CN107144389B - Embeddable strip-shaped fully-flexible multi-dimensional force sensor - Google Patents
Embeddable strip-shaped fully-flexible multi-dimensional force sensor Download PDFInfo
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- CN107144389B CN107144389B CN201710431236.4A CN201710431236A CN107144389B CN 107144389 B CN107144389 B CN 107144389B CN 201710431236 A CN201710431236 A CN 201710431236A CN 107144389 B CN107144389 B CN 107144389B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L5/00—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes
- G01L5/16—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring several components of force
- G01L5/161—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring several components of force using variations in ohmic resistance
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Abstract
The invention discloses an embeddable strip-shaped fully-flexible multidimensional force sensor, which comprises a flexible sensor substrate, wherein an upper-layer microchannel and a lower-layer microchannel which are arranged in a strip shape are arranged in the flexible sensor substrate, the upper-layer microchannel and the lower-layer microchannel have the same structure and are Z-shaped and are respectively connected end to form a channel, a liquid metal gallium indium tin alloy conductor is injected into the microchannels to serve as a sensitive sensor part, 1 connecting lead is respectively led out from the head and the tail of the lower-layer microchannel, 1 connecting lead is respectively led out from the head, the tail and the middle of the upper-layer microchannel, the led connecting leads are used for connecting an external acquisition system, and the stress condition of the sensor is obtained through calculation by detecting the change of resistance in the microchannels. The invention can be embedded into a soft robot and can detect the forces in three directions by following measurement. The invention has simple structure, simple and convenient manufacturing process, easy subsequent data processing work, stronger adaptability of the fully flexible structure to the environment and capability of being used for measurement in severe environment.
Description
Technical Field
The invention relates to the technical field of sensors, in particular to a flexible multi-dimensional force sensor.
Background
Soft robots have some advantages over traditional rigid robots in some respects, and have become one of the popular research directions in current robotics. The force position sensor technology is widely applied to detection of robots, and is used for detecting stress and motion conditions of the robots, feeding back required information, and monitoring or controlling the robots. However, the conventional sensor usually adopts a rigid structure, which limits the main performance of the soft robot in application, and therefore, the development of the soft robot technology also needs the follow-up and development of the flexible sensor technology.
In the research of flexible sensors, large flexible metal materials, silicon-based substrate materials, flexible cloth materials and the like are generally adopted to be researched and developed by utilizing physical phenomena such as light, electricity, magnetism and the like, but most of the flexible sensors are not flexible enough or can only detect one-dimensional force, and in addition, the problems of complex structure, complex process, difficult calibration and the like exist. In the research aspect of the multi-dimensional force sensor, the design mainly focuses on the planar configuration, the ductility is limited, and certain decoupling problems exist.
Disclosure of Invention
The invention aims to provide a fully flexible sensor which can be embedded into a soft robot to follow up, so as to solve the problems of insufficient ductility, poor decoupling performance and the like of a flexible multi-dimensional force sensor.
The purpose of the invention is realized by the following technical scheme: an embeddable full-flexible multidimensional force sensor comprises a sensor flexible substrate, wherein an upper layer micro-channel and a lower layer micro-channel which are arranged in a strip shape are arranged in the sensor flexible substrate, the upper layer micro-channel and the lower layer micro-channel have the same structure and are respectively connected into a channel in a Z shape, liquid metal gallium indium tin alloy conductors are injected into the micro-channels to serve as sensitive elements of the sensor, wherein a lead wire a and a lead wire b are respectively led out from the head and the tail of the lower layer micro-channel, a lead wire c, a lead wire d and an intermediate lead wire e are respectively led out from the head and the tail of the upper layer micro-channel, and each lead wire is used for connecting an external acquisition system so as to detect the change of resistance in the micro-channel; when the sensor is used, the sensor can be embedded into any link to be measured, the shape and the flexibility of the sensor can be set according to environmental requirements, when a tension-bending load is applied, the resistance of a micro-channel in a flexible matrix of the sensor and the voltage at two ends of the flexible matrix of the sensor change, each component of the applied three-dimensional force can be calculated according to a four-wire resistance measuring method, and the deformation of the sensor can also be solved through the relation between the stress and the deformation.
The three-dimensional force which can be measured by the invention comprises a normal stress and two bending moments, and the three-dimensional force sensor is characterized in that the structure and the performance of the sensor are not damaged when large deformation occurs, and meanwhile, a certain protection effect is also played on a body to be measured. In addition, the invention has simple structure and simple and convenient manufacturing process, and is easy for subsequent data processing work.
The invention can be installed in the traditional robot joint, soft robot, man-machine interaction equipment and other occasions needing to detect multi-dimensional force, and the full flexible structure has stronger adaptability to the environment and can be used for measuring severe environment.
Compared with the existing sensor, the invention has the following advantages:
the adopted main material is flexible silica gel, the shape, the size and the flexibility can be changed according to the environmental requirements, and the flexible silica gel can be embedded into certain soft bodies for force measurement; because the silica gel resists acid and alkali, the silica gel can be used in special environments such as various acid and alkali environments, moist environments and the like, and can work stably for a long time in severe environments; the size and the length of the internal micro-channel can be designed according to actual requirements, so that the adjustment of the measuring range and the sensitivity is convenient; because the silica gel is soft in texture and the liquid metal solution is injected into the inner micro-channel, the sensor allows large-scale distortion without damaging a detection element, does not influence the use performance after recovering the shape, and plays a role in buffering and damping a body to be detected; the micro-channel in the sensor is divided into an upper layer and a lower layer, the micro-channel in the upper layer is equally divided into two parts, and forces in all dimensions can be obtained by detecting the resistance of each part or the voltage at two ends, so that the sensor has high decoupling performance and can accurately measure the forces in multiple directions.
Drawings
Fig. 1 is a schematic structural diagram of an embeddable fully flexible multi-dimensional force sensor.
Fig. 2 is a schematic view of a middle cross section of the sensor shown in fig. 1, parallel to the XZ plane.
In the figure: 1-sensor flexible substrate, 2-upper layer microchannel, 3-lower layer microchannel, 4-connecting lead c, 5-connecting lead a, 6-connecting lead b, 7-connecting lead d and 8-connecting lead e.
Detailed Description
The invention is further described below with reference to the following figures and examples:
as shown in fig. 1 and 2, the embeddable strip-shaped fully flexible multidimensional force sensor according to the embodiment of the present invention includes a flexible sensor substrate 1 made of flexible silica gel, an upper layer microchannel 2 and a lower layer microchannel 3 arranged in a strip shape are disposed inside the flexible sensor substrate, the upper and lower layers of microchannels have the same structure and are respectively connected end to end in a Z shape to form a channel, a liquid metal gallium indium tin alloy conductor is injected into the microchannels to serve as a sensor sensing element, wherein a lead a5 and a lead b6 are respectively led out from the head and the tail of the lower layer microchannel, and a lead c4, a lead d7 and a middle lead e8 are respectively led out from the head and the tail of the upper layer microchannel. A coordinate system is established on the upper surface of the sensor, the vertical upper surface is upward and is provided with a Z axis, the vertical Z axis is leftward and is provided with an X axis, and the vertical XZ plane is forward and is provided with a Y axis.
The sensor is connected with a constant current power supply at two ends of a lead wire a5, a lead wire b6, a lead wire c4 and a lead wire d7 through a four-wire resistance measurement method, and is connected with a data acquisition board card to measure voltage values corresponding to the resistors, and the voltage values at two ends of the lead wire a5, the lead wire b6, the lead wire c4 and the lead wire d7 are recorded as U in an initial state 0 The voltage at two ends of the lead wire a5 and the lead wire b6 is U after the load is applied ab The voltage at the two ends of the lead wire c4 and the lead wire d7 is U cd The voltage at the two ends of the lead wire c4 and the lead wire e8 is U ce The voltage at two ends of the lead wire d7 and the lead wire e8 is U de 。
When the sensor is subjected to tensile loads F only along the Y axis Y When the resistance changes of the upper and lower layers of micro-channels are the same, namely U ab ＝U cd Obtaining F Y ＝K 1 (U ab -U 0 ). When the sensor is subjected only to bending moments M about the X-axis X Then, the resistances of the upper and lower micro-channel resistors have a difference in resistance, and a corresponding difference in voltage can be obtained, thereby obtaining M X ＝K 2 (U cd -U ab ) Due to U cd ＝U ce +U de So that M X ＝K 2 (U ce +U de -U ab ). When the sensor is only subjected to bending moment around the Z axis, the resistances of the upper and lower layers of microchannels have the same change, namely U ab ＝U cd But U is ce ≠U de Availability of M Z ＝K 3 (U ce -U de ). Three independent input variables are obtained by analysis, and are respectively U ab 、U ce And U de And the arrangement calculation can obtain:
written as input and output relationships can be obtained:
wherein K 1 、K 2 、K 3 As a voltage coordination coefficient, K 1 、K 2 、K 3 And U 0 Can be obtained by experimental calibration.
Claims (2)
1. Embeddable strip-shaped fully flexible multi-dimensional force sensor, which comprises a sensor flexible substrate and is characterized in that: an upper-layer micro-channel and a lower-layer micro-channel which are arranged in a strip shape are arranged in a flexible substrate of the sensor, the upper-layer micro-channel and the lower-layer micro-channel are identical in structure and are Z-shaped and are respectively connected end to form a channel, a liquid metal gallium indium tin alloy conductor is injected into the micro-channel and serves as a sensitive element of the sensor, a connecting lead a and a connecting lead b are respectively led out from the head and the tail of the lower-layer micro-channel, a connecting lead c, a connecting lead d and a middle-and-middle lead e are respectively led out from the head and the tail of the upper-layer micro-channel, and the led-out connecting leads are used for being connected with an external acquisition system so as to detect the change of resistance in the micro-channel; when the sensor is used, the sensor can be embedded into any link to be measured, the shape and the flexibility of the sensor can be set according to environmental requirements, when a tension-bending load is applied, the resistance of a micro-channel in the flexible matrix of the sensor and the voltage at two ends of the flexible matrix of the sensor are changed, and each component of the applied three-dimensional force can be calculated according to a four-wire resistance measuring method.
2. The embeddable strip-shaped fully flexible multi-dimensional force sensor of claim 1, wherein: the method for calculating each component of the applied three-dimensional force according to the four-wire resistance measurement method comprises the steps of introducing a constant current power supply to two ends of a lead wire a, a lead wire b, a lead wire c and a lead wire d, connecting the constant current power supply to a data acquisition board card, measuring voltage values corresponding to the resistors, recording the voltages of the two ends of the lead wire a, the lead wire b, the lead wire c and the lead wire d in an initial state as U 0 The voltage at two ends of the lead wire a and the lead wire b after the load is applied is U ab The voltage at the two ends of the lead wire c and the lead wire d is U cd The voltage at the two ends of the lead wire c and the lead wire e is U ce The voltage at two ends of the lead wire d and the lead wire e is U de When the sensor is subjected to tensile loads F only along the Y axis Y When the resistance changes of the upper and lower layers of micro-channels are the same, namely U ab ＝U cd Obtaining F Y ＝K 1 (U ab -U 0 ) When the sensor is subjected only to bending moments M about the X-axis X When the micro-channel is in use, the resistances of the upper and lower micro-channel resistors have difference, and accordingly, the voltage difference can be obtained X ＝K 2 (U cd -U ab ) Due to U cd ＝U ce +U de So that M X ＝K 2 (U ce +U de -U ab ) When the sensor only receives bending moment around the Z axis, the resistance changes of the upper and lower layers of micro-channels are the same, namely U ab ＝U cd However U is ce ≠U de Obtaining M Z ＝K 3 (U ce -U de ) Three independent input variables, U respectively, can be obtained by analysis ab 、U ce And U de And the arrangement calculation can obtain:
written as input and output relationships can be obtained:
wherein K1, K2 and K3 are voltage coordination coefficients, K 1 、K 2 、K 3 And U 0 Can be obtained by experimental calibration.
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| CN109443610A (en) * | 2018-11-01 | 2019-03-08 | 重庆大学 | remote interactive monitoring device based on liquid metal sensor and monitoring method thereof |
| CN110186487B (en) * | 2019-06-03 | 2020-10-27 | 北京航空航天大学 | Variable-resistance flexible sensing unit and manufacturing method thereof |
| CN111829432A (en) * | 2020-07-27 | 2020-10-27 | 上海大学 | Soft body curvature sensor with double-layer sensing structure and capable of being modularly used |
| CN112880885A (en) * | 2021-01-11 | 2021-06-01 | 大连理工大学 | Full-flexible bidirectional tension sensor based on Wheatstone bridge principle |
| CN114370959B (en) * | 2021-12-17 | 2023-07-25 | 鹏城实验室 | Liquid metal flexible pressure touch and strain sensor |
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