinfilm Technology is being turned round
Layout drawing on another parallel surface of post.
Fig. 4 is the torsion post sectional view of the high-performance torque sensor of the present utility model based on Sputtering Thinfilm Technology (in figure
Film sensing element fraction amplifies).
In figure, 1- switching upper flanges；2- switching lower flanges；
3- turns round post；4- film sensing elements；
5- through holes；31- arc grooves；
41- insulating barriers；42- strain sensitive resistance；
43- pads；44- protective layers.
Embodiment
As shown in Figure 1,2,3, 4, the high-performance torque sensor of the present utility model based on Sputtering Thinfilm Technology, including turn
Flange 1 is connected, lower flange 2 of transferring, the torsion post 3 for being connected to the switching upper flange 1 between lower flange 2 of transferring forms.
The post 3 of turning round is the square column that a kind of metal material processing forms.In order to increase the sensitivity of sensor, the torsion
Manufacture has the arc groove 31 communicated on the relative parallel surface of two of post 3.The size of arc groove 31 is big because of the range of sensor
Depending on small.
Turn round post 3 another two parallel surface relatively manufactures two film sensing elements 4 using Sputtering Thinfilm Technology.Manufacture
Method is will to turn round the parallel surfaces grinding and polishing for needing to manufacture film sensing element 4 of post 3, using Sputtering Thinfilm Technology smooth
Plural layers are sequentially prepared on surface, by photoetching technique, form insulating barrier 41, strain sensitive resistance 42, pad 43, protective layer
44.The strain sensitive resistance 42 is a kind of alloy firm resistance.
The figure of two film sensing elements 4 on the relative parallel surface turned round on post 3 is specular distribution.
The switching upper flange 1 and switching lower flange 2 connect motor shaft and load respectively.It is described switching upper flange 1 and turn
Connect the size of lower flange 2, shape can be adjusted change according to actual conditions.On the switching upper flange 1 and switching lower flange 2
Multiple through holes 5 are provided with, cable can be passed through.The torsion post 3 is fixed between the switching upper flange 1 and switching lower flange 2.
The four strain sensitive resistance 42 is formed into wheatstone bridge circuits, when under the switching upper flange 1 and switching
When flange 2 twists, the torsion post 3 by twisting force and is delivered to the strain sensitive resistance 42, the strain sensitive resistance
42 resistances change, and wheatstone bridge circuits lose out balance, the output electric signal proportional to torque, electric signal profit
Outwards exported with existing known technology.
The utility model utilizes Sputtering Thinfilm Technology, and sensing element is directly prepared on elastic shaft, composition favour stone electricity
Bridge circuit.The shortcomings that overcoming the conventional art that foil gauge is pasted on existing elastic shaft so that the lag error of sensor, repeat
Property error, temperature drift errors are greatly reduced, and sensor accuracy class is improved.Further, since in manufacturing process without using
Organic gel, the resistance to gentle long-time stable service behaviour of sensor is more preferable, can be used for a long time in more harsh environment.Simultaneously
The torsion post 3 is machined with arc groove 31, can effectively improve the sensitivity of sensor.This manufacture method is simple in construction, processing
Easily, production efficiency is high.
It is described above, only it is better embodiment of the present utility model, is not construed as the limit to the scope of the utility model
System, and the right that the utility model is advocated is not limited thereto, all personages for being familiar with this field skill, according to
Technology contents disclosed by the utility model, can think easily and equivalence changes, the scope of protection of the utility model all should be fallen into
It is interior.
Claims (4)
1. a kind of high-performance torque sensor based on Sputtering Thinfilm Technology, including switching upper flange (1), switching lower flange (2),
The torsion post (3) being connected between the switching upper flange (1) and switching lower flange (2) forms, it is characterised in that：The torsion post
(3) it is that two relative parallel surfaces are respectively adopted Sputtering Thinfilm Technology manufacture and have film comprising strain sensitive resistance (42) sensitive
Element (4), another two relative parallel surfaces are machined with the metal column of arc groove (31)；The film sensing element (4) is contained
Two strain sensitive resistance (42), the four strain sensitive resistance (42) is formed into wheatstone bridge circuits, when described
Transfer upper flange (1) with switching lower flange (2) twist when, it is described torsion post (3) by twisting force and be delivered to it is described strain it is quick
Sensing resistor (42), strain sensitive resistance (42) resistance change, and wheatstone bridge circuits lose out balance, by measuring
The output signal for stating wheatstone bridge circuits can obtain corresponding torque value size.
2. the high-performance torque sensor based on Sputtering Thinfilm Technology as claimed in claim 1, it is characterised in that：The film
Sensing element (4) is made up of insulating barrier (41), strain sensitive resistance (42), pad (43), protective layer (44).
3. the high-performance torque sensor based on Sputtering Thinfilm Technology as claimed in claim 1 or 2, it is characterised in that：It is described
Strain sensitive resistance (42) is a kind of alloy firm resistance.
4. the high-performance torque sensor based on Sputtering Thinfilm Technology as claimed in claim 1 or 2, it is characterised in that：It is described
The figure for turning round two film sensing elements (4) of the relative parallel surface on post (3) is specular distribution.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720250774.9U CN206725134U (en) | 2017-03-15 | 2017-03-15 | High-performance torque sensor based on Sputtering Thinfilm Technology |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720250774.9U CN206725134U (en) | 2017-03-15 | 2017-03-15 | High-performance torque sensor based on Sputtering Thinfilm Technology |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN206725134U true CN206725134U (en) | 2017-12-08 |
Family
ID=60501058
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201720250774.9U Active CN206725134U (en) | 2017-03-15 | 2017-03-15 | High-performance torque sensor based on Sputtering Thinfilm Technology |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN206725134U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106768537A (en) * | 2017-03-15 | 2017-05-31 | 北京中航兴盛测控技术有限公司 | High-performance torque sensor based on Sputtering Thinfilm Technology |
| CN109973709A (en) * | 2017-12-27 | 2019-07-05 | 核动力运行研究所 | A kind of dual-gripper column type jaw type thrust pickup |
| CN112611489A (en) * | 2020-12-21 | 2021-04-06 | 陕西电器研究所 | Anti-overload torque sensor based on film sputtering |
-
2017
- 2017-03-15 CN CN201720250774.9U patent/CN206725134U/en active Active
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106768537A (en) * | 2017-03-15 | 2017-05-31 | 北京中航兴盛测控技术有限公司 | High-performance torque sensor based on Sputtering Thinfilm Technology |
| CN109973709A (en) * | 2017-12-27 | 2019-07-05 | 核动力运行研究所 | A kind of dual-gripper column type jaw type thrust pickup |
| CN112611489A (en) * | 2020-12-21 | 2021-04-06 | 陕西电器研究所 | Anti-overload torque sensor based on film sputtering |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20181023 Address after: 102200 C2065 2, 16 building, No. 37 Chao Yuan Road, Changping District science and Technology Park, Beijing. Patentee after: Weiye smart core (Beijing) Technology Co., Ltd. Address before: 102101 building 26, No. 8, Feng Gu Road, Badaling Development Zone, Yanqing, Beijing. Patentee before: BEIJING ZHONGHANG XINGSHENG MEASUREMENT AND CONTROL TECHNOLOGY CO., LTD. |
|
| TR01 | Transfer of patent right | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20191223 Address after: 410331 A5, Changsha e center, No. 18, Xiang Tai Road, Liuyang, Hunan. Patentee after: Suno Alliance Technology Co., Ltd. Address before: 102200 C2065 2, 16 building, No. 37 Chao Yuan Road, Changping District science and Technology Park, Beijing. Patentee before: Weiye Zhixin (Beijing) Technology Co., Ltd. |